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JP7717586B2 - Electric field measuring device and electric field measuring method - Google Patents
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JP7717586B2 - Electric field measuring device and electric field measuring method - Google Patents

Electric field measuring device and electric field measuring method

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JP7717586B2
JP7717586B2 JP2021192693A JP2021192693A JP7717586B2 JP 7717586 B2 JP7717586 B2 JP 7717586B2 JP 2021192693 A JP2021192693 A JP 2021192693A JP 2021192693 A JP2021192693 A JP 2021192693A JP 7717586 B2 JP7717586 B2 JP 7717586B2
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electric field
displacement
measuring
measuring device
perturbation body
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JP2023079297A (en
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貴行 佐古
晋弥 松田
浩昌 安田
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Toshiba Corp
Toshiba Energy Systems and Solutions Corp
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Description

本発明の実施形態は、電場測定装置及び電場測定方法に関する。 Embodiments of the present invention relate to an electric field measurement device and an electric field measurement method.

一般に、線形加速器(例えば、高周波四重極線形加速器(RFQ)、ドリフトチューブライナック(DTL))を始めとする加速空胴においては、製作した空胴の電場分布を設計値と比較するための電場測定が行われる。電場測定の方法としては加速空胴に電場の摂動を生じさせる小さな誘電体もしくは金属で構成される摂動体を挿入し、共振周波数の変化から電場を測定する摂動(ビーズプル)法が知られている。具体的な方法としては摂動体を糸で保持し、加速空胴内を移動させ、軸方向の各点での周波数を測定し、電場分布に変換する(例えば、特許文献1参照)。 In accelerating cavities, such as linear accelerators (e.g., radio frequency quadrupole linacs (RFQs) and drift tube linacs (DTLs)), electric field measurements are generally performed to compare the electric field distribution of the fabricated cavity with the design value. A known method for measuring the electric field is the perturbation (bead-pull) method, in which a small dielectric or metallic perturber is inserted into the accelerating cavity to perturb the electric field, and the electric field is measured from changes in the resonant frequency. Specifically, the perturber is held by a string and moved within the accelerating cavity, and the frequency at each point in the axial direction is measured and converted into the electric field distribution (see, for example, Patent Document 1).

上述した電場測定においては、摂動体を所定の位置に保持する必要がある。摂動体の重量により摂動体を保持する糸に垂れが生じ、鉛直方向にずれると本来の位置と異なる位置で摂動が生じるため、取得した電場分布に誤差が含まれることになる。 In the electric field measurements described above, the perturber must be held in a predetermined position. The weight of the perturber causes sagging in the string holding the perturber, and if it shifts vertically, the perturbation will occur at a different position from its intended position, resulting in errors in the acquired electric field distribution.

このような誤差は、ビームダクトの径が大きく広範囲の測定を行う場合や、加速空胴の内部構造の制約により周波数測定用のアンテナサイズが制限され、信号強度維持のために摂動体のサイズを大きくすることで重量が大きくなった場合に特に顕著となる。 Such errors become particularly noticeable when the beam duct has a large diameter and measurements are being performed over a wide range, or when the size of the antenna for frequency measurement is limited due to constraints on the internal structure of the accelerating cavity, and the weight increases as the size of the perturbation body is increased to maintain signal strength.

また、広範囲の測定のため、長時間の測定により糸が変形していくことで、測定当初に設定した糸の張力では不足する場合もある。また、摂動体に機械的に接触するような方式で、摂動体の位置の変位を測定すると周波数が大きく変動し、電場分布を測定することができない。従来の手法では、摂動体の位置は糸の支持構造のみにより決定され、加速空胴内部で生じた摂動体の位置の変位は、測定した電場分布の誤差となって表れていた。 In addition, because measurements are performed over a wide range, the string deforms over long periods of time, and the string tension set at the beginning of the measurement may not be sufficient. Furthermore, if the displacement of the perturbation body's position is measured using a method that mechanically contacts the perturbation body, the frequency fluctuates significantly, making it impossible to measure the electric field distribution. With conventional methods, the position of the perturbation body is determined only by the string's support structure, and any displacement of the perturbation body's position that occurs inside the accelerating cavity appears as an error in the measured electric field distribution.

特許第6625915号公報Patent No. 6625915

上述したとおり、従来の電場測定装置及び電場測定方法では、加速空胴内部での電場測定において誤差が発生し、高精度で電場測定を行えないという課題があった。 As mentioned above, conventional electric field measurement devices and methods have the problem that errors occur when measuring the electric field inside the accelerating cavity, making it impossible to measure the electric field with high precision.

本発明は上述した課題を解決するためになされたものであり、加速空胴内に摂動体を配置して電場を測定する際に、より高精度で電場測定を行うことのできる電場測定装置及び電場測定方法を提供することを目的とする。 The present invention has been made to solve the above-mentioned problems, and aims to provide an electric field measurement device and electric field measurement method that can measure the electric field with higher accuracy when placing a perturbation body inside an accelerating cavity to measure the electric field.

実施形態の電場測定装置は、加速空胴内の電場を測定するための電場測定装置であって、前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、前記支持材を駆動して前記摂動体を移動させる駆動機構と、前記加速空胴内の電場を測定する電場測定手段と、前記摂動体の基準位置からの変位を検知するための変位測定手段と、を備える。 An electric field measuring device according to an embodiment is an electric field measuring device for measuring an electric field within an accelerating cavity, and includes a perturber disposed within the accelerating cavity for perturbing the electric field, a support member disposed along the axial direction within the accelerating cavity for supporting the perturber, a drive mechanism for driving the support member to move the perturber, electric field measuring means for measuring the electric field within the accelerating cavity, and displacement measuring means for detecting the displacement of the perturber from a reference position.

本発明の実施形態によれば、加速空胴内に摂動体を配置して電場を測定する際に、より高精度で電場測定を行うことのできる電場測定装置及び電場測定方法を提供することができる。 Embodiments of the present invention provide an electric field measurement device and an electric field measurement method that can measure the electric field with higher accuracy when placing a perturbation body inside an accelerating cavity to measure the electric field.

第1実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 1 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a first embodiment. 第2実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 10 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a second embodiment. 第3実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 10 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a third embodiment. 第4実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 10 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a fourth embodiment. 第5実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 10 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a fifth embodiment. 第6実施形態に係る電場測定装置の縦断面構成を模式的に示す図。FIG. 13 is a diagram schematically showing a vertical cross-sectional configuration of an electric field measuring device according to a sixth embodiment.

以下、実施形態に係る電場測定装置及び電場測定方法を、図面を参照して説明する。 The electric field measurement device and electric field measurement method according to the embodiment will be described below with reference to the drawings.

(第1実施形態)
まず、図1を参照して第1実施形態について説明する。本第1実施形態では、加速空胴1を測定対象とする。加速空胴1は、具体的には単純なピルボックス空胴の他、高周波四重極線形加速器(RFQ)、ドリフトチューブライナック(DTL)、その他の線形の高周波加速空胴など、電子やイオンなどの荷電粒子を加減速するための空胴が挙げられる。また、バンチャーやデバンチャーなど高周波電力の印加により荷電粒子の運動の挙動に変更を加える空胴全般が対象になる。
(First embodiment)
First, a first embodiment will be described with reference to FIG. 1 . In this first embodiment, an acceleration cavity 1 is the measurement target. Specific examples of the acceleration cavity 1 include a simple pillbox cavity, as well as cavities for accelerating and decelerating charged particles such as electrons and ions, such as a radio frequency quadrupole linear accelerator (RFQ), a drift tube linac (DTL), and other linear radio frequency acceleration cavities. Furthermore, the target cavity may be any cavity that changes the behavior of charged particle motion by applying radio frequency power, such as a buncher or debuncher.

支持材2が、加速空胴1の内部に、その軸方向に沿って配置される。支持材2は、支持材固定具3によって支持されている。支持材2は、糸やワイヤー等に代表される細く、物質量の小さい材質が望ましい。ナイロンやフロロカーボン、ポリエチレン等の釣り糸を適用することができる。 The support material 2 is placed inside the acceleration cavity 1 along its axial direction. The support material 2 is supported by a support material fixture 3. The support material 2 is preferably made of a thin material with a small mass, such as thread or wire. Fishing line made of nylon, fluorocarbon, polyethylene, etc. can be used.

支持材固定具3は、加速空胴1内部での支持材2の位置を固定するために用いられる。支持材固定具3は、プーリーのように支持材2との接触部を回転させて支持材2を円滑に動かせる形状のほか、ナイロン等の板に孔や切り欠きを設け、支持材2を通す等の形状とすることができる。いずれの場合も、支持材固定具3の支持材2との接触部にはR加工を施し、支持材2の損傷を避ける構造とすることが望ましい。 The support material fixture 3 is used to fix the position of the support material 2 inside the acceleration cavity 1. The support material fixture 3 can be shaped like a pulley, allowing the part in contact with the support material 2 to rotate, allowing smooth movement of the support material 2, or it can be shaped like a nylon plate with holes or notches through which the support material 2 can pass. In either case, it is desirable to apply a rounded finish to the part of the support material fixture 3 that comes into contact with the support material 2, to prevent damage to the support material 2.

支持材2には、摂動体4が接続される。摂動体4の形状は、球状もしくは円柱状、直方体等の対称性を有する形状が望ましい。摂動体4の材質としては、誘電体が挙げられ、ナイロン、アクリル等の加工性に優れる材質の他、誘電率の高いチタン酸バリウム、窒化ケイ素、アルミナ等のセラミックが適用できる。誘電率が高いほど、同一体積でも電場の摂動が大きくなり、S/N比が改善する。また、誘電体の他に金属を用いることも可能で、この場合は比重の軽いアルミニウム等が適している。 A perturbator 4 is connected to the support material 2. The shape of the perturbator 4 is preferably a symmetrical shape such as a sphere, cylinder, or rectangular parallelepiped. Possible materials for the perturbator 4 include dielectrics, such as nylon, acrylic, and other materials with excellent workability, as well as ceramics with high dielectric constants such as barium titanate, silicon nitride, and alumina. The higher the dielectric constant, the greater the electric field perturbation for the same volume, improving the S/N ratio. Metals can also be used instead of dielectrics, in which case aluminum, which has a light specific gravity, is suitable.

支持材2には、駆動装置5を接続する。駆動装置5として、例えばモーターを用いて支持材2を駆動させることで加速空胴1内部において摂動体4を搬送し、測定位置を変化させる。インダクションモーター等を用いて摂動体4を連続的に搬送しながら電場を測定する他、サーボモーターやステッピングモーター等を用いて摂動体4を特定の位置に停止させて測定することができる。 A drive unit 5 is connected to the support material 2. The drive unit 5 uses, for example, a motor to drive the support material 2, thereby transporting the perturber 4 inside the acceleration cavity 1 and changing the measurement position. In addition to measuring the electric field while continuously transporting the perturber 4 using an induction motor or the like, it is also possible to stop the perturber 4 at a specific position and perform measurements using a servo motor, stepping motor, or the like.

また、支持材2には、重り6を接続して摂動体4がその重量によって垂れ下がることのないよう張力を発生させる。重り6は、重り自体の重量をそのまま使うほか、モーター制御されたアームにより張力を発生させることでも構成できる。さらに摂動体4が垂れ下がり、変位が発生した場合に検知するための変位測定装置7が配置される。変位測定装置7としては、摂動体4の所定位置からの変位を検出することができるものであれば特に限定されない。この場合の変位の検出精度は、加速空胴1及び使用する摂動体4の仕様、荷電粒子の加速に使用される高周波電力などによって異なるが、例えば、1ミリから数ミリ程度等である。 A weight 6 is also connected to the support material 2 to generate tension so that the perturber 4 does not sag due to its own weight. The weight 6 can be configured by using the weight itself, or by generating tension using a motor-controlled arm. A displacement measuring device 7 is also provided to detect any sagging and displacement of the perturber 4. There are no particular restrictions on the displacement measuring device 7, as long as it can detect the displacement of the perturber 4 from a predetermined position. The accuracy of displacement detection in this case varies depending on the specifications of the accelerating cavity 1 and the perturber 4 used, the high-frequency power used to accelerate the charged particles, and other factors, but is typically on the order of 1 to several millimeters.

一例を挙げれば、例えば、変位測定装置7として、摂動体4に加わる張力もしくは荷重を計測する装置を用いることができる。例えば、変位測定装置7として、接触式(機械式)の張力計を用いて支持材2に接触させてその張力を計測する。または変位測定装置7として、音波式テンションメーター若しくはトラムテンションメーター等を用いて非接触で支持材2もしくは摂動体4の振動数や音波等から張力を計測することもできる。さらに、変位測定装置7として荷重計測計を用いて荷重を計測してもよい。このような変位測定装置7を用いることによって、摂動体4に加わる張力や荷重が本来の値から変動した際に、これを摂動体4の変位として検知することができる。 As one example, the displacement measuring device 7 can be a device that measures the tension or load applied to the perturbation body 4. For example, a contact-type (mechanical) tension meter can be used as the displacement measuring device 7, which comes into contact with the support material 2 to measure its tension. Alternatively, an ultrasonic tension meter or trance tension meter can be used as the displacement measuring device 7 to measure the tension from the vibration frequency or sound waves of the support material 2 or perturbation body 4 in a non-contact manner. Furthermore, a load measuring meter can also be used as the displacement measuring device 7 to measure the load. By using such a displacement measuring device 7, when the tension or load applied to the perturbation body 4 deviates from its original value, this can be detected as a displacement of the perturbation body 4.

加速空胴1には、周波数測定用のアンテナ8を配設する。アンテナ8の構造としては、例えば、真空封止可能な導入端子付きのフィードスルーフランジの真空面側に、銅、ステンレスを始めとした棒状の金属で構成するループを接続する。ループの形状は、円形、楕円形、長方形あるいはそれらを組み合わせた形状などで構成される。 An antenna 8 for frequency measurement is placed in the accelerating cavity 1. The structure of the antenna 8 is, for example, a loop made of a rod-shaped metal such as copper or stainless steel connected to the vacuum side of a feedthrough flange with a vacuum-sealable lead-in terminal. The shape of the loop can be circular, elliptical, rectangular, or a combination of these.

アンテナ8にケーブルを介して周波数測定器9を接続する。周波数測定器9としては、ネットワークアナライザー等を用いることができる。ケーブルにはBNCコネクタ、Nコネクタ、SMAコネクタ等を接続した同軸ケーブルを用いることができる。加速空胴1と周波数測定器9との間では、アンテナ8を1台で接続し、吸収測定を行う他に、アンテナ8を2台用いて2チャンネルで透過測定を行うこともできる。 A frequency measuring device 9 is connected to the antenna 8 via a cable. A network analyzer or similar device can be used as the frequency measuring device 9. The cable can be a coaxial cable with a BNC connector, N connector, SMA connector, or similar. In addition to connecting one antenna 8 between the accelerating cavity 1 and the frequency measuring device 9 to perform absorption measurements, two antennas 8 can also be used to perform two-channel transmission measurements.

このように構成された第1実施形態においては、摂動体4により生じた加速空胴1内の電場の摂動を、周波数測定器9により周波数もしくは位相の変化として測定することができる。したがって、変位測定装置7との組み合わせにより、摂動体4の変位が生じていない場合にのみ電場分布に変換するための周波数もしくは位相を測定することで測定誤差を抑えることができる。 In the first embodiment configured in this manner, the perturbation of the electric field inside the accelerating cavity 1 caused by the perturber 4 can be measured as a change in frequency or phase using the frequency measuring device 9. Therefore, by combining it with the displacement measuring device 7, measurement errors can be reduced by measuring the frequency or phase for conversion into an electric field distribution only when no displacement of the perturber 4 is occurring.

(第2実施形態)
次に、第2実施形態について、図2を参照して説明する。なお、図1に示した第1実施形態と同一の構成には同一の符号を付して、重複する説明は省略する。
Second Embodiment
Next, a second embodiment will be described with reference to Fig. 2. Note that the same components as those in the first embodiment shown in Fig. 1 are denoted by the same reference numerals, and redundant description will be omitted.

第2実施形態では、変位測定装置7として電磁波を照射する装置を用いる。例えば、変位測定装置7として、レーザー距離計や反射型レーザーセンサーを加速空胴1外部に設置し、レーザーを摂動体4に向けて照射する。 In the second embodiment, a device that emits electromagnetic waves is used as the displacement measurement device 7. For example, a laser rangefinder or a reflective laser sensor is installed outside the accelerating cavity 1 as the displacement measurement device 7, and emits a laser toward the perturber 4.

この場合、例えば、摂動体4の位置に変位が発生せず、所定の位置に留まっている場合にはレーザーが検知されず、変位が発生した場合にのみレーザーを検知する位置・方向に変位測定装置7を固定する。若しくは、図2に示すように、電磁波の照射体と検知側に分離している透過型のレーザーセンサーを用いて、加速空胴1外部に照射体を設置し、検知側を加速空胴1の他端に設置する。摂動体4が所定の位置に留まっている場合にはレーザーが検知側で検知され、摂動体4の変位が発生した場合にのみレーザーが検知されない位置・方向に照射体と検知側をそれぞれ固定する。変位測定装置7と摂動体4の間には必要に応じてレンズ、フィルター、ミラーなどを配置し、変位測定装置7と摂動体4は一直線上に配置しなくともよい。 In this case, for example, if no displacement occurs in the position of the perturber 4 and it remains in a predetermined position, the laser is not detected, and the displacement measuring device 7 is fixed in a position and orientation where the laser is detected only when displacement occurs. Alternatively, as shown in Figure 2, a transmission-type laser sensor that is separated into an electromagnetic wave emitting device and a detecting side is used, and the emitting device is installed outside the accelerating cavity 1, and the detecting side is installed at the other end of the accelerating cavity 1. If the perturber 4 remains in a predetermined position, the laser is detected on the detecting side, and only when displacement of the perturber 4 occurs are the emitting device and the detecting side fixed in a position and orientation where the laser is not detected. Lenses, filters, mirrors, etc. can be placed between the displacement measuring device 7 and the perturber 4 as needed, and the displacement measuring device 7 and the perturber 4 do not need to be placed in a straight line.

このように構成された第2実施形態においては、摂動体4が所定の位置から変位した際に、変位測定装置7でその変位を検知することができる。そして、摂動体4の変位が生じていない場合にのみ電場分布に変換するための周波数もしくは位相を測定することで測定誤差を抑えることができる。 In the second embodiment configured in this manner, when the perturbation body 4 is displaced from a predetermined position, the displacement can be detected by the displacement measuring device 7. Then, measurement errors can be reduced by measuring the frequency or phase for conversion into an electric field distribution only when the perturbation body 4 is not displaced.

(第3実施形態)
次に、第3実施形態について、図3を参照して説明する。なお、図1に示した第1実施形態と同一の構成には同一の符号を付して、重複する説明は省略する。
(Third embodiment)
Next, a third embodiment will be described with reference to Fig. 3. Note that the same components as those in the first embodiment shown in Fig. 1 are denoted by the same reference numerals, and redundant description will be omitted.

第3実施形態では、変位測定装置7として、摂動体4からの反射光の撮像装置を用いる。具体的には、カメラやビデオカメラの撮像方向を摂動体4に向けて設置する。必要に応じてレンズやフィルター、ミラーなどを光路上に配置する。摂動体4の搬送に連動して摂動体4の位置を撮影して記録する。記録した動画乃至画像の画像データを元に摂動体4の位置を推計する。 In the third embodiment, the displacement measuring device 7 uses an imaging device for capturing light reflected from the perturbation body 4. Specifically, a camera or video camera is installed with its imaging direction facing the perturbation body 4. Lenses, filters, mirrors, etc. are placed on the light path as needed. The position of the perturbation body 4 is photographed and recorded in conjunction with the transport of the perturbation body 4. The position of the perturbation body 4 is estimated based on the image data of the recorded video or image.

このように構成された第3実施形態においては、摂動体4が所定の位置から変位した際に、変位測定装置7でその変位を検知することができる。そして、摂動体4の変位が生じていない場合にのみ電場分布に変換するための周波数もしくは位相を測定することで測定誤差を抑えることができる。 In the third embodiment configured in this manner, when the perturbation body 4 is displaced from a predetermined position, the displacement can be detected by the displacement measuring device 7. Then, measurement errors can be reduced by measuring the frequency or phase for conversion into an electric field distribution only when no displacement of the perturbation body 4 occurs.

(第4実施形態)
次に、第4実施形態について、図4を参照して説明する。
(Fourth embodiment)
Next, a fourth embodiment will be described with reference to FIG.

第4実施形態では、変位測定装置7で取得した変位情報をトリガー信号として周波数測定器9に入力し、変位が生じた際には記録を停止し、変位が生じていない場合にのみ記録を行う。周波数測定器9の信号入力様式に応じてNOT回路を用いてトリガー信号を反転させて用いる。若しくは、周波数測定器9としてネットワークアナライザーとロガー、オシロスコープ等の記録装置と組み合わせて変位信号をデータとして同期させて記録する。 In the fourth embodiment, the displacement information acquired by the displacement measuring device 7 is input to the frequency measuring device 9 as a trigger signal, and recording is stopped when displacement occurs and continues only when no displacement occurs. The trigger signal is inverted using a NOT circuit depending on the signal input format of the frequency measuring device 9. Alternatively, the frequency measuring device 9 is combined with a network analyzer and a recording device such as a logger or oscilloscope, and the displacement signal is synchronized and recorded as data.

このように構成された第4実施形態においては、摂動体4が所定の位置から変位した際に、変位測定装置7でその変位を検知し、電場データである周波数や位相を同期記録することができる。このように、摂動体4の位置変位を検知し、変位が無い時のみの測定を自動で行い、測定誤差を抑えることができる。 In the fourth embodiment configured in this manner, when the perturber 4 is displaced from its predetermined position, the displacement measuring device 7 detects the displacement and synchronously records the electric field data, which are frequency and phase. In this way, the positional displacement of the perturber 4 is detected and measurements are automatically performed only when there is no displacement, thereby reducing measurement errors.

さらに、第4実施形態においては、摂動体4の位置変位を検知し、電場データである周波数や位相と同期して記録することで、測定後のデータ処理で変位が生じていないデータのみ抽出することで変位が生じていないデータ点のみで電場分布を構築し、測定誤差を抑えることができる。 Furthermore, in the fourth embodiment, the positional displacement of the perturber 4 is detected and recorded in synchronization with the frequency and phase of the electric field data. By extracting only data in which no displacement has occurred during data processing after measurement, an electric field distribution can be constructed using only data points in which no displacement has occurred, thereby reducing measurement errors.

(第5実施形態)
次に、第5実施形態について、図5を参照して説明する。なお、図1に示した第1実施形態と同一の構成には同一の符号を付して、重複する説明は省略する。
Fifth Embodiment
Next, a fifth embodiment will be described with reference to Fig. 5. Note that the same components as those in the first embodiment shown in Fig. 1 are denoted by the same reference numerals, and redundant description will be omitted.

第5実施形態では、図5に示すように、支持材固定具3を用いて支持材2をループ状に構成する。さらに変位測定装置7で得られた変位情報を元に張力調整手段により、変位が消えるまで支持材2の張力を調整する。張力調整手段としては、支持材固定具3を電動駆動させ、ループ長を変化させて支持材2の張力を調整するもの、若しくは、重り6に追加の負荷を加えて支持材2の張力を調整するもの等を使用することができる。追加の負荷としては電動のアームにより重り6の重量を変えるなどの方法がある。 In the fifth embodiment, as shown in Figure 5, the support material 2 is configured into a loop shape using a support material fixture 3. Furthermore, based on the displacement information obtained by the displacement measuring device 7, the tension of the support material 2 is adjusted by a tension adjustment means until the displacement disappears. As a tension adjustment means, a means can be used that electrically drives the support material fixture 3 and changes the loop length to adjust the tension of the support material 2, or a means that adjusts the tension of the support material 2 by adding an additional load to the weight 6. One method of adding an additional load is to change the weight of the weight 6 using an electric arm.

このように構成された第5実施形態においては、摂動体4が所定の位置から変位した際に変位測定装置7で変位を検知した後に、支持材2の張力を調整し、変位を解消できる。このように、摂動体4の位置変位を自動的に解消することで手動調整なしに最適な張力で測定を行い、測定誤差を抑えて自動的に測定することができる。 In the fifth embodiment configured in this manner, when the perturber 4 is displaced from its predetermined position, the displacement is detected by the displacement measuring device 7, and the tension of the support material 2 is then adjusted to eliminate the displacement. In this way, by automatically eliminating the positional displacement of the perturber 4, measurements can be performed at the optimal tension without manual adjustment, reducing measurement errors and enabling automatic measurements.

(第6実施形態)
次に、第6実施形態について、図6を参照して説明する。なお、図1に示した第1実施形態と同一の構成には同一の符号を付して、重複する説明は省略する。
Sixth Embodiment
Next, a sixth embodiment will be described with reference to Fig. 6. Note that the same components as those in the first embodiment shown in Fig. 1 are denoted by the same reference numerals, and redundant description will be omitted.

第6実施形態では、図6に示すように、駆動装置5と周波数測定器9に、制御装置10を接続する。制御装置10としては、パーソナルコンピュータ(PC)やプログラマブルロジックユニット(PLC)、必要に応じてモータードライバー、モーターコントローラ等を用いる。また、制御装置10には、変位測定装置7からの測定信号を入力する。 In the sixth embodiment, as shown in FIG. 6, a control device 10 is connected to the drive device 5 and frequency measuring device 9. The control device 10 may be a personal computer (PC) or a programmable logic unit (PLC), and, if necessary, a motor driver, motor controller, etc. In addition, a measurement signal from the displacement measuring device 7 is input to the control device 10.

制御装置10を用いて、駆動装置5、周波数測定器9を連動して動作する。最初に測定対象の全領域を搬送させ、全領域で摂動体4の位置変位が生じないよう張力を調整する。全領域の探査が完了した後に、再度同一の張力設定の下で測定領域の搬送を行い、電場分布データである周波数や位相を記録する。支持材2の経時変化等で搬送中に変位を記録した場合は再度張力を調整し、全領域の搬送とデータ記録を行う。以降、測定対象の全領域で一度も張力の調整を行うことなく記録ができるまで調整と測定を繰り返す。なお、支持材2の張力を調整する張力調整手段としては、例えば、重り6の調整、或いは、図5に示した第5実施形態のように、支持材固定具3を電動駆動させ、ループ長を変化させる方法等を使用することができる。 The drive unit 5 and frequency measuring device 9 are operated in conjunction with the control device 10. First, the entire area of the measurement target is transported, and the tension is adjusted so that no positional displacement of the perturber 4 occurs throughout the entire area. After the entire area has been explored, the measurement area is transported again under the same tension setting, and electric field distribution data, such as frequency and phase, is recorded. If displacement is recorded during transport due to changes in the support material 2 over time, for example, the tension is adjusted again, and the entire area is transported and data is recorded. Thereafter, adjustment and measurement are repeated until data can be recorded throughout the entire area of the measurement target without any tension adjustment. The tension adjustment means for adjusting the tension of the support material 2 can be, for example, adjustment of the weight 6, or, as in the fifth embodiment shown in Figure 5, a method of electrically driving the support material fixture 3 and changing the loop length, etc.

このように構成された第6実施形態においては、加速空胴1の全測定領域において一度も張力の調整を行わないデータを記録することができる。すなわち、加速空胴1の全測定領域において、均一な張力設定かつ、摂動体4の位置変位が生じない電場データを取得することができ、張力の変化ならびに摂動体4の位置変位により生ずる測定誤差を抑えることができる。 In the sixth embodiment configured in this way, data can be recorded without any tension adjustments being made across the entire measurement region of the accelerating cavity 1. In other words, electric field data can be obtained with a uniform tension setting and no positional displacement of the perturbation body 4 across the entire measurement region of the accelerating cavity 1, thereby minimizing measurement errors caused by changes in tension and positional displacement of the perturbation body 4.

以上、本発明のいくつかの実施形態を説明したが、これらの実施形態は例として掲示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更、組み合わせを行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments may be embodied in a variety of other forms, and various omissions, substitutions, modifications, and combinations may be made without departing from the spirit of the invention. These embodiments and their variations are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as set forth in the claims.

1……加速空胴、2……支持材、3……支持材固定具、4……摂動体、5……駆動装置、6……重り、7……変位測定装置、8……アンテナ、9……周波数測定器、10……制御装置。 1...Acceleration cavity, 2...Support, 3...Support fixture, 4...Perturber, 5...Driver, 6...Weight, 7...Displacement measuring device, 8...Antenna, 9...Frequency measuring device, 10...Control device.

Claims (10)

加速空胴内の電場を測定するための電場測定装置であって、
前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、
前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、
前記支持材を駆動して前記摂動体を移動させる駆動機構と、
前記加速空胴内の電場を測定する電場測定手段と、
前記加速空胴内における前記摂動体の基準位置からの鉛直方向の変位を検知するための変位測定手段と、
を備え、
前記変位測定手段が、前記支持材の張力を検知する張力検知手段からなることを特徴とする電場測定装置。
An electric field measuring device for measuring an electric field in an accelerating cavity, comprising:
a perturbation body disposed within the accelerating cavity for perturbing the electric field;
a support member disposed along the axial direction within the acceleration cavity and supporting the perturbation body;
a drive mechanism that drives the support member to move the perturbation body;
an electric field measuring means for measuring an electric field within the accelerating cavity;
a displacement measuring means for detecting a vertical displacement of the perturbation body from a reference position within the accelerating cavity;
Equipped with
10. An electric field measuring device, wherein the displacement measuring means comprises tension detecting means for detecting the tension of the support material.
加速空胴内の電場を測定するための電場測定装置であって、
前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、
前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、
前記支持材を駆動して前記摂動体を移動させる駆動機構と、
前記加速空胴内の電場を測定する電場測定手段と、
前記加速空胴内における前記摂動体の基準位置からの鉛直方向の変位を検知するための変位測定手段と、
を備え、
前記変位測定手段が、前記摂動体に加わる荷重を計測することを特徴とする電場測定装置。
An electric field measuring device for measuring an electric field in an accelerating cavity, comprising:
a perturbation body disposed within the accelerating cavity for perturbing the electric field;
a support member disposed along the axial direction within the acceleration cavity and supporting the perturbation body;
a drive mechanism that drives the support member to move the perturbation body;
an electric field measuring means for measuring an electric field within the accelerating cavity;
a displacement measuring means for detecting a vertical displacement of the perturbation body from a reference position within the accelerating cavity;
Equipped with
10. An electric field measuring device, wherein the displacement measuring means measures a load applied to the perturbation body.
加速空胴内の電場を測定するための電場測定装置であって、
前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、
前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、
前記支持材を駆動して前記摂動体を移動させる駆動機構と、
前記加速空胴内の電場を測定する電場測定手段と、
前記加速空胴内における前記摂動体の基準位置からの鉛直方向の変位を検知するための変位測定手段と、
を備え、
前記変位測定手段が、前記摂動体へ電磁波を照射しその電磁波の応答から変位を検知することを特徴とする電場測定装置。
An electric field measuring device for measuring an electric field in an accelerating cavity, comprising:
a perturbation body disposed within the accelerating cavity for perturbing the electric field;
a support member disposed along the axial direction within the acceleration cavity and supporting the perturbation body;
a drive mechanism that drives the support member to move the perturbation body;
an electric field measuring means for measuring an electric field within the accelerating cavity;
a displacement measuring means for detecting a vertical displacement of the perturbation body from a reference position within the accelerating cavity;
Equipped with
10. An electric field measuring device, wherein the displacement measuring means irradiates the perturbing body with an electromagnetic wave and detects the displacement from the response of the electromagnetic wave.
加速空胴内の電場を測定するための電場測定装置であって、
前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、
前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、
前記支持材を駆動して前記摂動体を移動させる駆動機構と、
前記加速空胴内の電場を測定する電場測定手段と、
前記加速空胴内における前記摂動体の基準位置からの鉛直方向の変位を検知するための変位測定手段と、
を備え、
前記変位測定手段が、前記摂動体からの反射光を撮影し、その動画乃至画像から変位を検知することを特徴とする電場測定装置。
An electric field measuring device for measuring an electric field in an accelerating cavity, comprising:
a perturbation body disposed within the accelerating cavity for perturbing the electric field;
a support member disposed along the axial direction within the acceleration cavity and supporting the perturbation body;
a drive mechanism that drives the support member to move the perturbation body;
an electric field measuring means for measuring an electric field within the accelerating cavity;
a displacement measuring means for detecting a vertical displacement of the perturbation body from a reference position within the accelerating cavity;
Equipped with
An electric field measuring device characterized in that the displacement measuring means photographs the light reflected from the perturbation body and detects the displacement from the video or image.
加速空胴内の電場を測定するための電場測定装置であって、
前記加速空胴内に配置され、電場に摂動を与えるための摂動体と、
前記加速空胴内の軸方向に沿って配設され、前記摂動体を支持する支持材と、
前記支持材を駆動して前記摂動体を移動させる駆動機構と、
前記加速空胴内の電場を測定する電場測定手段と、
前記加速空胴内における前記摂動体の基準位置からの鉛直方向の変位を検知するための変位測定手段と、
を備え、
前記変位測定手段が、前記摂動体の基準位置からの変位を検知した際に、前記摂動体を固定する前記支持材の張力を、変位がなくなるまで調整する張力調整手段を有することを特徴とする電場測定装置。
An electric field measuring device for measuring an electric field in an accelerating cavity, comprising:
a perturbation body disposed within the accelerating cavity for perturbing the electric field;
a support member disposed along the axial direction within the acceleration cavity and supporting the perturbation body;
a drive mechanism that drives the support member to move the perturbation body;
an electric field measuring means for measuring an electric field within the accelerating cavity;
a displacement measuring means for detecting a vertical displacement of the perturbation body from a reference position within the accelerating cavity;
Equipped with
An electric field measuring device characterized in that the displacement measuring means has a tension adjusting means for adjusting the tension of the support material fixing the perturbation body until the displacement disappears when the displacement measuring means detects a displacement of the perturbation body from a reference position.
前記駆動機構により、前記摂動体を測定領域全体に亘って駆動して前記支持材の張力を前記張力調整手段によって調整し、
この後、前記摂動体を、再度測定領域全体に亘って駆動し、前記電場測定手段により電場を測定するよう制御する制御装置を具備した
ことを特徴とする請求項5に記載の電場測定装置。
the driving mechanism drives the perturbation body over the entire measurement region, and the tension of the support material is adjusted by the tension adjusting means;
6. The electric field measuring device according to claim 5, further comprising a control device that controls the perturbation body to be driven again over the entire measurement region after the measurement and measure the electric field by the electric field measuring means.
前記電場測定手段が、
前記加速空胴に挿入された周波数測定用のアンテナと、当該アンテナに接続された周波数測定装置とを具備した
ことを特徴とする請求項1乃至6の何れか1項に記載の電場測定装置。
The electric field measuring means
7. The electric field measuring device according to claim 1, further comprising: an antenna for measuring a frequency inserted into the acceleration cavity; and a frequency measuring device connected to the antenna.
前記電場測定手段が、前記加速空胴に挿入された周波数測定用のアンテナと、当該アンテナに接続された周波数測定装置とを具備し、
前記変位測定手段が、前記摂動体の基準位置からの変位を検知した際に、変位信号を前記周波数測定装置に出力し、
前記周波数測定装置は、前記変位信号が入力された際の周波数測定信号の取得を停止することを特徴とする請求項1乃至4の何れか1項に記載の電場測定装置。
the electric field measuring means comprises an antenna for measuring a frequency inserted into the acceleration cavity, and a frequency measuring device connected to the antenna;
when the displacement measuring means detects a displacement of the perturbation body from a reference position, the displacement measuring means outputs a displacement signal to the frequency measuring device;
5. The electric field measuring device according to claim 1, wherein the frequency measuring device stops acquiring the frequency measuring signal when the displacement signal is input.
前記電場測定手段が、前記加速空胴に挿入された周波数測定用のアンテナと、当該アンテナに接続された周波数測定装置とを具備し、
前記変位測定手段による前記摂動体の基準位置からの変位情報と、前記周波数測定装置による測定信号とを、同時に計測することを特徴とする請求項1乃至4の何れか1項に記載の電場測定装置。
the electric field measuring means comprises an antenna for measuring a frequency inserted into the acceleration cavity, and a frequency measuring device connected to the antenna;
5. The electric field measuring device according to claim 1, wherein the displacement information of the perturbation body from a reference position measured by the displacement measuring means and the measurement signal measured by the frequency measuring device are measured simultaneously.
加速空胴内の電場を測定するための電場測定方法であって、
請求項1乃至9の何れか1項に記載の電場測定装置を用いて電場を測定することを特徴とする電場測定方法。
1. An electric field measurement method for measuring an electric field in an accelerating cavity, comprising:
An electric field measuring method, comprising measuring an electric field using the electric field measuring device according to any one of claims 1 to 9.
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