JP7721466B2 - Irradiation device - Google Patents
Irradiation deviceInfo
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Description
本発明は、流体に紫外光を照射するための照射装置に関する。 The present invention relates to an irradiation device for irradiating a fluid with ultraviolet light.
紫外光には殺菌能力があることが知られており、医療や食品加工の現場などでの殺菌処理に紫外光を照射する装置が用いられている。また、水などの流体に紫外光を照射することで、流体を連続的に殺菌する装置も用いられている。このような装置として、例えば、直管状の金属パイプで形成される流路の管端部内壁に紫外線LEDを配置した装置が挙げられる(例えば、特許文献1参照)。 Ultraviolet light is known to have sterilizing properties, and devices that irradiate ultraviolet light are used for sterilization processes in medical and food processing facilities. Devices that continuously sterilize fluids, such as water, by irradiating them with ultraviolet light are also used. One such device is one in which ultraviolet LEDs are arranged on the inner wall at the end of a flow path formed by a straight metal pipe (see, for example, Patent Document 1).
流路内を流れる流体に高効率で紫外光を照射するためには、流路内壁面での紫外光反射率が高い構造とすることが望ましい。しかし、流路内壁面には流体の状態によって気泡が生じたり消えたりすることがある。気泡が生じる場合には、流路内壁面の気泡により紫外光が散乱され、流路内の紫外光の強度分布が時間経過とともに変化する。そうすると、流体に作用する紫外光の量にばらつきが生じ、紫外光照射による殺菌効果や有機物分解効果にもばらつきが生じてしまう。 In order to irradiate the fluid flowing through the channel with ultraviolet light with high efficiency, it is desirable to have a structure with high ultraviolet light reflectivity on the channel's inner wall. However, bubbles may appear and disappear on the channel's inner wall depending on the state of the fluid. When bubbles appear, the ultraviolet light is scattered by the bubbles on the channel's inner wall, causing the intensity distribution of the ultraviolet light within the channel to change over time. This causes variations in the amount of ultraviolet light acting on the fluid, which in turn causes variations in the sterilization effect and organic matter decomposition effect of ultraviolet light irradiation.
本発明はこうした課題に鑑みてなされたものであり、その例示的な目的のひとつは、紫外光の照射効率を高めつつ、照射量のばらつきを低減した照射装置を提供することにある。 The present invention was made in consideration of these problems, and one of its exemplary objectives is to provide an irradiation device that increases the irradiation efficiency of ultraviolet light while reducing variation in the irradiation amount.
本発明のある態様の照射装置は、算術平均粗さが2μm以下のフッ素系樹脂材料で流路内壁面の少なくとも一部が構成される流路構造と、流路構造の内部に向けて紫外光を照射する光源と、を備える。 An irradiation device according to one embodiment of the present invention comprises a flow path structure in which at least a portion of the inner wall surface of the flow path is made of a fluororesin material with an arithmetic mean roughness of 2 μm or less, and a light source that irradiates ultraviolet light toward the inside of the flow path structure.
この態様によると、流路内壁面にフッ素系樹脂材料を用いることにより、紫外光に対する耐久性が高い流路構造にするとともに、流路内壁面での紫外光反射率を高めて流体に効率的に紫外光を照射することができる。また、フッ素系樹脂材料の表面粗さを2μm以下にすることで、流路内壁面への気泡の付着を防ぎ、流路内の紫外光の照度分布の時間変化を軽減できる。これにより、流体に作用する紫外光量のばらつきを抑え、照射装置の照射性能を安定化させることができる。 According to this aspect, by using a fluororesin material for the inner wall surface of the flow channel, the flow channel structure is highly resistant to ultraviolet light, and the ultraviolet light reflectance on the inner wall surface of the flow channel is increased, allowing for efficient irradiation of the fluid with ultraviolet light. Furthermore, by setting the surface roughness of the fluororesin material to 2 μm or less, it is possible to prevent air bubbles from adhering to the inner wall surface of the flow channel and reduce changes over time in the irradiance distribution of ultraviolet light within the flow channel. This reduces variations in the amount of ultraviolet light acting on the fluid and stabilizes the irradiation performance of the irradiation device.
フッ素系樹脂材料は、ポリテトラフルオロエチレン(PTFE)であってもよい。 The fluorine-based resin material may be polytetrafluoroethylene (PTFE).
流路構造は、フッ素系樹脂材料で構成される直管を含んでもよい。光源は、直管の内部に向けて直管の軸方向に紫外光を照射するよう配置されてもよい。 The flow path structure may include a straight tube made of a fluororesin material. The light source may be positioned to irradiate ultraviolet light toward the interior of the straight tube in the axial direction of the straight tube.
光源は、波長が250nm~300nmの紫外光を出力してもよい。 The light source may output ultraviolet light with a wavelength of 250 nm to 300 nm.
本発明によれば、流路内での紫外光の照射効率を高めつつ、照射量のばらつきを低減できる。 This invention can increase the efficiency of ultraviolet light irradiation within the flow channel while reducing variation in the amount of irradiation.
以下、図面を参照しながら、本発明を実施するための形態について詳細に説明する。なお、説明において同一の要素には同一の符号を付し、重複する説明を適宜省略する。 The following describes in detail the embodiments of the present invention with reference to the drawings. Note that identical elements throughout the description will be designated by the same reference numerals, and redundant explanations will be omitted where appropriate.
図1は、実施の形態に係る照射装置10の構成を概略的に示す断面図である。照射装置10は、流路構造12と、光源14とを備える。流路構造12は、直管20と、流入管26と、流出管28と、照射窓30と、端部壁32とを備える。照射装置10は、直管20の内部を流れる水などの流体に紫外光を照射して殺菌処理や浄化処理を施すために用いられる。 Figure 1 is a cross-sectional view showing the schematic configuration of an irradiation device 10 according to an embodiment. The irradiation device 10 comprises a flow path structure 12 and a light source 14. The flow path structure 12 comprises a straight pipe 20, an inlet pipe 26, an outlet pipe 28, an irradiation window 30, and an end wall 32. The irradiation device 10 is used to irradiate a fluid such as water flowing inside the straight pipe 20 with ultraviolet light to perform sterilization or purification treatment.
光源14は、流路構造12の内部に紫外光を照射するよう構成される。光源14は、直管20の第1端部22に配置され、照射窓30を介して直管20の内部に向けて直管20の軸方向に紫外光を照射する。光源14は、例えば、紫外光を発するLED(Light Emitting Diode)を含み、殺菌効率が高い波長である250nm~300nm付近の紫外光を出力する。光源14は、照射対象が水の場合、265nm~285nmの紫外光を出力するよう構成されることが好ましく、例えば、270nm、275nm、または、280nmの紫外光を出力する。光源14は、紫外光LEDから出力される紫外光の照射方向を整えるためのレンズやリフレクタといった光学素子を含んでもよい。 The light source 14 is configured to irradiate the interior of the flow path structure 12 with ultraviolet light. The light source 14 is disposed at the first end 22 of the straight tube 20 and irradiates the ultraviolet light in the axial direction of the straight tube 20 toward the interior of the straight tube 20 through the irradiation window 30. The light source 14 includes, for example, an LED (Light Emitting Diode) that emits ultraviolet light, and outputs ultraviolet light with a wavelength of approximately 250 nm to 300 nm, which has high sterilization efficiency. When the target to be irradiated is water, the light source 14 is preferably configured to output ultraviolet light with a wavelength of 265 nm to 285 nm, for example, 270 nm, 275 nm, or 280 nm. The light source 14 may also include optical elements such as a lens or reflector to adjust the irradiation direction of the ultraviolet light output from the ultraviolet LED.
直管20は、第1端部22から第2端部24に向けて軸方向に延在する。直管20は、フッ素系樹脂材料で構成され、例えば、全フッ素化樹脂であるポリテトラフルオロエチレン(PTFE)で構成される。PTFEは、化学的に安定した材料であり、耐久性、耐熱性および耐薬品性に優れ、紫外光の反射率が高い材料である。直管20をPTFEなどのフッ素樹脂材料で構成することにより、光源14からの紫外光を内壁面18で反射させ、直管20の軸方向に紫外光を効率的に伝搬させることができる。 The straight tube 20 extends axially from the first end 22 to the second end 24. The straight tube 20 is made of a fluororesin material, such as polytetrafluoroethylene (PTFE), a fully fluorinated resin. PTFE is a chemically stable material that has excellent durability, heat resistance, and chemical resistance, and has a high reflectivity for ultraviolet light. By making the straight tube 20 out of a fluororesin material such as PTFE, the ultraviolet light from the light source 14 is reflected by the inner wall surface 18, allowing the ultraviolet light to propagate efficiently in the axial direction of the straight tube 20.
なお、直管20は、その全体がPTFEで構成されている必要はなく、流体と接触する内壁面18がPTFEで構成されていればよい。例えば、他の樹脂材料もしくは金属材料で構成される管の内面にPTFEのライナを取り付けて直管20を構成してもよい。 The straight pipe 20 does not need to be made entirely of PTFE; it is sufficient that the inner wall surface 18 that comes into contact with the fluid is made of PTFE. For example, the straight pipe 20 may be made by attaching a PTFE liner to the inner surface of a pipe made of another resin or metal material.
直管20の第1端部22には、光源14からの紫外光を透過させる照射窓30が設けられる。照射窓30は、石英(SiO2)やサファイア(Al2O3)、非晶質のフッ素系樹脂などの紫外光の透過率が高い部材で構成される。直管20の第2端部24には、端部壁32が設けられる。端部壁32は、直管20と同様にPTFEなどのフッ素系樹脂材料で構成される。端部壁32は、その全体がPTFEで構成されなくてもよく、少なくとも端部壁32の内面34がPTFEで構成されていればよい。 An irradiation window 30 that transmits ultraviolet light from the light source 14 is provided at the first end 22 of the straight tube 20. The irradiation window 30 is made of a material with high ultraviolet light transmittance, such as quartz ( SiO2 ), sapphire ( Al2O3 ), or amorphous fluororesin . An end wall 32 is provided at the second end 24 of the straight tube 20. Like the straight tube 20, the end wall 32 is made of a fluororesin material such as PTFE. The end wall 32 does not have to be made entirely of PTFE; it is sufficient that at least the inner surface 34 of the end wall 32 is made of PTFE.
流入管26は、直管20の第1端部22付近に設けられ、直管20の軸方向と直交する径方向に延在する。流出管28は、直管20の第2端部24付近に設けられ、直管20の径方向に延在する。したがって、照射装置10は、光源14に近い位置から流体が流入され、光源14から離れる方向に直管20の内部を流れてから排出される。なお、流体の流れの方向が逆になるように構成されてもよく、流入管26が流出側、流出管28が流入側となるように構成してもよい。 The inlet pipe 26 is provided near the first end 22 of the straight pipe 20 and extends radially, perpendicular to the axial direction of the straight pipe 20. The outlet pipe 28 is provided near the second end 24 of the straight pipe 20 and extends radially of the straight pipe 20. Therefore, in the irradiation device 10, fluid flows into the straight pipe 20 from a position close to the light source 14, flows inside the straight pipe 20 in a direction away from the light source 14, and is then discharged. Note that the direction of fluid flow may be reversed, and the inlet pipe 26 may be on the outlet side and the outlet pipe 28 on the inlet side.
本実施の形態では、直管20の内壁面18の算術平均粗さRaが2μm以下となるように構成されている。内壁面18の表面粗さRaを2μm以下にするためには、例えば、内壁面18に切削加工を施して内壁面18の微小な凹凸を除去すればよい。その他、直管20を成形する金型として、内壁面18を形成する面が鏡面仕上げされた金型を用いることにより、内壁面18の表面粗さRaを2μm以下にできる。 In this embodiment, the straight pipe 20 is configured so that the arithmetic mean roughness Ra of the inner wall surface 18 is 2 μm or less. In order to achieve a surface roughness Ra of the inner wall surface 18 of 2 μm or less, for example, the inner wall surface 18 can be machined to remove minute irregularities on the inner wall surface 18. Alternatively, the surface roughness Ra of the inner wall surface 18 can be achieved by using a mold with a mirror finish on the surface that forms the inner wall surface 18 as the mold for molding the straight pipe 20.
直管20の内壁面18を構成するフッ素系樹脂材料は、表面エネルギーが高いために超撥水性を示す。そのため、内壁面18に微細な凹凸が存在していると、その凹凸に気泡が付着しやすく、気泡がいったんできると除去されにくい。本発明者らの知見によれば、PTFE表面の算術平均粗さRaが2μmを超えると、表面に気泡の付着が確認され、Raが9μm以上となると多数の気泡が付着することが分かっている。 The fluororesin material that makes up the inner wall surface 18 of the straight pipe 20 has high surface energy and is therefore extremely water-repellent. Therefore, if the inner wall surface 18 has minute irregularities, air bubbles tend to adhere to the irregularities, and once air bubbles form, they are difficult to remove. According to the inventors' findings, when the arithmetic mean roughness Ra of the PTFE surface exceeds 2 μm, air bubbles are observed adhering to the surface, and when Ra is 9 μm or greater, a large number of air bubbles adhere.
直管20の内壁面18に気泡が付着すると、流体と気泡の屈折率差により気泡表面で反射ないし散乱が生じ、直管20の内部の紫外光照度分布に影響を及ぼす。気泡の発生箇所は一定とは限らないため、気泡の発生数や発生場所等に応じて流路内の照度分布が変化し、流体に照射される紫外光量にばらつきが生じてしまう。また、フッ素系樹脂材料の表面では拡散反射が主体的であり、入射する紫外光が様々な方向に散乱されるのに対し、気泡表面では鏡面反射が主体的であり、入射する紫外光が特定の方向に強く反射されやすい。その結果、気泡が生じると流路内の照度分布が不均一になりやすい。本実施の形態では、気泡の発生による照射量のばらつきを低減するため、内壁面18の算術平均粗さRaを2μm以下としている。 When air bubbles adhere to the inner wall surface 18 of the straight pipe 20, the difference in refractive index between the fluid and the air bubbles causes reflection or scattering at the bubble surface, affecting the UV light illuminance distribution inside the straight pipe 20. Because air bubbles do not necessarily occur in a fixed location, the illuminance distribution within the flow path changes depending on the number and location of the bubbles, resulting in variations in the amount of UV light irradiated onto the fluid. Furthermore, while the surface of a fluororesin material is primarily diffusely reflected, scattering incident UV light in various directions, the surface of an air bubble is primarily specularly reflected, tending to strongly reflect incident UV light in a specific direction. As a result, the formation of air bubbles can easily cause uneven illuminance distribution within the flow path. In this embodiment, the arithmetic mean roughness Ra of the inner wall surface 18 is set to 2 μm or less to reduce variations in the amount of irradiation due to the formation of air bubbles.
図2は、比較例に係る流路内の照度分布を模式的に示すグラフであり、流路内の径方向の照度分布の時間変化を示している。本比較例では、内直径が40mm、流路内壁面の算術平均粗さRaが4μmのPTFE管を使用し、光源から150mm離れた位置で照度分布を計測した。PTFE管の内部は純水で満たされている。図2は、複数回のタイミングで計測した照度分布のグラフを示しており、光強度が最大となったときの強度値を1として規格化している。図示されるように、流路内壁面の表面粗さが大きい場合には光強度のばらつきが見られ、最大で約30%の強度変化が生じていることが分かる。 Figure 2 is a graph showing a schematic representation of the illuminance distribution within a flow channel according to a comparative example, illustrating the change over time in the radial illuminance distribution within the flow channel. In this comparative example, a PTFE tube with an inner diameter of 40 mm and an arithmetic mean roughness Ra of 4 μm on the flow channel inner wall surface was used, and the illuminance distribution was measured at a position 150 mm away from the light source. The inside of the PTFE tube was filled with pure water. Figure 2 shows a graph of the illuminance distribution measured at multiple times, with the intensity value at maximum light intensity normalized to 1. As shown in the figure, when the surface roughness of the flow channel inner wall surface is high, variations in light intensity are observed, with a maximum intensity change of approximately 30% occurring.
図3は、実施例に係る流路内の照度分布を模式的に示すグラフであり、流路内壁面の算術平均粗さRaが1.8μmのPTFEを用いた場合の照度分布の時間変化を示している。本実施例においても、内直径が40mmのPTFE管を使用し、PTFE管の内部に純水を満たした状態で、光源から150mm離れた位置で照度分布を計測した。図3においても、複数回のタイミングで計測した照度分布のグラフを示しており、光強度が最大となったときの強度値を1として規格化している。本実施例では、流路内壁面の表面粗さが小さいために光強度のばらつきが小さく、最大で約5%の強度変化しか生じていない。このように、表面粗さを2μm以下とすることで流路内の照度分布の時間変化を小さくし、照射量のばらつきを低減することができる。 Figure 3 is a graph schematically illustrating the illuminance distribution within a flow channel according to an embodiment, showing the change over time in the illuminance distribution when PTFE with an arithmetic mean roughness Ra of 1.8 μm was used for the flow channel inner wall surface. In this example, a PTFE tube with an inner diameter of 40 mm was used, and the illuminance distribution was measured at a position 150 mm away from the light source with the PTFE tube filled with pure water. Figure 3 also shows a graph of the illuminance distribution measured at multiple times, with the intensity value at maximum light intensity normalized to 1. In this example, the small surface roughness of the flow channel inner wall surface resulted in small variations in light intensity, with a maximum intensity change of only approximately 5%. Thus, by setting the surface roughness to 2 μm or less, the change over time in the illuminance distribution within the flow channel can be minimized, reducing variations in the amount of irradiation.
図4は、実施の形態に係る浄化装置70の構成を模式的に示す図であり、上述の照射装置10の応用例を示す。浄化装置70は、照射装置10と、処理装置60とを備える。浄化装置70は、二段階の浄化処理をするための浄化システムであり、処理装置60にて前処理がなされた後、照射装置10にて後処理がなされる。 Figure 4 is a diagram showing a schematic configuration of a purification device 70 according to an embodiment, illustrating an application example of the above-described irradiation device 10. The purification device 70 comprises an irradiation device 10 and a treatment device 60. The purification device 70 is a purification system for performing a two-stage purification process, in which pre-treatment is performed in the treatment device 60 and then post-treatment is performed in the irradiation device 10.
処理装置60は、処理槽62と、曝気装置64とを有する。処理装置60は、微生物を利用して浄化処理をするための装置である。処理槽62の内部には、好気性微生物が付着する接触材が設けられる。曝気装置64は、処理槽62の内部の流体に空気を供給し、好気性微生物の働きにより流入路71から供給される流体が浄化されるようにする。処理槽62にて処理された流体は、固形物が除去された後、接続路72を通じて照射装置10に供給される。 The treatment device 60 has a treatment tank 62 and an aeration device 64. The treatment device 60 is a device for purifying water using microorganisms. A contact material, to which aerobic microorganisms adhere, is provided inside the treatment tank 62. The aeration device 64 supplies air to the fluid inside the treatment tank 62, allowing the aerobic microorganisms to purify the fluid supplied from the inlet channel 71. After solids are removed from the fluid treated in the treatment tank 62, it is supplied to the irradiation device 10 via the connection channel 72.
照射装置10は、処理装置60から接続路72を通じて供給される流体に紫外光を照射して浄化処理をし、処理後の流体を流出路73から排出する。処理装置60では曝気装置64を通じて空気が供給されるため、接続路72を通じて供給される流体は、溶存空気量が比較的高く、気泡が生じやすい。しかしながら、照射装置10では、流路内壁面の表面粗さが2μm以下に設定されているため、溶存空気量が高い流体が供給される場合であっても、流路内壁面への気泡の付着を好適に抑制できる。その結果、照射装置10において高効率に紫外光を照射するとともに、気泡による照射ムラの発生を抑えることができる。したがって、本実施の形態によれば、浄化装置70の処理能力を安定化できる。 The irradiation device 10 irradiates the fluid supplied from the treatment device 60 through the connection path 72 with ultraviolet light to purify the fluid, and discharges the treated fluid from the outlet path 73. Because air is supplied to the treatment device 60 through the aeration device 64, the fluid supplied through the connection path 72 has a relatively high dissolved air content and is prone to generating bubbles. However, in the irradiation device 10, the surface roughness of the flow path inner wall is set to 2 μm or less, so adhesion of bubbles to the flow path inner wall can be effectively suppressed even when a fluid with a high dissolved air content is supplied. As a result, the irradiation device 10 can irradiate ultraviolet light with high efficiency and suppress uneven irradiation caused by bubbles. Therefore, according to this embodiment, the processing capacity of the purification device 70 can be stabilized.
以上、本発明を実施の形態にもとづいて説明した。本発明は上記実施の形態に限定されず、種々の設計変更が可能であり、様々な変形例が可能であること、またそうした変形例も本発明の範囲にあることは、当業者に理解されるところである。 The present invention has been described above based on the embodiments. Those skilled in the art will understand that the present invention is not limited to the above embodiments, and that various design changes and modifications are possible, and that such modifications are also within the scope of the present invention.
上述の実施の形態では、直管形状の流路構造を用いる場合を示したが、流路構造の形状は特に限定されない。変形例においては、流路全体が直線状に構成されるのではなく、流路の少なくとも一部に屈曲部が設けられてもよい。また、流路の断面形状は円形であってもよいし、多角形であってもよい。 In the above-described embodiment, a straight-pipe-shaped flow path structure is used, but the shape of the flow path structure is not particularly limited. In a modified example, the entire flow path may not be linear, but at least a portion of the flow path may have a bent section. Furthermore, the cross-sectional shape of the flow path may be circular or polygonal.
上述の実施の形態では、流路内壁面の全体にフッ素系樹脂材料を用いる場合を示した。変形例においては、流路内壁面の一部にフッ素系樹脂材料が用いられてもよい。流路の配壁面の一部に用いられるフッ素系樹脂材料について表面粗さRaを2μm以下にすることにより、フッ素系樹脂表面の気泡の付着を抑制し、フッ素系樹脂表面での紫外光の反射特性を安定化させることができる。 In the above-described embodiment, a fluororesin material is used for the entire inner wall surface of the flow path. In a modified example, a fluororesin material may be used for only a portion of the inner wall surface of the flow path. By setting the surface roughness Ra of the fluororesin material used for a portion of the inner wall surface of the flow path to 2 μm or less, it is possible to suppress the adhesion of air bubbles to the fluororesin surface and stabilize the reflection characteristics of ultraviolet light on the fluororesin surface.
上述の実施の形態では、光源14として紫外光LEDを用いる場合を示した。変形例においては、紫外線ランプを光源として用いてもよく、中心波長またはピーク波長が250nm~260nm、例えば254nmの紫外線ランプを用いてもよい。 In the above-described embodiment, an ultraviolet LED is used as the light source 14. In a modified example, an ultraviolet lamp may be used as the light source, and an ultraviolet lamp with a center or peak wavelength of 250 nm to 260 nm, for example 254 nm, may be used.
10…照射装置、12…流路構造、14…光源、18…内壁面、20…直管。 10...Irradiation device, 12...Flow path structure, 14...Light source, 18...Inner wall surface, 20...Straight tube.
Claims (4)
前記直管の内部を流れる水に向けて紫外光を照射する光源と、を備える照射装置。 a flow path structure including a straight pipe, an inlet pipe for introducing water into the straight pipe, and an outlet pipe for discharging water from the straight pipe, wherein at least a portion of the inner surface of the straight pipe is made of polytetrafluoroethylene (PTFE) having an arithmetic mean roughness of 2 μm or less by cutting ;
an irradiation device comprising: a light source that irradiates ultraviolet light toward the water flowing inside the straight pipe.
前記直管の内部を流れる水に向けて紫外光を照射する光源と、を備え、
前記光源は、前記直管の軸方向に紫外光を照射する、照射装置。 a flow path structure including a straight pipe, an inlet pipe for introducing water into the straight pipe, and an outlet pipe for discharging water from the straight pipe, wherein at least a portion of the inner surface of the straight pipe is made of polytetrafluoroethylene (PTFE) having an arithmetic mean roughness of 1.8 μm;
a light source that irradiates ultraviolet light toward the water flowing inside the straight pipe,
The light source is an irradiation device that irradiates ultraviolet light in the axial direction of the straight tube.
前記光源は、前記照射窓を介して前記直管の内部に紫外光を照射する、請求項1または2に記載の照射装置。 the flow path structure further includes an irradiation window provided at a first end of the straight pipe;
The irradiation device according to claim 1 or 2, wherein the light source irradiates the inside of the straight tube with ultraviolet light through the irradiation window.
前記端部壁の内面は、PTFEで構成される、請求項1から3のいずれか一項に記載の照射装置。 the flow path structure further includes an end wall provided at a second end of the straight pipe;
4. The illumination device of claim 1, wherein the inner surface of the end wall is made of PTFE.
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| JP2017017511A JP7043172B2 (en) | 2017-02-02 | 2017-02-02 | Irradiation device |
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| JP2003285085A (en) | 2002-03-28 | 2003-10-07 | Mitsui Eng & Shipbuild Co Ltd | Water purification device and water purification method |
| US8551415B2 (en) | 2008-08-22 | 2013-10-08 | Applied Materials, Inc. | UV assisted polymer modification and in situ exhaust cleaning |
| JP4832496B2 (en) | 2008-11-18 | 2011-12-07 | タキロン株式会社 | Backlight unit |
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