JP7739933B2 - Output program, output device, and output method - Google Patents

Description

The present invention relates to an output program that outputs the content represented by the code contained in photomask data.

Photomasks used to manufacture semiconductor integrated circuits are affixed with barcodes or two-dimensional codes (hereinafter simply referred to as "codes") that indicate control numbers, etc. During the semiconductor integrated circuit manufacturing process, exposure equipment reads the code on the photomask and confirms whether it is the photomask that should be used.

Photomask data is data used when manufacturing photomasks. When new photomask data is created or changed, the pattern graphics and codes contained in the photomask data are displayed on a device that displays and checks the photomask data (hereinafter referred to as the display check device) during the inspection process. The displayed code is then read and decoded with a barcode reader, allowing the user to confirm the model number of the displayed photomask and whether the model number has been assigned as the appropriate code.

However, this type of reading method, which involves holding a barcode reader over a code displayed on the display of a display confirmation device, has the problem that it may not be possible to accurately read the code depending on the display screen size, the size of the code displayed on the screen, the brightness of the display, etc. In relation to this problem, Patent Document 1 proposes a barcode display device that creates and arranges barcodes according to a barcode display layout (a layout in which the thinnest line is two pixels wide) that corresponds to the display specifications. Patent Document 2 also proposes a barcode service provision system in which a server is provided with a database that contains a table that associates mobile device model data with barcode image data, and the server retrieves an image of the barcode corresponding to the model from the database and displays it on the mobile device screen, allowing the barcode to be accurately read with a barcode reader.

Japanese Patent Application Laid-Open No. 2002-117372 Japanese Patent Application Laid-Open No. 2003-115025

When displaying a code on a display confirmation device, for example, to fit both the pattern graphic and code from the photomask data on the same screen, the code must be displayed in a reduced size, but this may not be possible with the above-mentioned conventional technologies. When displaying a code in a reduced size, it may not be possible to ensure that the thinnest line of the barcode is two or more pixels wide, as with the technology described in Patent Document 1. With the technology described in Patent Document 2, the size of the barcode image data is fixed for each display, so it may not be possible to fit both the pattern graphic and code from the photomask data on the same screen. Furthermore, a physical code reader must be prepared in addition to the display confirmation device.

The present invention was made in light of these circumstances. Its purpose is to provide an output program or the like that can decode codes without being affected by the display screen size, the size of the displayed code, screen brightness, etc.

An output program according to one aspect of the present application causes a computer to read photomask data, output a display image of the pattern graphic and code contained in the photomask data, obtain range data indicating the display range of the code in the display image, decode the content indicated by the code based on the range data, and output the decoded content.

According to one aspect of the present application, codes can be decoded without using a code reader and without being affected by the display screen size, the size of the displayed code, screen brightness, etc.

FIG. 2 is a block diagram illustrating an example of a hardware configuration of a display confirmation device. FIG. 2 is an explanatory diagram showing the functional parts of the display confirmation device. 10 is a flowchart illustrating an example of a procedure of a main process. FIG. 10 is an explanatory diagram showing a method for specifying a range. FIG. 2 is an explanatory diagram showing an example of a display screen.

Embodiments will be described below with reference to the drawings. Figure 1 is a block diagram showing an example of the hardware configuration of a display confirmation device. Display confirmation device 1 includes a control unit 11, a main memory unit 12, an auxiliary memory unit 13, a VRAM 14, an input unit 15, a display unit 16, a communication unit 17, and a reading unit 18. The control unit 11, the main memory unit 12, the auxiliary memory unit 13, the VRAM 14, the input unit 15, the display unit 16, the communication unit 17, and the reading unit 18 are connected via a bus B. Display confirmation device 1 is configured as a PC (Personal Computer), a tablet computer, a workstation, or the like. Display confirmation device 1 may also be configured as a multi-computer consisting of multiple computers, a virtual machine virtually constructed using software, or a quantum computer. Furthermore, the functions of display confirmation device 1 may be realized as a cloud service, and users may use the cloud service via a thin client.

The control unit 11 has one or more arithmetic processing devices such as a CPU (Central Processing Unit), MPU (Micro-Processing Unit), GPU (Graphics Processing Unit), etc. The control unit 11 reads and executes a control program 1P (program, program product) stored in the auxiliary storage unit 13, thereby performing various information processing, control processing, etc. related to the display confirmation device 1.

The main memory unit 12 is a static random access memory (SRAM), dynamic random access memory (DRAM), flash memory, etc. The main memory unit 12 mainly temporarily stores data required by the control unit 11 to perform arithmetic processing.

The auxiliary memory unit 13 is a hard disk or SSD (Solid State Drive), etc., and stores the control program 1P and various DBs (Databases) required for the control unit 11 to execute processing. The auxiliary memory unit 13 stores a photomask DB 131. The auxiliary memory unit 13 may be an external storage device connected to the display confirmation device 1. The various DBs, etc. stored in the auxiliary memory unit 13 may be stored in a database server or cloud storage separate from the display confirmation device 1.

VRAM 14 is a storage device also known as graphics memory, VIDEO RAM, or video memory. VRAM 14 is composed of SRAM, etc. VRAM 14 is a storage device for storing content to be displayed on display unit 16. Note that VRAM 14 may be part of main memory unit 12.

The input unit 15 is a keyboard and mouse. The display unit 16 includes an LCD panel or the like. The display unit 16 displays photomask data and the like. The input unit 15 and display unit 16 may also be integrated to form a touch panel display. The display confirmation device 1 may also display on an external display device.

The communication unit 17 communicates with this computer, etc., via a network. The control unit 11 may also use the communication unit 17 to download the control program 1P from another computer via the network and store it in the auxiliary storage unit 13.

The reading unit 18 reads portable storage media 1a, including CD (Compact Disc)-ROM and DVD (Digital Versatile Disc)-ROM. The control unit 11 may read the control program 1P from the portable storage medium 1a via the reading unit 18 and store it in the auxiliary storage unit 13. The control unit 11 may also read the control program 1P from the semiconductor memory 1b.

Next, we will explain photomask data. Photomask data is data used to create photomasks. A photomask is an original plate for the circuit pattern that is burned onto a silicon substrate using photolithography during the manufacturing process of semiconductor integrated circuits and other devices. Because multiple layers are stacked to form a single semiconductor integrated circuit, multiple photomasks are typically used. Therefore, photomask data is a collection of data used to create multiple photomasks. Multiple layers are called layers, and the data for each layer that makes up the photomask data includes pattern graphic data corresponding to the photomask pattern and code graphic data (code) that represents the photomask's control number, etc., as a barcode or two-dimensional code. In other words, the data for each layer that makes up the photomask data includes pattern graphic data and code graphic data. Such photomask data is stored in photomask DB 131. In photomask DB 131, it is desirable for photomask data to be associated with an identification ID and the number of layers. The identification ID may be the common portion of the control number assigned to each layer. For example, if the control numbers are "AA12345-BBB-D-R4," "AA12345-CCC-D-R4," "AA12345-DDD-D-R4," etc., the identification ID would be "AA12345-R4," etc. In the following explanation, it is assumed that the photomask data is stored in photomask DB 131 with the identification ID associated with the number of layers.

Next, the functions of the display confirmation device 1 will be explained. Figure 2 is an explanatory diagram showing the functional units of the display confirmation device. The display confirmation device 1 includes the following functional units: a data reading unit 11a, a graphic display control unit 11b, a range designation unit 11c, a code decoding unit 11d, and a text display control unit 11e. Each functional unit is realized by the control unit 11 executing the control program 1P.

The data reading unit 11a reads the photomask data to be displayed from the photomask DB 131. The photomask data read by the data reading unit 11a is input to the graphic display control unit 11b and the code decoding unit 11d. The graphic display control unit 11b generates drawing data (pattern graphic and code graphic) for displaying the pattern graphic data and code graphic data contained in the photomask data on the display unit 16, and writes this data to the VRAM 14. The drawing data written to the VRAM 14 corresponds to the size and resolution of the display screen of the display unit 16. Therefore, if the drawing range of the pattern graphic is wider than the size of the display screen, such as when displaying a large pattern graphic in its entirety, the pattern graphic will be displayed in a reduced size. Accordingly, the code graphic will also be displayed in a reduced size. The drawing data written to the VRAM 14 is displayed on the display screen of the display unit 16.

The user uses the input unit 15 to specify the display range of the code graphic displayed on the display screen. The range specification unit 11c acquires the range data. The range data is input to the code decoding unit 11d. Based on the photomask data and range data, the code decoding unit 11d extracts only the graphics within the specified range in the photomask data and recognizes the shape of the code from the coordinates of each graphic that makes up the code. The code decoding unit 11d decodes the code and outputs text such as a management number as the decoding result. The code shape recognition and decoding are performed for each layer of data contained in the photomask data, so this is repeated a number of times equal to the number of layers. Note that the code display range is assumed to be in approximately the same position for each layer. The decoding results for all layers are input to the text display control unit 11e. The text display control unit 11e generates drawing data for displaying the text on the screen and writes it to VRAM 14. The drawing data written to VRAM 14 is displayed on the display screen of the display unit 16. As a result of the above operations, the pattern graphic, code graphic, and text resulting from the code graphic decipherment are displayed on the display screen of the display unit 16.

The data reading unit 11a corresponds to the reading unit. The graphic display control unit 11b corresponds to the first output unit. The range specification unit 11c corresponds to the acquisition unit. The code decoding unit 11d corresponds to the decoding unit. The text display control unit 11e corresponds to the second output unit.

Next, the information processing performed by the display confirmation device 1 will be explained using a flowchart. FIG. 3 is a flowchart showing an example of the main processing procedure. FIG. 4 is an explanatory diagram showing a range specification method. The user inputs or selects the photomask data to be confirmed via the input unit 15 of the display confirmation device 1. The control unit 11 of the display confirmation device 1 reads the photomask data from the photomask DB 131 (step S1). Based on the control program 1P, the control unit 11 displays the photomask data on the display unit 16 (step S2). Specifically, the control unit 11 extracts pattern graphic data and code graphic data for each layer from the read photomask data. The control unit 11 draws the extracted pattern graphic and code graphic for all layers using the frame type, fill color, and display magnification (enlargement/reduction) set by the user, and displays them on the display of the display unit 16. The user specifies the display range of the code graphic displayed on the display using the input unit 15, such as a mouse. Specifically, as shown in FIG. 4A, if the code graphic is a barcode, the user specifies a line segment in the direction of the barcode intersection so that it passes over all of the barcode. The user clicks the left edge of the barcode (first point) and then the right edge of the barcode (second point). In this case, the range data is line segment data, which is the coordinate values of the two endpoints that specify the line segment. If the code graphic is a two-dimensional code, the user clicks the bottom left (first point) and top right (second point) of the two-dimensional code so that all of the two-dimensional code fits within the range, as shown in FIG. 4B. In this case, the range data is rectangle data, which is the coordinate values of a pair of opposite vertices that specify the rectangle. Other methods of specification are also possible as long as they allow the display range of the barcode or two-dimensional code to be specified. The control unit 11 acquires the range data of the code graphic specified by the user (step S3). The control unit 11 selects the layer to be processed (step S4). The control unit 11 extracts the graphic data that forms the code within the specified range from the photomask data and range data of the selected layer, and decodes the code (step S5). The code shape used for code decoding is not the shape displayed on the display unit 16, but is recognized based on the coordinates of the graphic layout output from the data reader. The control unit 11 stores the decoded text data in a temporary area in the main memory unit 12 or the auxiliary memory unit 13, in association with the layer number (step S6). The control unit 11 determines whether there are any unprocessed layers (step S7). If the control unit 11 determines that there are any unprocessed layers (YES in step S7), the process returns to step S4, where the unprocessed layers are processed. If the control unit 11 determines that there are no unprocessed layers (NO in step S7), the control unit 11 associates the text data stored in the temporary area with the layer number and displays it on the display unit 16 (step S8). The control unit 11 then terminates the process. The coordinates of the code graphic layout, i.e., the range data of the code graphic, may be displayed on the display unit 16.

Figure 5 is an explanatory diagram showing an example of a display screen. In the example shown in Figure 5A, the display confirmation device 1 enlarges and displays the code graphic CD according to the range specified by the user. The display confirmation device 1 then displays the text resulting from the code decryption in a text box TB. In the example shown in Figure 5B, the display confirmation device 1 displays the pattern graphic at a scale that allows for full display. Therefore, the display confirmation device 1 displays the code graphic CD in a reduced size. However, by performing the above-described processing, the display confirmation device 1 can display the code decryption result shown in the text box TB.

According to the embodiment described above, there is no need to hold a physical barcode reader over the display unit 16 of the display verification device 1 to read the code graphic. Furthermore, the code graphic can be reliably read without being affected by the screen size of the display unit 16, the size of the displayed code graphic, screen brightness, etc. For example, when a pattern graphic is reduced for full-screen display, the code graphic may become distorted, and the code graphic read by the barcode reader may not be able to decode the code. However, in this embodiment, the code shape is recognized from the coordinates of each graphic in the photomask data read by the data reading unit 11a based on the display range of the code graphic, regardless of the display scale, and the code is decoded, so the code graphic can be reliably decoded.

Furthermore, in photomask data consisting of multiple layers, if each layer contains a code graphic indicating information such as a control number, it is possible to decode the code graphics of all layers with a single operation and display the decoded results. Conventionally, when code graphics of multiple layers are displayed overlapping each other, the code graphics of the lower layer are hidden by the code graphics of the upper layer, so even if you try to read and decode the code graphics of all layers at once with a barcode reader, it may not be possible to decode them. However, in this embodiment, layers are extracted one by one and the code graphics are decoded, so it is possible to reliably decode the code graphics.

In the above explanation, the reason why the user specifies the display range of the code graphic is as follows: If a wide range that includes a large number of pattern graphics is to be decoded, the processing time required to search for the code graphic within the range becomes long. For this reason, having the user specify the range is intended to shorten the processing time. If the processing capacity of the display confirmation device 1 is sufficiently high and a wide range can be specified in an appropriate processing time, the user may be omitted from specifying the display range. Whether the layout of the code graphics is always the same or there are a limited number of layouts, the user may be omitted from specifying the display range.

In this embodiment, the code shape is recognized and analyzed from the coordinates of each graphic in the photomask data read by the data reading unit 11a, but this is not limited to this. An image may be generated from the coordinates of each graphic in the photomask data read by the data reading unit 11a, and the code shape may be recognized and analyzed from the generated image.

The technical features (constituent elements) described in each embodiment can be combined with each other, and by combining them, new technical features can be formed.
The embodiments disclosed herein are to be considered as illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above meaning, and is intended to include all modifications within the meaning and scope of the claims.

REFERENCE SIGNS LIST 1 display confirmation device 1P control program 1a portable storage medium 1b semiconductor memory 11 control unit 11a data reading unit 11b graphic display control unit 11c range designation unit 11d code decoding unit 11e text display control unit 12 main memory unit 13 auxiliary memory unit 131 photomask DB
14 VRAM
15 Input unit 16 Display unit 17 Communication unit 18 Reading unit B Bus

Claims (7)

Photomask data having a plurality of layer data each including a pattern figure and a code is read,
The pattern figures of each layer included in the photomask data and the display image of the code are displayed in an overlapping manner ;
acquiring range data indicating a display range of the code including a display image of the code of each layer displayed in an overlapping manner ;
For each layer, decipher the content indicated by the code based on the layer data and the range data;
An output program causing a computer to perform a process of outputting the contents decoded for each layer in association with information relating to each layer . 2. The output program according to claim 1 , wherein the code is a barcode, and the range data is line segment data along a crossing direction of the code. 3. The output program according to claim 2 , wherein the line segment data is coordinate values of two end points. 2. The output program according to claim 1 , wherein the code is a two-dimensional code, and the range data is rectangular data surrounding the code. 5. The output program according to claim 4 , wherein the range data is coordinate values of opposite vertices of a rectangle. a reading unit that reads photomask data having a plurality of layer data each including a pattern figure and a code ;
a first output unit that displays a display image of the pattern graphic of each layer included in the photomask data and a display image of the code in an overlapping manner ;
an acquisition unit that acquires range data indicating a display range of the code including a display image of the code of each layer displayed in an overlapping manner;
a decoding unit that decodes the content indicated by the code for each layer based on the layer data and the range data;
a second output unit that outputs the content decoded for each layer in association with information related to each layer . Photomask data having a plurality of layer data each including a pattern figure and a code is read,
The pattern figures of each layer included in the photomask data and the display image of the code are displayed in an overlapping manner ;
acquiring range data indicating a display range of the code including a display image of the code of each layer displayed in an overlapping manner ;
For each layer, decipher the content indicated by the code based on the layer data and the range data;
an output method, characterized in that a computer performs a process of outputting the content decoded for each layer in association with information relating to each layer .