JP7764140B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device for processing a workpiece.

The device chip manufacturing process uses a wafer on which devices are formed in multiple areas partitioned by multiple streets (planned division lines) arranged in a grid pattern. By dividing this wafer along the streets, multiple device chips, each equipped with a device, are obtained. The device chips are incorporated into various electronic devices such as mobile phones and personal computers.

A cutting device, for example, is used to divide the wafer. The cutting device is equipped with a chuck table that holds the workpiece and a cutting unit to which an annular cutting blade that cuts the workpiece is attached. The wafer is held by the chuck table, and the cutting blade is rotated to cut into the wafer, thereby cutting and dividing the wafer.

In recent years, development has also progressed on processes for dividing wafers using laser processing. Laser processing equipment is used for laser processing of wafers. Laser processing equipment is equipped with a chuck table that holds the workpiece and a laser irradiation unit that irradiates the workpiece with a laser beam.

For example, a laser processing device performs ablation processing on a wafer. Specifically, a laser beam is focused on the surface or inside of a wafer held by a chuck table and scanned along the streets, forming grooves (laser-processed grooves) in the wafer along the streets. When an external force is then applied to the wafer, the laser-processed grooves function as splitting starting points, and the wafer is split along the streets.

Various liquids are used when processing workpieces using processing equipment such as the cutting equipment and laser processing equipment mentioned above. For example, when processing a workpiece using a laser processing equipment, a protective film may be formed on the workpiece in advance to prevent debris generated by the laser processing from adhering to the workpiece. For example, a protective film is formed by dripping a solution (protective film material) containing a water-soluble resin onto the workpiece (see Patent Document 1). Then, after laser processing of the workpiece is completed, the protective film is removed along with the debris.

Japanese Patent Application Laid-Open No. 2006-140311

The processing device has a tank placement area where a tank containing a liquid used to process the workpiece is placed, and a supply pipe connected to the tank. The liquid is supplied from the tank to the workpiece via the supply pipe depending on the processing status of the workpiece. For example, the tank placement area of a laser processing device has a tank containing a protective film material used to form a protective film. The protective film material supplied from the tank is then applied to the workpiece, forming a protective film on the workpiece. The material of the protective film material is selected depending on the material of the workpiece, processing conditions, etc.

When the liquid stored in a tank is used up, the tank is replaced and a new tank filled with liquid is placed in the tank placement area. If an operator mistakenly places a tank containing a different liquid in the tank placement area, the unintended liquid will be supplied to the workpiece. This can result in poor processing or contamination of the workpiece, reducing processing quality.

The present invention was made in consideration of these problems, and aims to provide a processing device that can supply an appropriate liquid to a workpiece, etc.

According to one aspect of the present invention, there is provided a processing device for processing a workpiece, comprising: a supply pipe connected to a tank that contains a protective film material for forming a protective film on the workpiece and that delivers the protective film material; a reading unit that reads material information from an identification unit that is attached to the tank and contains material information indicating the material of the protective film material contained in the tank; and a determination unit that determines whether the protective film material contained in the tank is a specified protective film material based on the material information read by the reading unit, wherein the protective film material is a solution containing polyvinyl alcohol, polyethylene glycol, polyethylene oxide, or polyvinylpyrrolidone .

Preferably, the identification unit includes expiration date information indicating the expiration date of the protective film material, and the determination unit determines whether the expiration date of the protective film material stored in the tank has passed based on the expiration date information. Also, preferably, the identification unit includes manufacturer information indicating the manufacturer of the protective film material, and the determination unit determines whether the manufacturer of the protective film material stored in the tank is a predetermined manufacturer based on the manufacturer information. Also, preferably, the processing device further includes a laser irradiation unit that irradiates the workpiece with a laser beam. Also, preferably, the tank has an insertion port through which the supply pipe is inserted, the insertion port being blocked by a sheet bearing the identification unit, and the supply pipe is inserted into the insertion port by breaking the area of the sheet bearing the identification unit.

A processing device according to one aspect of the present invention includes a reading unit that reads liquid information from an identification unit attached to a tank, and a determination unit that determines whether the liquid contained in the tank is suitable for processing workpieces based on the liquid information read by the reading unit. This allows confirmation that the tank contains the intended, specified liquid, and supplies the appropriate liquid from the tank to the workpieces, etc.

FIG. FIG. FIG. 3A is a perspective view showing the liquid supply unit, and FIG. 3B is a partial cross-sectional front view showing the liquid supply unit. FIG. 2 is a partial cross-sectional front view showing a liquid supply unit that supplies a protective film material to a workpiece. FIG. 5A is a perspective view showing the tank, and FIG. 5B is a cross-sectional view showing the tank. FIG. 2 is a perspective view showing a tank arranged in a tank arrangement area. FIG. 2 is a block diagram showing a control unit. 10 is a flowchart showing the procedure for installing a tank and operating the processing device.

The present embodiment will now be described with reference to the accompanying drawings. First, an example configuration of a processing device according to this embodiment will be described. FIG. 1 is a perspective view showing a processing device 2. The processing device 2 is a laser processing device that performs laser processing on a workpiece. Note that in FIG. 1, the X-axis direction (processing feed direction, left-right direction, first horizontal direction) and the Y-axis direction (indexing feed direction, front-back direction, second horizontal direction) are mutually perpendicular. Furthermore, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis and Y-axis directions.

The processing device 2 includes a base 4 that supports and houses each of the components that make up the processing device 2. An opening 4a is provided at the front corner of the base 4. Inside the opening 4a, a cassette support table 6 is provided that moves (lifts and lowers) along the Z-axis direction by an elevation mechanism (not shown). A cassette 8 that can house multiple workpieces 11 to be processed by the processing device 2 is mounted on the cassette support table 6. Note that in Figure 1, the outline of the cassette 8 is indicated by a two-dot chain line.

Figure 2 is a perspective view showing the workpiece 11. For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface 11a and a back surface 11b that are generally parallel to each other. The workpiece 11 is divided into multiple rectangular regions by multiple streets (planned division lines) 13 arranged in a grid pattern so as to intersect with each other. Furthermore, devices 15, such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) devices, are formed on the front surface 11a side of each of the regions divided by the streets 13.

However, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer (substrate) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass (quartz glass, borosilicate glass, etc.), resin, ceramic, metal, etc. Furthermore, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the device 15.

The workpiece 11 is processed by the processing device 2 (see Figure 1) and divided along the streets 13 to produce multiple device chips, each of which includes a device 15. When the workpiece 11 is processed by the processing device 2, the workpiece 11 is supported by an annular frame 17.

The frame 17 is made of a metal such as SUS (stainless steel). A cylindrical opening 17a, with a diameter larger than that of the workpiece 11, is provided in the center of the frame 17, penetrating the frame 17 in the thickness direction. The workpiece 11 is placed inside the opening 17a.

Tape 19 is attached to the workpiece 11 and the frame 17. The tape 19 includes a circular film-like substrate and an adhesive layer (glue layer) provided on the substrate. For example, the substrate is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate. The adhesive layer is made of an epoxy-based, acrylic-based, or rubber-based adhesive. The adhesive layer may also be an ultraviolet-curing resin that hardens when exposed to ultraviolet light.

When the center of the tape 19 is attached to the back surface 11b of the workpiece 11 and the outer periphery of the tape 19 is attached to the frame 17, the workpiece 11 is supported by the frame 17 via the tape 19. The workpiece 11 is then stored in the cassette 8 (see Figure 1) while supported by the frame 17.

As shown in FIG. 1, a transport unit (transport mechanism) 10 that transports workpieces 11 is provided behind the opening 4a. The transport unit 10 is configured to be movable along the Y-axis direction, and transports workpieces 11 out of and into cassettes 8. A gripping portion 10a that grips the frame 17 is provided at the end of the transport unit 10 on the opening 4a side (cassette 8 side).

A temporary storage area 12 is provided between the opening 4a and the transport unit 10, where workpieces 11 removed from the cassette 8 or workpieces 11 to be loaded into the cassette 8 are temporarily stored. The temporary storage area 12 is provided with a pair of guide rails 14 arranged roughly parallel to each other along the Y-axis direction. The pair of guide rails 14 move toward and away from each other along the X-axis direction, sandwiching the frame 17 between them to align the workpieces 11.

A transport unit (transport mechanism) 16 that transports the workpiece 11 is provided near the temporary placement area 12. For example, the transport unit 16 includes multiple suction pads that hold the upper surface of the frame 17 by suction.

A rectangular opening 4b is provided to the side of opening 4a, with its longitudinal direction aligned with the X-axis direction. A moving unit (moving mechanism) 18 equipped with a flat moving table 18a is provided inside opening 4b. For example, moving unit 18 is a ball screw-type moving mechanism equipped with a ball screw (not shown) arranged along the X-axis direction, and moves moving table 18a along the X-axis direction. In addition, accordion-shaped dust-proof and drip-proof covers 20 that expand and contract along the X-axis direction are provided on both sides of moving table 18a to cover the components of moving unit 18.

A chuck table (holding table) 22 that holds the workpiece 11 is provided on the moving table 18a. The upper surface of the chuck table 22 is a flat surface that is roughly parallel to the horizontal direction (XY plane direction) and forms a holding surface 22a that holds the workpiece 11. The holding surface 22a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), etc. provided inside the chuck table 22. In addition, multiple clamps 24 that grip and secure the frame 17 are provided around the periphery of the chuck table 22.

The moving unit 18 moves the chuck table 22 together with the moving table 18a along the X-axis direction. This positions the chuck table 22 in a transfer area A where the workpiece 11 is transferred and in a processing area B where the workpiece 11 is processed. The chuck table 22 is also connected to a rotational drive source (not shown), such as a motor, that rotates the chuck table 22 around a rotation axis that is generally parallel to the Z-axis direction.

A laser irradiation unit 26 that irradiates a laser beam is provided in the processing area B. The laser irradiation unit 26 includes a laser oscillator (not shown) such as a YAG laser, a _YVO4 laser, or a YLF laser, and a head 28 arranged above the chuck table 22. The head 28 has a built-in optical system that guides the pulsed laser beam emitted from the laser oscillator to the workpiece 11, and the optical system includes optical elements such as a condenser lens that focuses the laser beam. The laser irradiation unit 26 irradiates the workpiece 11 held by the chuck table 22 with the laser beam, thereby performing laser processing on the workpiece 11.

A movement unit (movement mechanism, not shown) that moves the head 28 along the Y-axis direction is connected to the laser irradiation unit 26. For example, the movement unit is a ball screw-type movement mechanism equipped with a ball screw arranged along the Y-axis direction. This movement unit controls the position of the head 28 in the Y-axis direction, and adjusts the focusing position of the laser beam in the Y-axis direction.

An imaging unit 30 is provided at a position overlapping the movement path of the chuck table 22 (between the transport area A and the processing area B) to capture images of the workpiece 11 held by the chuck table 22. For example, the imaging unit 30 may include a visible light camera equipped with an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera equipped with an imaging element that receives infrared light and converts it into an electrical signal. The images captured by the imaging unit 30 are used to align the workpiece 11 with the head 28 of the laser irradiation unit 26, etc.

A circular opening 4c is provided behind the chuck table 22. A liquid supply unit 32 is provided inside the opening 4c to supply liquid to the workpiece 11. For example, the liquid supply unit 32 forms a protective film on the workpiece 11 by supplying a protective film material (protective film liquid) to the workpiece 11. The liquid supply unit 32 also cleans the workpiece 11 by supplying a cleaning liquid to the workpiece 11. Details of the liquid supply unit 32 will be described later.

Above the liquid supply unit 32, a transport unit (transport mechanism) 34 is provided to transport the workpiece 11 between the chuck table 22 and the liquid supply unit 32. For example, the transport unit 34 includes multiple suction pads that hold the upper surface of the frame 17 by suction.

A support stand 36 is provided behind the processing area B, and a display unit (display unit, display device) 38 is mounted on the support stand 36. The display unit 38 is made up of various displays and displays various information related to the processing device 2. In addition, an input unit (input unit, input device) 40 is provided at the front end of the base 4 for inputting various information into the processing device 2. The input unit 40 may be an operation panel with multiple operation keys, a mouse, a keyboard, or the like.

The processing device 2 may also be equipped with a touch panel that functions as a user interface. In this case, the touch panel functions as the display unit 38 and the input unit 40. The operator can then input information such as processing conditions into the processing device 2 by touching the touch panel while referring to the operation screen displayed on the touch panel.

The processing device 2 also has a tank placement area 42 in which a tank (container) 44 is placed. For example, a space capable of accommodating the tank 44 is provided at the rear end of the base 4, and this space corresponds to the tank placement area 42. However, there are no restrictions on the form of the tank placement area 42 as long as it is possible to place the tank 44.

The tank 44 contains the liquid used in the processing device 2 and is connected to the processing device 2. For example, the tank 44 stores a liquid (protective film material) used to form a protective film on the workpiece 11. Details of the tank 44 will be described later.

Each component of the processing device 2 (cassette support table 6, transport unit 10, guide rails 14, transport unit 16, moving unit 18, chuck table 22, clamp 24, laser irradiation unit 26, imaging unit 30, liquid supply unit 32, transport unit 34, display unit 38, input unit 40, etc.) is connected to a control unit (control unit, control device) 46. The control unit 46 controls the operation of the processing device 2 by generating control signals that control the operation of each component of the processing device 2.

For example, the control unit 46 is configured by a computer. Specifically, the control unit 46 is configured to include a processor such as a CPU (Central Processing Unit) that performs calculations necessary for the operation of the processing device 2, and memory such as a ROM (Read Only Memory) or RAM (Random Access Memory) that stores various information (data, programs, etc.) used in the operation of the processing device 2.

When processing the workpiece 11 with the processing device 2, the transport unit 10 first moves toward the cassette 8 and grips the end of the frame 17 stored in the cassette 8 with the gripping portion 10a. The transport unit 10 then moves away from the cassette 8 along the Y-axis direction. This causes the workpiece 11 to be pulled out of the cassette 8 and placed on the pair of guide rails 14. The pair of guide rails 14 then approach each other while supporting the frame 17 from below, sandwiching the frame 17 between them. This aligns the workpiece 11.

Next, the frame 17 is held by suction by the transport unit 16, and the workpiece 11 is transported to the liquid supply unit 32. Then, a protective film is formed by the liquid supply unit 32 to cover the surface 11a side (device 15 side, see Figure 2) of the workpiece 11.

Next, the frame 17 is held by suction by the transport unit 34, and the workpiece 11 is transported from the liquid supply unit 32 to the chuck table 22 positioned in transport area A. The workpiece 11 is then placed on the holding surface 22a of the chuck table 22 via tape 19. The frame 17 is also fixed in place by multiple clamps 24. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 22a, the workpiece 11 is held by suction by the chuck table 22 via the tape 19.

Next, the workpiece 11 is processed by the laser irradiation unit 26. Specifically, the chuck table 22 holding the workpiece 11 is positioned in the processing area B by the movement unit 18. Then, a laser beam is irradiated from the laser irradiation unit 26 onto the workpiece 11, and laser processing is performed on the workpiece 11.

For example, a laser beam from the laser irradiation unit 26 is irradiated along the street 13 (see Figure 2) onto the surface 11a of the workpiece 11, and the workpiece 11 is subjected to ablation processing. As a result, a linear groove (laser-processed groove) is formed along the street 13 on the surface 11a of the workpiece 11.

Next, the chuck table 22 is positioned in the transfer area A by the moving unit 18. The frame 17 is held by suction by the transfer unit 34, and the processed workpiece 11 is transferred from the chuck table 22 to the liquid supply unit 32. The liquid supply unit 32 then cleans the workpiece 11. After cleaning, the workpiece 11 is transported onto the pair of guide rails 14 by the transfer unit 16, and then gripped by the gripping portion 10a of the transfer unit 10 and stored in the cassette 8.

As described above, the liquid supply unit 32 forms a protective film on the workpiece 11 and cleans the workpiece 11. That is, the liquid supply unit 32 functions as a protective film forming unit and a cleaning unit. Figure 3(A) is a perspective view showing the liquid supply unit 32, and Figure 3(B) is a partially cross-sectional front view showing the liquid supply unit 32. Note that some components of the liquid supply unit 32 are not shown in Figure 3(B).

The liquid supply unit 32 includes a spinner table 50 that holds and rotates the workpiece 11. The top surface of the spinner table 50 is a flat surface that is roughly parallel to the horizontal direction, and forms a holding surface 50a that holds the workpiece 11. The holding surface 50a is connected to a suction source (not shown), such as an ejector, via a flow path (not shown), a valve (not shown), etc., provided inside the spinner table 50.

A rotary drive source 52, such as a motor, is connected to the spinner table 50 to rotate the spinner table 50. The rotary drive source 52 has a cylindrical spindle (output shaft) 54 arranged vertically, and the upper end of the spindle 54 is connected to the center of the underside of the spinner table 50. When the spindle 54 is rotated, the spinner table 50 rotates around a rotation axis that is approximately perpendicular to the holding surface 50a.

As shown in Figure 3 (A), an elevation unit (elevating mechanism) 56 is connected to the rotary drive source 52. The elevation unit 56 includes multiple air cylinders 58 fixed to the rotary drive source 52. Each air cylinder 58 has a cylindrical support leg 60 attached to its lower end, supporting the air cylinder 58. When the multiple air cylinders 58 are operated simultaneously, the spinner table 50 and rotary drive source 52 move up and down vertically.

A number of clamps 62 are provided around the periphery of the spinner table 50 to grip and secure the frame 17 supporting the workpiece 11. When the spinner table 50 is rotated by the rotary drive source 52, centrifugal force causes the lower parts (weight parts) of the clamps 62 to move radially outward from the spinner table 50, and the upper parts (gripping parts) of the clamps 62 to move radially inward from the spinner table 50.

The spinner table 50 and clamp 62 are surrounded by a liquid receiving member 64 formed in a hollow, cylindrical shape. Specifically, the liquid receiving member 64 comprises an annular outer wall 64a that surrounds the spinner table 50 and clamp 62, an annular bottom surface 64b that protrudes radially inward of the liquid receiving member 64 from the lower end of the outer wall 64a, and an annular inner wall 64c that protrudes upward from the radially inner end of the bottom surface 64b. The inside of the inner wall 64c corresponds to an insertion opening 64d through which the spindle 54 is inserted.

In addition, an annular cover 66 is provided inside the liquid receiving member 64, covering the upper end of the inner wall 64c. The cover 66 surrounds the spindle 54 and is positioned so as to overlap the inner wall 64c of the liquid receiving member 64. By covering the upper part of the inner wall 64c with the cover 66 (see Figure 4), it is possible to prevent liquid present inside the liquid receiving member 64 from leaking out of the liquid receiving member 64 through the insertion port 64d.

As shown in FIG. 3(A), a drainage port 68 is provided on the bottom surface 64b of the liquid receiving member 64, and a drainage path 70 is connected to the drainage port 68. Liquid stored in the liquid receiving member 64 is discharged to the outside of the liquid receiving member 64 via the drainage port 68 and the drainage path 70.

In addition, a protective film material supply unit 72 that supplies protective film material to the workpiece 11 and a cleaning liquid supply unit 74 that supplies cleaning liquid to the workpiece 11 are provided inside the liquid receiving member 64. The protective film material supply unit 72 and the cleaning liquid supply unit 74 are arranged so as to sandwich the spinner table 50.

The protective film material supply unit 72 includes a hollow cylindrical arm 72a and a protective film material supply nozzle 72b connected to the tip of the arm 72a. A rotary drive source 72c (see Figure 3(B)), such as a motor, is connected to the arm 72a. By rotating the arm 72a using the rotary drive source 72c, the protective film material supply nozzle 72b can be positioned between a supply position where it overlaps the spinner table 50 and a retracted position where it does not overlap the spinner table 50.

The protective film material supply unit 72 is connected to a protective film material supply source 78, which supplies protective film material, via a flow path 76 composed of a tube, pipe, etc. The protective film material is supplied from the protective film material supply source 78 to the arm 72a via the flow path 76, and is then dripped from the protective film material supply nozzle 72b onto the holding surface 50a of the spinner table 50.

The cleaning liquid supply unit 74 includes a hollow, cylindrical arm 74a and a cleaning liquid supply nozzle 74b connected to the tip of the arm 74a. A rotary drive source 74c (see FIG. 3(B)), such as a motor, is connected to the arm 74a. By rotating the arm 74a using the rotary drive source 74c, the cleaning liquid supply nozzle 74b can be positioned between a supply position where it overlaps the spinner table 50 and a retracted position where it does not overlap the spinner table 50.

The cleaning liquid supply unit 74 is connected to a cleaning liquid supply source 82, which supplies cleaning liquid, via a flow path 80 composed of tubes, pipes, etc. Cleaning liquid supplied from the cleaning liquid supply source 82 to the arm 74a via the flow path 80 is dripped from the cleaning liquid supply nozzle 74b onto the holding surface 50a of the spinner table 50.

Figure 4 is a partial cross-sectional front view showing the liquid supply unit 32 that supplies protective film material (protective film liquid) 84 to the workpiece 11. When forming a protective film on the workpiece 11, the workpiece 11 is first held by the spinner table 50. For example, the workpiece 11 is placed on the spinner table 50 with the front surface 11a exposed upward and the back surface 11b facing the holding surface 50a. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 50a, the workpiece 11 is suction-held by the spinner table 50 via the tape 19 (see Figure 3(A)).

Then, the spinner table 50 is lowered by the lifting unit 56 (see Figure 3(A)). This positions the workpiece 11 inside the liquid receiving member 64, and the top of the insertion opening 64d is covered by the cover 66.

Next, the protective film material supply nozzle 72b is positioned directly above the holding surface 50a (supply position). Then, while the spinner table 50 is rotated by the rotary drive source 52, protective film material 84 is dispensed from the protective film material supply nozzle 72b. As the spinner table 50 rotates, the upper part (gripping portion) of the clamp 62 moves radially inward of the spinner table 50, and the frame 17 is gripped by the clamp 62.

The protective film material 84 may be, for example, a solution containing a water-soluble resin. Examples of water-soluble resins include PVA (polyvinyl alcohol), PEG (polyethylene glycol), PEO (polyethylene oxide), and PVP (polyvinylpyrrolidone).

The protective film material 84 dropped onto the center of the workpiece 11 flows along the surface 11a and reaches the outer edge of the workpiece 11. As a result, the protective film material 84 is applied over the entire surface 11a of the workpiece 11. The protective film material 84 is then dried to form a protective film that covers the surface 11a side of the workpiece 11. Note that if a solution containing a water-soluble resin is used as the protective film material 84, a protective film made of the water-soluble resin is formed on the workpiece 11.

When the protective film is formed, the outer wall 64a of the liquid receiving member 64 prevents the protective film material 84 from scattering, and any protective film material 84 not used as a protective film is stored at the bottom of the liquid receiving member 64. The protective film material 84 stored in the liquid receiving member 64 is discharged to the outside of the liquid receiving member 64 via the drain port 68 and drain path 70.

The workpiece 11 with the protective film formed thereon is held by the chuck table 22 (see Figure 1) and processed by the laser irradiation unit 26 (see Figure 1). Specifically, a laser beam emitted from the laser irradiation unit 26 is irradiated onto the surface 11a of the workpiece 11 through the protective film. This performs laser processing such as ablation on the surface 11a of the workpiece 11.

When the workpiece 11 is irradiated with a laser beam, melted material (debris) from the workpiece 11 is generated and scattered. However, because a protective film is formed on the surface 11a of the workpiece 11, debris is less likely to adhere to the surface 11a of the workpiece 11. This prevents contamination of the workpiece 11.

Once processing of the workpiece 11 is complete, the workpiece 11 is cleaned by the liquid supply unit 32. When cleaning the workpiece 11, the protective film material supply nozzle 72b is positioned in a retracted position, and the cleaning liquid supply nozzle 74b is positioned directly above the holding surface 50a (supply position). Cleaning liquid is then supplied from the cleaning liquid supply nozzle 74b toward the rotating workpiece 11, thereby cleaning the workpiece 11. The cleaning liquid may be a liquid such as pure water, or a mixed fluid obtained by mixing a liquid (such as pure water) with a gas (such as air).

If the protective film formed on the workpiece 11 is made of a water-soluble resin, the protective film can be easily removed by supplying a cleaning liquid. This simplifies the process of removing the protective film. In addition, any foreign matter (debris, etc.) adhering to the protective film can be removed along with the protective film.

In this embodiment, a tank 44 (see Figure 1) is used as the protective film material supply source 78. Specifically, the tank 44 containing the protective film material 84 is placed in the tank placement area 42 (see Figure 1) and connected to the flow path 76. The protective film material 84 is then supplied from the tank 44 to the protective film material supply unit 72 via the flow path 76.

Figure 5(A) is a perspective view showing the tank 44, and Figure 5(B) is a cross-sectional view showing the tank 44. The tank 44 is formed in a hollow rectangular parallelepiped shape and contains a liquid 90 inside. For example, the tank 44 contains a protective film material 84 (see Figure 4) used to form a protective film as the liquid 90. There are no limitations on the shape, size, or material of the tank 44.

As shown in FIG. 5(B), the tank 44 is provided with an insertion port 44a that connects the outside and inside of the tank 44. For example, the insertion port 44a is formed so as to penetrate the top wall of the tank 44. A supply pipe 92 that delivers the liquid 90 contained in the tank 44 is inserted into the insertion port 44a of the tank 44.

The supply pipe 92 is a piping such as a tube or pipe built into the processing device 2 (see Figure 1) and corresponds to part of the flow path 76 (see Figure 3(B)) connected to the liquid supply unit 32. For example, the supply pipe 92 is provided in the tank arrangement area 42 (see Figure 1), and its tip is inserted into the insertion port 44a of the tank 44. This connects the processing device 2 and the tank 44.

Furthermore, as shown in FIG. 5(A), the tank 44 is provided with an identification unit 94 containing information (liquid information) about the liquid 90 contained in the tank 44. For example, the identification unit 94 is a one-dimensional code (barcode) or two-dimensional code having a pattern corresponding to the liquid information. If the identification unit 94 is a two-dimensional code, the two-dimensional code may be a matrix type or a stack type.

The liquid information includes information (material information) indicating the material (type) of the liquid 90. For example, the name of the material of the liquid 90, a code (character string) corresponding to the material of the liquid 90, the product number of the liquid 90, etc. are used as material information. The liquid information may also include information indicating the expiration date of the liquid 90 (expiration date information), information indicating the manufacturer of the liquid 90 (manufacturer information), etc.

There are no limitations on the method for attaching the identification section 94 to the tank 44. For example, a sheet (tape) 96 bearing a one-dimensional or two-dimensional code as the identification section 94 is attached to the tank 44. In this case, it is preferable that the sheet 96 be attached so that the insertion opening 44a is covered by the sheet 96 and the identification section 94 overlaps with the insertion opening 44a. Alternatively, the identification section 94 may be printed directly on the tank 44.

The tank 44 with the identification part 94 is placed in the tank placement area 42. Figure 6 is a perspective view showing the tank 44 placed in the tank placement area 42. For example, a rectangular parallelepiped opening 4d is provided at the corner of the base 4, extending inward from the side of the base 4. The shape and size of the opening 4d are set so that the tank 44 can be placed in the opening 4d.

The base 4 includes mutually perpendicular side walls 4e, 4f exposed inside the opening 4d, and a top wall 4g formed horizontally and connected to the side walls 4e, 4f. The space surrounded by the side walls 4e, 4f and the top wall 4g corresponds to the tank arrangement area 42. The tank 44 is housed in the tank arrangement area 42 so that it overlaps with the top wall 4g. Although not shown in Figure 6, a supply pipe 92 (see Figures 5(A) and 5(B)) is provided in the tank arrangement area 42.

The tank arrangement area 42 is also provided with a reading section (reading unit) 98 that reads liquid information from the identification section 94. The type of reading section 98 is selected depending on the configuration of the identification section 94. For example, if the identification section 94 is a one-dimensional code, a barcode reader is used as the reading section 98. If the identification section 94 is a two-dimensional code, a two-dimensional code reader is used as the reading section 98.

When the identification unit 94 is attached to the top surface of the tank 44, the reading unit 98 is provided on the top wall 4g of the base 4. When the tank 44 is properly installed in the tank placement area 42, the identification unit 94 is positioned directly below the reading unit 98, and the information (liquid information) contained in the identification unit 94 is read by the reading unit 98. However, the position of the reading unit 98 can be changed as appropriate depending on the position of the identification unit 94. For example, when the identification unit 94 is attached to the side of the tank 44, the reading unit 98 may be located on the side walls 4e and 4f of the base 4.

When the liquid information contained in the identification unit 94 is read by the reading unit 98, the liquid information is input to the control unit 46. Then, based on the liquid information, the control unit 46 determines whether the tank 44 located in the tank placement area 42 is an appropriate tank.

Figure 7 is a block diagram showing the control unit 46. In addition to a block showing the functional configuration of the control unit 46, Figure 7 also shows a portion of the tank 44 and the reading unit 98.

The control unit 46 includes a processing unit 100 and a memory unit 110. The processing unit 100 processes information (signals, data, etc.) input from the outside, and generates and outputs various types of information (signals, data, etc.) to the outside. The memory unit 110 stores information (data, programs, etc.) used for processing by the processing unit 100.

The processing unit 100 includes an input unit 102 to which liquid information is input. When the identification unit 94 attached to the tank 44 is read by the reading unit 98, the liquid information contained in the identification unit 94 is input to the input unit 102. The liquid information input to the input unit 102 may be stored in the memory unit 110 together with the time when the identification unit 94 was read. This allows a log of the liquid information to be accumulated in the memory unit 110.

The processing unit 100 also includes a determination unit 104 that determines, based on the liquid information read by the reading unit 98, whether the liquid 90 (see FIG. 5B) contained in the tank 44 arranged in the tank arrangement area 42 is a liquid suitable for processing the workpiece 11. Furthermore, the memory unit 110 includes a reference information storage unit 112 that stores reference information used to determine the liquid information. The determination unit 104 then compares the liquid information input from the input unit 102 with the reference information previously stored in the reference information storage unit 112 to determine whether the liquid 90 contained in the tank 44 is a liquid suitable for processing the workpiece 11.

For example, the liquid information input to the determination unit 104 includes information (material information) indicating the material of the liquid 90 contained in the tank 44. Furthermore, the reference information stored in the reference information storage unit 112 includes information (reference material information) indicating the material of the protective film material 84 (see Figure 4) to be supplied to the workpiece 11. Based on the material information, the determination unit 104 then determines whether the liquid 90 contained in the tank 44 is the specified protective film material 84 to be supplied to the workpiece 11.

Specifically, the determination unit 104 determines whether the material information input from the input unit 102 matches the reference material information input from the reference information storage unit 112. If the material information and the reference material information match, it is determined that the intended specific protective film material 84 is contained in the tank 44. On the other hand, if the material information and the reference material information do not match, it is determined that the intended specific protective film material 84 is not contained in the tank 44.

However, the method for determining whether the liquid 90 contained in the tank 44 is suitable for processing the workpiece 11 is not limited to the above. For example, if the liquid information includes expiration date information for the liquid 90, it may be determined whether the expiration date for use of the liquid 90 contained in the tank 44 has passed.

Specifically, expiration information (expiration date) for the liquid 90 is input from the input unit 102 to the determination unit 104, and the current date (installation date of the tank 44) stored in the reference information storage unit 112 is input to the determination unit 104. The determination unit 104 then compares the expiration date for the liquid 90 with the installation date of the tank 44 to determine whether the expiration date for the liquid 90 has passed.

Furthermore, if the liquid information includes manufacturer information for the liquid 90, it may be determined whether the manufacturer of the liquid 90 contained in the tank 44 is a specified manufacturer. In this case, the manufacturer information (manufacturer code) for the liquid 90 is input from the input unit 102 to the determination unit 104, and a reference manufacturer code (a code indicating a specified manufacturer) stored in the reference information storage unit 112 is input to the determination unit 104. The determination unit 104 then determines whether the manufacturer code for the liquid 90 matches the reference manufacturer code.

The processing unit 100 also includes a drive unit 106 that controls the operation of each component of the processing device 2. The result of the determination by the determination unit 104 is input to the drive unit 106. The drive unit 106 then generates a control signal to be output to each component of the processing device 2 based on the result of the determination by the determination unit 104.

If it is determined that the liquid 90 contained in the tank 44 is not suitable for processing the workpiece 11, the drive unit 106 may prohibit the use of the liquid 90 in the processing device 2. For example, if it is determined that the tank 44 does not contain the specified protective film material 84 (see Figure 4), the drive unit 106 outputs a control signal to the liquid supply unit 32 to stop the operation of the liquid supply unit 32 until an appropriate tank 44 is installed in the tank arrangement area 42. This prevents the liquid 90 from being unintentionally supplied to the workpiece 11.

The drive unit 106 also outputs a control signal to the display unit 38 (see Figure 1), causing the display unit 38 to display the result of the determination. For example, the display unit 38 displays a message indicating whether the liquid 90 contained in the tank 44 is a liquid (such as a protective film material) suitable for treating the workpiece 11. At this time, the display unit 38 may also simultaneously display the name of the material of the liquid 90 contained in the tank 44, its expiration date, the manufacturer's name, etc.

Furthermore, if the drive unit 106 determines that the liquid 90 contained in the tank 44 is not suitable for processing the workpiece 11, the drive unit 106 may cause the components of the processing device 2 to issue a warning (error). For example, the drive unit 106 may cause the display unit 38 to display a warning message. Also, if the processing device 2 is equipped with a speaker, the drive unit 106 may cause the speaker to issue a sound (warning sound) or message (warning message) to notify the warning.

Next, a specific example of the operation method of the processing device 2 will be described. Figure 8 is a flowchart showing the procedure for installing the tank 44 and operating the processing device 2. Below, we will mainly refer to Figures 7 and 8 to describe an example of determining whether the liquid 90 contained in the tank 44 is a predetermined protective film material that has been selected in advance.

First, liquid information is read from the identifier 94 attached to the tank 44 (reading step). Specifically, the tank 44 is placed in the tank arrangement area 42 (see Figures 1 and 6) (step S1). Then, the liquid information contained in the identifier 94 attached to the tank 44 is read by the reading unit 98 (step S2). Note that the liquid information includes information indicating the material of the liquid 90 contained in the tank 44 (material information). Then, the liquid information read by the reading unit 98 is output from the reading unit 98 to the control unit 46.

Next, based on the liquid information read by the reading unit 98, it is determined whether the liquid 90 contained in the tank 44 is suitable for processing the workpiece 11 (determination step). Specifically, the determination unit 104 determines whether the material information input from the input unit 102 matches the reference material information input from the reference information storage unit 112. This determines whether the liquid 90 in the tank 44 is a predetermined protective film material that has been selected in advance (step S3).

If it is determined that the liquid 90 in the tank 44 is the specified protective film material (YES in step S3), a protective film is formed on the workpiece 11 using the liquid 90 (protective film formation step). Specifically, first, the processing device 2 is permitted to form a protective film (step S4). This puts the liquid supply unit 32 into an operational state.

The supply pipe 92 is then inserted into the tank 44 (step S5). Specifically, as shown in Figures 5(A) and 5(B), the supply pipe 92 is inserted into the supply pipe 92 insertion port 44a. This connects the processing device 2 and the tank 44.

A sheet 96 with an identification portion 94 attached is attached to the tank 44. For example, the sheet 96 is attached so that the insertion opening 44a is blocked by the sheet 96 and the identification portion 94 overlaps the insertion opening 44a. In this case, when the supply pipe 92 is inserted into the insertion opening 44a, the area of the sheet 96 with the identification portion 94 attached is broken by the tip of the supply pipe 92. This destroys the identification portion 94, preventing it from being reused after the tank 44 is opened.

Furthermore, as shown in Figures 5(A) and 5(B), it is preferable that the tip surface of the supply pipe 92 be inclined with respect to the width direction (radial direction) of the supply pipe 92. This forms an acute angle at the tip of the supply pipe 92, making it easier to tear the sheet 96.

Then, a protective film is formed on the workpiece 11 using liquid 90 (protective film material) contained in tank 44 (step S6, see Figure 4). Then, the workpiece 11 with the protective film formed thereon is transported to the chuck table 22 (see Figure 1) and processed by the laser irradiation unit 26 (see Figure 1).

On the other hand, if it is determined that the liquid 90 in the tank 44 is not the specified protective film material (NO in step S3), the processing device 2 is prohibited from forming a protective film (step S7). This stops the liquid supply unit 32, and the liquid supply unit 32 is no longer able to form a protective film on the workpiece 11.

The processing device 2 also issues a warning (warning step, step S8). Specifically, a warning message is displayed on the display unit 38 (see FIG. 1), and a warning sound or message is emitted from the speaker (not shown). This notifies the operator that an inappropriate tank 44 has been placed in the tank placement area 42, and the worker places an appropriate tank 44 in the tank placement area 42 (step S1).

The above-described operating method of the processing device 2 is realized by the control unit 46 controlling the operation of each component of the processing device 2. Specifically, the memory unit 110 of the control unit 46 stores programs for causing the processing device 2 to execute steps such as a reading step, a determination step, a protective film formation step, and a warning step. The control unit 46 then reads and executes the programs from the memory unit 110, and outputs control signals to each component of the processing device 2. As a result, the processing device 2 automatically performs steps such as reading liquid information, determining the liquid 90, forming a protective film, and issuing a warning.

As described above, the processing device 2 according to this embodiment includes a reading unit 98 that reads liquid information from the identification unit 94 attached to the tank 44, and a control unit 46 (determination unit 104) that determines whether the liquid 90 contained in the tank 44 is suitable for processing the workpiece 11 based on the liquid information read by the reading unit 98. This allows confirmation that the tank 44 contains the intended specified liquid, and the appropriate liquid is supplied from the tank 44 to the workpiece 11, etc.

In the above embodiment, an example was described in which liquid information was read from the identification unit 94 (see Figures 5(A) to 7) configured as a one-dimensional code or two-dimensional code, but there are no limitations on the manner in which liquid information may be read. For example, liquid information may be read using RFID (Radio Frequency Identification).

Specifically, an RF (Radio Frequency) tag can be attached to the tank 44 as the identification unit 94. The RF tag has a control circuit including an IC and memory, and an antenna used to send and receive information. The RF tag's memory stores liquid information, including material information, expiration date information, manufacturer information, etc. An RFID reader is used as the reading unit 98 (see Figures 6 and 7). The liquid information stored in the RF tag is read by the RFID reader and output to the control unit 46.

Furthermore, in the above embodiment, the liquid 90 contained in the tank 44 is a protective film material. However, there are no restrictions on the liquid 90 contained in the tank 44, as long as it is a liquid used to process the workpiece 11 in the processing device 2 (see Figure 1). For example, the tank 44 may contain a chemical liquid or cleaning liquid used in the processing device 2.

Furthermore, in the above embodiment, an example was described in which the processing device 2 was a laser processing device equipped with a laser irradiation unit 26, but there are no limitations on the type of processing device 2. For example, the processing device 2 may be a cutting device equipped with a cutting unit that cuts the workpiece 11, a grinding device equipped with a grinding unit that grinds the workpiece 11, a polishing device equipped with a polishing unit that polishes the workpiece 11, etc.

The cutting unit of the cutting device has a spindle, and an annular cutting blade is attached to the tip of the spindle. The cutting blade is rotated and cuts into the workpiece 11, thereby cutting the workpiece 11. The grinding unit of the grinding device has a spindle, and an annular grinding wheel including a grinding stone is attached to the tip of the spindle. The grinding wheel is rotated and the grinding stone is brought into contact with the workpiece 11, thereby grinding the workpiece 11. The polishing unit of the polishing device has a spindle, and a disc-shaped polishing pad is attached to the tip of the spindle. The polishing pad is rotated and brought into contact with the workpiece 11, thereby polishing the workpiece 11.

In addition, the structure, methods, etc. related to this embodiment can be modified as appropriate without departing from the scope of the present invention.

11 Workpiece 11a Front surface 11b Back surface 13 Street (planned division line)
15 Device 17 Frame 17a Opening 19 Tape 2 Processing device 4 Base 4a, 4b, 4c, 4d Opening 4e, 4f Side wall 4g Upper wall 6 Cassette support base 8 Cassette 10 Transport unit (transport mechanism)
10a: gripping portion 12: temporary placement area 14: guide rail 16: transport unit (transport mechanism)
18. Moving unit (moving mechanism)
18a Moving table 20 Dustproof/waterproof cover 22 Chuck table (holding table)
22a Holding surface 24 Clamp 26 Laser irradiation unit 28 Head 30 Imaging unit 32 Liquid supply unit 34 Transport unit (transport mechanism)
36 Support stand 38 Display unit (display unit, display device)
40 Input section (input unit, input device)
42 Tank arrangement area 44 Tank (container)
44a Insertion port 46 Control unit (control unit, control device)
50 Spinner table 50a Holding surface 52 Rotation drive source 54 Spindle (output shaft)
56 Lifting unit (lifting mechanism)
58 Air cylinder 60 Support leg 62 Clamp 64 Liquid receiving member 64a Outer wall 64b Bottom surface 64c Inner wall 64d Insertion port 66 Cover 68 Drainage port 70 Drainage path 72 Protective film material supply unit 72a Arm 72b Protective film material supply nozzle 72c Rotation drive source 74 Cleaning liquid supply unit 74a Arm 74b Cleaning liquid supply nozzle 74c Rotation drive source 76 Flow path 78 Protective film material supply source 80 Flow path 82 Cleaning liquid supply source 84 Protective film material (protective film liquid)
90 Liquid 92 Supply pipe 94 Identification part 96 Sheet (tape)
98 Reading unit
100 Processing unit 102 Input unit 104 Determination unit 106 Driving unit 110 Storage unit 112 Reference information storage unit

Claims (5)

A processing device for processing a workpiece,
a supply pipe connected to a tank containing a protective film material for forming a protective film on the workpiece, the supply pipe supplying the protective film material;
a reading unit that reads material information from an identification unit that includes material information indicating the material of the protective film material attached to the tank and contained in the tank;
a determination unit that determines whether the protective film material contained in the tank is a predetermined protective film material based on the material information read by the reading unit ,
The processing device is characterized in that the protective film material is a solution containing polyvinyl alcohol, polyethylene glycol, polyethylene oxide, or polyvinylpyrrolidone . the identification portion includes expiration date information indicating an expiration date of the protective film material;
2. The processing device according to claim 1, wherein the determining unit determines whether the expiration date of the protective film material stored in the tank has passed, based on the expiration date information. the identification portion includes manufacturer information indicating a manufacturer of the protective film material,
3. The processing device according to claim 1, wherein the determining unit determines whether the protective film material stored in the tank is manufactured by a predetermined manufacturer based on the manufacturer information. The processing device described in any one of claims 1 to 3, further comprising a laser irradiation unit that irradiates the workpiece with a laser beam. the tank has an insertion port into which the supply pipe is inserted;
the insertion opening is closed by a sheet having the identification part attached thereto;
5. The processing device according to claim 1, wherein the supply pipe is inserted into the insertion opening by tearing the area of the sheet where the identification part is attached.