JP7766141B2 - Method for manufacturing light-transmitting laminate - Google Patents
Method for manufacturing light-transmitting laminateInfo
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- JP7766141B2 JP7766141B2 JP2024102530A JP2024102530A JP7766141B2 JP 7766141 B2 JP7766141 B2 JP 7766141B2 JP 2024102530 A JP2024102530 A JP 2024102530A JP 2024102530 A JP2024102530 A JP 2024102530A JP 7766141 B2 JP7766141 B2 JP 7766141B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/023—Optical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
- G01N2201/108—Miscellaneous
- G01N2201/1087—Focussed scan beam, e.g. laser
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Laminated Bodies (AREA)
Description
本発明は、光透過性積層体の製造方法に関する。 The present invention relates to a method for manufacturing a light-transmitting laminate.
画像表示装置に適用される光透過性積層体(例えば、光学部材、光学積層体、光学フィルム、光透過性粘着シート)は、画像表示欠陥等を防止するために当該積層体内部の異物を排除する必要がある。そのため、このような光透過性積層体は、代表的には異物検査に供される。異物検査は、代表的には、光透過性積層体の長尺状のウェブを搬送しながら行われる透過検査であり、当該透過検査において異物および/または欠点は暗点として認識され得る。近年、画像表示装置に要求される表示性能が格段に高くなり、その結果、光透過性積層体の異物検査の精度についても格段に高いものが要求されるようになっている。具体的には、従来は50μm程度の異物および/または欠点を検出すれば許容されていたところ、10μm程度の異物および/または欠点を検出する必要が生じている。しかし、上記のような長尺状のウェブを搬送しながら行われる異物検査では、このように小さな異物および/または欠点を検出することはきわめて困難である。 Light-transmitting laminates (e.g., optical components, optical laminates, optical films, and light-transmitting adhesive sheets) used in image display devices require the removal of foreign matter from within the laminate to prevent image display defects and the like. Therefore, such light-transmitting laminates are typically subjected to foreign matter inspection. Foreign matter inspection is typically a transmission inspection performed while a long web of the light-transmitting laminate is being transported, and in this transmission inspection, foreign matter and/or defects can be recognized as dark spots. In recent years, the display performance required of image display devices has become significantly higher, resulting in significantly higher demands for the accuracy of foreign matter inspection of light-transmitting laminates. Specifically, while it was previously acceptable to detect foreign matter and/or defects of approximately 50 μm, it is now necessary to detect foreign matter and/or defects of approximately 10 μm. However, it is extremely difficult to detect such small foreign matter and/or defects in foreign matter inspections performed while a long web such as the one described above is being transported.
本発明は上記課題を解決するためになされたものであり、その主たる目的は、従来に比べて格段に微小な異物および/または欠点を検出し得る光透過性積層体を提供することにある。 The present invention was made to solve the above problems, and its main objective is to provide a light-transmitting laminate that can detect significantly smaller foreign particles and/or defects than conventional methods.
本発明の実施形態による光透過性積層体は、第1主面と第2主面とを有し;該第1主面側に剥離可能に仮着された少なくとも1つの反射性保護フィルムを含み;該反射性保護フィルムは、所定倍率の光学系の焦点を該第1主面の表面に合わせるときの照射光を反射し、かつ、検査光を透過する機能を有する。
1つの実施形態においては、上記反射性保護フィルムは以下の関係を満足する:
y≧0.0181x-11.142
ここで、xは650nm~800nmの波長領域での検出波長の絶対値であり、yは反射率の絶対値である。
1つの実施形態においては、上記光透過性積層体は、上記反射性保護フィルムの表面に剥離可能に仮着された表面保護フィルムをさらに含む。
1つの実施形態においては、上記光透過性積層体は、上記反射性保護フィルムの表面に形成されたハードコート層をさらに含む。
1つの実施形態においては、上記光透過性積層体は、枚葉で中空に固定された状態で、8μm~50μmサイズの欠点を検出する透過検査に用いられる。
1つの実施形態においては、上記光透過性積層体は、上記透過検査の検査後に検査済み領域を認識可能な認識手段が設けられている。
1つの実施形態においては、上記認識手段は、検査済み領域を包囲する直線または破線、クロスマーク、あるいは一定間隔のドットである。
A light-transmitting laminate according to an embodiment of the present invention has a first main surface and a second main surface; and includes at least one reflective protective film releasably and temporarily attached to the first main surface; the reflective protective film has the function of reflecting irradiated light when an optical system with a predetermined magnification is focused on the surface of the first main surface, and transmitting inspection light.
In one embodiment, the reflective protective film satisfies the following relationship:
y≧0.0181x-11.142
Here, x is the absolute value of the detection wavelength in the wavelength range of 650 nm to 800 nm, and y is the absolute value of the reflectance.
In one embodiment, the light-transmitting laminate further includes a surface protection film temporarily and releasably attached to the surface of the reflective protection film.
In one embodiment, the light-transmitting laminate further includes a hard coat layer formed on the surface of the reflective protective film.
In one embodiment, the optically transparent laminate is used for transmission inspection to detect defects of 8 μm to 50 μm in size while being fixed in a hollow state in a sheet form.
In one embodiment, the light-transmitting laminate is provided with a recognition means capable of recognizing an inspected area after the transmission inspection.
In one embodiment, the recognition means is a straight or dashed line, a cross mark, or regularly spaced dots surrounding the inspected area.
本発明の実施形態による光透過性積層体によれば、従来に比べて格段に微小な(例えば、8μmサイズ程度の)異物および/または欠点を検出することができる。 The optically transparent laminate according to an embodiment of the present invention makes it possible to detect foreign particles and/or defects that are significantly smaller (e.g., approximately 8 μm in size) than conventional methods.
以下、図面を参照して本発明の実施形態について説明するが、本発明はこれらの実施形態には限定されない。また、図面はすべて模式的に表されており、実際の状態を正確に描いたものではない。 Embodiments of the present invention will be described below with reference to the drawings, but the present invention is not limited to these embodiments. Furthermore, all drawings are schematic and do not accurately depict actual conditions.
A.光透過性積層体の検査方法の概略
本発明の実施形態による光透過性積層体の検査方法は、枚葉の光透過性積層体を中空に固定した状態で透過検査を行う。図1は、透過検査の一例を説明する概略側面図である。透過検査は、例えば、光学系を用いて、一対の支持部材20、20に横架された光透過性積層体10の画像を得ることを含む。光学系は、例えば、光透過性積層体10の一方の側(図示例では上方)に配され、光透過性積層体の画像を得る撮像素子30と;光透過性積層体10の他方の側(図示例では下方)に配され、光透過性積層体10を照射する照射光を発する光源40と;を含む。なお、撮像素子30が光透過性積層体10の下方に配され、光源40が光透過性積層体10の上方に配されてもよい。撮像素子30は、透過光(検査光)像を撮像し、当該撮像した画像において、異物および/または欠点(以下、文脈に応じて単に異物または欠点と称する場合がある)は暗点として認識され得る。透過検査のより具体的な実施形態については後述する。枚葉の光透過性積層体を中空に固定した状態で透過検査を行うことにより、光透過性積層体において8μm~50μmサイズ、好ましくは8μm~30μmサイズ、より好ましくは8μm~20μmサイズ、さらに好ましくは8μm~15μmサイズ、特に好ましくは約10μmサイズの欠点を検出することができる。従来、光学フィルムのような光透過性積層体の異物検査は長尺状のウェブを搬送しながら行われている。このような異物検査によれば、小さな(代表的には、50μm以下のサイズの)異物を検出することは実質的に不可能である。なお、従来は50μmサイズ程度の異物を検出すれば許容されていたので、ウェブ搬送による異物検査に特段の問題は生じていなかったところ、画像表示装置の高精度化に伴い、10μmサイズ程度の異物を検出する必要が新たに生じてきた。本発明者らはこのような問題について鋭意検討した結果、搬送時のウェブのバタつきおよび/または搬送装置の振動により撮像素子による正確な画像が得られないことに起因し得ることを見出した。そして、試行錯誤の結果、光透過性積層体を枚葉状に裁断し、当該枚葉状の光透過性積層体を中空に固定した状態で(すなわち、載置せずに)透過検査を行うことにより、搬送時のウェブのバタつきおよび/または搬送装置の振動による悪影響を排除できるのみならず、載置面の異物等の悪影響も排除した。その結果、きわめて高精度の異物検査を実現し、10μmサイズ程度の異物および/または欠点を検出することを可能にした。このように、本発明は、従来になかった新たな課題を解決するものである。
A. Overview of the Inspection Method for a Light-Transmitting Laminate According to an embodiment of the present invention, a method for inspecting a light-transmitting laminate performs a transmission inspection while a sheet of the light-transmitting laminate is fixed in the air. FIG. 1 is a schematic side view illustrating an example of the transmission inspection. The transmission inspection includes, for example, using an optical system to obtain an image of the light-transmitting laminate 10 that is horizontally supported by a pair of support members 20. The optical system includes, for example, an imaging element 30 that is arranged on one side (above in the illustrated example) of the light-transmitting laminate 10 and obtains an image of the light-transmitting laminate; and a light source 40 that is arranged on the other side (below in the illustrated example) of the light-transmitting laminate 10 and emits irradiation light that irradiates the light-transmitting laminate 10. Note that the imaging element 30 may be arranged below the light-transmitting laminate 10, and the light source 40 may be arranged above the light-transmitting laminate 10. The imaging element 30 captures a transmitted light (inspection light) image, and foreign matter and/or defects (hereinafter, simply referred to as foreign matter or defects depending on the context) can be recognized as dark spots in the captured image. More specific embodiments of transmission inspection will be described later. By performing transmission inspection while a sheet of light-transmitting laminate is fixed in the air, defects of 8 μm to 50 μm in size, preferably 8 μm to 30 μm in size, more preferably 8 μm to 20 μm in size, even more preferably 8 μm to 15 μm in size, and particularly preferably approximately 10 μm in size, can be detected in the light-transmitting laminate. Conventionally, foreign matter inspection of light-transmitting laminates such as optical films has been performed while a long web is being transported. This type of foreign matter inspection makes it virtually impossible to detect small foreign matter (typically, 50 μm or less in size). In the past, detecting foreign particles of approximately 50 μm in size was considered acceptable, and there were no particular problems with foreign particle inspection using a conveyed web. However, with the increasing precision of image display devices, the need to detect foreign particles of approximately 10 μm in size has arisen. After extensive research into this issue, the inventors discovered that this problem could be caused by flapping of the web during conveyance and/or vibration of the conveying device, preventing accurate images from being obtained by the imaging element. Through trial and error, they cut the light-transmitting laminate into sheets and performed transmission inspection while the sheet-like light-transmitting laminate was fixed in the air (i.e., not placed on a surface). This not only eliminated the adverse effects of flapping of the web during conveyance and/or vibration of the conveying device, but also eliminated the adverse effects of foreign particles on the placement surface. As a result, extremely high-precision foreign particle inspection was achieved, making it possible to detect foreign particles and/or defects of approximately 10 μm in size. Thus, the present invention solves a new problem not previously encountered.
B.光透過性積層体
光透過性積層体としては、異物検査が必要とされる任意の適切な光透過性の積層体が挙げられる。具体例としては、光学フィルム、粘着剤シート、およびこれらの組み合わせ(例えば、粘着剤層付光学フィルム)が挙げられる。光学フィルムとしては、例えば、偏光板、位相差板、タッチパネル用導電性フィルム、表面処理フィルム、および、これらを目的に応じて適切に積層した積層体(例えば、反射防止用円偏光板、タッチパネル用導電層付偏光板)が挙げられる。粘着剤シートは、代表的には、粘着剤とその少なくとも一方の側に仮着された離型フィルムとを含む。光透過性積層体は、代表的には、粘着剤層付光学フィルムであり得る。光透過性積層体の厚みは、好ましくは300μm以下であり、より好ましくは280μm以下であり、さらに好ましくは250μm以下である。本発明の実施形態によれば、このような薄型の光透過性積層体においても微小な異物を良好に検出することができる。光透過性積層体の厚みの下限は、例えば30μmであり得る。
B. Light-Transmitting Laminate The light-transmitting laminate may be any suitable light-transmitting laminate that requires foreign matter inspection. Specific examples include optical films, pressure-sensitive adhesive sheets, and combinations thereof (e.g., optical films with pressure-sensitive adhesive layers). Examples of optical films include polarizing plates, retardation plates, conductive films for touch panels, surface-treated films, and laminates obtained by appropriately stacking these films according to the purpose (e.g., anti-reflection circular polarizing plates, polarizing plates with conductive layers for touch panels). The pressure-sensitive adhesive sheet typically includes a pressure-sensitive adhesive and a release film temporarily attached to at least one side of the pressure-sensitive adhesive. The light-transmitting laminate may typically be an optical film with a pressure-sensitive adhesive layer. The thickness of the light-transmitting laminate is preferably 300 μm or less, more preferably 280 μm or less, and even more preferably 250 μm or less. According to an embodiment of the present invention, even in such a thin light-transmitting laminate, minute foreign matter can be effectively detected. The lower limit of the thickness of the light-transmitting laminate may be, for example, 30 μm.
光透過性積層体は、例えば、光透過性積層体を構成する各層をいわゆるロールトゥロールにより積層することにより作製され得る。光透過性積層体は、第1主面と第2主面とを有する。第1主面は、代表的には光透過性積層体が貼り合わせられる画像表示セルと反対側の表面であり;第2主面は、代表的には画像表示セル側の表面であり、より詳細には粘着剤層の表面であり得る。作製された長尺状の光透過性積層体は、所定サイズに裁断されて異物検査に供される。当該サイズは、代表的には、最終製品が複数枚得られるサイズであり得る。検査終了後、光透過性積層体は、代表的には最終製品サイズに裁断されて出荷され得る。 The light-transmitting laminate can be produced, for example, by laminating the layers that make up the light-transmitting laminate using a so-called roll-to-roll process. The light-transmitting laminate has a first main surface and a second main surface. The first main surface is typically the surface opposite the image display cell to which the light-transmitting laminate is attached; the second main surface is typically the surface facing the image display cell, and more specifically, may be the surface of the adhesive layer. The produced long light-transmitting laminate is cut to a predetermined size and subjected to foreign matter inspection. Typically, this size may be large enough to produce multiple final products. After inspection, the light-transmitting laminate can be cut to the final product size and shipped.
1つの実施形態においては、光透過性積層体は、異物検査に供される際、第1主面に反射性保護フィルムが剥離可能に仮着されてもよい。光透過性積層体の種類・構成によっては(例えば、光透過性積層体が低反射層(AR層)を含む場合には)光透過性積層体の第1主面に撮像素子のオートフォーカスが機能しない場合があるところ、反射性保護フィルムを仮着することにより、そのような場合であっても光透過性積層体の第1主面に撮像素子のオートフォーカスを良好に機能させることができる。反射性保護フィルムは、代表的には、所定倍率の光学系の焦点を光透過性積層体の第1主面の表面に合わせるときの照射光を反射し、かつ、検査光を透過する機能を有する。1つの実施形態においては、反射性保護フィルムは以下の関係を満足する:
y≧0.0181x-11.142
ここで、xは650nm~800nmの波長領域での検出波長の絶対値であり、yは反射率の絶対値である。このような構成であれば、撮像素子のオートフォーカスをより良好に機能させることができる。反射性保護フィルムとしては、上記機能を有する限りにおいて任意の適切な構成が採用され得る。具体的には、反射性保護フィルムは、例えば特開2019-099751号公報の[0031]に記載の環状オレフィン系樹脂で構成され得る。環状オレフィン系樹脂としては、例えばポリノルボルネンが挙げられる。環状オレフィン系樹脂は、市販品を用いてもよい。市販品の具体例としては、日本ゼオン製のゼオノアおよびゼオネックス、JSR製のアートン、三井化学製のアペル、TOPAS ADVANCED POLYMERS製のトパス等が挙げられる。環状オレフィン系樹脂フィルムは、環状オレフィン系樹脂を50重量%以上含有するものが好ましい。1つの実施形態においては、反射性保護フィルムの表面にハードコート層が形成されていてもよい。ハードコート層を形成することにより、反射性保護フィルムのキズの発生、反射性保護フィルムへの異物の付着等を防止することができるので、より高精度で異物検査を行うことができ、微小な異物および/または欠点を正確に検出することができる。
In one embodiment, when the light-transmitting laminate is subjected to foreign substance inspection, a reflective protective film may be temporarily and removably attached to the first main surface. Depending on the type and configuration of the light-transmitting laminate (for example, when the light-transmitting laminate includes a low-reflection layer (AR layer)), autofocus of the image sensor may not function on the first main surface of the light-transmitting laminate. However, by temporarily attaching the reflective protective film, even in such cases, autofocus of the image sensor can be made to function well on the first main surface of the light-transmitting laminate. The reflective protective film typically has the function of reflecting the irradiated light when the focus of an optical system with a predetermined magnification is adjusted on the surface of the first main surface of the light-transmitting laminate, and transmitting the inspection light. In one embodiment, the reflective protective film satisfies the following relationship:
y≧0.0181x-11.142
Here, x is the absolute value of the detection wavelength in the wavelength range of 650 nm to 800 nm, and y is the absolute value of the reflectance. This configuration allows the autofocus of the imaging element to function more effectively. Any appropriate configuration can be adopted as the reflective protective film as long as it has the above-mentioned function. Specifically, the reflective protective film can be composed of a cyclic olefin resin, for example, as described in [0031] of JP 2019-099751 A. Examples of cyclic olefin resins include polynorbornene. Commercially available cyclic olefin resins may be used. Specific examples of commercially available products include Zeonor and Zeonex manufactured by Zeon Corporation, Arton manufactured by JSR Corporation, Apel manufactured by Mitsui Chemicals, and Topas manufactured by TOPAS ADVANCED POLYMERS. The cyclic olefin resin film preferably contains 50% or more by weight of a cyclic olefin resin. In one embodiment, a hard coat layer may be formed on the surface of the reflective protective film. By forming a hard coat layer, it is possible to prevent scratches on the reflective protective film and adhesion of foreign matter to the reflective protective film, thereby enabling more accurate foreign matter inspection and accurate detection of minute foreign matter and/or defects.
反射性保護フィルムは、予定される検査回数に応じて、複数枚を仮着してもよい。例えば異物検査が2回予定されている場合には、反射性保護フィルムを2枚貼り合わせることにより、2回目の異物検査の前に外側の反射性保護フィルムを1枚剥離すれば、内側の反射性保護フィルムのキズの発生、内側の反射性保護フィルムへの異物の付着等を防止することができるので、より高精度で複数回の異物検査を行うことができる。なお、複数回の検査が予定されている場合であっても、反射性保護フィルムを1枚のみ仮着してもよい。 Multiple reflective protective films may be temporarily attached depending on the number of planned inspections. For example, if two foreign substance inspections are planned, by attaching two reflective protective films together, it is possible to prevent scratches on the inner reflective protective film and the adhesion of foreign substances to the inner reflective protective film by peeling off one outer reflective protective film before the second foreign substance inspection, thereby enabling multiple foreign substance inspections to be carried out with greater accuracy. Note that even if multiple inspections are planned, only one reflective protective film may be temporarily attached.
1つの実施形態においては、反射性保護フィルムの表面(反射性保護フィルムが複数存在する場合には、最表の反射性保護フィルム表面)に表面保護フィルムが剥離可能に仮着されてもよい。表面保護フィルムを仮着することにより、反射性保護フィルムのキズの発生、反射性保護フィルムへの異物の付着等を防止することができるので、より高精度で異物検査を行うことができる。表面保護フィルムは、代表的には、検査時に剥離除去される。検査終了後には、検査時に剥離された表面保護フィルムが光透過性積層体の表面に再度仮着されてもよく、別の表面保護フィルムが剥離可能に仮着されてもよい。 In one embodiment, a surface protective film may be temporarily and removably attached to the surface of the reflective protective film (or to the surface of the outermost reflective protective film if multiple reflective protective films are present). Temporarily attaching the surface protective film can prevent scratches on the reflective protective film and adhesion of foreign matter to the reflective protective film, allowing for more accurate foreign matter inspection. The surface protective film is typically peeled off and removed during inspection. After inspection is complete, the surface protective film peeled off during inspection may be temporarily reattached to the surface of the light-transmitting laminate, or another surface protective film may be temporarily and removably attached.
反射性保護フィルムおよび表面保護フィルムは、ロールトゥロールにより(すなわち、裁断前に)光透過性積層体に仮着されてもよく、裁断後に仮着されてもよい。 The reflective protective film and surface protective film may be temporarily attached to the light-transmitting laminate by roll-to-roll (i.e., before cutting), or they may be temporarily attached after cutting.
C.光透過性積層体の検査方法の具体的な実施形態
C-1.中空での固定
以下、透過検査における欠点の検出をより具体的に説明する。欠点の検出においては、上記のとおり、枚葉の光透過性積層体は中空に固定される。光透過性積層体は、例えば上記の図1に示すとおり、一対の支持部材に横架されることにより中空に固定され得る。光透過性積層体は、非製品領域である対向する端部が支持部材に固定され得る。代表的には、光透過性積層体は粘着剤層を含み、光透過性積層体は当該粘着剤層を介して支持部材に固定され得る。図2(a)~図2(d)は、光透過性積層体の支持部材への固定方法の手順の一例を説明する概略側面図である。一連の手順において、好ましくは、光透過性積層体は第1主面10aに反射性保護フィルム50および表面保護フィルム60が剥離可能に仮着されている。まず、図2(a)に示すとおり、光透過性積層体の非製品領域である一方の端部10cのセパレーターが剥離除去され粘着剤層が露出する。当該粘着剤層を介して端部10cが支持部材20に貼り合わせられる。次に、図2(b)に示すとおり、非製品領域である端部10cに対向する端部10dのセパレーターが剥離除去され粘着剤層が露出し、当該粘着剤層を介して端部10dが支持部材20に貼り合わせられる。光透過性積層体(の端部)を粘着剤層により支持部材に貼り合わせることにより、固定治具を別途用いることなく簡便な固定が可能となる。端部10cおよび10dが貼り合わせられると、図2(c)に示すように、セパレーターはすべて除去される。ここで、反射性保護フィルム50および表面保護フィルム60は、光透過性積層体のキズの発生および/または光透過性積層体への異物の付着を防止するだけでなく、セパレーターの除去および端部の貼り合わせの際の補強材としても機能し得る。このようにして、光透過性積層体が支持部材に横架される。次に、図2(d)に示すように、表面保護フィルム60が剥離されて、反射性保護フィルム50が仮着された光透過性積層体10が異物検査に供される。光透過性積層体を支持部材に固定した後に表面保護フィルムを剥離することにより(すなわち、表面保護フィルムを仮着した状態で光透過性積層体を支持部材に固定することにより)、セパレーターを剥離した後も光透過性積層体の剛性(コシ)を保持することが可能となり、取り扱いが容易となる。その結果、シワ等が防止されるので、高精度で異物検査を実施することができ、微小な異物および/または欠点を正確に検出することができる。さらに、枚葉の光透過性積層体を横架した状態で異物検査を行うことにより、搬送によるバタつきおよび/または搬送装置の振動の影響を排除できるので、表面保護フィルムを剥離した後であっても高精度で異物検査を実施することができ、微小な異物および/または欠点を正確に検出することができる。加えて、表面保護フィルムを剥離することにより、表面保護フィルムの異物を検出することがなくなるので、上記効果との相乗的な効果により、より高精度で異物検査を実施することができる。1つの実施形態においては、上記B項で説明したとおり、反射性保護フィルムは複数枚仮着されていてもよい。この場合、1回目の異物検査時に表面保護フィルムが剥離除去され、反射性保護フィルムは、以降の異物検査のたびに1枚ずつ剥離され得る。
C. Specific Embodiments of the Inspection Method for a Light-Transmitting Laminate C-1. Fixation in the Air The detection of defects during transmission inspection will be described in more detail below. In defect detection, a sheet of the light-transmitting laminate is fixed in the air as described above. The light-transmitting laminate can be fixed in the air by being horizontally supported on a pair of support members, as shown in FIG. 1 , for example. Opposing ends of the light-transmitting laminate, which are non-product regions, can be fixed to the support members. Typically, the light-transmitting laminate includes a pressure-sensitive adhesive layer, and the light-transmitting laminate can be fixed to the support member via the pressure-sensitive adhesive layer. FIGS. 2( a) to 2(d) are schematic side views illustrating an example of the steps of a method for fixing a light-transmitting laminate to a support member. In this series of steps, preferably, a reflective protective film 50 and a surface protective film 60 are releasably temporarily attached to the first main surface 10a of the light-transmitting laminate. First, as shown in FIG. 2( a), the separator at one end 10c, which is the non-product region of the light-transmitting laminate, is peeled and removed to expose the pressure-sensitive adhesive layer. The end 10c is bonded to the support member 20 via the adhesive layer. Next, as shown in FIG. 2(b), the separator at the end 10d opposite the end 10c (non-product area) is peeled and removed to expose the adhesive layer, and the end 10d is bonded to the support member 20 via the adhesive layer. By bonding (the end of) the light-transmitting laminate to the support member via the adhesive layer, simple fixation is possible without using a separate fixing jig. Once the ends 10c and 10d are bonded together, the separator is completely removed as shown in FIG. 2(c). Here, the reflective protective film 50 and the surface protective film 60 not only prevent scratches on the light-transmitting laminate and/or adhesion of foreign matter to the light-transmitting laminate, but can also function as reinforcing materials when removing the separator and bonding the ends. In this way, the light-transmitting laminate is draped across the support member. Next, as shown in FIG. 2(d), the surface protective film 60 is peeled off, and the light-transmitting laminate 10 with the reflective protective film 50 temporarily attached is subjected to foreign matter inspection. By peeling off the surface protective film after fixing the light-transmitting laminate to a support member (i.e., by fixing the light-transmitting laminate to a support member with the surface protective film temporarily attached), the rigidity (stiffness) of the light-transmitting laminate can be maintained even after the separator is peeled off, making it easier to handle. As a result, wrinkles and the like are prevented, allowing for highly accurate foreign matter inspection and accurate detection of minute foreign matters and/or defects. Furthermore, by performing foreign matter inspection while the sheet-like light-transmitting laminate is horizontally suspended, the effects of flapping due to transport and/or vibration of the transport device can be eliminated. This allows for highly accurate foreign matter inspection even after the surface protective film is peeled off, allowing for accurate detection of minute foreign matters and/or defects. In addition, peeling off the surface protective film eliminates the need to detect foreign matters in the surface protective film, which, combined with the above-mentioned effects, allows for more accurate foreign matter inspection. In one embodiment, as explained above in Section B, a plurality of reflective protective films may be temporarily attached. In this case, the surface protective film is peeled off and removed during the first foreign substance inspection, and the reflective protective films can be peeled off one by one for each subsequent foreign substance inspection.
一対の支持部材20、20は、代表的には、相対的に近接または離間可能に構成されている。1つの実施形態においては、支持部材は、スライド可能に構成され、かつ、互いに離間する方向に付勢されている。具体的には、支持部材は、図2(b)~図2(d)に示すように、一方(図示例では図面の右側)が固定され、他方(図示例では図面の左側)がスライド可能に構成され、当該他方が弾性部材(例えば、バネ)により離間する方向に付勢されている。このような構成であれば、光透過性積層体に適切な張力(テンション)が付与され、光透過性積層体が張架された状態となる。その結果、光透過性積層体のシワおよび歪みが顕著に抑制されるので、より高精度で異物検査を行うことができ、微小な異物および/または欠点を正確に検出することができる。張力は、バネ自体の強度、バネの固定ねじの締め具合を調整することにより制御することができる。なお、支持部材を両方ともスライド可能に構成し、両方を弾性部材により離間する方向に付勢してもよい。 The pair of support members 20, 20 are typically configured to be able to move toward or away from each other. In one embodiment, the support members are configured to be slidable and are biased in a direction away from each other. Specifically, as shown in Figures 2(b) to 2(d), one support member (on the right side of the drawing in the illustrated example) is fixed, and the other support member (on the left side of the drawing in the illustrated example) is configured to be slidable, and the other support member is biased in a direction away from each other by an elastic member (e.g., a spring). With this configuration, an appropriate tension is applied to the light-transmitting laminate, and the light-transmitting laminate is in a taut state. As a result, wrinkles and distortions in the light-transmitting laminate are significantly suppressed, enabling more accurate foreign substance inspection and the accurate detection of minute foreign substances and/or defects. The tension can be controlled by adjusting the strength of the spring itself and the tightness of the spring's fixing screw. Alternatively, both support members may be configured to be slidable, and both may be biased in a direction away from each other by an elastic member.
C-2.欠点の検出
欠点の検出は、上記のように、代表的には図1に示すような光学系(撮像素子30および光源40を含む)を用いて行われる。以下、具体的に説明する。まず、図3の左側に示すように、所定倍率(以下、低倍率と称する場合がある)の光学系(実質的には、撮像素子30)の焦点を光透過性積層体10の第1主面10aの表面に合わせる。この状態で、図4に示すようにして撮像素子30で光透過性積層体10の平面(XY平面)全体を走査し、欠点のXY座標マップ(第1のXY座標マップ)を作成する。上記A項に記載のとおり、欠点は暗点として認識されるので、第1のXY座標マップにおいては、光透過性積層体10の第1主面10a近傍(第1主面から厚み方向内方の所定の距離まで)の欠点は、例えば図5に示すような画像上の暗点として認識される。なお、第1のXY座標マップのみでは、厚み方向の深い位置(第2主面に近い位置)の微小欠点を検出できない場合がある。これに対して、本発明の実施形態によれば、後述するように、第1主面の表面から厚み方向内方に所定距離Pずらして欠点の検出を行うことにより、光透過性積層体の厚み方向全体にわたって微小欠点を正確に検出することができる。
C-2. Defect Detection As described above, defect detection is typically performed using an optical system (including an image sensor 30 and a light source 40) as shown in FIG. 1 . A specific description follows. First, as shown on the left side of FIG. 3 , an optical system (essentially, an image sensor 30) with a predetermined magnification (hereinafter sometimes referred to as low magnification) is focused on the first main surface 10 a of the light-transmitting laminate 10. In this state, the image sensor 30 scans the entire plane (XY plane) of the light-transmitting laminate 10 as shown in FIG. 4 to create an XY coordinate map of defects (first XY coordinate map). As described in Section A above, defects are recognized as dark spots. Therefore, in the first XY coordinate map, defects near the first main surface 10 a of the light-transmitting laminate 10 (up to a predetermined distance inward in the thickness direction from the first main surface) are recognized as dark spots on the image, as shown in FIG. 5 . Note that the first XY coordinate map alone may not be able to detect minute defects deep in the thickness direction (close to the second main surface). In contrast, according to an embodiment of the present invention, as described below, defects are detected by shifting a predetermined distance P inward in the thickness direction from the surface of the first main surface, thereby making it possible to accurately detect minute defects throughout the entire thickness direction of the light-transmitting laminate.
次いで、図3の中央部に示すように、撮像素子30の焦点を光透過性積層体10の第1主面10aの表面から厚み方向(Z方向)内方に所定距離Pずらして、光透過性積層体10の厚み方向内方の所定の位置に焦点を合わせる。この状態で、上記と同様に図4に示すようにして撮像素子30で光透過性積層体10のXY平面全体を走査して、欠点のXY座標マップ(第2のXY座標マップ)を作成する。第2のXY座標マップにおいては、光透過性積層体10の厚み方向内方の所定位置近傍(当該所定位置から所定の距離まで)の欠点は、例えば図5とは実質的に異なる位置にある画像上の暗点として認識される。なお、本明細書においては、所定距離Pを撮像ピッチと称する場合がある。撮像素子の焦点合わせは、任意の適切な手段を用いて実現され得る。例えば、撮像素子自体をZ方向に移動させてもよく、レンズ等により撮像素子の焦点距離を変更してもよく、これらを組み合わせてもよい。図示例は、レンズ等により撮像素子の焦点距離を変更する形態を示している。 Next, as shown in the center of Figure 3, the focal point of the imaging element 30 is shifted a predetermined distance P inward in the thickness direction (Z direction) from the surface of the first main surface 10a of the light-transmitting laminate 10, and the focal point is adjusted to a predetermined position inside the thickness direction of the light-transmitting laminate 10. In this state, the imaging element 30 is scanned across the entire XY plane of the light-transmitting laminate 10 as shown in Figure 4, as described above, to create an XY coordinate map of defects (second XY coordinate map). In the second XY coordinate map, defects near a predetermined position inside the thickness direction of the light-transmitting laminate 10 (up to a predetermined distance from that position) are recognized as dark spots on the image at a position substantially different from that shown in Figure 5, for example. Note that in this specification, the predetermined distance P may be referred to as the imaging pitch. Focusing of the imaging element can be achieved using any appropriate means. For example, the imaging element itself may be moved in the Z direction, the focal length of the imaging element may be changed using a lens or the like, or a combination of these may be used. The illustrated example shows a configuration in which the focal length of the imaging element is changed using a lens or the like.
必要に応じて、図3の右側に示すように、撮像素子30の焦点を厚み方向(Z方向)に所定距離Pさらにずらして、光透過性積層体10の厚み方向内方の次の所定の位置に焦点を合わせる。この状態で、上記と同様に図4に示すようにして撮像素子30で光透過性積層体10のXY平面全体を走査して、欠点のXY座標マップ(第3のXY座標マップ)を作成する。この操作を必要に応じて所定回数繰り返し、所定数の欠点のXY座標マップを作成する。撮像ピッチおよび作成する欠点のXY座標マップの数は、光透過性積層体の全体厚み、光透過性積層体を構成する層の数、各層の厚み等に応じて適切に設定され得る。撮像ピッチPは、例えば10μm~100μmであり、好ましくは20μm~80μmであり、より好ましくは40μm~60μmである。このような構成によれば、厚み方向全体を撮像素子で走査することなく、厚み方向に存在する実質的にすべての欠点(したがって、光透過性積層体における実質的にすべての欠点)およびその大まかな位置を検出することができる。図3では欠点のXY座標マップを3つ作成する形態を示しているが、作成される欠点のXY座標マップの数はこれに限定されるものではなく、好ましくは2~10であり、より好ましくは3~8であり、さらに好ましくは4~6である。 If necessary, as shown on the right side of Figure 3, the focus of the imaging element 30 is further shifted a predetermined distance P in the thickness direction (Z direction) to focus on the next predetermined position inside the thickness direction of the light-transmitting laminate 10. In this state, the imaging element 30 is used to scan the entire XY plane of the light-transmitting laminate 10 as shown in Figure 4, as described above, to create an XY coordinate map of defects (third XY coordinate map). This operation is repeated a predetermined number of times as necessary to create a predetermined number of XY coordinate maps of defects. The imaging pitch and the number of defect XY coordinate maps to be created can be appropriately set depending on the overall thickness of the light-transmitting laminate, the number of layers constituting the light-transmitting laminate, the thickness of each layer, etc. The imaging pitch P is, for example, 10 μm to 100 μm, preferably 20 μm to 80 μm, and more preferably 40 μm to 60 μm. This configuration makes it possible to detect substantially all defects present in the thickness direction (and therefore substantially all defects in the light-transmitting laminate) and their approximate locations without scanning the entire thickness direction with the imaging element. Figure 3 shows a form in which three defect XY coordinate maps are created, but the number of defect XY coordinate maps created is not limited to this, and is preferably 2 to 10, more preferably 3 to 8, and even more preferably 4 to 6.
次いで、上記のようにして作成した所定数の欠点のXY座標マップを統合する。例えば図6は、5つの欠点のXY座標マップを統合して欠点のXY座標マップ(統合XY座標マップ)を作成する一例を示す。図6のように、各画像データを統合することにより、それぞれのXY座標マップに存在する欠点を共通のXY座標上で表すことができる。このようにして、統合XY座標マップが作成され得る。統合XY座標マップにおいては、光透過性積層体における実質的にすべての欠点がXY座標(2次元座標)に表されている。 Next, the XY coordinate maps of a predetermined number of defects created as described above are integrated. For example, Figure 6 shows an example of integrating the XY coordinate maps of five defects to create an XY coordinate map of defects (integrated XY coordinate map). By integrating each image data as shown in Figure 6, the defects present in each XY coordinate map can be represented on a common XY coordinate system. In this way, an integrated XY coordinate map can be created. In the integrated XY coordinate map, substantially all defects in the light-transmitting laminate are represented by XY coordinates (two-dimensional coordinates).
上記のような統合XY座標マップの作成における撮像素子の所定倍率(低倍率)は、好ましくは10倍未満であり、より好ましくは5倍以下である。当該倍率の下限は、例えば1.5倍であり得る。当該倍率がこのような範囲であれば、光透過性積層体の広範囲を効率よく撮像することができ、その結果、統合XY座標マップを効率よく作成することができる。 The predetermined magnification (low magnification) of the imaging element used to create the integrated XY coordinate map described above is preferably less than 10x, and more preferably 5x or less. The lower limit of this magnification can be, for example, 1.5x. If the magnification is within this range, a wide range of the optically transparent laminate can be efficiently imaged, and as a result, the integrated XY coordinate map can be efficiently created.
次に、欠点の深度(光透過性積層体の厚み方向における位置)を測定する。ここで、光透過性積層体の平面全面かつ厚み方向全体にわたって欠点を検出することは困難であり、仮に実現できたとしてもコスト、時間および効率性を考慮すると実用的ではない。したがって、本実施形態においては、統合XY座標マップにおける欠点発生座標のみにおいて欠点の厚み方向の位置を測定する。上記のとおり、統合XY座標マップにおいては、光透過性積層体における実質的にすべての欠点が2次元座標に表されているので、欠点発生座標のみにおいて欠点の厚み方向の位置を測定することにより、光透過性積層体における実質的にすべての欠点の厚み方向の位置を検出することができる。 Next, the depth of the defect (its position in the thickness direction of the optically transparent laminate) is measured. It is difficult to detect defects across the entire plane and thickness of the optically transparent laminate, and even if it were possible, it would be impractical in terms of cost, time, and efficiency. Therefore, in this embodiment, the thickness direction position of the defect is measured only at the defect occurrence coordinates in the integrated XY coordinate map. As described above, in the integrated XY coordinate map, substantially all defects in the optically transparent laminate are represented in two-dimensional coordinates. Therefore, by measuring the thickness direction position of the defect only at the defect occurrence coordinates, it is possible to detect the thickness direction position of substantially all defects in the optically transparent laminate.
欠点の深度の測定は、撮像素子の焦点を光透過性積層体の第1主面の表面に合わせること、および、当該焦点を光透過性積層体の厚み方向内方に移動させて第1主面の表面から欠点までの距離を測定すること、を含む。具体的には、撮像素子の焦点を厚み方向に移動させ、コントラストが高い位置を合焦位置として認定し、第1主面表面から当該合焦位置までの距離を欠点の厚み方向における位置とすることができる。欠点の厚み方向における正確な位置を検出することにより、製品の検査効率および出荷効率を格段に向上させることができる。 Measuring the depth of the defect involves focusing the imaging element on the surface of the first principal surface of the light-transmitting laminate, and moving the focal point inward in the thickness direction of the light-transmitting laminate to measure the distance from the surface of the first principal surface to the defect. Specifically, the focal point of the imaging element is moved in the thickness direction, a position with high contrast is recognized as the in-focus position, and the distance from the surface of the first principal surface to the in-focus position can be determined as the position of the defect in the thickness direction. Detecting the exact position of the defect in the thickness direction can significantly improve product inspection efficiency and shipping efficiency.
上記のような欠点の深度測定における撮像素子の倍率(高倍率)は、好ましくは10倍以上であり、より好ましくは20倍以上である。当該倍率の上限は、例えば50倍であり得る。当該倍率がこのような範囲であれば、微小欠点の厚み方向における位置を確実に検出することができる。 The magnification (high magnification) of the imaging element when measuring the depth of defects as described above is preferably 10x or more, and more preferably 20x or more. The upper limit of this magnification can be, for example, 50x. If the magnification is within this range, the position of minute defects in the thickness direction can be reliably detected.
欠点の深度測定は、例えば、特開2001-124660号公報、特開2004-077261号公報、特開2009-250893号公報に記載されている。これらの公報の記載は、本明細書に参考として援用される。 Defect depth measurement is described, for example, in Japanese Patent Application Laid-Open Nos. 2001-124660, 2004-077261, and 2009-250893. The descriptions in these publications are incorporated herein by reference.
1つの実施形態においては、上記欠点の検出は、上記欠点のXY座標マップにおける撮像素子による走査距離1000μmあたりの光透過性積層体の第1主面の厚み方向(Z方向)の変動量が好ましくは±10μm以内、より好ましくは±8μm以内となるような領域で行われ得る。別の実施形態においては、上記欠点の検出は、光透過性積層体の撓み角度が水平方向に対して好ましくは±0.57°以内、より好ましくは±0.50°以内となるような領域で行われ得る。すなわち、いずれの実施形態においても、光透過性積層体の撓みが非常に小さい領域で、欠点の検出が行われ得る。このような構成であれば、光透過性積層体の第1主面への撮像素子の焦点合わせ(結果として、以降の厚み方向内方の所定の位置への焦点合わせ)をきわめて正確に行うことができる。その結果、微小欠点の厚み方向における位置を正確に検出することができる。このような光透過性積層体の撓みが非常に小さい領域は、上記C-1項に記載の光透過性積層体の固定方法により実現され得る。なお、変動量および/または撓み角度が上記範囲を外れる場合には、正確な透過検査が実施できない場合があり、結果として、光透過性積層体において透過検査できない領域が発生する場合がある。このような場合には、後述するように光透過性積層体に検査済み領域を認識する手段を設けることにより、非検査領域が製品として出荷されてしまうという事態を防止することができる。 In one embodiment, the defect detection can be performed in an area where the amount of variation in the thickness direction (Z direction) of the first main surface of the light-transmitting laminate per 1000 μm of scanning distance by the imaging element in the defect XY coordinate map is preferably within ±10 μm, more preferably within ±8 μm. In another embodiment, the defect detection can be performed in an area where the deflection angle of the light-transmitting laminate relative to the horizontal direction is preferably within ±0.57°, more preferably within ±0.50°. That is, in both embodiments, defect detection can be performed in an area where the deflection of the light-transmitting laminate is very small. With this configuration, the imaging element can be focused on the first main surface of the light-transmitting laminate (and, as a result, subsequently focused on a predetermined position inward in the thickness direction) with great accuracy. As a result, the position of the minute defect in the thickness direction can be accurately detected. Such an area where the deflection of the light-transmitting laminate is very small can be achieved by the method for fixing the light-transmitting laminate described in Section C-1 above. If the amount of variation and/or bending angle is outside the above range, accurate transmission inspection may not be possible, resulting in areas of the optically transparent laminate that cannot be inspected through transmission. In such cases, as described below, providing the optically transparent laminate with a means for recognizing inspected areas can prevent uninspected areas from being shipped as products.
以上のようにして、透過検査(欠点の検出)が行われ得る。検査終了後、光透過性積層体は、上記のとおり、代表的には最終製品サイズに裁断されて出荷され得る。これも上記のとおり、検査終了後には必要に応じて、剥離した表面保護フィルムを光透過性積層体に再度剥離可能に仮着してもよい。 Transmission inspection (detection of defects) can be performed in this manner. After the inspection is complete, the light-transmitting laminate can typically be cut to the final product size and shipped, as described above. Also as described above, after the inspection is complete, the peeled-off surface protection film can be temporarily and removably reattached to the light-transmitting laminate, if necessary.
1つの実施形態においては、検査後の光透過性積層体(実質的には、光透過性積層体の第1主面側に残っている表面保護フィルムまたは反射性保護フィルム)には、検査済み領域を認識可能な認識手段が設けられている。例えば光透過性積層体の撓み角度が水平方向に対して非常に大きい場合、光透過性積層体において透過検査できない領域が発生し得る。あるいは、上記支持部材による光透過性積層体の固定状態によっては、検査領域が設定とずれてしまう場合がある。検査済み領域を認識する手段を設けることにより、上記のような場合であっても非検査領域が製品として出荷されてしまうという事態を防止することができる。認識手段は、例えば、撮像素子と連動して移動する例えばプロッターにより光透過性積層体にマークすることにより形成され得る。認識手段の具体的な様式としては、例えば、検査済み領域を包囲する直線または破線、クロスマーク、一定間隔のドットが挙げられる。 In one embodiment, the light-transmitting laminate after inspection (effectively, the surface protective film or reflective protective film remaining on the first main surface of the light-transmitting laminate) is provided with a recognition means capable of recognizing the inspected area. For example, if the bending angle of the light-transmitting laminate is very large relative to the horizontal direction, areas of the light-transmitting laminate that cannot be inspected through transmission may be generated. Alternatively, depending on how the light-transmitting laminate is fixed by the support member, the inspection area may deviate from the setting. By providing a means for recognizing the inspected area, it is possible to prevent non-inspected areas from being shipped as products even in such cases. The recognition means can be formed, for example, by marking the light-transmitting laminate with, for example, a plotter that moves in conjunction with the imaging element. Specific forms of the recognition means include, for example, straight or dashed lines surrounding the inspected area, cross marks, or dots at regular intervals.
認識手段について、図7(a)~図7(c)を参照して具体的に説明する。例えば図7(a)に示すように支持部材20による光透過性積層体10の固定がずれてしまった場合、撮像素子の走査はXY方向(光透過性積層体10が正しく固定された場合の長辺方向および短辺方向)に行われるので、図7(b)に示すように検査済み領域70aは製品領域80とずれてしまう。認識手段がマークされていなければ、図7(c)に「×」で示す非検査領域が製品として出荷されてしまう可能性があるところ、認識手段70bをマークすることにより、非検査領域を特定することができ、その結果、非検査領域が製品として出荷されてしまうという事態を防止することができる。 The recognition means will be described in detail with reference to Figures 7(a) to 7(c). For example, if the optically transparent laminate 10 is misaligned when fixed by the support member 20 as shown in Figure 7(a), the imaging element will scan in the X and Y directions (the long and short side directions when the optically transparent laminate 10 is properly fixed), and as shown in Figure 7(b), the inspected area 70a will be misaligned with the product area 80. If the recognition means were not marked, there is a possibility that the non-inspection area indicated by an "X" in Figure 7(c) would be shipped as a product. However, by marking the recognition means 70b, the non-inspection area can be identified, thereby preventing the non-inspection area from being shipped as a product.
本発明の実施形態による光透過性積層体の検査方法は、画像表示装置の製造過程において光学フィルム、粘着剤シート等の異物の検出に好適に用いられ得る。 The inspection method for a light-transmitting laminate according to an embodiment of the present invention can be suitably used to detect foreign matter such as optical films, adhesive sheets, etc. during the manufacturing process of image display devices.
10 光透過性積層体
20 支持部材
30 撮像素子
40 光源
50 反射性保護フィルム
60 表面保護フィルム
REFERENCE SIGNS LIST 10 Light-transmitting laminate 20 Support member 30 Imaging element 40 Light source 50 Reflective protective film 60 Surface protective film
Claims (3)
粘着剤層と光学フィルムと少なくとも1枚の反射性保護フィルムとをこの順に備える積層体の異物検査する工程を含み、
前記異物検査する工程は、枚葉の前記積層体を中空に固定した状態で透過検査を行い、
前記積層体における8μm~50μmサイズの欠点を検出することを含み、
前記欠点の検出が、
所定倍率の光学系の焦点を前記積層体の第1主面の表面に合わせ、前記光学系で前記積層体を走査して欠点のXY座標マップを作成すること;
前記光学系の焦点を前記積層体の第1主面の表面から厚み方向内方に所定距離ずらして、前記光学系で前記積層体を走査して別の欠点のXY座標マップを作成すること;および
前記作成した欠点のXY座標マップを統合すること;
を含む、
光透過性積層体の製造方法。 A method for producing a light-transmitting laminate including a pressure-sensitive adhesive layer and an optical film,
The method includes a step of inspecting a laminate having a pressure-sensitive adhesive layer, an optical film, and at least one reflective protective film in this order for foreign matter,
The step of inspecting for foreign matter includes performing a transmission inspection while the laminate of sheets is fixed in a hollow space,
detecting defects in the laminate of 8 μm to 50 μm in size;
The detection of the defect
focusing an optical system having a predetermined magnification on the first major surface of the laminate, and scanning the laminate with the optical system to create an XY coordinate map of defects;
shifting a focus of the optical system inward in a thickness direction from the surface of the first main surface of the laminate by a predetermined distance, and scanning the laminate with the optical system to create another XY coordinate map of defects; and integrating the created XY coordinate maps of defects;
Including,
A method for producing a light-transmitting laminate.
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- 2021-02-16 KR KR1020267004390A patent/KR20260023611A/en active Pending
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-
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- 2023-02-14 JP JP2023020634A patent/JP7498815B2/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| CN120761413A (en) | 2025-10-10 |
| TW202519849A (en) | 2025-05-16 |
| JP2021135219A (en) | 2021-09-13 |
| CN115135996A (en) | 2022-09-30 |
| JP7498815B2 (en) | 2024-06-12 |
| JP2023053294A (en) | 2023-04-12 |
| WO2021172089A1 (en) | 2021-09-02 |
| TW202521974A (en) | 2025-06-01 |
| KR20220145816A (en) | 2022-10-31 |
| KR20260023611A (en) | 2026-02-20 |
| CN115135996B (en) | 2026-04-03 |
| KR20260025441A (en) | 2026-02-24 |
| TW202521975A (en) | 2025-06-01 |
| CN120761412A (en) | 2025-10-10 |
| CN120761411A (en) | 2025-10-10 |
| KR20260025440A (en) | 2026-02-24 |
| JP7451227B2 (en) | 2024-03-18 |
| TW202141029A (en) | 2021-11-01 |
| JP2024111327A (en) | 2024-08-16 |
| JP2024083647A (en) | 2024-06-21 |
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