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JP7771018B2 - Accelerated particle generating device and accelerated particle generating method - Google Patents
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JP7771018B2 - Accelerated particle generating device and accelerated particle generating method - Google Patents

Accelerated particle generating device and accelerated particle generating method

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JP7771018B2
JP7771018B2 JP2022132954A JP2022132954A JP7771018B2 JP 7771018 B2 JP7771018 B2 JP 7771018B2 JP 2022132954 A JP2022132954 A JP 2022132954A JP 2022132954 A JP2022132954 A JP 2022132954A JP 7771018 B2 JP7771018 B2 JP 7771018B2
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accelerating
voltage
optical path
plate electrodes
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浩昌 安田
泰介 川崎
貴行 佐古
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Toshiba Corp
Toshiba Energy Systems and Solutions Corp
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Description

本発明の実施形態は、光の入射によりON状態になる光スイッチによって加速並行平板電極にパルス電圧を印加して電場を形成し、荷電粒子を加速する加速粒子生成装置、及び加速粒子生成方法に関する。 Embodiments of the present invention relate to an accelerated particle generating device and an accelerated particle generating method that apply a pulse voltage to accelerating parallel plate electrodes using an optical switch that turns on when light is incident on them to form an electric field and accelerate charged particles.

従来の加速器は、静電場または高周波エネルギを用いて加速電場を形成し、荷電粒子の加速を行っている。しかしながら、加速電場の強さを上げていくと、静電場ではパッシェンの法則、高周波エネルギではキルパトリック放電限界という経験則に従って放電が発生してしまう。真空度の向上や表面処理、加速周波数の向上等により放電電圧の改善は可能であるが、現実的に加速勾配は静電場による加速で1MV/m程度、高周波エネルギによる加速で40MV/m程度が限界であり、それ以上では放電が発生する可能性がある。 Conventional accelerators use electrostatic fields or radio frequency energy to form an accelerating electric field and accelerate charged particles. However, as the strength of the accelerating electric field is increased, discharge occurs according to an empirical rule known as Paschen's law in electrostatic fields and the Kilpatrick discharge limit in radio frequency energy. While it is possible to improve the discharge voltage by improving the degree of vacuum, surface treatment, and increasing the acceleration frequency, the realistic acceleration gradient is limited to approximately 1 MV/m for acceleration using electrostatic fields and approximately 40 MV/m for acceleration using radio frequency energy, and discharge may occur at gradients greater than this.

また、特にイオンのように質量が大きな粒子の加速では、粒子速度が相対論的速度β=1に近づくまで時間がかかる。このため、高周波エネルギによる加速でイオンを加速する際には、徐々に変化する粒子速度に加速位相を合わせるため加速効率が更に低下し、加速勾配は数百KV/m~数MV/mになる。その結果、装置が数百平方メートル以上の巨大なサイズとなり、加速器普及の妨げとなっている。 Furthermore, when accelerating particles with large masses, such as ions, it takes time for the particle velocity to approach the relativistic velocity β = 1. For this reason, when accelerating ions using radio-frequency energy, the acceleration efficiency decreases further as the acceleration phase must be adjusted to match the gradually changing particle velocity, resulting in an acceleration gradient of several hundred kV/m to several MV/m. As a result, the equipment must be huge, covering an area of several hundred square meters or more, which is an obstacle to the widespread use of accelerators.

米国特許第5757146号明細書U.S. Pat. No. 5,757,146 特表2013-504150号公報Special table 2013-504150 publication

上述の加速効率の低下を回避して高加速勾配を実現する手段として、誘電体壁加速(Dielectric Wall Accelerator:DWA)が提案されている(特許文献1)。これは、パルス電圧を利用した加速器(特許文献2)の一種で、スイッチング素子により発生したパルス電圧を伝搬して電極間に加速電場を発生するものである。加速のための電極を積層することで多段化が容易なため、静電場による加速のように粒子エネルギに応じた大電圧を印加する必要がない。また、スイッチング素子によるスイッチングのタイミングを粒子ビームに同期させることで、イオンのように質量の大きな粒子の加速も、数十MV/m以上の加速勾配を実現することができる。 As a means of avoiding the aforementioned decline in acceleration efficiency and achieving a high acceleration gradient, the Dielectric Wall Accelerator (DWA) has been proposed (Patent Document 1). This is a type of accelerator that uses pulse voltage (Patent Document 2), and generates an accelerating electric field between electrodes by propagating a pulse voltage generated by a switching element. Because it is easy to create multiple stages by stacking the acceleration electrodes, there is no need to apply a large voltage corresponding to the particle energy, as is the case with acceleration using an electrostatic field. Furthermore, by synchronizing the switching timing of the switching elements with the particle beam, it is possible to achieve an acceleration gradient of tens of MV/m or more, even for particles with large masses such as ions.

しかし、加速並行平板電極までのパルス電圧の伝搬路長さの不一致やレーザ光路長の違いにより、粒子ビームが加速並行平板電極を通過するタイミングが不適切で、粒子ビームが良好に加速されない場合がある。つまり、スイッチング素子のONのタイミングが、粒子ビームが加速並行平板電極を通過するタイミングとずれて、粒子を設計通りに加速できない課題がある。 However, due to discrepancies in the propagation path length of the pulse voltage to the accelerating parallel plate electrodes or differences in the laser optical path length, the timing at which the particle beam passes through the accelerating parallel plate electrodes may be inappropriate, resulting in the particle beam not being accelerated properly. In other words, the timing at which the switching element is turned on may differ from the timing at which the particle beam passes through the accelerating parallel plate electrodes, resulting in the issue of not being able to accelerate the particles as designed.

本発明の実施形態は、上述の事情を考慮してなされたものであり、荷電粒子ビームが複数の加速並行平板電極間に生ずる加速電場からのエネルギを効率良く取得して、荷電粒子を設計通りに加速させることができる加速粒子生成装置及び加速粒子生成方法を提供することを目的とする。 Embodiments of the present invention have been made in consideration of the above circumstances, and aim to provide an accelerated particle generation device and an accelerated particle generation method that enable a charged particle beam to efficiently acquire energy from the accelerating electric field generated between multiple accelerating parallel plate electrodes, thereby accelerating the charged particles as designed.

本発明の実施形態における加速粒子生成装置は、荷電粒子のビームを発生するビーム源と、前記ビーム源からの荷電粒子ビームを通過させて加速する複数の加速並行平板電極と、前記加速並行平板電極のそれぞれに電圧を印加するために高電圧を発生する複数の高電圧電源と、光を発生する光源と、前記加速並行平板電極及び前記高電圧電源のそれぞれに接続され、前記光源からの光が照射されることでON状態となって、前記高電圧電源からの電圧をパルス電圧として前記加速並行平板電極に印加する複数の光スイッチと、を有する加速粒子生成装置であって、複数の前記光スイッチ間を光が通過する光路の光路長を調整して、前記加速並行平板電極へのパルス電圧の印加タイミングを、荷電粒子ビームの前記加速並行平板電極通過タイミングと一致させる光路長調整機構を有して構成されたことを特徴とするものである。 An accelerated particle generator according to an embodiment of the present invention includes a beam source that generates a beam of charged particles, multiple acceleration parallel plate electrodes through which the charged particle beam from the beam source passes and accelerates, multiple high-voltage power supplies that generate high voltages to apply voltages to each of the acceleration parallel plate electrodes, a light source that generates light, and multiple optical switches connected to the acceleration parallel plate electrodes and the high-voltage power supplies, respectively, that turn on when irradiated with light from the light source and apply voltage from the high-voltage power supplies as a pulse voltage to the acceleration parallel plate electrodes. The accelerated particle generator is characterized by including an optical path length adjustment mechanism that adjusts the optical path length of the optical path through which light passes between the multiple optical switches, thereby matching the timing of application of the pulse voltage to the acceleration parallel plate electrodes with the timing of the charged particle beam passing through the acceleration parallel plate electrodes.

本発明の実施形態における加速粒子生成方法は、荷電粒子のビームを発生するビーム源と、前記ビーム源からの荷電粒子ビームを通過させて加速する複数の加速並行平板電極と、前記加速並行平板電極のそれぞれに電圧を印加するために高電圧を発生する複数の高電圧電源と、光を発生する光源と、前記加速並行平板電極及び前記高電圧電源のそれぞれに接続され、前記光源からの光が照射されることでON状態となって、前記高電圧電源からの電圧をパルス電圧として前記加速並行平板電極に印加する複数の光スイッチと、を有する加速粒子生成装置を用意し、複数の前記光スイッチ間を光が通過する光路の光路長を調整して、前記加速並行平板電極へのパルス電圧の印加タイミングを、荷電粒子ビームの前記加速並行平板電極通過タイミングと一致させることを特徴とするものである。 An accelerated particle generation method according to an embodiment of the present invention provides an accelerated particle generation device having a beam source that generates a beam of charged particles, multiple acceleration parallel plate electrodes through which the charged particle beam from the beam source passes and accelerates, multiple high-voltage power supplies that generate high voltages to apply voltages to each of the acceleration parallel plate electrodes, a light source that generates light, and multiple optical switches connected to the acceleration parallel plate electrodes and the high-voltage power supplies, respectively, that turn on when irradiated with light from the light source and apply voltage from the high-voltage power supplies as a pulse voltage to the acceleration parallel plate electrodes, and adjusts the optical path length of the optical path through which light passes between the multiple optical switches to synchronize the timing of application of the pulse voltage to the acceleration parallel plate electrodes with the timing of the charged particle beam passing through the acceleration parallel plate electrodes.

本発明の実施形態によれば、荷電粒子ビームが複数の加速並行平板電極間に生ずる加速電場からのエネルギを効率良く取得して、荷電粒子を設計通りに加速させることができる。 According to an embodiment of the present invention, a charged particle beam can efficiently acquire energy from the accelerating electric field generated between multiple accelerating parallel plate electrodes, accelerating the charged particles as designed.

第1実施形態に係る加速粒子生成装置を示す構成図。FIG. 1 is a configuration diagram showing an accelerated particle generation device according to a first embodiment. 図1の加速並行平板電極周囲の接続関係を示す斜視図。FIG. 2 is a perspective view showing the connection relationship around the accelerating parallel plate electrode shown in FIG. 1 . 第2実施形態に係る加速粒子生成装置を示す構成図。FIG. 10 is a configuration diagram showing an accelerated particle generation device according to a second embodiment. 図3の電圧モニタの回路構成を示す電気回路図。FIG. 4 is an electrical circuit diagram showing the circuit configuration of the voltage monitor of FIG. 3 . 図3及び図4の電圧モニタの波形測定装置が測定した加速並行平板電極に印加されるパルス電圧の時間分布を示すグラフ。5 is a graph showing the time distribution of a pulse voltage applied to an accelerating parallel plate electrode measured by the waveform measuring device of the voltage monitor of FIGS. 3 and 4 . 図3の各電圧モニタのそれぞれが測定した各加速並行平板電極に印加されるパルス電圧の時間分布を示すグラフ。4 is a graph showing the time distribution of the pulse voltage applied to each accelerating parallel plate electrode measured by each voltage monitor of FIG. 3; 図3の制御手段が実行する光路長調整手順及び荷電粒子加速手順を示すフローチャート。4 is a flowchart showing an optical path length adjustment procedure and a charged particle acceleration procedure executed by the control means of FIG. 3 .

以下、本発明を実施するための形態を、図面に基づき説明する。
[A]第1実施形態(図1、図2)
図1は、第1実施形態に係る加速粒子生成装置を示す構成図である。この図1に示す加速粒子生成装置10は、光の入射によりON状態になる光スイッチを用いた光伝導スイッチング方式の加速装置であり、ビーム源11、複数の加速並行平板電極(例えば加速並行平板電極12A及び12B)、複数の高電圧電源(例えば高電圧電源13A及び13B)、グラウンド電極14、光源としてのレーザ源15、複数の光スイッチ(例えば光スイッチ16A及び16B)、光路長調整機構17、並びにビームエネルギ測定装置18を有して構成される。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[A] First embodiment (FIGS. 1 and 2)
Fig. 1 is a configuration diagram showing an accelerated particle generator according to the first embodiment. The accelerated particle generator 10 shown in Fig. 1 is a photoconductive switching type accelerator using optical switches that are turned on by the incidence of light, and is configured to include a beam source 11, a plurality of acceleration parallel plate electrodes (e.g., acceleration parallel plate electrodes 12A and 12B), a plurality of high-voltage power supplies (e.g., high-voltage power supplies 13A and 13B), a ground electrode 14, a laser source 15 as a light source, a plurality of optical switches (e.g., optical switches 16A and 16B), an optical path length adjustment mechanism 17, and a beam energy measurement device 18.

ビーム源11は、例えば陽子、電子、イオン等の荷電粒子のビーム(荷電粒子ビームP)を発生する。高電圧電源13Aは加速並行平板電極12Aに、高電圧電源13Bは加速並行平板電極12Bにそれぞれ電圧(後述のパルス電圧)を印加するために高電圧を発生する。また、レーザ源15は、光としてのレーザLを発生する。 Beam source 11 generates a beam of charged particles (charged particle beam P), such as protons, electrons, or ions. High-voltage power supply 13A generates a high voltage to apply a voltage (pulse voltage, described below) to acceleration parallel plate electrode 12A, and high-voltage power supply 13B generates a high voltage to apply a voltage (pulse voltage, described below) to acceleration parallel plate electrode 12B. Furthermore, laser source 15 generates a laser beam L as light.

光スイッチ16A及び16Bは、レーザ源15からのレーザLの入射により、OFF状態からON状態に高速で瞬間的に動作する。光スイッチ16Aは、高電圧伝搬路19Aを介して高電圧電源13Aに、スイッチ電圧伝搬路20Aを介して加速並行平板電極12Aにそれぞれ電気的に接続される。また、光スイッチ16Bは、高電圧伝搬路19Bを介して高電圧電源13Bに、スイッチ電圧伝搬路20Bを介して加速並行平板電極12Bに、それぞれ電気的に接続される。 Optical switches 16A and 16B are rapidly and instantaneously switched from OFF to ON when laser light L is incident from laser source 15. Optical switch 16A is electrically connected to high-voltage power supply 13A via high-voltage propagation path 19A and to accelerating parallel plate electrode 12A via switch voltage propagation path 20A. Optical switch 16B is electrically connected to high-voltage power supply 13B via high-voltage propagation path 19B and to accelerating parallel plate electrode 12B via switch voltage propagation path 20B.

光スイッチ16Aは、レーザLの入射によりON状態となったときに、高電圧電源13Aからの高電圧をパルス波形としたパルス電圧を、スイッチ電圧伝搬路20Aを経て加速並行平板電極12Aに印加する。光スイッチ16Bは、レーザLの入射によりON状態となったときに、高電圧電源13Bからの高電圧をパルス波形としたパルス電圧を、スイッチ電圧伝搬路20Bを経て加速並行平板電極12Bに印加する。 When optical switch 16A is turned ON by the incidence of laser light L, it applies a pulse voltage, which is a pulse waveform of the high voltage from high-voltage power supply 13A, to acceleration parallel plate electrode 12A via switch voltage propagation path 20A. When optical switch 16B is turned ON by the incidence of laser light L, it applies a pulse voltage, which is a pulse waveform of the high voltage from high-voltage power supply 13B, to acceleration parallel plate electrode 12B via switch voltage propagation path 20B.

加速並行平板電極12A、12B及びグラウンド電極14は、図1及び図2に示すように、ビーム源11からの荷電粒子ビームPを通過させて加速する。つまり、加速並行平板電極12Aは、高電圧電源13A及び光スイッチ16Aによりパルス電圧が印加されたときに加速並行平板電極12Bとの間で加速電場を形成し、この加速電場内を流れる荷電粒子ビームPを加速する。その後、加速並行平板電極12Bは、高電圧電源13B及び光スイッチ16Bによりパルス電圧が印加されたときにグラウンド電極14との間で加速電場を形成し、この加速電場内を流れる荷電粒子ビームPを更に加速する。 As shown in Figures 1 and 2, the acceleration parallel plate electrodes 12A, 12B and the ground electrode 14 allow the charged particle beam P from the beam source 11 to pass through and accelerate the beam. That is, when a pulse voltage is applied to the acceleration parallel plate electrode 12A by the high-voltage power supply 13A and the optical switch 16A, the acceleration parallel plate electrode 12A forms an acceleration electric field between itself and the acceleration parallel plate electrode 12B, accelerating the charged particle beam P flowing within this acceleration electric field. Then, when a pulse voltage is applied to the acceleration parallel plate electrode 12B by the high-voltage power supply 13B and the optical switch 16B, the acceleration parallel plate electrode 12B forms an acceleration electric field between itself and the ground electrode 14, further accelerating the charged particle beam P flowing within this acceleration electric field.

ここで、グラウンド電極14は、加速並行平板電極12A及び12Bの下流に設置されて電位が零の電極である。また、ビームエネルギ測定装置18は、グラウンド電極14の下流に設置されて、加速並行平板電極12A、12B及びグラウンド電極14を通過して加速された荷電粒子ビームPのビームエネルギを測定する。この荷電粒子ビームPのビームエネルギEは、加速並行平板電極12A、12Bに印加されるパルス電圧の電圧をV、加速並行平板電極の数をN(第1実施形態ではN=2)、荷電粒子ビームPの価数(電荷)をQとすると、E=N×Q×Vである。 Here, the ground electrode 14 is an electrode installed downstream of the acceleration parallel plate electrodes 12A and 12B and has a zero potential. The beam energy measuring device 18 is installed downstream of the ground electrode 14 and measures the beam energy of the charged particle beam P accelerated by passing through the acceleration parallel plate electrodes 12A, 12B and the ground electrode 14. The beam energy E of this charged particle beam P is E = N x Q x V, where V is the voltage of the pulse voltage applied to the acceleration parallel plate electrodes 12A and 12B, N is the number of acceleration parallel plate electrodes (N = 2 in the first embodiment), and Q is the valence (charge) of the charged particle beam P.

光路長調整機構17は、レーザLを反射させると共に固定して設置された固定式反射鏡21と、レーザLを反射させると共に移動可能に設けられた移動式反射鏡22とを備えてなる。レーザ源15から出射されたレーザLは、光スイッチ16Aを通過してこの光スイッチ16AをON状態にした後、固定式反射鏡21、移動式反射鏡22により順次反射され、その後、光スイッチ16Bを通過してこの光スイッチ16BをON状態とする。 The optical path length adjustment mechanism 17 comprises a fixed reflecting mirror 21 that reflects the laser beam L and is fixedly installed, and a movable reflecting mirror 22 that reflects the laser beam L. The laser beam L emitted from the laser source 15 passes through the optical switch 16A, turning this optical switch 16A on, and is then reflected sequentially by the fixed reflecting mirror 21 and the movable reflecting mirror 22, before passing through the optical switch 16B and turning this optical switch 16B on.

光路長調整機構17は、移動式反射鏡22を移動させることで、上述の光スイッチ16Aと16B間をレーザLが通過するレーザ光路の光路長Kを調整する。この光スイッチ16A、16B間のレーザ光路の光路長Kは、荷電粒子ビームPが加速並行平板電極12A、12B間を通過する通過時間をTとし、レーザLの速度をCとしたとき、K=CTとなるように調整される。これにより、加速並行平板電極12A及び12B(特に加速並行平板電極12B)へのパルス電圧の印加タイミングを、荷電粒子ビームPが加速並行平板電極12A及び12B(特に加速並行平板電極12B)を通過する通過タイミングと一致させることが可能になる。 The optical path length adjustment mechanism 17 moves the movable reflecting mirror 22 to adjust the optical path length K of the laser optical path along which the laser L passes between the optical switches 16A and 16B. The optical path length K of the laser optical path between the optical switches 16A and 16B is adjusted so that K = CT, where T is the transit time of the charged particle beam P between the acceleration parallel plate electrodes 12A and 12B and C is the velocity of the laser L. This makes it possible to match the timing of application of the pulse voltage to the acceleration parallel plate electrodes 12A and 12B (particularly the acceleration parallel plate electrode 12B) with the timing of the charged particle beam P passing through the acceleration parallel plate electrodes 12A and 12B (particularly the acceleration parallel plate electrode 12B).

以上のように構成されたことから、本第1実施形態によれば、次の効果(1)を奏する。
(1)光路長調整機構17は移動式反射鏡22を移動させることで、光スイッチ16A、16B間をレーザLが通過するレーザ光路の光路長Kを調整して、加速並行平板電極12A、12B(特に加速並行平板電極12B)へのパルス電圧の印加タイミングを、荷電粒子ビームPの加速並行平板電極12A、12B(特に加速並行平板電極12B)通過タイミングと一致させるものである。従って、光スイッチ16A、16Bのそれぞれが加速並行平板電極12A、12Bにパルス電圧を順次印加させることで、これらの加速並行平板電極12A、12Bが加速電場を形成して荷電粒子ビームPを加速する際に、荷電粒子ビームPは、加速並行平板電極12A、12B間、及び加速並行平板電極12B、グラウンド電極14間にそれぞれ形成される加速電場からのエネルギを効率良く取得することができる。この結果、光路長調整機構17を備えた加速粒子生成装置10は、荷電粒子を設計通りに加速することができる。
As configured as above, the first embodiment provides the following effect (1).
(1) The optical path length adjustment mechanism 17 adjusts the optical path length K of the laser light path through which the laser L passes between the optical switches 16A and 16B by moving the movable reflecting mirror 22, thereby matching the timing of applying a pulse voltage to the acceleration parallel plate electrodes 12A and 12B (particularly the acceleration parallel plate electrode 12B) with the timing of the charged particle beam P passing through the acceleration parallel plate electrodes 12A and 12B (particularly the acceleration parallel plate electrode 12B). Therefore, when the acceleration parallel plate electrodes 12A and 12B form an acceleration electric field to accelerate the charged particle beam P by each of the optical switches 16A and 16B sequentially applying a pulse voltage to the acceleration parallel plate electrodes 12A and 12B, the charged particle beam P can efficiently obtain energy from the acceleration electric fields formed between the acceleration parallel plate electrodes 12A and 12B and between the acceleration parallel plate electrode 12B and the ground electrode 14. As a result, the accelerated particle generator 10 equipped with the optical path length adjustment mechanism 17 can accelerate the charged particles as designed.

[B]第2実施形態(図3~図7)
図3は、第2実施形態に係る加速粒子生成装置を示す構成図である。この第2実施形態において第1実施形態と同様な部分については、第1実施形態と同一の符号を付すことにより説明を簡略化し、または省略する。
[B] Second embodiment (FIGS. 3 to 7)
3 is a block diagram showing an accelerated particle generation apparatus according to a second embodiment. In this second embodiment, parts similar to those in the first embodiment are denoted by the same reference numerals as in the first embodiment, and the description thereof will be simplified or omitted.

本第2実施形態の加速粒子生成装置25が第1実施形態と異なる点は、電圧測定手段としての複数の電圧モニタ(例えば電圧モニタ26A及び26B)と、光路長調整機構17等を制御する制御手段27とが、第1実施形態の加速粒子生成装置10に追加して構成された点である。 The accelerated particle generator 25 of this second embodiment differs from the first embodiment in that it is configured by adding multiple voltage monitors (e.g., voltage monitors 26A and 26B) as voltage measurement means and a control means 27 that controls the optical path length adjustment mechanism 17, etc., to the accelerated particle generator 10 of the first embodiment.

電圧モニタ26Aは、電極電圧伝搬路28Aを介して加速並行平板電極12Aに電気的に接続され、光スイッチ16AがON状態になったときに加速並行平板電極12Aに印加されるパルス電圧を測定する。また、電圧モニタ26Bは、電極電圧伝搬路28Bを介して加速並行平板電極12Bに電気的に接続され、光スイッチ16BがON状態になったときに加速並行平板電極12Bに印加されるパルス電圧を測定する。これらの電圧モニタ26A及び26Bは、図4に示すように、分圧器としての分圧回路29と波形測定装置30とを有して構成され、具体的にはEOプローブ(Electrical-Optical Probe)が好ましい。 Voltage monitor 26A is electrically connected to acceleration parallel plate electrode 12A via electrode voltage propagation path 28A and measures the pulse voltage applied to acceleration parallel plate electrode 12A when optical switch 16A is turned ON. Voltage monitor 26B is electrically connected to acceleration parallel plate electrode 12B via electrode voltage propagation path 28B and measures the pulse voltage applied to acceleration parallel plate electrode 12B when optical switch 16B is turned ON. As shown in Figure 4, these voltage monitors 26A and 26B are configured with a voltage divider circuit 29 as a voltage divider and a waveform measurement device 30; specifically, an EO probe (Electrical-Optical Probe) is preferred.

分圧回路29は、加速並行平板電極12A、12Bからのパルス電圧を伝搬する電極電圧伝搬路28A、28Bの先に、直列接続された複数(例えば2個)のコンデンサ31及び32と、これらのコンデンサ31及び32に並列に接続された負荷抵抗33とを備えてなる。この分圧回路29によって、加速並行平板電極12A、12Bに印加されたパルス電圧が分圧される。分圧回路29のコンデンサ31、32間に波形測定装置30が接続されることで、加速並行平板電極12A、12Bへのパルス電圧が分圧回路29により分圧され、その波形が波形測定装置30に出力されて測定される。 The voltage divider circuit 29 comprises multiple (e.g., two) capacitors 31 and 32 connected in series at the end of the electrode voltage propagation paths 28A and 28B that propagate the pulse voltage from the accelerating parallel plate electrodes 12A and 12B, and a load resistor 33 connected in parallel to these capacitors 31 and 32. The pulse voltage applied to the accelerating parallel plate electrodes 12A and 12B is divided by this voltage divider circuit 29. By connecting a waveform measuring device 30 between the capacitors 31 and 32 of the voltage divider circuit 29, the pulse voltage applied to the accelerating parallel plate electrodes 12A and 12B is divided by the voltage divider circuit 29, and the waveform is output to the waveform measuring device 30 for measurement.

波形測定装置30により測定される加速並行平板電極12A、12Bへの印加パルス電圧の波形(時間分布)を図5に示す。加速並行平板電極12A、12Bへの印加パルス電圧の時間分布34は、最大波高になるまでにある一定の立上り時間Saを要し、一定時間Sbを経過した後に降下する。次に、加速並行平板電極12Aへの印加パルス電圧の時間分布35Aと、加速並行平板電極12Bへの印加パルス電圧の時間分布35Bとを図6に示す。加速並行平板電極12Aへの印加パルス電圧の時間分布35Aにおける立上り時刻をt1とし、加速並行平板電極12Bへの印加パルス電圧の時間分布35Bにおける立上り時刻をt2とすると、これらの時間差Δt=|t1-t2|は、光スイッチ16A、16B間のレーザ光路の光路長Kに依存(比例)する。 Figure 5 shows the waveform (time distribution) of the pulse voltage applied to acceleration parallel plate electrodes 12A and 12B measured by waveform measurement device 30. Time distribution 34 of the pulse voltage applied to acceleration parallel plate electrodes 12A and 12B requires a certain rise time Sa to reach its maximum height and then drops after a certain time Sb. Next, time distribution 35A of the pulse voltage applied to acceleration parallel plate electrode 12A and time distribution 35B of the pulse voltage applied to acceleration parallel plate electrode 12B are shown in Figure 6. If the rise time in time distribution 35A of the pulse voltage applied to acceleration parallel plate electrode 12A is t1 and the rise time in time distribution 35B of the pulse voltage applied to acceleration parallel plate electrode 12B is t2, then the time difference Δt = |t1 - t2| between them depends on (is proportional to) the optical path length K of the laser optical path between optical switches 16A and 16B.

図3に示す制御手段27は、電圧モニタ26A及び26Bの測定値(光スイッチ16A、16Bにより加速並行平板電極12A、12Bに印加されるパルス電圧の時間分布35A、35B)と、荷電粒子ビームPが隣接する加速並行平板電極12A、12B間を通過する通過時間Tとに基づいて、光路長調整機構17の移動式反射鏡22の動作(移動)を制御する。更に、この制御手段27は、ビーム源11、レーザ源15並びに高電圧電源13A及び13Bの起動と停止を制御する。また、制御手段27には、ビームエネルギ測定装置18からの荷電粒子ビームPのビームエネルギの測定値が入力される。 The control means 27 shown in FIG. 3 controls the operation (movement) of the movable reflector 22 of the optical path length adjustment mechanism 17 based on the measured values of the voltage monitors 26A and 26B (time distributions 35A and 35B of the pulse voltage applied to the accelerating parallel plate electrodes 12A and 12B by the optical switches 16A and 16B) and the transit time T for the charged particle beam P to pass between adjacent accelerating parallel plate electrodes 12A and 12B. Furthermore, this control means 27 controls the start and stop of the beam source 11, laser source 15, and high-voltage power supplies 13A and 13B. The control means 27 also receives input of the measured beam energy of the charged particle beam P from the beam energy measurement device 18.

上述の移動式反射鏡22の移動制御について、制御手段27は、まず、シミュレーション等で予め求められた荷電粒子ビームPの加速並行平板電極12A、12B間の通過時間Tを取得し、この通過時間Tと、加速並行平板電極12A、12Bへの印加パルス電圧の時間分布35A、35Bにおける立上り時刻t1、t2の時間差Δtとを比較する。次に、制御手段27は、Δt>Tのときには、レーザ光路の光路長Kが短くなるように移動式反射鏡22を移動させ、Δt<Tのときには、レーザ光路の光路長Kが長くなるように移動式反射鏡22を移動させる。制御手段27は、上述の電圧モニタ26A、26Bによるパルス電圧の測定と、光路長調整機構17の移動式反射鏡22の移動制御とを繰り返し実行して、時間差Δtと通過時間Tとの差が最小(好ましくは時間差Δtと通過時間Tとが一致)になるように移動式反射鏡22を移動させる。 Regarding the movement control of the movable reflecting mirror 22 described above, the control means 27 first obtains the transit time T of the charged particle beam P between the accelerating parallel plate electrodes 12A and 12B, which is determined in advance by simulation or the like, and compares this transit time T with the time difference Δt between the rise times t1 and t2 in the time distributions 35A and 35B of the pulse voltage applied to the accelerating parallel plate electrodes 12A and 12B. Next, when Δt > T, the control means 27 moves the movable reflecting mirror 22 so as to shorten the optical path length K of the laser optical path, and when Δt < T, moves the movable reflecting mirror 22 so as to lengthen the optical path length K of the laser optical path. The control means 27 repeatedly measures the pulse voltage using the voltage monitors 26A and 26B and controls the movement of the movable reflecting mirror 22 of the optical path length adjustment mechanism 17, moving the movable reflecting mirror 22 so that the difference between the time difference Δt and the transit time T is minimized (preferably so that the time difference Δt and the transit time T are the same).

次に、レーザ光路の光路長Kの調整手順及び荷電粒子ビームPの加速手順について、主に図7を参照して説明する。
まず、高電圧電源13A、13Bの電圧値、レーザ源15の出力値などの各機器のパラメータを設定すると共に、制御手段27は、荷電粒子ビームPが加速並行平板電極12A、12B間を通過する通過時間Tを取得して、光スイッチ16A、16B間のレーザ光路の光路長Kを設定する(S1)。次に、制御手段27は、高電圧電源13A、13Bにより、OFF状態の光スイッチ16A、16Bのそれぞれに電圧を印加させる(S2)。
Next, the procedure for adjusting the optical path length K of the laser optical path and the procedure for accelerating the charged particle beam P will be described mainly with reference to FIG.
First, parameters of each device, such as the voltage values of the high-voltage power supplies 13A and 13B and the output value of the laser source 15, are set, and the control means 27 acquires the transit time T for the charged particle beam P to pass between the accelerating parallel plate electrodes 12A and 12B, and sets the optical path length K of the laser optical path between the optical switches 16A and 16B (S1). Next, the control means 27 applies voltage to each of the optical switches 16A and 16B in the OFF state using the high-voltage power supplies 13A and 13B (S2).

次に、制御手段27は、レーザ源15からレーザLを照射させて(S3)、光スイッチ16Aにより加速並行平板電極12Aにパルス電圧を印加させ、引き続き、光スイッチ16Bにより加速並行平板電極12Bにパルス電圧を印加させる。次に、加速並行平板電極12Aに印加されたパルス電圧を電圧モニタ26Aが測定して制御手段27へ出力し、引き続き、加速並行平板電極12Bに印加されたパルス電圧を電圧モニタ26Bが測定して制御手段27へ出力する(S4)。 Next, the control means 27 causes the laser source 15 to emit laser L (S3), applies a pulse voltage to the acceleration parallel plate electrode 12A using the optical switch 16A, and subsequently applies a pulse voltage to the acceleration parallel plate electrode 12B using the optical switch 16B. Next, the voltage monitor 26A measures the pulse voltage applied to the acceleration parallel plate electrode 12A and outputs it to the control means 27, and subsequently, the voltage monitor 26B measures the pulse voltage applied to the acceleration parallel plate electrode 12B and outputs it to the control means 27 (S4).

次に、制御手段27は、電圧モニタ26A、26Bにて測定されたパルス電圧の波形である時間分布35A、35Bにおけるそれぞれの立上り時刻t1、t2の時間差Δtが、設定値(荷電粒子ビームPが加速並行平板電極12A、12B間を通過する通過時間T)と一致するか否かを判断する(S5)。制御手段27は、ステップS5において、Δt>Tの場合にはレーザ光路の光路長Kが短くなるように修正して計算し、Δt<Tの場合には光路長Kが長くなるように修正して計算する(S6)。 Next, the control means 27 determines whether the time difference Δt between the rise times t1 and t2 in the time distributions 35A and 35B, which are waveforms of the pulse voltages measured by the voltage monitors 26A and 26B, matches a set value (the transit time T for the charged particle beam P to pass between the accelerating parallel plate electrodes 12A and 12B) (S5). In step S5, if Δt > T, the control means 27 performs a calculation to shorten the optical path length K of the laser optical path, and if Δt < T, performs a calculation to lengthen the optical path length K (S6).

制御手段27は、ステップS6にて計算し修正した光路長Kとなるように光路長調整機構17の移動式反射鏡22を移動して、レーザ光路の光路長Kを調整する(S7)。制御手段27は、ステップS3~S7を繰り返し実行して、ΔtとTとの差が最小、好ましくはΔtがTと一致するように、光路長調整機構17の移動式反射鏡22を移動させて、レーザ光路の光路長Kを調整する。 The control means 27 adjusts the optical path length K of the laser optical path by moving the movable reflecting mirror 22 of the optical path length adjustment mechanism 17 so that the optical path length K is the corrected optical path length K calculated in step S6 (S7). The control means 27 repeatedly executes steps S3 to S7, moving the movable reflecting mirror 22 of the optical path length adjustment mechanism 17 to adjust the optical path length K of the laser optical path so that the difference between Δt and T is minimized, and preferably so that Δt matches T.

その後、制御手段27は、ビーム源11を起動させて(S8)、荷電粒子ビームPを加速並行平板電極12A、12B及びグラウンド電極14に通過させ、加速並行平板電極12Aと加速並行平板電極12B間に形成される加速電場、加速並行平板電極12Bとグラウンド電極14間に形成される加速電場により荷電粒子ビームPを順次加速させる。これらの加速電場により加速された荷電粒子ビームPのビームエネルギは、ビームエネルギ測定装置18により測定されて(S9)、その測定値が制御手段27へ出力される。 Then, the control means 27 activates the beam source 11 (S8), causing the charged particle beam P to pass through the acceleration parallel plate electrodes 12A and 12B and the ground electrode 14, and sequentially accelerating the charged particle beam P by the acceleration electric field formed between the acceleration parallel plate electrode 12A and the acceleration parallel plate electrode 12B, and the acceleration electric field formed between the acceleration parallel plate electrode 12B and the ground electrode 14. The beam energy of the charged particle beam P accelerated by these acceleration electric fields is measured by the beam energy measuring device 18 (S9), and the measured value is output to the control means 27.

制御手段27は、ビームエネルギ測定装置18により測定された荷電粒子ビームPのビームエネルギが所定値以上増大している場合には、光路長調整機構17によるレーザ光路の光路長Kの調整を完了する(S10)。制御手段27は、ビームエネルギ測定装置18により測定された荷電粒子ビームPのビームエネルギの増大量が所定値未満である場合には、光路長調整機構17による光路長Kの調整以外の他の対策が必要であるかを検討するよう提示する。 If the beam energy of the charged particle beam P measured by the beam energy measuring device 18 has increased by a predetermined value or more, the control means 27 completes the adjustment of the optical path length K of the laser optical path by the optical path length adjustment mechanism 17 (S10). If the increase in the beam energy of the charged particle beam P measured by the beam energy measuring device 18 is less than a predetermined value, the control means 27 suggests that consideration be given to whether other measures besides adjusting the optical path length K by the optical path length adjustment mechanism 17 are necessary.

以上のように構成されたことから、本第2実施形態によれば、次の効果(2)を奏する。
(2)レーザLの入射によりON状態に変化して加速並行平板電極12A、12Bのそれぞれにパルス電圧を付加する光スイッチ16A、16B間のレーザ光路の光路長Kは、電圧モニタ26A、26Bのそれぞれにより測定された加速並行平板電極12A、12Bの印加パルス電圧の測定値に基づいて、(つまり、測定された印加パルス電圧の時間分布35A、35Bにおける立上り時刻t1、t2の時間差Δtに基づいて)、制御手段27が光路長調整機構17の移動式反射鏡22を移動させることで調整される。これにより、加速並行平板電極12A、12B(特に加速並行平板電極12B)のパルス電圧の印加タイミングを、荷電粒子ビームPの加速並行平板電極12A、12B(特に加速並行平板電極12B)の通過タイミングと高精度に一致させることができる。従って、加速並行平板電極12A、12B及びグラウンド電極14を通過する荷電粒子ビームPは、これらの電極12A、12B、14により形成される加速電場からのエネルギをより一層効率良く取得することができる。この結果、光路長調整機構17、電圧モニタ26A及び26Bを備えた加速粒子生成装置25は、荷電粒子ビームPを設計通りに正確に加速することができる。
As configured as above, the second embodiment provides the following effect (2).
(2) The optical switch 16A, 16B, which is turned on by the incidence of the laser beam L and applies a pulse voltage to each of the acceleration parallel plate electrodes 12A, 12B, is adjusted by the control means 27 by moving the movable reflecting mirror 22 of the optical path length adjusting mechanism 17 based on the measured value of the pulse voltage applied to the acceleration parallel plate electrodes 12A, 12B measured by the voltage monitors 26A, 26B, respectively (i.e., based on the time difference Δt between the rise times t1 and t2 in the measured time distributions 35A, 35B of the applied pulse voltage). This allows the application timing of the pulse voltage to the acceleration parallel plate electrodes 12A, 12B (particularly the acceleration parallel plate electrode 12B) to be matched with the passing timing of the charged particle beam P through the acceleration parallel plate electrodes 12A, 12B (particularly the acceleration parallel plate electrode 12B) with high precision. Therefore, the charged particle beam P passing through the accelerating parallel plate electrodes 12A, 12B and the ground electrode 14 can more efficiently obtain energy from the accelerating electric field formed by these electrodes 12A, 12B, 14. As a result, the accelerated particle generator 25 equipped with the optical path length adjustment mechanism 17 and the voltage monitors 26A and 26B can accurately accelerate the charged particle beam P as designed.

以上、本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これらの実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更、組み合わせを行うことができ、また、それらの置き換えや変更、組み合わせは、発明の範囲や要旨に含まれると共に、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in a variety of other forms, and various omissions, substitutions, changes, and combinations can be made without departing from the spirit of the invention. Furthermore, such substitutions, changes, and combinations are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims.

例えば、光源から照射される光は、レーザ源15からのレーザLに限らず、例えばLEDによる光を光学系で集光させて用いてもよい。 For example, the light emitted from the light source is not limited to the laser L from the laser source 15, but may also be light from an LED that is focused by an optical system.

10…加速粒子生成装置、11…ビーム源、12A、12B…加速並行平板電極、13A、13B…高電圧電源、15…レーザ源(光源)、16A、16B…光スイッチ、17…光路長調整機構、22…移動式反射鏡、25…加速粒子生成装置、26A、26B…電圧モニタ(電圧測定手段)、27…制御手段、29…分圧回路(分圧器)、30…波形測定装置、31、32…コンデンサ、33…負荷抵抗、K…光路長、L…レーザ(光)、P…荷電粒子ビーム 10...accelerated particle generator, 11...beam source, 12A, 12B...accelerating parallel plate electrodes, 13A, 13B...high-voltage power supply, 15...laser source (light source), 16A, 16B...optical switch, 17...optical path length adjustment mechanism, 22...movable reflector, 25...accelerated particle generator, 26A, 26B...voltage monitor (voltage measurement means), 27...control means, 29...voltage divider circuit (voltage divider), 30...waveform measurement device, 31, 32...capacitor, 33...load resistance, K...optical path length, L...laser (light), P...charged particle beam

Claims (6)

荷電粒子のビームを発生するビーム源と、
前記ビーム源からの荷電粒子ビームを通過させて加速する複数の加速並行平板電極と、
前記加速並行平板電極のそれぞれに電圧を印加するために高電圧を発生する複数の高電圧電源と、
光を発生する光源と、
前記加速並行平板電極及び前記高電圧電源のそれぞれに接続され、前記光源からの光が照射されることでON状態となって、前記高電圧電源からの電圧をパルス電圧として前記加速並行平板電極に印加する複数の光スイッチと、を有する加速粒子生成装置であって、
複数の前記光スイッチ間を光が通過する光路の光路長を調整して、前記加速並行平板電極へのパルス電圧の印加タイミングを、荷電粒子ビームの前記加速並行平板電極通過タイミングと一致させる光路長調整機構を有して構成されたことを特徴とする加速粒子生成装置。
a beam source for generating a beam of charged particles;
a plurality of parallel plate accelerating electrodes for passing and accelerating the charged particle beam from the beam source;
a plurality of high voltage power supplies that generate high voltages to apply voltages to the accelerating parallel plate electrodes;
a light source that generates light;
a plurality of optical switches connected to the accelerating parallel plate electrode and the high voltage power supply, respectively, and turned on when irradiated with light from the light source, and applying a voltage from the high voltage power supply to the accelerating parallel plate electrode as a pulse voltage,
An accelerated particle generating device characterized by being configured with an optical path length adjustment mechanism that adjusts the optical path length of the optical path through which light passes between the multiple optical switches, thereby matching the timing of applying a pulse voltage to the acceleration parallel plate electrodes with the timing of the charged particle beam passing through the acceleration parallel plate electrodes.
前記加速並行平板電極に印加されるパルス電圧を測定する電圧測定手段と、
前記電圧測定手段による測定値と荷電粒子ビームが隣接する前記加速並行平板電極間を通過する時間とに基づいて光路長調整機構の動作を制御する制御手段と、を更に有して構成されたことを特徴とする請求項1に記載の加速粒子生成装置。
a voltage measuring means for measuring a pulse voltage applied to the accelerating parallel plate electrodes;
2. The accelerated particle generating device according to claim 1, further comprising: a control means for controlling the operation of the optical path length adjustment mechanism based on the measurement value by the voltage measurement means and the time it takes for the charged particle beam to pass between the adjacent parallel plate electrodes of the accelerating electrode.
前記光路長調整機構は、光を反射させると共に移動可能な移動式反射鏡を備えて構成されることを特徴とする請求項1または2に記載の加速粒子生成装置。 The accelerated particle generator described in claim 1 or 2, characterized in that the optical path length adjustment mechanism is configured with a movable reflecting mirror that reflects light and is movable. 前記電圧測定手段は、加速並行平板電極に印加されるパルス電圧を分圧する分圧器と、この分圧器により分圧されたパルス電圧の波形を測定する波形測定装置と、を備えて構成されたことを特徴とする請求項2に記載の加速粒子生成装置。 The accelerated particle generating device described in claim 2, characterized in that the voltage measuring means is configured to include a voltage divider that divides the pulse voltage applied to the accelerating parallel plate electrodes, and a waveform measuring device that measures the waveform of the pulse voltage divided by this voltage divider. 前記分圧器は、加速並行平板電極からのパルス電圧を伝搬する伝搬路の先に、直列接続された複数のコンデンサと、これらのコンデンサと並列に接続された負荷抵抗とを備えてなり、複数のコンデンサ間のパルス電圧が波形測定器へ出力されるよう構成されたことを特徴とする請求項4に記載の加速粒子生成装置。 The accelerated particle generating device described in claim 4, characterized in that the voltage divider comprises a plurality of capacitors connected in series at the end of the propagation path for propagating the pulse voltage from the accelerating parallel plate electrodes, and a load resistor connected in parallel to these capacitors, and is configured so that the pulse voltage between the plurality of capacitors is output to a waveform measuring device. 荷電粒子のビームを発生するビーム源と、
前記ビーム源からの荷電粒子ビームを通過させて加速する複数の加速並行平板電極と、
前記加速並行平板電極のそれぞれに電圧を印加するために高電圧を発生する複数の高電圧電源と、
光を発生する光源と、
前記加速並行平板電極及び前記高電圧電源のそれぞれに接続され、前記光源からの光が照射されることでON状態となって、前記高電圧電源からの電圧をパルス電圧として前記加速並行平板電極に印加する複数の光スイッチと、を有する加速粒子生成装置を用意し、
複数の前記光スイッチ間を光が通過する光路の光路長を調整して、前記加速並行平板電極へのパルス電圧の印加タイミングを、荷電粒子ビームの前記加速並行平板電極通過タイミングと一致させることを特徴とする加速粒子生成方法。
a beam source for generating a beam of charged particles;
a plurality of parallel plate accelerating electrodes for passing and accelerating the charged particle beam from the beam source;
a plurality of high voltage power supplies that generate high voltages to apply voltages to the accelerating parallel plate electrodes;
a light source that generates light;
a plurality of optical switches connected to the accelerating parallel plate electrode and the high-voltage power supply, respectively, and turned on when irradiated with light from the light source, and applying a voltage from the high-voltage power supply to the accelerating parallel plate electrode as a pulse voltage;
A method for generating accelerated particles, characterized by adjusting the optical path length of the optical path through which light passes between the plurality of optical switches, and matching the timing of applying a pulse voltage to the accelerating parallel plate electrodes with the timing of the charged particle beam passing through the accelerating parallel plate electrodes.
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