JP7776181B2 - Low thermal expansion alloy - Google Patents
Low thermal expansion alloyInfo
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- JP7776181B2 JP7776181B2 JP2024533737A JP2024533737A JP7776181B2 JP 7776181 B2 JP7776181 B2 JP 7776181B2 JP 2024533737 A JP2024533737 A JP 2024533737A JP 2024533737 A JP2024533737 A JP 2024533737A JP 7776181 B2 JP7776181 B2 JP 7776181B2
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/60—Ferrous alloys, e.g. steel alloys containing lead, selenium, tellurium, or antimony, or more than 0.04% by weight of sulfur
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
- C21D6/001—Heat treatment of ferrous alloys containing Ni
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
- C21D6/007—Heat treatment of ferrous alloys containing Co
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/004—Very low carbon steels, i.e. having a carbon content of less than 0,01%
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/04—Ferrous alloys, e.g. steel alloys containing manganese
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/06—Ferrous alloys, e.g. steel alloys containing aluminium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
- C22C38/105—Ferrous alloys, e.g. steel alloys containing cobalt containing Co and Ni
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/26—Methods of annealing
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/26—Methods of annealing
- C21D1/30—Stress-relieving
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties of ferrous metals or ferrous alloys by deformation combined with, or followed by, heat treatment
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- Mechanical Engineering (AREA)
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- Crystallography & Structural Chemistry (AREA)
- Powder Metallurgy (AREA)
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- Compositions Of Oxide Ceramics (AREA)
Description
本発明は低熱膨張合金に関し、特に、被削性に優れた低熱膨張合金に関する。 The present invention relates to a low thermal expansion alloy, and in particular to a low thermal expansion alloy with excellent machinability.
エレクトロニクスや半導体関連機器、レーザ加工機、超精密加工機器の部品材料として、熱的に安定なインバー合金が広く使用されている。しかしながら、従来インバー合金は被削性が低いため、実用化されているのはかなり狭い分野に限定されるという問題があった。 Thermal stable Invar alloys are widely used as a component material for electronics and semiconductor-related equipment, laser processing machines, and ultra-precision machining equipment. However, conventional Invar alloys have poor machinability, which has limited their practical use to a fairly narrow range of fields.
特許文献1は、この問題を解決する手段として、快削元素としてSを用いた、重量%で、C:0.05%以下、Si:0.3%以下、Mn:0.45~1.2%、P:0.5%以下、S:0.015~0.035%、Ni:33.0~34.5%、Co:3.0~4.0%であり、残部が実質的に鉄からなり、かつ[Mn]をMnの重量%、[S]をSの重量%とした場合に[Mn]/[S]:15以上であることを特徴とする常温での平均熱膨張係数が1.0×10-6/℃以下の熱膨張係数を有する被削性に優れた低熱膨張合金を開示している。 As a means for solving this problem, Patent Document 1 discloses an alloy with excellent machinability and a low thermal expansion coefficient at room temperature of 1.0 x 10-6/°C or less, which uses S as a free-cutting element and is characterized by the following weight percentages: C: 0.05% or less, Si: 0.3% or less, Mn: 0.45 to 1.2%, P: 0.5% or less, S: 0.015 to 0.035%, Ni: 33.0 to 34.5%, Co: 3.0 to 4.0%, and the balance being essentially iron, and having an average thermal expansion coefficient at room temperature of 1.0 x 10-6 /°C or less, where [Mn] is the weight percentage of Mn and [S] is the weight percentage of S.
特許文献2は、快削元素としてCを用いた、オーステナイト基地鉄中に黒鉛組織を有する鋳鉄であって、重量%で、固溶炭素を0.09%以上0.43%以下、ケイ素1.0%未満、ニッケル29%以上34%以下、コバルト4%以上8%以下を含み残部鉄から成り、0~200℃の温度範囲における熱膨張係数が4×10-6/℃以下である低熱膨張鋳鉄を開示している。 Patent Document 2 discloses a low thermal expansion cast iron that uses C as a free-cutting element and has a graphite structure in an austenitic matrix iron, and that contains, by weight, 0.09% to 0.43% solid solution carbon, less than 1.0% silicon, 29% to 34% nickel, 4% to 8% cobalt, and the balance iron, and that has a thermal expansion coefficient of 4×10 -6 /°C or less in the temperature range of 0 to 200°C.
特許文献3は、快削元素としてCを用いた、炭素0.8~3.0%、シリコン1.0~3.0%、マンガン0.4~2.0%、ニッケル30.0~33.0%コバルト4.0~6.0%を含有してなることを特徴とする鋳鉄を開示している。 Patent document 3 discloses cast iron that uses C as a free-cutting element and is characterized by containing 0.8-3.0% carbon, 1.0-3.0% silicon, 0.4-2.0% manganese, 30.0-33.0% nickel, and 4.0-6.0% cobalt.
精密機器の構成部品に使用する合金には、加工の容易性の観点から優れた被削性が求められる。低い熱膨張係数を備えた合金の被削性には、さらに改善の余地がある。本発明は、上記の事情に鑑み、被削性に優れた低熱膨張合金を提供することを課題とする。 Alloys used in components of precision equipment require excellent machinability in order to be easily processed. However, there is room for further improvement in the machinability of alloys with low thermal expansion coefficients. In light of the above, the objective of the present invention is to provide a low thermal expansion alloy with excellent machinability.
本発明者らは、被削性をさらに向上させた低熱膨張合金を得る方法を鋭意検討した。その結果、特に、Si、Mn、S、Ni、Coの含有量を適切に制御することにより、熱膨張係数が小さく、かつ、被削性に優れた低熱膨張合金が得られることを知見した。The inventors have conducted extensive research into methods for obtaining low-thermal expansion alloys with improved machinability. As a result, they have discovered that by appropriately controlling the content of Si, Mn, S, Ni, and Co in particular, it is possible to obtain low-thermal expansion alloys with a small thermal expansion coefficient and excellent machinability.
本発明は上記の知見に基づきなされたものであって、その要旨は以下のとおりである。 The present invention was made based on the above findings, and its gist is as follows:
質量%で、C:0.050%以下、Si:0.30~1.00%、Mn:0.50~2.00%、S:0.030~0.150%、Ni:27.00~38.00%、Co:0~12.00%、sol.Al:0.003~0.100%、O:0.010%以下を含有し、残部がFe及び不純物であり、Mn、S、Ni、Co、Siの含有量を質量%で表した[Mn]、[S]、[Ni]、[Co]、[Si]が、[Mn]/[S]≧10.0、32.0%≦[Ni]+0.4[Co]≦38.0%、[Si]+[Mn]≦2.50%を満たし、25~100℃における平均熱膨張係数が3.0×10-6/℃以下であることを特徴とする低熱膨張合金。 In mass%, C: 0.050% or less, Si: 0.30 to 1.00%, Mn: 0.50 to 2.00%, S: 0.030 to 0.150%, Ni: 27.00 to 38.00%, Co: 0 to 12.00%, sol. A low thermal expansion alloy characterized by containing Al: 0.003 to 0.100%, O: 0.010% or less, the balance being Fe and impurities, and the contents of Mn, S, Ni, Co, and Si expressed in mass % as [Mn], [S], [Ni], [Co], and [Si] satisfying the following conditions: [Mn]/[S]≧10.0, 32.0%≦[Ni]+0.4[Co]≦38.0%, and [Si]+[Mn]≦2.50%, and the average thermal expansion coefficient at 25 to 100°C is 3.0× 10-6 /°C or less.
本発明によれば被削性に優れた低熱膨張合金が得られるので、たとえば、精密機器の構成部品への加工を容易に行えるようになる。 The present invention provides a low thermal expansion alloy with excellent machinability, making it easy to process into components for precision equipment, for example.
以下、本発明について詳細に説明する。以下、成分組成に関する「%」は特に断りのない限り「質量%」を表すものとする。はじめに、本発明の低熱膨張合金の成分組成について説明する。The present invention will be described in detail below. Hereinafter, "%" in relation to the component composition will represent "mass %" unless otherwise specified. First, the component composition of the low thermal expansion alloy of the present invention will be described.
(C:0.050%以下)
Cは鋳物中に黒鉛として晶出し被削性を高める元素であるが、熱膨張係数を増加させる元素でもある。本発明の低熱膨張合金においては、熱膨張係数の増加を抑えるため、C量は0.050%以下とする。好ましくは0.040%以下、より好ましくは0.030%以下、さらに好ましくは0.020%以下である。
(C: 0.050% or less)
C is an element that crystallizes as graphite in castings to improve machinability, but also increases the thermal expansion coefficient. In the low thermal expansion alloy of the present invention, the C content is set to 0.050% or less to suppress the increase in the thermal expansion coefficient. Preferably, it is 0.040% or less, more preferably 0.030% or less, and even more preferably 0.020% or less.
(Si:0.30~1.00%)
Siは、Sと複合することにより、被削性を向上させる元素である。Siの含有量が多くなると熱膨張係数が増加するため、被削性と熱膨張係数のバランスを考慮し、Si量は0.30~1.00%とする。Si量の下限は、0.40%、0.50%としてもよい。Si量の上限は、0.90%、0.80%としてもよい。
(Si: 0.30-1.00%)
Si is an element that improves machinability by combining with S. Since the thermal expansion coefficient increases as the Si content increases, the Si content is set to 0.30 to 1.00%, taking into consideration the balance between machinability and the thermal expansion coefficient. The lower limit of the Si content may be 0.40% or 0.50%. The upper limit of the Si content may be 0.90% or 0.80%.
(Mn:0.50~2.00%)
Mnは、Sと化合物を形成し、被削性を向上させる元素である。また、鋳造、鍛造時の割れを抑制する元素でもある。Mnの含有量が多くなると熱膨張係数が増加するため、被削性と熱膨張係数のバランスを考慮し、Mn量は0.50~2.00%とする。Mn量の下限は、0.60%、0.70%、0.80%としてもよい。Mn量の上限は、1.90%、1.80%、1.70%としてもよい。
(Mn: 0.50-2.00%)
Mn is an element that forms a compound with S and improves machinability. It is also an element that suppresses cracking during casting and forging. Since an increase in the Mn content increases the thermal expansion coefficient, the Mn content is set to 0.50 to 2.00% in consideration of the balance between machinability and the thermal expansion coefficient. The lower limit of the Mn content may be 0.60%, 0.70%, or 0.80%. The upper limit of the Mn content may be 1.90%, 1.80%, or 1.70%.
(S:0.030~0.150%)
Sは、Mnと化合物を形成し、被削性を向上させる元素である。S量が多くなると、Sが粒界に偏析することで合金が脆化し、鋳造、鍛造時に割れが生じやすくなるので、被削性と合金の脆化のバランスを考慮し、S量は0.030~0.150%とする。S量の下限は、0.040%、0.050%、0.060%としてもよい。S量の上限は、0.140%、0.130%、0.120%としてもよい。
(S: 0.030-0.150%)
S is an element that forms a compound with Mn and improves machinability. If the S content is too high, S segregates at grain boundaries, embrittling the alloy and making it more susceptible to cracking during casting and forging. Therefore, taking into consideration the balance between machinability and embrittlement of the alloy, the S content is set to 0.030 to 0.150%. The lower limit of the S content may be 0.040%, 0.050%, or 0.060%. The upper limit of the S content may be 0.140%, 0.130%, or 0.120%.
(Ni:27.00~38.00%)
Niは、熱膨張係数を低下させる元素である。本発明の低熱膨張合金は、25~100℃の平均熱膨張係数が3.0×10-6/℃以下である。この熱膨張係数は、主として、Ni及びCoの含有量を適切な範囲とすることで得られる。Ni量は多すぎても少なすぎても熱膨張係数が十分に小さくならない。熱膨張係数を十分に小さくするために、Ni量は27.00~38.00%とする。Ni量の下限は、28.00%、29.00%、30.00%としてもよい。Ni量の上限は、37.00%、36.00%、35.00%としてもよい。
(Ni: 27.00-38.00%)
Ni is an element that lowers the thermal expansion coefficient. The low thermal expansion alloy of the present invention has an average thermal expansion coefficient of 3.0 × 10 -6 /°C or less at 25 to 100°C. This thermal expansion coefficient is mainly obtained by setting the Ni and Co contents within appropriate ranges. If the Ni content is too high or too low, the thermal expansion coefficient will not be sufficiently low. In order to sufficiently reduce the thermal expansion coefficient, the Ni content is set to 27.00 to 38.00%. The lower limit of the Ni content may be 28.00%, 29.00%, or 30.00%. The upper limit of the Ni content may be 37.00%, 36.00%, or 35.00%.
(Co:0~12.00%)
Coは、Niとの組み合わせにより熱膨張係数の低下に寄与する。Coの含有量は0であってもよい。所望の熱膨張係数を得るため、Coの範囲は0~12.00%とする。Co量の上限は、11.00%、10.00%、8.00%としてもよい。
(Co: 0-12.00%)
Co contributes to a decrease in the thermal expansion coefficient in combination with Ni. The Co content may be 0. To obtain a desired thermal expansion coefficient, the Co content ranges from 0 to 12.00%. The upper limit of the Co content may be 11.00%, 10.00%, or 8.00%.
(sol.Al:0.003~0.100%)
sol.Alは、被削性を向上させる元素である。熱膨張係数を増加させる元素でもあるので、被削性と熱膨張係数のバランスを考慮し、sol.Al量は0.003~0.100%とする。ここで、sol.Alとは、Al2O3等の酸化物になっておらず、酸に可溶する酸可溶Alを意味する。sol.Alの含有量は、Alの分析過程で生じるろ紙上の不溶解残渣を控除して測定したAlとして求められる。sol.Al量の下限は、0.010%、0.020%、0.030%としてもよい。sol.Al量の上限は、0.090%、0.080%、0.070%としてもよい。
(sol. Al: 0.003 to 0.100%)
Sol. Al is an element that improves machinability. Since it also increases the thermal expansion coefficient, the sol. Al content is set to 0.003 to 0.100% in consideration of the balance between machinability and the thermal expansion coefficient. Here, sol. Al refers to acid-soluble Al that is soluble in acid and does not form oxides such as Al2O3 . The sol. Al content is determined by subtracting the insoluble residue on the filter paper generated during the Al analysis process. The lower limit of the sol. Al content may be 0.010%, 0.020%, or 0.030%. The upper limit of the sol. Al content may be 0.090%, 0.080%, or 0.070%.
(O:0.010%以下)
Oは不純物として含有される元素であり、必須の元素ではなく、下限は0である。OはAlと結合するとアルミナを形成する。アルミナは硬いため、工具の摩耗を促進する。また、アルミナが形成することにより、sol.Al量が減少し、被削性が低下する。そのためO量は0.010%以下とする。好ましくは、0.008%以下、より好ましくは0.007%以下、さらに好ましくは0.006%以下である。
(O: 0.010% or less)
O is an element contained as an impurity, not an essential element, and the lower limit is 0. O forms alumina when combined with Al. Alumina is hard and promotes tool wear. Furthermore, the formation of alumina reduces the amount of sol. Al, which reduces machinability. Therefore, the O content is set to 0.010% or less. Preferably, it is 0.008% or less, more preferably 0.007% or less, and even more preferably 0.006% or less.
成分組成の残部は、Fe及び不純物である。ここでいう不純物とは、主として本発明で規定する成分組成を有する鋳物を工業的に製造する際に、原料や製造環境等から不可避的に混入するものであり、上述の元素以外で、混入しても、本発明の低熱膨張合金の被削性、熱膨張係数を害さないものをいう。例えば、0.050%以下のPが挙げられる。The remainder of the composition is Fe and impurities. The term "impurities" refers primarily to elements that are inevitably mixed in from raw materials or the manufacturing environment during the industrial production of castings having the composition specified in this invention. These elements are elements other than those mentioned above that, even if mixed in, do not impair the machinability or thermal expansion coefficient of the low thermal expansion alloy of this invention. For example, 0.050% or less of P is an example.
本発明の低熱膨張合金は、さらに、Mn、S、Ni、Co、Siの含有量を質量%で表した[Mn]、[S]、[Ni]、[Co]、[Si]が、以下の式を満たす。 The low thermal expansion alloy of the present invention further has the following formula: [Mn], [S], [Ni], [Co], [Si], where [Mn], [S], [Ni], [Co], and [Si] are the contents of Mn, S, Ni, Co, and Si expressed in mass %.
([Mn]/[S]≧10.0)
[Mn]/[S]は、SがMnと十分に化合物を形成し、被削性を向上させるため10.0以上とする。好ましくは15.0以上、より好ましくは20.0以上、さらに好ましくは30.0以上である。[Mn]/[S]が小さいことは、S量がMn量に対して相対的に大きいことを意味し、Sが粒界に偏析する量が増えるため、鋳造、鍛造時に割れが生じやすくなる可能性がある。
([Mn]/[S]≧10.0)
The ratio [Mn]/[S] is set to 10.0 or more so that S can sufficiently form compounds with Mn and improve machinability. It is preferably 15.0 or more, more preferably 20.0 or more, and even more preferably 30.0 or more. A small ratio [Mn]/[S] means that the amount of S is relatively large compared to the amount of Mn, and the amount of S segregating to grain boundaries increases, which may make cracks more likely to occur during casting and forging.
(32.0%≦[Ni]+0.4[Co]≦38.0%)
NiとCoは、ともに熱膨張係数を低下させる元素であるが、その組み合わせを最適化することで、熱膨張係数をより低下させることができ、[Ni]+0.4[Co]を32.0~38.0%とする。[Ni]+0.4[Co]の下限は、好ましくは32.5%、より好ましくは33.0%である。[Ni]+0.4[Co]の上限は、好ましくは37.0%、より好ましくは36.0%、さらに好ましくは35.0%である。
(32.0%≦[Ni]+0.4[Co]≦38.0%)
Both Ni and Co are elements that reduce the thermal expansion coefficient, and optimizing their combination can further reduce the thermal expansion coefficient, so [Ni] + 0.4[Co] is set to 32.0 to 38.0%. The lower limit of [Ni] + 0.4[Co] is preferably 32.5%, more preferably 33.0%. The upper limit of [Ni] + 0.4[Co] is preferably 37.0%, more preferably 36.0%, and even more preferably 35.0%.
([Si]+[Mn]≦2.50%)
SiとMnは、ともに被削性を向上させる元素であるが、熱膨張係数を増加させるので、合計量を2.50%以下とする。好ましくは2.30%以下、より好ましくは2.00%以下である。
([Si]+[Mn]≦2.50%)
Both Si and Mn are elements that improve machinability, but increase the thermal expansion coefficient, so the total content is set to 2.50% or less, preferably 2.30% or less, and more preferably 2.00% or less.
(25~100℃の平均熱膨張係数が3.0×10-6/℃以下)
本発明の低熱膨張合金は、25~100℃の平均熱膨張係数が3.0×10-6/℃以下である。上述のとおり、この熱膨張係数は、主として、Ni及びCoの含有量を適切な範囲とすることで得られる。25~100℃の平均熱膨張係数は、2.80×10-6/℃以下、2.60×10-6/℃以下、2.40×10-6/℃以下、2.20×10-6/℃以下、2.00×10-6/℃以下、1.80×10-6/℃以下であってよい。
(Average thermal expansion coefficient between 25 and 100°C is 3.0 x 10-6 /°C or less)
The low thermal expansion alloy of the present invention has an average thermal expansion coefficient of 3.0×10 -6 /°C or less from 25 to 100°C. As described above, this thermal expansion coefficient is obtained mainly by setting the Ni and Co contents within appropriate ranges. The average thermal expansion coefficient from 25 to 100°C may be 2.80×10 -6 /°C or less, 2.60×10 -6 /°C or less, 2.40×10 -6 /°C or less, 2.20×10 -6 /°C or less, 2.00×10 -6 /°C or less, or 1.80×10 -6 /°C or less.
熱膨張係数は、熱膨張測定装置を用いて、-1~130℃の範囲を、昇温速度3℃/minで測定する。熱膨張測定装置としては、BRUKER社製TD5030Sを使用することができる。 The thermal expansion coefficient is measured using a thermal expansion measuring device in the range of -1 to 130°C at a heating rate of 3°C/min. A BRUKER TD5030S thermal expansion measuring device can be used.
次に、本発明の低熱膨張合金を得るための製造方法の一例について説明する。 Next, we will explain one example of a manufacturing method for obtaining the low thermal expansion alloy of the present invention.
本発明の低熱膨張合金は、
(1)所望の成分組成となるように調整した原料を溶融、凝固させ、鋳造品を製造し、
(2)得られた鋳造品に、溶体化処理を施し、
(3)溶体化処理を施した鋳造品に、応力除去焼きなましを施す
工程を備える製造方法により、製造される。
The low thermal expansion alloy of the present invention is
(1) A raw material adjusted to have a desired composition is melted and solidified to produce a casting.
(2) The resulting casting is subjected to a solution treatment.
(3) It is manufactured by a manufacturing method including a step of subjecting a casting that has been subjected to solution treatment to stress relief annealing.
上記の製造方法により得られた鋳造品に鍛造を施し、鍛造品としてもよい。鍛造は、鋳造合金を製造した後、溶体化処理の前に行う。すなわち、本発明の低熱膨張合金は
(1)所望の成分組成となるように調整した原料を溶融、凝固させ、鋳造品を製造し、
(2)得られた鋳造品に、鍛造を施し、
(3)鍛造後の鍛造品に、溶体化処理を施し、
(4)溶体化処理を施した鍛造品に、応力除去焼きなましを施す
工程を備える製造方法により製造されてもよい。
The casting obtained by the above manufacturing method may be forged to produce a forged product. Forging is performed after the casting alloy is manufactured and before the solution treatment. That is, the low thermal expansion alloy of the present invention can be produced by: (1) melting and solidifying raw materials adjusted to have a desired composition, and producing a casting;
(2) Forging the obtained casting;
(3) The forged product is subjected to a solution treatment,
(4) The steel sheet may be manufactured by a manufacturing method including a step of subjecting a forged product that has been subjected to a solution treatment to stress relief annealing.
鋳造品の製造に用いる鋳型や、鋳型への溶融合金の注入装置、注入方法は特に限定されるものではなく、公知の装置、方法を用いればよい。 There are no particular restrictions on the mold used to produce the casting, the equipment used to inject the molten alloy into the mold, or the method of injecting the alloy, and any known equipment or method may be used.
溶体化処理は、鋳造品を750~850℃に加熱し、0.5~3hr保持した後、急冷する。冷却速度は10℃/min以上が好ましく、100℃/min以上がより好ましい。溶体化処理により、熱膨張係数を低下させることができる。 Solution treatment involves heating the casting to 750-850°C, holding for 0.5-3 hours, and then rapidly cooling. The cooling rate is preferably 10°C/min or more, and more preferably 100°C/min or more. Solution treatment can reduce the thermal expansion coefficient.
応力除去焼きなましは、300~350℃で1~5hr保持し、その後空冷する。 Stress relief annealing involves holding the material at 300-350°C for 1-5 hours, followed by air cooling.
溶体化処理、応力除去焼きなましは、鋳造後に替えて、鍛造後に施してもよい。 Solution treatment and stress relief annealing may be performed after forging instead of after casting.
鋳造品に鍛造を施す場合は、鋳造品を加熱炉内で1050~1250℃に加熱し、その後、熱間鍛造を施す。その際の鍛錬比は3以上が好ましい。熱間鍛造を施した場合でも本発明の低熱膨張合金の低熱膨張特性はほぼ維持される。また、熱間圧延及び冷間圧延により厚さ0.1~10mmに加工をすることも可能である。その場合でも、低熱膨張特性はほぼ維持される。 When forging a casting, the casting is heated to 1050-1250°C in a heating furnace and then hot forged. A forging ratio of 3 or more is preferable. Even when hot forging is performed, the low thermal expansion properties of the low thermal expansion alloy of the present invention are largely maintained. It is also possible to process the alloy to a thickness of 0.1-10 mm by hot rolling and cold rolling. Even in this case, the low thermal expansion properties are largely maintained.
本発明の成分組成を有する合金であれば、上述のとおり、特別な製法を用いることなく、被削性に優れた低熱膨張合金を得ることが可能である。 As mentioned above, an alloy having the component composition of the present invention can be used to obtain a low thermal expansion alloy with excellent machinability without using any special manufacturing methods.
本発明の低熱膨張合金(鋳造品、及び鍛造品を含む)を加工することで、たとえば、エレクトロニクスや半導体関連機器、レーザ加工機、超精密加工機器に用いる合金部品を得ることができる。本発明の低熱膨張合金は、熱的に安定であり、かつ被削性に優れているので、合金部品の材料として好適である。 By processing the low thermal expansion alloy of the present invention (including cast and forged products), alloy parts for use in, for example, electronics and semiconductor-related equipment, laser processing machines, and ultra-precision processing equipment can be obtained. The low thermal expansion alloy of the present invention is thermally stable and has excellent machinability, making it suitable as a material for alloy parts.
高周波溶解炉を用いて、表1に示す成分組成となるように調整した鋳造品(Y型供試材と、インゴット10kg)を溶製した。表1、表2に「鍛造品」と記載された実施例については、得られたインゴットを加熱炉内で1200℃に加熱した後熱間鍛造を施し、鍛造品(40mm角の棒材)とした。鍛錬比は5以上になるようにした。Using a high-frequency melting furnace, cast products (Y-type test material and 10 kg ingots) were melted to have the chemical composition shown in Table 1. For the examples labeled "forged products" in Tables 1 and 2, the resulting ingots were heated to 1200°C in a heating furnace and then hot forged to form forged products (40 mm square bars). The forging ratio was set to 5 or more.
得られた鋳造品、鍛造品それぞれに対して、800℃に加熱し、1.5hr保持する溶体化処理を施し、溶体化処理の後、300℃で3hr保持して空冷する応力焼きなまし処理を施した。 The resulting cast and forged products were each subjected to solution treatment by heating to 800°C and holding for 1.5 hours.After solution treatment, they were subjected to stress annealing by holding at 300°C for 3 hours and then air-cooling.
応力焼きなまし処理後の鋳造品、鍛造品それぞれから、熱膨張係数測定試験片、被削性評価用試験片を採取した。 Test pieces for measuring the thermal expansion coefficient and for evaluating machinability were taken from each of the cast and forged products after stress annealing.
熱膨張係数については、熱膨張測定装置(BRUKER社製TD5030S)を用いて、-1~130℃の範囲を、昇温速度3℃/minで測定し、25℃から100℃の平均熱膨張係数を求めた。 The thermal expansion coefficient was measured using a thermal expansion measuring device (BRUKER TD5030S) in the range of -1 to 130°C at a heating rate of 3°C/min, and the average thermal expansion coefficient from 25°C to 100°C was calculated.
被削性、切りくずの破砕性については、被削性評価用試験片を、ドリル径φ2.6mmのドリル(コバルトハイス、TiNコーティング)を用いて、水溶性切削油剤を使用し、切削速度:45m/min、送り量:0.052mm/minで、加工深さ13mmの穴あけ加工(ノンステップ加工)を行い評価した。 Machinability and chip crushability were evaluated by drilling the test pieces for machinability evaluation to a depth of 13 mm (non-step drilling) using a drill diameter of 2.6 mm (cobalt high-speed steel, TiN coating) and a water-soluble cutting fluid at a cutting speed of 45 m/min and a feed rate of 0.052 mm/min.
被削性は工具摩耗量、切りくずの破砕性で評価した。図1を参照して、工具摩耗量について説明する。工具摩耗量については、100穴加工後のドリルについて、図1に示すように、ドリルの母材が見えるところ(1)から切れ刃(2)までの距離とし、工具摩耗量が0.05mm以下の場合、良好であると判断した。なお、表2の「穿孔不可」は、ドリルの折損、若しくは欠損が確認され、又は穿孔中に異音が発生し、穿孔不可と判断したものである。また、「鍛造割れ」と記載された実施例では、鍛造時に割れが生じたため、熱膨張係数、工具摩耗量、及び切りくずの破砕性の評価は行わなかった。Machinability was evaluated based on tool wear and chip friability. Referring to Figure 1, tool wear is explained. Regarding tool wear, the distance from the visible point of the drill base material (1) to the cutting edge (2) was measured for a drill after drilling 100 holes, as shown in Figure 1. Tool wear of 0.05 mm or less was considered to be good. Note that "Drilling Unavailable" in Table 2 indicates drilling unavailability due to confirmed breakage or chipping of the drill or the generation of abnormal noise during drilling. Furthermore, in examples marked with "Forging Crack," cracks occurred during forging, so evaluation of the thermal expansion coefficient, tool wear, and chip friability were not performed.
図2を参照して、切りくずの破砕性について説明する。切りくずの破砕性は、切りくずを観察して80%以上の切りくずが、長さが1cm以下で分断されていれば良好と評価して「○」とした。図2の(a)が切りくずの破砕性が良好である例、(b)が破砕性が劣る例である。なお、表2の「×伸びる」は、20%超の切りくずで、長さが1cmを超えたことを意味する。 Referring to Figure 2, chip friability will be explained. Chip friability was evaluated as good if 80% or more of the chips were observed and broken into pieces with a length of 1 cm or less, and given a "○" rating. Figure 2 (a) shows an example of good chip friability, while (b) shows an example of poor chip friability. Note that "x elongation" in Table 2 means that more than 20% of the chips exceeded 1 cm in length.
結果を表2に示す。工具摩耗量、切りくずの破砕性の評価がともに良好なものを、被削性が良好であると判断した。The results are shown in Table 2. Tools with good evaluations of both tool wear and chip friability were judged to have good machinability.
No.1~14は発明例であり、熱膨張係数が小さく、工具摩耗量、切りくずの破砕性も良好であり、本発明の低熱膨張合金は、鋳造品、鍛造品とも良好な被削性を有することが確認できた。 Nos. 1 to 14 are examples of the invention, and have a low thermal expansion coefficient, good tool wear, and good chip friability. It was confirmed that the low thermal expansion alloys of the present invention have good machinability for both cast and forged products.
No.15はSi量が小さく、工具摩耗量が大きくなった。 No. 15 had a low Si content, resulting in increased tool wear.
No.16はSi量が大きく、さらに[Si]+[Mn]が大きく、熱膨張係数が大きかった。 No. 16 had a large Si content, a large [Si] + [Mn] ratio, and a large thermal expansion coefficient.
No.17はMn量が小さく、さらに[Mn]/[S]が小さく、鍛造割れが生じた。 No. 17 had a low Mn content and a low [Mn]/[S] ratio, resulting in forging cracks.
No.18はMn量が大きく、さらに[Si]+[Mn]が大きく、熱膨張係数が大きかった。 No. 18 had a large Mn content, a large [Si] + [Mn] ratio, and a large thermal expansion coefficient.
No.19はS量が小さく、工具摩耗量が大きく、切りくずの破砕性が悪かった。 No. 19 had a low S content, resulting in high tool wear and poor chip crushability.
No.20はS量が大きく、さらに[Mn]/[S]が小さく、鍛造割れが生じた。 No. 20 had a large amount of S and a small [Mn]/[S] ratio, resulting in forging cracks.
No.21はNi量が小さく、熱膨張係数が大きかった。 No. 21 had a small amount of Ni and a large thermal expansion coefficient.
No.22はNi量が大きく、熱膨張係数が大きかった。 No. 22 had a high Ni content and a high thermal expansion coefficient.
No.23はCo量が大きく、熱膨張係数が大きかった。 No. 23 had a high Co content and a high thermal expansion coefficient.
No.24はsol.Al量が小さく、さらにO量が大きく、工具摩耗量大きくなった。 No. 24 had a low amount of sol. Al and a high amount of O, resulting in increased tool wear.
No.25は[Mn]/[S]が小さく、鍛造割れが生じた。 No. 25 had a small [Mn]/[S] ratio, resulting in forging cracks.
No.26は[Ni]+0.4[Co]が小さく、熱膨張係数が大きかった。 No. 26 had a small [Ni] + 0.4 [Co] and a large thermal expansion coefficient.
No.27は[Ni]+0.4[Co]が大きく、さらに、[Si]+[Mn]が大きく、熱膨張係数が大きかった。 No. 27 had a large [Ni] + 0.4 [Co], and also a large [Si] + [Mn], resulting in a large thermal expansion coefficient.
No.28は[Si]+[Mn]が大きく、熱膨張係数が大きかった。 No. 28 had a large [Si] + [Mn] and a large thermal expansion coefficient.
No.29~33は、Si量、Mn量、S量が小さく、工具摩耗量が大きく、切りくずの破砕性が悪かった。 Nos. 29 to 33 had low amounts of Si, Mn, and S, resulting in high tool wear and poor chip crushability.
1 ドリルの母材が見えるところ
2 切れ刃
1. The drill base material is visible. 2. Cutting edge
Claims (1)
C :0.050%以下、
Si:0.30~1.00%、
Mn:0.50~2.00%、
S :0.030~0.150%、
Ni:27.00~38.00%、
Co:0~12.00%、
sol.Al:0.003~0.100%、
O :0.010%以下
を含有し、残部がFe及び不純物であり、
Mn、S、Ni、Co、Siの含有量を質量%で表した[Mn]、[S]、[Ni]、[Co]、[Si]が、
[Mn]/[S]≧10.0、
32.0%≦[Ni]+0.4[Co]≦38.0%、
[Si]+[Mn]≦2.50%
を満たし、
25~100℃における平均熱膨張係数が3.0×10-6/℃以下である
ことを特徴とする低熱膨張合金。 In mass%,
C: 0.050% or less,
Si: 0.30-1.00%,
Mn: 0.50-2.00%,
S: 0.030-0.150%,
Ni: 27.00-38.00%,
Co: 0-12.00%,
sol. Al: 0.003 to 0.100%,
O: 0.010% or less, the balance being Fe and impurities;
The contents of Mn, S, Ni, Co, and Si expressed in mass% are [Mn], [S], [Ni], [Co], and [Si],
[Mn]/[S]≧10.0,
32.0%≦[Ni]+0.4[Co]≦38.0%,
[Si]+[Mn]≦2.50%
Fulfilling
A low thermal expansion alloy characterized in that the average thermal expansion coefficient at 25 to 100°C is 3.0 x 10 -6 /°C or less.
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| JP2001262277A (en) | 2000-03-17 | 2001-09-26 | Nippon Chuzo Kk | Low thermal expansion alloy excellent in machinability and its producing method |
| JP2003286546A (en) | 2002-03-28 | 2003-10-10 | Nippon Chuzo Kk | Low-heat expansion cast alloy excellent in hardness and strength at normal temperature and low in crack sensitivity in casting |
| JP2012530001A (en) | 2009-06-11 | 2012-11-29 | フォード モーター カンパニー | Low thermal expansion coefficient slush mold having a textured surface, method for producing the same, and method for using the same |
| JP2018145491A (en) | 2017-03-07 | 2018-09-20 | 新報国製鉄株式会社 | Low thermal expansion alloy |
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| JPS6051547B2 (en) | 1982-05-29 | 1985-11-14 | 新一 榎本 | Low thermal expansion cast iron |
| JP2568022B2 (en) | 1988-11-02 | 1996-12-25 | 株式会社東芝 | Machine tools, precision measuring instruments, molding dies, semiconductor devices and electronic manufacturing equipment using low thermal expansion cast iron |
| JP2019065344A (en) * | 2017-09-29 | 2019-04-25 | 新報国製鉄株式会社 | Low thermal expansion alloy |
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| JP2001262277A (en) | 2000-03-17 | 2001-09-26 | Nippon Chuzo Kk | Low thermal expansion alloy excellent in machinability and its producing method |
| JP2003286546A (en) | 2002-03-28 | 2003-10-10 | Nippon Chuzo Kk | Low-heat expansion cast alloy excellent in hardness and strength at normal temperature and low in crack sensitivity in casting |
| JP2012530001A (en) | 2009-06-11 | 2012-11-29 | フォード モーター カンパニー | Low thermal expansion coefficient slush mold having a textured surface, method for producing the same, and method for using the same |
| JP2018145491A (en) | 2017-03-07 | 2018-09-20 | 新報国製鉄株式会社 | Low thermal expansion alloy |
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