JP7779077B2 - How to operate a pure water production system - Google Patents
How to operate a pure water production systemInfo
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Description
本発明は、純水製造システムの運転方法に係り、特に所定温度の純水を生産するようにチラーシステムを備えた純水製造システムの運転方法に関する。 The present invention relates to a method for operating a pure water production system, and in particular to a method for operating a pure water production system equipped with a chiller system to produce pure water at a predetermined temperature.
半導体製造工程等の排水を原水として用い、純水を製造するシステムが用いられている（特許文献１）。この純水製造システムは、原水をＲＯ（逆浸透）処理するＲＯ装置と、ＲＯ装置の透過水をイオン交換処理するイオン交換装置等を備えている。 A system is in use that produces pure water using wastewater from semiconductor manufacturing processes and other processes as raw water (Patent Document 1). This pure water production system includes an RO (reverse osmosis) device that treats the raw water with RO, and an ion exchange device that performs ion exchange on the water that passes through the RO device.
本発明は、チラーシステムを備えた純水製造システムにより純水を製造する方法において、所定温度の純水を製造することができる純水製造システムの運転方法を提供することを課題とする。 The present invention aims to provide a method for producing pure water using a pure water production system equipped with a chiller system, and an operating method for the system that can produce pure water at a predetermined temperature.
本発明の純水製造システムの運転方法の要旨は、次の通りである。 The gist of the method for operating the pure water production system of the present invention is as follows:
［１］ 原水槽と、
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
前記純水槽又は前記純水取り出し手段で取り出した純水の温度が規定温度よりも上昇したときに、前記純水返送手段により一部の純水を前記原水槽に返送することを特徴とする純水製造システムの運転方法。
[1] A raw water tank;
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
A method for operating a pure water production system, characterized in that when the temperature of the pure water taken out by the pure water tank or the pure water taking-out means rises above a specified temperature, the pure water taking-out means returns a portion of the pure water to the raw water tank.
［２］ 前記純水返送手段により一部の純水を原水槽に返送すると共に、前記中間槽に工業用水を供給する［１］の純水製造システムの運転方法。 [2] A method for operating the pure water production system of [1], in which the pure water return means returns a portion of the pure water to the raw water tank and supplies industrial water to the intermediate tank.
［３］ 前記中間槽への工業用水の供給に合わせて前記イオン交換装置の運転条件を調整する［２］の純水製造システムの運転方法。 [3] The method for operating a pure water production system according to [2], wherein the operating conditions of the ion exchange device are adjusted in accordance with the supply of industrial water to the intermediate tank.
［４］ 前記受け入れ手段に高温排水が流入することにより、受け入れ手段の水温が所定温度よりも高くなったときに該受け入れ手段に工業用水を供給する［１］～［３］のいずれかの純水製造システムの運転方法。 [4] A method for operating a pure water production system according to any one of [1] to [3], in which industrial water is supplied to the receiving means when the water temperature of the receiving means rises above a predetermined temperature due to high-temperature wastewater flowing into the receiving means.
［５］ 原水槽と、
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
前記受け入れ手段に高温排水が流入することにより、受け入れ手段の水温が所定温度よりも高くなったときに該受け入れ手段に工業用水を供給することを特徴とする純水製造システムの運転方法。
[5] a raw water tank;
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
A method for operating a pure water production system, comprising supplying industrial water to the receiving means when the water temperature of the receiving means becomes higher than a predetermined temperature due to high-temperature wastewater flowing into the receiving means.
［６］ 原水槽と、
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
該ヒートポンプの凝縮器と前記第２熱交換器とを循環する媒体の温度が所定温度よりも高くなったときに該受け入れ手段に工業用水を供給することを特徴とする純水製造システムの運転方法。
[6] a raw water tank;
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
a supply of industrial water to said receiving means when the temperature of the medium circulating through said heat pump condenser and said second heat exchanger exceeds a predetermined temperature;
［７］ 前記受け入れ手段に供給する工業用水は井水である［４］～［６］のいずれかの純水製造システムの運転方法。 [7] A method for operating a pure water production system according to any one of [4] to [6], wherein the industrial water supplied to the receiving means is well water.
［８］ 前記受け入れ手段は、中和槽と、該中和槽からの水が流入する貯留槽と、該貯留槽から水を流出させる流出手段とを有しており、
前記ＲＯ装置の濃縮水及び前記高温排水は該中和槽に導入される［４］～［７］のいずれかの純水製造システムの運転方法。
[8] The receiving means includes a neutralization tank, a storage tank into which water from the neutralization tank flows, and an outflow means for causing water to flow out of the storage tank,
The method for operating a pure water production system according to any one of [4] to [7], wherein the concentrated water from the RO device and the high-temperature wastewater are introduced into the neutralization tank.
［９］ 前記第２熱交換器に、該貯留槽内の水が循環通水される［８］の純水製造システムの運転方法。 [9] A method for operating a pure water production system according to [8], in which water in the storage tank is circulated through the second heat exchanger.
［１０］ 前記高温排水はボイラドレン水である［４］～［９］のいずれかの純水製造システムの運転方法。 [10] A method for operating a pure water production system according to any one of [4] to [9], wherein the high-temperature wastewater is boiler drain water.
本発明によると、原水槽と、該原水槽からの水をＲＯ処理するＲＯ装置と、該ＲＯ装置の透過水を受け入れる中間槽と、該中間槽からの中間水と熱交換する第１熱交換器と、該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、該イオン交換装置を通過した純水を受け入れる純水槽と、該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、該受け入れ手段からの水が循環通水される第２熱交換器と、前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムとを有する純水製造システムにおいて、純水送水を止めることなく所定温度の純水を製造することができる。
According to the present invention, a raw water tank, an RO device for RO-treating water from the raw water tank, an intermediate tank for receiving permeated water from the RO device, a first heat exchanger for heat exchange with intermediate water from the intermediate tank, an ion exchange device through which the intermediate water that has been heat exchanged in the first heat exchanger is passed, a pure water tank for receiving pure water that has passed through the ion exchange device, and pure water removal means for removing pure water from the pure water tank.
In a pure water production system having a pure water return means for returning a portion of the pure water extracted by the pure water extraction means to the raw water tank or intermediate tank, a receiving means for receiving concentrated water from the RO device, a second heat exchanger through which water from the receiving means is circulated, and a chiller system with a heat pump for transferring heat from the first heat exchanger to the second heat exchanger, pure water of a predetermined temperature can be produced without stopping the supply of pure water.
以下、図面を参照して実施の形態について説明する。 The following describes the embodiments with reference to the drawings.
原水（この実施の形態では、工場排水又はその処理水。ただし、これに限定されない。）は、原水槽１に導入され、ポンプ２及び配管３を介して膜濾過装置４に送水され、膜濾過される。膜濾過装置４としては、この実施の形態ではＭＦ装置が用いられているが、原水中の懸濁物質等を除去できるものであればよく、ＭＦ装置に限定されず、また膜濾過装置以外の濾過装置を採用してもよい。 Raw water (in this embodiment, industrial wastewater or treated water, but not limited to this) is introduced into raw water tank 1 and sent to membrane filtration device 4 via pump 2 and piping 3, where it is subjected to membrane filtration. In this embodiment, an MF device is used as the membrane filtration device 4, but any device capable of removing suspended solids and the like from the raw water is sufficient; it is not limited to an MF device, and filtration devices other than membrane filtration devices may also be used.
膜濾過装置４で濾過された濾過水は、配管５からＲＯ装置６に送水され、ＲＯ処理水（透過水）が配管７を介して中間槽８に送水され、貯留される。 The filtered water from the membrane filtration device 4 is sent via pipe 5 to the RO device 6, and the RO-treated water (permeate) is sent via pipe 7 to the intermediate tank 8 where it is stored.
中間槽８内のＲＯ処理水は、ポンプ９及び配管１０を介して第１熱交換器１１に送水され、熱交換して所定温度とされた後、配管１２を介してイオン交換装置１３に送水される。イオン交換装置１３にてイオン交換処理されることにより生じた純水は、配管１４を介して純水槽１５に導入され、貯留される。純水槽１５内の純水は、ポンプ１６及び配管１７によって取り出され、純水需要先へ送水される。 The RO-treated water in the intermediate tank 8 is sent to the first heat exchanger 11 via pump 9 and piping 10, where it is heat exchanged to a predetermined temperature and then sent to the ion exchanger 13 via piping 12. The pure water produced by the ion exchange process in the ion exchanger 13 is introduced into the pure water tank 15 via piping 14 and stored there. The pure water in the pure water tank 15 is extracted by pump 16 and piping 17 and sent to the pure water demand destination.
イオン交換装置１３としては、２床３塔式、３床４塔式など各種構成のものを用いることができる。 Various configurations of ion exchange unit 13 can be used, such as a two-bed, three-tower system or a three-bed, four-tower system.
配管１７からは純水返送用配管１８が分岐している。該配管１８の下流側は配管１９，２１に分岐しており、純水が配管１９、弁２０を介して中間槽８に導入可能とされると共に、配管２１、弁２２を介して原水槽１に導入可能とされている。 Pure water return pipe 18 branches off from pipe 17. The downstream side of pipe 18 branches off into pipes 19 and 21, allowing pure water to be introduced into intermediate tank 8 via pipe 19 and valve 20, and into raw water tank 1 via pipe 21 and valve 22.
中間槽８には、配管２３及び弁２４を介して工水（工業用水、井水、水道水など）が導入可能とされている。 Industrial water (industrial water, well water, tap water, etc.) can be introduced into the intermediate tank 8 via piping 23 and valve 24.
ＲＯ装置６のブライン（濃縮水）は、配管３０を介して中和槽４０に導入される。中和槽４０には、配管３１及び弁３２を介して工水（この実施の形態では井水）が導入可能とされている。配管２３で供給される工水と配管３１で供給される工水とは、同一種類であってもよく、異種類であってもよい。 The brine (concentrated water) from the RO device 6 is introduced into the neutralization tank 40 via pipe 30. Industrial water (well water in this embodiment) can be introduced into the neutralization tank 40 via pipe 31 and valve 32. The industrial water supplied via pipe 23 and the industrial water supplied via pipe 31 may be the same type or different types.
中和槽４０には蒸気の凝縮水であるボイラドレン水がドレンタンク及びドレンポンプ（図示略）から配管３３を介して導入可能とされている。また、イオン交換装置１３の再生排水が配管３４を介してプレ中和槽３５に導入され、該プレ中和槽３５で中和された後、中和槽４０に導入可能とされている。なお、プレ中和槽３５を省略し、イオン交換装置１３の再生排水を配管３４から直接に中和槽４０に導入してもよい。 Boiler drain water, which is steam condensate, can be introduced into the neutralization tank 40 from a drain tank and drain pump (not shown) via piping 33. Furthermore, regenerated wastewater from the ion exchange unit 13 is introduced into the pre-neutralization tank 35 via piping 34, and after being neutralized in the pre-neutralization tank 35, can be introduced into the neutralization tank 40. It is also possible to omit the pre-neutralization tank 35 and introduce the regenerated wastewater from the ion exchange unit 13 directly into the neutralization tank 40 via piping 34.
中和槽４０において酸又はアルカリ等の中和剤が添加されて中和された中和水が、配管４１を介して貯留槽４２に導入される。貯留槽４２内の水は、ポンプ４５、配管４６を介して第２熱交換器４７に導入され、熱交換器４７で熱交換した後、配管４８を介して貯留槽４２に戻る。 Neutralized water, which has been neutralized in the neutralization tank 40 by adding a neutralizing agent such as acid or alkali, is introduced into the storage tank 42 via piping 41. The water in the storage tank 42 is introduced into the second heat exchanger 47 via pump 45 and piping 46, undergoes heat exchange in the heat exchanger 47, and then returns to the storage tank 42 via piping 48.
なお、貯留槽４２内の水位が所定範囲となるように、ポンプ４３及び配管４４を介して貯留槽４２内の水が排出される。 In addition, water is discharged from the storage tank 42 via the pump 43 and piping 44 so that the water level in the storage tank 42 is within a predetermined range.
第２熱交換器４７は、前記第１熱交換器１１に低温水を循環させるためのチラーシステム（ヒートポンプ利用熱移動システム）４９の一部を構成している。チラーシステム４９の水冷チラー５０は、蒸発器５１からの代替フロン等の熱媒体をコンプレッサ５２で圧縮して凝縮器５３に導入し、凝縮器５３からの凝縮熱媒体を膨張弁５４を介して蒸発器５１に導入するように構成されたヒートポンプである。 The second heat exchanger 47 constitutes part of a chiller system (heat pump-based heat transfer system) 49 for circulating low-temperature water through the first heat exchanger 11. The water-cooled chiller 50 of the chiller system 49 is a heat pump configured to compress a heat medium such as a refrigerant substitute from an evaporator 51 using a compressor 52 and introduce it into a condenser 53, and then introduce the condensed heat medium from the condenser 53 into the evaporator 51 via an expansion valve 54.
凝縮器５３に第２熱交換器４７からの第２媒体水が配管５７を介して導入され、凝縮器５３で加熱された第２媒体水がポンプ５５及び配管５６を介して熱交換器４７に循環される。 The second water medium from the second heat exchanger 47 is introduced into the condenser 53 via piping 57, and the second water medium heated in the condenser 53 is circulated to the heat exchanger 47 via pump 55 and piping 56.
一方、蒸発器５１に通水されることにより低温となった第１媒体水が、配管６０を介して第１熱交換器１１に送水され、貯留槽８からの水（中間水）と熱交換して昇温した後、ポンプ６１及び配管６２を経て蒸発器５１に循環される。 Meanwhile, the first water medium, which has been cooled by passing it through the evaporator 51, is sent to the first heat exchanger 11 via piping 60, where it exchanges heat with water (intermediate water) from the storage tank 8 to raise its temperature, and is then circulated to the evaporator 51 via pump 61 and piping 62.
この実施の形態では、配管１７，５６及び中和槽４０に温度センサＴ１７，Ｔ５６，Ｔ４０が設けられているが、実際には他の箇所にも温度センサが設置されている。温度センサＴ１７は、純水槽１５に設置されてもよい。 In this embodiment, temperature sensors T17, T56, and T40 are provided in the pipes 17 and 56 and the neutralization tank 40, but in practice, temperature sensors are also installed in other locations. Temperature sensor T17 may also be installed in the pure water tank 15.
このように構成された純水製造システムにおいては、定常運転中には、上記の通り、原水がＲＯ装置６でＲＯ処理されて透過水（中間水）となり、該中間水が中間槽８を経て第１熱交換器１１で降温した後、イオン交換装置１３で処理されて純水となり、純水槽１５から配管１７を経て所定温度の純水が取り出される。定常時には、弁２０，２２は閉となっているが、弁２０については小開度とし、少量の純水を配管１８，１９を介して中間槽８に返送してもよい。定常時には、弁２４，３２は閉となっている。 In a pure water production system configured in this manner, during steady-state operation, as described above, raw water undergoes RO treatment in the RO device 6 to produce permeate (intermediate water), which then passes through the intermediate tank 8, where it is cooled in the first heat exchanger 11 and treated in the ion exchange device 13 to produce pure water. Pure water at a predetermined temperature is then extracted from the pure water tank 15 via piping 17. During steady-state operation, valves 20 and 22 are closed, but valve 20 may be slightly opened to return a small amount of pure water to the intermediate tank 8 via piping 18 and 19. During steady-state operation, valves 24 and 32 are closed.
また、定常運転中には、ＲＯ装置６のブラインが中和槽４０から貯留槽４２を経て系外に排出される。第１熱交換器１１において中間水から奪われた熱は、チラーシステム４９を経て、第２熱交換器４７において、貯留槽４２からの循環水に授与（伝熱）され、温排水の形態となって配管４４から系外に排出される。定常運転状態では、第１熱交換器１１から第２熱交換器４７への熱移動量は十分であり、純水槽１５内の純水温度は平常温度（例えば２３℃±１℃）に維持される。 During steady-state operation, the brine from the RO unit 6 is discharged from the neutralization tank 40 to the storage tank 42 and then to the outside of the system. The heat removed from the intermediate water in the first heat exchanger 11 is transferred (heat transferred) to the circulating water from the storage tank 42 in the second heat exchanger 47 via the chiller system 49, and is then discharged to the outside of the system through the piping 44 in the form of heated wastewater. During steady-state operation, the amount of heat transferred from the first heat exchanger 11 to the second heat exchanger 47 is sufficient, and the temperature of the pure water in the pure water tank 15 is maintained at a normal temperature (e.g., 23°C ± 1°C).
この純水製造システムにおいて、種々の原因により純水の水温が定常温度よりも上昇する事態が生じたときの対処法を次に説明する。 The following explains how to deal with situations in which the temperature of the pure water in this pure water production system rises above its steady state temperature due to various causes.
［原水温度や外気温の著しい上昇に起因して純水の水温が上昇する場合］
原水温度や外気温の著しい上昇に起因して純水の水温（温度センサＴ１７の検出温度）が第１規定温度（例えば２３．５℃）よりも高くなった場合には、弁２２を開（小開）とし、配管１７から純水の一部を原水槽１に返送する。これにより、ＲＯ装置６からのブライン量が増加し、貯留槽４２の水温が低下し、貯留槽４２から第２熱交換器４７に循環される水温も低下し、チラーシステム４９を介して第１熱交換器１１から第２熱交換器４７に十分な量の熱が移動し、第１熱交換器１１で中間水を十分に降温させることができるようになり、純水温度（温度センサＴ１７検出温度）が低下する。
[When the temperature of the pure water rises due to a significant rise in the raw water temperature or outside air temperature]
When the temperature of the pure water (the temperature detected by the temperature sensor T17) becomes higher than a first specified temperature (e.g., 23.5°C) due to a significant increase in the raw water temperature or the outside air temperature, the valve 22 is opened (slightly opened), and a portion of the pure water is returned to the raw water tank 1 through the piping 17. This increases the amount of brine from the RO device 6, lowers the water temperature in the storage tank 42, and also lowers the temperature of the water circulated from the storage tank 42 to the second heat exchanger 47. A sufficient amount of heat is transferred from the first heat exchanger 11 to the second heat exchanger 47 via the chiller system 49, allowing the intermediate water to be sufficiently lowered in temperature in the first heat exchanger 11, and the pure water temperature (the temperature detected by the temperature sensor T17) drops.
このように、純水の一部を返送しても純水温度が低下しないときには、純水の返送量を増加させる。純水温度が第１規定温度よりも高い第２規定温度（例えば２４．０℃）に達したときには、弁２４を開とし、中間槽８に井水等の工水を供給し、中間水の温度を低下させる。これにより、純水温度（温度センサＴ１７の検出温度）が低下する。 In this way, if the pure water temperature does not decrease even when a portion of the pure water is returned, the amount of pure water returned is increased. When the pure water temperature reaches a second specified temperature (e.g., 24.0°C) that is higher than the first specified temperature, valve 24 is opened and industrial water such as well water is supplied to intermediate tank 8, lowering the temperature of the intermediate water. This lowers the pure water temperature (the temperature detected by temperature sensor T17).
なお、純水温度が上昇しないときでも、中間槽８内の水位が規定水位よりも低下したときには、弁２４を開とし、中間槽８へ工水を供給してもよい。 Even if the pure water temperature does not rise, if the water level in the intermediate tank 8 drops below the specified water level, the valve 24 may be opened to supply industrial water to the intermediate tank 8.
また、何らかの原因で原水槽１の水位が低下した場合にも、弁２４を開とし、中間槽８に工水を供給してもよい。 Also, if the water level in the raw water tank 1 drops for some reason, the valve 24 can be opened to supply industrial water to the intermediate tank 8.
なお、工水のイオン濃度はＲＯ装置６からのＲＯ透過水のイオン濃度よりも高い。そのため、中間槽８に工水を供給して運転する場合には、イオン交換装置１３の通水条件（イオン交換樹脂の再生時期）を調節することが好ましく、工水の供給量に応じてイオン交換樹脂の再生時期を自動制御するプログラムを導入することが好ましい。 The ion concentration of the industrial water is higher than that of the RO permeate from the RO device 6. Therefore, when operating with industrial water supplied to the intermediate tank 8, it is preferable to adjust the water flow conditions of the ion exchange device 13 (the timing of regeneration of the ion exchange resin), and it is preferable to introduce a program that automatically controls the timing of regeneration of the ion exchange resin according to the amount of industrial water supplied.
［中和槽４０へのボイラドレン水の流入に起因して純水の水温が上昇する場合］
ボイラドレン水はＲＯブラインよりも高温である。そのため、ドレンポンプが作動して、中和槽４０にボイラドレン水が導入されると、中間槽４０からの貯留槽４２への流入水温が上昇する。これによって貯留槽４２内の貯留水の水温が高くなり、貯留槽４２から第２熱交換器４７に循環される水温が高くなり、配管５６を流れる媒体水の温度（温度センサＴ５６の検出温度）が高くなり、その結果、チラーシステム４９を経由して第１熱交換器１１から第２熱交換器４７へ移動する熱量が減少し、第１熱交換器１１で中間水を十分に降温させることができなくなり、生産される純水の水温が上昇することがある。
[When the temperature of the pure water rises due to the inflow of boiler drain water into the neutralization tank 40]
The boiler drain water is hotter than the RO brine. Therefore, when the drain pump is operated and the boiler drain water is introduced into the neutralization tank 40, the temperature of the water flowing from the intermediate tank 40 into the storage tank 42 rises. This increases the temperature of the stored water in the storage tank 42, which in turn increases the temperature of the water circulated from the storage tank 42 to the second heat exchanger 47. This increases the temperature of the water medium flowing through the pipe 56 (the temperature detected by the temperature sensor T56). As a result, the amount of heat transferred from the first heat exchanger 11 to the second heat exchanger 47 via the chiller system 49 decreases, making it impossible to sufficiently lower the temperature of the intermediate water in the first heat exchanger 11, which may result in an increase in the temperature of the pure water produced.
そこで、このように中和槽４０にボイラドレン水が流入して中和槽４０の水温（温度センサＴ４０の検出温度）が所定温度よりも上昇する場合は、弁３２を開とし、工水（この実施の形態では井水）を中和槽４０に導入し、中和槽４０から貯留槽４２への流入水温を平常温度とする。これにより、チラーシステム４９を介して第１熱交換器１１から第２熱交換器４７に十分な量の熱が移動し、第１熱交換器１１で中間水が十分に降温するようになり、定常温度の純水が生産される。 Therefore, when boiler drain water flows into the neutralization tank 40 and the water temperature of the neutralization tank 40 (the temperature detected by temperature sensor T40) rises above a predetermined temperature, valve 32 is opened, industrial water (well water in this embodiment) is introduced into the neutralization tank 40, and the temperature of the water flowing from the neutralization tank 40 to the storage tank 42 is brought to a normal temperature. This allows a sufficient amount of heat to be transferred from the first heat exchanger 11 to the second heat exchanger 47 via the chiller system 49, causing the temperature of the intermediate water in the first heat exchanger 11 to drop sufficiently, producing pure water at a steady temperature.
［その他の原因により配管５６の媒体水温度（温度センサＴ５６検出温度）が上昇する場合］
中和槽４０にボイラドレン水が流入すること以外の何らかの原因によって、温度センサＴ５６が検出する媒体水温度が規定温度よりも上昇することがある。このような場合にも、弁３２を開とし、工水を中和槽４０に導入し、中和槽４０から貯留槽４２への流入水温を平常温度とする。これにより、チラーシステム４９を介して第１熱交換器１１から第２熱交換器４７に十分な量の熱が移動し、第１熱交換器１１で中間水が十分に降温するようになり、定常温度の純水が生産される。
[When the temperature of the medium water in the pipe 56 (temperature detected by the temperature sensor T56) rises due to other causes]
The intermediate water temperature detected by the temperature sensor T56 may rise above the specified temperature due to some cause other than the inflow of boiler drain water into the neutralization tank 40. In such a case, the valve 32 is opened, industrial water is introduced into the neutralization tank 40, and the temperature of the water flowing from the neutralization tank 40 into the storage tank 42 is set to the normal temperature. This allows a sufficient amount of heat to be transferred from the first heat exchanger 11 to the second heat exchanger 47 via the chiller system 49, causing the temperature of the intermediate water in the first heat exchanger 11 to drop sufficiently, producing pure water at a steady temperature.
上記実施の形態において、純水需要先への純水供給が一時的に不要になった場合、配管１７からの純水の全量を原水槽１に返送する。この場合、ＲＯ装置６への給水水質が良好となり、ＲＯブライン量が減少するので、弁３２を開とし、中和槽４０に配管３１から工水を補給することが好ましい。 In the above embodiment, if the supply of pure water to the pure water demand destination is temporarily no longer necessary, the entire amount of pure water from pipe 17 is returned to raw water tank 1. In this case, the quality of the water supplied to RO device 6 improves and the amount of RO brine decreases, so it is preferable to open valve 32 and replenish industrial water from pipe 31 to neutralization tank 40.
上記実施の形態は本発明の一例であり、本発明は上記以外の形態とされてもよい。例えば、上記実施の形態では中和槽４０がボイラドレン水を受け入れるようになっているが、ボイラドレン水以外の高温水を受け入れるものであってもよい。 The above embodiment is one example of the present invention, and the present invention may be embodied in other forms. For example, in the above embodiment, the neutralization tank 40 is configured to receive boiler drain water, but it may also receive high-temperature water other than boiler drain water.
１ 原水槽
４ 膜濾過装置
６ ＲＯ装置
８ 中間槽
１１ 第１熱交換器
１３ イオン交換装置
１５ 純水槽
４０ 中和槽
４２ 貯留槽
４７ 第２熱交換器
４９ チラーシステム
５０ 水冷チラー
REFERENCE SIGNS LIST 1 raw water tank 4 membrane filtration device 6 RO device 8 intermediate tank 11 first heat exchanger 13 ion exchange device 15 pure water tank 40 neutralization tank 42 storage tank 47 second heat exchanger 49 chiller system 50 water-cooled chiller
Claims (9)
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
前記純水槽又は前記純水取り出し手段で取り出した純水の温度が規定温度よりも上昇したときに、前記純水返送手段により一部の純水を前記原水槽に返送することを特徴とする純水製造システムの運転方法。 Raw water tank and
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
A method for operating a pure water production system, characterized in that when the temperature of the pure water taken out by the pure water tank or the pure water taking-out means rises above a specified temperature, the pure water taking-out means returns a portion of the pure water to the raw water tank.
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
前記受け入れ手段の水温が所定温度よりも高くなったときに該受け入れ手段に井水を供給することを特徴とする純水製造システムの運転方法。 Raw water tank and
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
A method for operating a pure water production system, comprising the steps of: supplying well water to said receiving means when the water temperature of said receiving means becomes higher than a predetermined temperature;
該原水槽からの水をＲＯ処理するＲＯ装置と、
該ＲＯ装置の透過水（以下、中間水という。）を受け入れる中間槽と、
該中間槽からの中間水と熱交換する第１熱交換器と、
該第１熱交換器で熱交換した中間水が通水されるイオン交換装置と、
該イオン交換装置を通過した純水を受け入れる純水槽と、
該純水槽から純水を取り出す純水取り出し手段と、
該純水取り出し手段で取り出した純水の一部を前記原水槽又は中間槽に返送する純水返送手段と、
前記ＲＯ装置の濃縮水を受け入れる受け入れ手段と、
該受け入れ手段からの水が循環通水される第２熱交換器と、
前記第１熱交換器からの熱を該第２熱交換器に移動させる、ヒートポンプを有したチラーシステムと
を有する純水製造システムの運転方法であって、
該ヒートポンプの凝縮器と前記第２熱交換器とを循環する媒体の温度が所定温度よりも高くなったときに該受け入れ手段に井水を供給することを特徴とする純水製造システムの運転方法。 Raw water tank and
an RO device that performs RO treatment on the water from the raw water tank;
an intermediate tank for receiving permeated water (hereinafter referred to as intermediate water) from the RO device;
a first heat exchanger that exchanges heat with the intermediate water from the intermediate tank;
an ion exchange device through which the intermediate water that has undergone heat exchange in the first heat exchanger is passed;
a pure water tank for receiving the pure water that has passed through the ion exchange device;
a pure water extracting means for extracting pure water from the pure water tank;
a pure water returning means for returning a portion of the pure water extracted by the pure water extracting means to the raw water tank or the intermediate tank;
A receiving means for receiving concentrated water from the RO device;
a second heat exchanger through which the water from the receiving means is circulated;
a chiller system having a heat pump that transfers heat from the first heat exchanger to the second heat exchanger,
a heat pump condenser and a second heat exchanger, the second heat exchanger being connected to the heat pump condenser; a heat pump condenser and a second heat exchanger being connected to the second heat exchanger;
前記ＲＯ装置の濃縮水及び前記高温排水は該中和槽に導入される請求項４の純水製造システムの運転方法。 the receiving means includes a neutralization tank, a storage tank into which water from the neutralization tank flows, and an outlet means for discharging water from the storage tank;
5. The method for operating a pure water production system according to claim 4 , wherein the concentrated water from the RO device and the high-temperature wastewater are introduced into the neutralization tank.
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