JP7783671B2 - Workpiece machining method, program, and cylindrical grinding device - Google Patents

Description

This disclosure relates to a workpiece transport device, a cylindrical grinding device, and a method for correcting misalignment.

A cylindrical grinding machine for grinding a cylindrical workpiece is known (see, for example, Patent Document 1), and a method for measuring crystal orientation is also known (see, for example, Patent Document 2).
In response to this, the inventors have developed a cylindrical grinding machine capable of performing predetermined machining (e.g., grinding the outer peripheral surface of the workpiece, additional machining such as creating a chamfered edge (OF) or a V-shaped notch) on cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) so as to satisfy predetermined machining conditions. In factories where cylindrical grinding machines are installed, cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) are stored. As needed, a corresponding workpiece is retrieved from storage and clamped between the spindle unit (spindle jaws) and tail unit (tail jaws) of the cylindrical grinding machine, and the clamped workpiece is then subjected to predetermined machining so as to satisfy the predetermined machining conditions. In this case, it is desirable for the workpiece to be clamped between the spindle unit (spindle jaws) and tail unit (tail jaws) with its crystal axis aligned with the rotation axis of the cylindrical grinding machine.

For this reason, conventionally, the crystal axis of the workpiece is measured using an X-ray device such as a crystal orientation measuring device (for example, Toshiba IT Control Systems Corporation, Model SU-021), the misalignment between this measured crystal axis and the rotation axis of the cylindrical grinding machine is corrected, and then the corrected workpiece is re-clamped between the spindle unit (spindle jaws) and tail unit (tail jaws) of the cylindrical grinding machine.

JP 2009-190142 A Japanese Patent Application Laid-Open No. 2000-266697

However, measuring the crystal axis of the workpiece, correcting the misalignment, and re-clamping must be done manually, which poses a significant workload.

This disclosure has been made to solve these problems, and aims to provide a workpiece transport device, cylindrical grinding device, and misalignment correction method that can automatically clamp a workpiece between the spindle unit (spindle jaw) and the tail unit (tail jaw) while aligning the workpiece's crystal axis with the rotation axis of the cylindrical grinding device.

The workpiece transport device according to the present disclosure is
A workpiece conveying device that conveys a cylindrical workpiece to be machined to a cylindrical grinding device body,
a clamping mechanism having a pair of claws for clamping the workpiece;
a turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped;
an X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle jaws and the tail jaws of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value that corrects the amount of deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body,
When the rotation axis of the cylindrical grinding device body is defined as the X axis, the axis perpendicular to the X axis is defined as the Y axis, and the axis perpendicular to the plane including the X axis and the Y axis is defined as the Z axis,
The rotation mechanism rotates the clamping mechanism, which has clamped the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

This configuration makes it possible to provide a workpiece transport device that can automatically clamp the workpiece between the spindle unit (spindle jaw) and the tail unit (tail jaw) while aligning the workpiece's crystal axis with the rotation axis of the cylindrical grinding device.

This is due to the inclusion of a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

Further, in the above workpiece transport device,
The claw moving mechanism may clamp the workpiece by moving the pair of claws in a direction approaching each other in the Y-axis direction and abutting the pair of claws against the outer peripheral surface of the workpiece.

Further, in the above workpiece transport device,
The moving mechanism includes:
a first moving mechanism that moves the clamp mechanism in the Z-axis direction;
a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the Y-axis direction;
The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the X-axis direction.

Further, in the above workpiece transport device,
The moving mechanism includes:
a first moving mechanism that moves the clamp mechanism in the Z-axis direction;
a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the X-axis direction;
The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the Y-axis direction.

Further, in the above workpiece transport device,
Each of the pair of claw portions may have a first abutment portion that abuts against the lower part of the workpiece and a second abutment portion that abuts against the upper part of the workpiece when the pair of claw portions move in a direction toward each other.

Further, in the above workpiece transport device,
The pair of claw portions may have tapered surfaces that open toward each other in a V-shape and function as the first contact portion and the second contact portion, respectively.

Further, in the above workpiece transport device,
The moving mechanism may move the clamping mechanism that clamps the workpiece until the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body between the main shaft and tail of the cylindrical grinding device body.

Further, in the above workpiece transport device,
The moving mechanism may further move the clamping mechanism that clamps the workpiece until one end face of the workpiece abuts against the spindle.

Further, in the above workpiece transport device,
The pair of claw portions may clamp the center of the workpiece.

The cylindrical grinding device according to the present disclosure is
a cylindrical grinding device body;
A cylindrical grinding machine including a workpiece transport device that transports a cylindrical workpiece to be processed to the cylindrical grinding machine body,
The workpiece transport device is
a clamping mechanism having a pair of claws for clamping the workpiece;
a turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped;
an X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle jaws and the tail jaws of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value that corrects the amount of deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body,
When the rotation axis of the cylindrical grinding device body is defined as the X axis, the axis perpendicular to the X axis is defined as the Y axis, and the axis perpendicular to the plane including the X axis and the Y axis is defined as the Z axis,
The rotation mechanism rotates the clamping mechanism, which has clamped the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

This configuration makes it possible to provide a cylindrical grinding machine that can automatically clamp a workpiece between the spindle unit (spindle jaw) and the tail unit (tail jaw) while aligning the workpiece's crystal axis with the rotation axis of the cylindrical grinding machine.

This is due to the inclusion of a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

The deviation amount correction method according to the present disclosure includes:
A deviation amount correction method for correcting a deviation amount of the clamped workpiece relative to a rotation shaft of the cylindrical grinding machine body using the workpiece transport device, comprising:
a measuring step of measuring the crystal plane orientation of a cylindrical workpiece to be machined, the workpiece being clamped in a state in which a spindle jaw of a cylindrical grinding device body is in contact with a top end face of the cylindrical workpiece and a tail jaw of the cylindrical grinding device body is in contact with a bottom end face of the workpiece, and the crystal plane orientation of a workpiece rotated by a predetermined angle from the reference position, and outputting a correction value for correcting the amount of deviation of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body;
and a deviation amount correcting step of controlling the turning mechanism so as to eliminate the deviation amount.

This configuration provides a misalignment correction method that automatically clamps the workpiece between the spindle unit (spindle jaw) and the tail unit (tail jaw) while aligning the workpiece's crystal axis with the rotation axis of the cylindrical grinding machine.

This is due to the inclusion of a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

In the above-mentioned deviation amount correction method,
The first measuring step, the second measuring step, the deviation amount calculating step, and the deviation amount correcting step may be repeatedly executed until the deviation amount of the workpiece after the deviation amount correcting step becomes equal to or less than a set value.

In the above-mentioned deviation amount correction method,
the amount of deviation is a deviation angle of the central axis of the workpiece relative to the rotation axis of the cylindrical grinding machine body,
The deviation amount correcting step may include controlling the turning mechanism so that the clamping mechanism that clamps the workpiece turns by the deviation angle.

This disclosure provides a workpiece transport device, cylindrical grinding machine, and misalignment correction method that can automatically clamp a workpiece between the spindle unit (spindle jaw) and the tail unit (tail jaw) while aligning the workpiece's crystal axis with the rotation axis of the cylindrical grinding machine.

FIG. 1 is a perspective view of a cylindrical grinding device 1. FIG. 1 is a schematic diagram of a cylindrical grinding device main body 100. FIG. 1A is a diagram illustrating a state in which a workpiece W is clamped between a spindle unit 110 (spindle jaw 111) and a tail unit 120 (tail jaw 121) (when the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ are aligned), and FIG. 1B is a diagram illustrating a state in which a workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and a tail unit 120 (tail jaw 121) (when the central axis AX- _W of the workpiece W is misaligned by an angle θ with respect to the rotation axis AX- ₁₀₀ ). (a) is a diagram showing a state in which a workpiece W is clamped between a spindle jaw 111 and a tail jaw 121 with its central axis AX _-W coinciding with the rotation axis AX- ₁₀₀ ; (b) is a diagram showing a state in which a workpiece W is clamped between a spindle jaw 111 and a tail jaw 121 with its central axis AX- _W misaligned with the rotation axis AX _-100 by an angle θ; and (c) is a diagram showing a state in which a workpiece W is clamped between a spindle jaw 111 and a tail jaw 121 with its central axis AX- _W misaligned with the rotation axis AX- ₁₀₀ by an angle θ. (a) A diagram showing the state in which the circular grinding unit 130 performs circular grinding or orientation flat (orientation flat) processing on the workpiece W, and (b) A diagram showing the state in which the notch unit 140 performs notch processing on the workpiece W. FIG. 2 is a perspective view of the workpiece transport device 200. 8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and the associated configuration (second movable frame 230, etc.) extracted from FIG. 7. FIG. 8 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated configuration (second movable frame 230, etc.) extracted from FIG. 7. FIG. FIG. 8 is a perspective view of a third movable frame 240 and its associated components (such as a clamping mechanism 250) extracted from FIG. 7. 10 is an example of a rotation mechanism (rotation motor 260) that rotates the clamp mechanism 250. FIG. 2 is a perspective view of a clamping mechanism 250. 10 is a schematic diagram showing a state in which a workpiece W is clamped by a pair of claw portions 251a and 251b. FIG. 10 is a perspective view of a sensor attached to a pair of claws 251a and 251b. 10 is a schematic diagram showing how the length L of the workpiece W is measured by sensors attached to a pair of claws 251a and 251b. FIG. FIG. 2 is a system configuration diagram including a control device 300. 4 is a flowchart of an example of the operation of the cylindrical grinding device 1. FIG. 1 is a perspective view of a cylindrical grinding machine 1 installed in a factory. 10A and 10B are diagrams for explaining the operation of the clamp mechanism 250. 10A and 10B are diagrams for explaining the operation of the clamp mechanism 250. 10A and 10B are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. FIG. 10A and 10B are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. FIG. 10 is a flowchart of a displacement amount measurement process. FIG. 10 is a diagram showing the workpiece W being rotated by 90 degrees. 10 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom-side end face Wb. 24 is a table summarizing the measured values Δct, Δcb, θ, and ΔY of the workpieces W _W3-W1 , W _W2-W4 , W _W1-W3 , and W _W4-W2 measured as a result of the processing of FIG. 23. 10 is a flowchart of a deviation amount correction process. 17A is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the cylindrical grinding device 1, and FIG. 17B is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the cylindrical grinding device 1 of a modified example. 10A and 10B are diagrams for explaining a specific example 1 of the misalignment amount correction process; 10A and 10B are diagrams for explaining a specific example 2 of the misalignment amount correction process. 10A and 10B are diagrams for explaining a specific example 3 of the misalignment amount correction process. 10A and 10B are diagrams for explaining a specific example 4 of the misalignment amount correction process; 10A and 10B are diagrams for explaining a specific example 5 of the misalignment amount correction process. 10A and 10B are diagrams for explaining a specific example 6 of the misalignment amount correction process. 10 is a flowchart of another example of the operation of the cylindrical grinding device 1. 1 is a perspective view showing a state in which the workpiece W is clamped between the spindle jaws 111 (spindle ₁₀₁ ) and the tail jaws 121 (tail 102) in a state in which the central axis AX- _W of the workpiece W and the rotation axis AX-100 of the cylindrical grinding device main body 100 are aligned. 10 is a flowchart of a surface orientation measurement process. 1 is a diagram showing a state in which an X-ray device 150 irradiates a workpiece W with X-rays to measure its surface orientation. 10 is a flowchart of a rotation angle/swing angle correction process. 1 is a diagram showing a state in which an X-ray device 150 irradiates a workpiece W with X-rays to measure its surface orientation.

(Embodiment 1)
Hereinafter, a cylindrical grinding device 1 according to a first embodiment of the present disclosure will be described with reference to the accompanying drawings. Corresponding components in each drawing are designated by the same reference numerals, and redundant description will be omitted.
<Cylindrical grinding device 1>
FIG. 1 is a perspective view of a cylindrical grinding machine 1. As shown in FIG.

As shown in Fig. 1, the cylindrical grinding machine 1 includes a cylindrical grinding machine main body 100, a workpiece transport device 200, and a control device 300 that controls the cylindrical grinding machine main body 100 and the workpiece transport device 200. In Fig. 1, the symbol AX ₁₀₀ indicates a rotation axis (machining axis) of the cylindrical grinding machine main body 100. Hereinafter, this will be referred to as the rotation axis AX ₁₀₀ .
<Work W>
First, an example of the structure of the cylindrical workpiece W to be machined will be described.

Figure 2 is a perspective view of the workpiece W.

The workpiece W is, for example, a single crystal silicon ingot (e.g., a cylindrically ground silicon ingot) or a cylindrical workpiece (also called a block) cut from the single crystal silicon ingot. The workpiece W has a top end face Wt and a bottom end face Wb that are perpendicular to its central axis AX- _W . Workpieces W having various diameters D and various lengths L (the length of the workpiece W in the direction of the central axis AX- _W ) can be used.
<Cylindrical grinding device main body 100>
Next, an example of the configuration of the cylindrical grinding machine main body 100 will be described.

Figure 3 is a schematic diagram of the cylindrical grinding device main body 100.

For ease of explanation, the X, Y, and Z axes are defined below as shown in Fig. 1 etc. The X axis extends in the same direction as the rotation axis _AX100 of the cylindrical grinding machine body 100 (horizontal axis). The Y axis extends in a direction perpendicular to the X axis (horizontal axis). The Z axis extends in a direction perpendicular to the plane including the X and Y axes (vertical axis).

The cylindrical grinding device main body 100 is a known cylindrical grinding device that can perform predetermined processing on the workpiece W to satisfy predetermined processing conditions. The processing conditions include, for example, the amount of grinding to be performed on the outer surface of the workpiece W, and whether or not additional processing such as a flat edge (OF) or a V-shaped notch is performed, and are input by an operator via, for example, the operating device 400. The predetermined processing is, for example, grinding the outer surface of the workpiece, or additional processing such as a flat edge (OF) or a V-shaped notch.

As shown in Figure 3, the cylindrical grinding machine main body 100 includes a spindle unit 110, a tail unit 120, a grinding unit 130, a notch unit 140, an X-ray device 150, etc.

The spindle unit 110 is installed in a fixed state to the floor surface. On the other hand, the tail unit 120 is installed in a state where it can move in the X-axis direction.

Fig. 4(a) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle mouthpiece 111) and the tail unit 120 (tail mouthpiece 121) (when the central axis AX- _W of the workpiece W coincides with the rotation axis AX _-100 ). Fig. 4(b) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle mouthpiece 111) and the tail unit 120 (tail mouthpiece 121) (when the central axis AX- _W of the workpiece W is misaligned by an angle θ with respect to the rotation axis AX- ₁₀₀ ).

As shown in Figure 4(a), the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121).

At this time, the mating surface between the spindle mouthpiece 111 and the rotation axis rotated by the spindle motor 113 is spherical (see FIG. 4(a)). Therefore, even if the central axis AX- _W of the workpiece W is inclined at an angle θ with respect to the rotation axis AX- ₁₀₀ , as shown in FIG. 4(b), the spindle mouthpiece 111 rotates following the top end surface Wt of the workpiece W and abuts (comes into close contact with) the top end surface Wt.

Similarly, the mating surface between the tail jaw 121 and the rotation axis rotated by the tail motor 123 is spherical (see FIG. 4(a)). Therefore, even if the central axis AX- _W of the workpiece W is inclined at an angle θ with respect to the rotation axis AX- ₁₀₀ , as shown in FIG. 4(b), the tail jaw 121 rotates following the bottom end surface Wb of the workpiece W and abuts (comes into close contact with) the bottom end surface Wb.

3, the spindle unit 110 includes a spindle mouthpiece 111, a spindle body 112, and a spindle motor 113. The spindle mouthpiece 111 is attached to a rotation shaft that is rotated about a rotation axis _AX100 by the spindle motor 113. The spindle motor 113 is, for example, a servo motor.

Tail unit 120 includes tail mouthpiece 121, tail body 122, and tail motor 123. Tail mouthpiece 121 is attached to a rotation shaft that is rotated around rotation axis _AX100 by tail motor 123. Tail motor 123 is, for example, a servo motor. Main shaft motor 113 and tail motor 123 are controlled to rotate synchronously with each other.

It is desirable that the workpiece W is clamped between the spindle jaws 111 and the tail jaws 121 in a state in which its central axis AX- _W and the rotation axis AX- ₁₀₀ coincide (see FIG. 5(a)). However, there are cases in which the workpiece W is clamped between the spindle jaws 111 and the tail jaws 121 in a state in which its central axis AX- _W and the rotation axis AX- ₁₀₀ do not coincide (see FIGS. 5(b) and 5(c)).

Fig. 5(a) shows a state in which the workpiece W is clamped between the spindle jaws 111 and the tail jaws 121 with its central axis _{AX_W} coinciding with the rotation axis _{AX_100} . Fig. 5(b) shows a state in which the workpiece W is clamped between the spindle jaws 111 and the tail jaws 121 with its central axis _{AX_W} misaligned with the rotation axis _{AX_100} by an angle θ. Fig. 5(b) shows that the center point CP (the center point on the central axis _{AX_W} ) of the workpiece W is on the rotation axis _{AX_100} and is misaligned by an angle θ around this center point CP. This misalignment angle θ is corrected as described below. Note that the rectangle A1 drawn with a dotted line in Fig. 5(b) represents the workpiece W in Fig. 5(a).

Similarly, Figure 5(c) shows a state in which the workpiece W is clamped between the spindle jaw 111 and the tail jaw 121 with its central axis AX- _W misaligned by an angle θ with respect to the rotation axis AX _-100 . Figure 5(c) shows that the center point CP of the workpiece W (the center point on the central axis AX- _W ) is not on the rotation axis AX _-100 but is at a position misaligned by ΔY in the Y-axis direction from the rotation axis AX _-100 , and that the workpiece W is misaligned by an angle θ around this center point CP. This misalignment angle θ and misalignment distance ΔY are corrected as described below. Note that the rectangle A2 drawn with a dotted line in Figure 5(c) represents the workpiece W in Figure 5(b).

5(b) and 5(c), Δct represents the distance between the center of the top-side end face Wt and the rotation axis _AX100 . Meanwhile, Δcb represents the distance between the center of the bottom-side end face Wb and the rotation axis _AX100 . ΔY can be calculated by Δct - Δcb. In the case of FIG. 5(b), that is, when the center point CP of the workpiece W (the center point on the central axis _AXW ) is on the rotation axis _AX100 (that is, when the center point CP of the workpiece W is the true center), the relationship Δct = Δcb holds. On the other hand, in the case of FIG. 5(c), that is, when the center point CP of the workpiece W (the center point on the central axis _AXW ) is not on the rotation axis _AX100 , the relationship Δct > Δcb (or Δct < Δcb) holds.

The grinding unit 130 is a device for grinding or orientation flat machining on the workpiece W clamped between the spindle nozzle 111 and the tail nozzle 121, and is held by a grinding base 132. The grinding unit 130 is equipped with a grinding wheel 131 and a grinding motor 133 that rotates the grinding wheel 131.

Figure 6(a) shows the circular grinding unit 130 performing circular grinding or orientation flat processing on the workpiece W.

The grinding wheel 131, rotated by the grinding motor 133, cuts into the rotating workpiece W by the input grinding amount x1 to perform grinding (cylindrical grinding mode). Meanwhile, the grinding unit 130 cuts into the non-rotating workpiece W by the input grinding amount x1 to perform orientation flat (orientation flat grinding mode).

The notch unit 140 is a device for performing notch processing on the workpiece W clamped between the spindle jaw 111 and the tail jaw 121, and is held by the notch frame 142. The notch unit 140 is equipped with a notch grinding wheel 141, a notch motor 143 that rotates the notch grinding wheel 141, and other components.

Figure 6(b) shows the notch unit 140 performing notch processing on the workpiece W. The notch grinding wheel 141, rotated by the notch motor 143, cuts into the non-rotating workpiece W by the input grinding amount x 2 to perform orientation flat processing.

The X-ray device 150 is a device for measuring the crystal plane orientation of the workpiece W and is provided so as to be movable in the X-axis direction. For example, a crystal orientation measurement device (Model SU-021, manufactured by Toshiba IT Control Systems Corporation) can be used as the X-ray device 150. This crystal orientation measurement device simultaneously measures the axial orientation of the cut plane (axial orientation) of the workpiece W before wafer processing and the crystal orientation of the V-notch.
<Work transport device 200>
Next, an example of the configuration of the workpiece transport device 200 will be described.

Figure 7 is a perspective view of the workpiece transport device 200.

As shown in Figure 7, the work transport device 200 comprises a fixed frame 210 supported by four vertical pillars 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 so as to be movable in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 so as to be movable in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 so as to be movable in the Z-axis direction, and a clamping mechanism 250 fixed to the third movable frame 240.
<Fixed Frame 210>
The fixed frame 210 is a rectangular frame formed by combining a pair of first frames 211a and 211b extending in the X-axis direction and a pair of second frames 212a and 212b extending in the Y-axis direction.

The four vertical pillars 201 supporting the fixed frame 210 are fixed to the floor surface with anchors (not shown), with the length in the Z-axis direction adjusted by adjusters (not shown) provided at the bottom of the vertical pillars so that the fixed frame 210 is horizontal. Each vertical pillar 201 is fixed to the cylindrical grinding machine main body 100 with fastening members such as bolts.
<First Movable Frame 220>
As shown in FIG. 7, the first movable frame 220 is a rectangular frame formed by combining a pair of third frames 221a, 221b extending in the X-axis direction and a pair of fourth frames 222a, 222b extending in the Y-axis direction.

The first movable frame 220 is attached to the fixed frame 210 so as to be slidable in the X-axis direction. Specifically, the first movable frame 220 is attached so as to be slidable on guide rails 223a, 223b extending in the X-axis direction and provided on the upper surface of the fixed frame 210 (first frames 211a, 211b).

The first movable frame 220 moves in the X-axis direction along the guide rails 223a and 223b as a ball screw 224 connected to the first movable frame 220 and extending in the X-axis direction is rotated forward and backward by a drive motor 225 (e.g., a servo motor) attached to the fixed frame 210 (first frame 211a).

The guide rails 223a, 223b, the ball screw 224, and the drive motor 225 mainly constitute a movable frame moving mechanism _M220 that moves the first movable frame 220 in the X-axis direction. The movable frame moving mechanism _M220 is an example of a first moving mechanism of the present disclosure.
<Outer diameter measuring mechanism 270>
FIG. 8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and the associated configuration (second movable frame 230, etc.) extracted from FIG.

As shown in Figure 8, the first movable frame 220 (fourth frame 222a) is provided with an outer diameter measuring mechanism 270.

The outer diameter measuring mechanism 270 is a device that measures the outer diameter (outer diameter of each of the top end face Wt and bottom end face Wb) of the workpiece W clamped between the spindle nozzle 111 and the tail nozzle 121.

The outer diameter measuring mechanism 270 includes a lifting frame 271, measuring arms 272a and 272b, probes 273a and 273b, and a carriage 274 to which these are attached.

The carriage 274 is slidably attached to a guide rail 275 extending in the Z-axis direction and provided on the first movable frame 220 (fourth frame 222a) side.

The outer diameter measuring mechanism 270 (probes 273a, 273b, etc.) moves (lifts and lowers) in the Z-axis direction along the guide rail 275 as a ball screw (not shown) connected to the outer diameter measuring mechanism 270 and extending in the Z-axis direction is rotated forward and backward by a drive motor 276 (e.g., a servo motor) attached to the first movable frame 220 (third frame 221a).

Although not shown, the outer diameter measurement mechanism 270 is equipped with a first probe movement mechanism that moves one measuring arm 272a (and probe 273a) in the Y-axis direction, and a second probe movement mechanism that moves the other measuring arm 272b (and probe 273b) in the Y-axis direction. The first probe movement mechanism and the second probe movement mechanism each include a probe drive motor (e.g., a servo motor). By controlling each probe drive motor, each probe 273a, 273b moves individually in the Y-axis direction.

According to the outer diameter measuring mechanism 270, the probes 273 a, 273 b can acquire the position (position data) of each contact point by moving individually in the Y-axis direction and contacting the outer peripheral surface of the workpiece W. Then, the control device 300 can measure (calculate) the outer diameter of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 (the outer diameters of the top end face Wt and the bottom end face Wb of the workpiece W) and the like by performing a predetermined calculation based on these positions (position data).
<Second Movable Frame 230>
FIG. 9 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated components (such as the second movable frame 230) extracted from FIG.

As shown in Figure 9, the second movable frame 230 is a rectangular cylindrical frame extending in the Z-axis direction.

The second movable frame 230 is attached to the first movable frame 220 so as to be slidable in the Y-axis direction. Specifically, the second movable frame 230 is slidably attached to guide rails 231a and 231b extending in the Y-axis direction and provided on the upper surface of the first movable frame 220 (fourth frames 222a and 222b).

The second movable frame 230 moves in the Y-axis direction along the guide rails 231a and 231b as a ball screw 232 connected to the second movable frame 230 and extending in the Y-axis direction is rotated forward and backward by a drive motor 233 (e.g., a servo motor) attached to the first movable frame 220 (fourth frame 222b).

The guide rails 231a, 231b, the ball screw 232, and the drive motor 233 mainly constitute a movable frame moving mechanism _M230 that moves the second movable frame 230 in the Y-axis direction. The movable frame moving mechanism _M230 is an example of a second moving mechanism of the present disclosure.
<Third Movable Frame 240>
10 is a perspective view of the third movable frame 240 and its associated components (such as the clamping mechanism 250) extracted from FIG. 7.

The third movable frame 240 is a rectangular cylindrical frame extending in the Z-axis direction and is positioned within the second movable frame 230, which is also a rectangular cylindrical frame extending in the Z-axis direction.

The third movable frame 240 is attached to the second movable frame 230 so as to be slidable in the Z-axis direction. Specifically, the third movable frame 240 is slidably attached to guide rails 241a, 241b (see Figure 10) attached to one inner surface of the second movable frame 230 and extending in the Z-axis direction, and to a guide rail (not shown) attached to the other inner surface.

The third movable frame 240 (and the clamping mechanism 250 attached thereto) moves in the Z-axis direction along the guide rails 241a, 241b, etc. as a ball screw (not shown) connected to the third movable frame 240 and extending in the Z-axis direction is rotated forward and backward by a drive motor 242 (e.g., a servo motor) attached to the second movable frame 230.

The guide rails 241 a, 241 b, the ball screw (not shown), and the drive motor 242 mainly constitute a movable frame moving mechanism _M240 that moves the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction. The movable frame moving mechanism _M240 is an example of a third moving mechanism of the present disclosure.
<Clamping mechanism 250>
As shown in FIG. 10, a clamp mechanism 250 is attached to the lower end of the third movable frame 240 via a rotation mechanism (rotation motor 260).

The clamping mechanism 250 is attached to the buffer shaft mount base 245 so as to be rotatable about the θ-axis AX _θ (see FIG. 11). The θ-axis AX _θ passes through the center of the workpiece W clamped by the clamping mechanism 250 (the center on the central axis AX _W ), as will be described later, and extends in the Z-axis direction. FIG. 11 shows an example of a rotation mechanism (rotation motor 260) that rotates the clamping mechanism 250.

Specifically, the clamp mechanism 250 is mounted with a rotation shaft of a swing motor 260 (e.g., a hollow shaft motor) fixed to a top plate 262 of the clamp mechanism 250 fixed to the buffer shaft frame base 245. As a result, when the swing motor 260 fixed to the top plate 262 rotates forward and backward, the clamp mechanism 250 swings around the θ-axis AX _θ by a predetermined angle (e.g., angle θ; see FIGS. 5B and 5C ) relative to the buffer shaft frame base 245. The swing motor 260 is an example of a swing mechanism of the present disclosure. Note that instead of the swing motor 260 (e.g., a hollow shaft motor), other drive mechanisms such as a worm gear, a wheel gear, and a general-purpose motor may be used as the swing mechanism.

The buffer shaft mount base 245, to which the clamp mechanism 250 is attached as described above, is attached to the Z-axis mount base 243 so as to be slidable in the X-axis direction. Specifically, a slide rail 244 extending in the X-axis direction and provided on the upper surface of the buffer shaft mount base 245 is slidably engaged with the underside of the Z-axis mount base 243, which is fixed to the third movable frame 240. As a result, as described below, when the workpiece W (top end face Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, the buffer shaft mount base 245 (and the clamp mechanism 250 attached thereto) slides in the X-axis direction relative to the Z-axis mount base 243. As a result, when the workpiece W (top end face Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, excessive force is prevented from being applied to the clamp mechanism 250.

Figure 12 is a perspective view of the clamping mechanism 250.

As shown in FIG. 12, the clamping mechanism 250 includes a pair of claws 251 a, 251 b that clamp the workpiece W, and a claw moving mechanism M ₂₅₀ that moves the pair of claws 251 a, 251 b in directions toward or away from each other.

One of the claws 251a is attached to the lower end of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, one of the claws 251a is fixed to the underside of one of the movable frames 254a, which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction and provided on the underside of frame 252 fixed to the lower end of the third movable frame 240.

Similarly, the other claw portion 251b is attached to the lower end of the third movable frame 240 so as to be slidable in the Y-axis direction. Specifically, the other claw portion 251b is fixed to the lower surface of the other movable frame 254b, which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction and provided on the lower surface of frame 252 fixed to the lower end of the third movable frame 240.

The pair of claws 251a, 251b move together with the movable frames 254a, 254b in a direction toward each other (the Y-axis direction) along the guide rails 253a, 253b when a coaxial ball screw (not shown) extending in the Y-axis direction and connected to the movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed is rotated forward by a drive motor 255 attached to the frame 252. Furthermore, the pair of claws 251a, 251b move together with the movable frames 254a, 254b in a direction away from each other (the Y-axis direction) along the guide rails 253a, 253b when a coaxial ball screw (not shown) connected to the movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed is rotated reversely by the drive motor 255.

The guide rails 253a, 253b, left and right coaxial ball screws (not shown), and drive motor 255 mainly constitute a claw moving mechanism _M250 that moves the pair of claws 251a, 251b in directions approaching or separating from each other.

Figure 13 is a schematic diagram showing the workpiece W clamped by a pair of claws 251a and 251b.

As shown in FIG. 13, the pair of claw portions 251a, 251b each have a first abutment portion 256a that abuts against the lower part of the workpiece W and a second abutment portion 256b that abuts against the upper part of the workpiece W. Specifically, the pair of claw portions 251a, 251b each have tapered surfaces that open toward each other in a V-shape (the cross section in the YZ plane is V-shaped). These tapered surfaces function as the first abutment portion 256a and the second abutment portion 256b. Hereinafter, the first abutment portion 256a and the second abutment portion 256b will also be referred to as the tapered surfaces 256a, 256b.

The pair of claws 251a, 251b are each made of synthetic resin or metal with tapered surfaces 256a, 256b covered with synthetic resin. Note that if the workpiece W is a cylindrical workpiece other than a silicon ingot, the pair of claws 251a, 251b may be made of metal with tapered surfaces 256a, 256b not covered with synthetic resin.

The pair of claws 251a, 251b move toward each other, clamping the workpiece W with the tapered surfaces 256a, 256b each abutting against the outer peripheral surface of the workpiece W (see Figure 13).

The pair of claws 251a, 251b allows the workpiece W to be clamped with the central axis _AXW of the workpiece W always positioned at the same position, regardless of the diameter of the workpiece W.

Figure 14 is an oblique view of the sensor attached to a pair of claws 251a and 251b.

A sensor for measuring the length L (see Figure 2) of the workpiece W is attached to the pair of claws 251a, 251b. As shown in Figure 14, this sensor consists of a light-emitter 257a attached to the bottom of one of the claws 251a and a light-receiver 257b attached to the bottom of the other claw 251b. Conversely, the light-emitter 257a may be attached to the bottom of the other claw 251a, and the light-receiver 257b may be attached to the bottom of one of the claws 251a.

Figure 15 is a schematic diagram showing how the length L of the workpiece W is measured using sensors attached to a pair of claws 251a and 251b.

With this sensor, for example, as shown in FIG. 15, the length L of the workpiece W can be measured by moving the clamping mechanism 250 (light projector 257a and light receiver 257b) in the direction of the thick arrow (X-axis direction) above the workpiece W, and calculating the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the workpiece W blocks the light ray from the light projector 257a that is received by the light receiver 257b (see FIG. 14), and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the light receiver 257b receives the light ray from the light projector 257a (see FIG. 14).
<Control device 300>
Next, the control device 300 will be described.

Figure 16 is a system configuration diagram including the control device 300.

The control device 300 includes a processor, RAM, ROM, etc., which are not shown. As shown in Fig. 16, the control device 300 includes a drive motor 225 constituting a movable frame moving mechanism M220 that moves the first movable frame ₂₂₀ in the X-axis direction, a drive motor 233 constituting a movable frame moving mechanism M230 that moves the second movable frame 230 in the Y-axis direction, a drive motor 242 constituting a movable frame moving mechanism _M240 that moves the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction, a claw moving mechanism M251a, 251b that moves the pair of claws 251a, 251b in directions approaching or separating from each other, and a drive motor ₂₄₃ constituting a movable frame moving mechanism M240 that moves the pair of claws 251a, 251b in directions approaching or separating from each other. The drive motor 255 constituting the clamp mechanism ₂₅₀ , the turning motor 260 that turns the clamp mechanism 250, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circle grinding unit 130 (circle grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), the operating device 400, the pallet loader 500, and the sensors (light projector 257a, light receiver 257b) are electrically connected.

The processor is, for example, a CPU. There may be one processor or multiple processors. For example, the processor executes a program loaded from ROM to RAM, and functions as a control means for controlling the drive motors 225, 233, 242, 255, spindle unit 110 (spindle motor 113), tail unit 120 (tail motor 123), circle grinding unit 130 (circle grinding motor 133), notch unit 140 (notch motor 143), X-ray device 150, turning motor 260, outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), etc.

Next, we will explain an example of the operation of the cylindrical grinding device 1 configured as described above.

Figure 17 is a flowchart of an example of the operation of the cylindrical grinding machine 1. Figure 18 is a perspective view of the cylindrical grinding machine 1 installed in a factory. Figures 19 and 20 are diagrams for explaining the operation of the clamp mechanism 250. Figures 21, 22(a), and 22(b) are diagrams for explaining the operation of the spindle unit 110 and tail unit 120.

In Figure 18, the symbols AGV1 and AGV2 indicate automated guided vehicles, and the symbol 500 indicates a pallet loader. Hereinafter, these will be referred to as automated guided vehicles AGV1, AGV2, and pallet loader 500.

The automated guided vehicle AGV1 transports a pallet P1 carrying the workpiece W (workpiece W1 in Figure 18) to be machined from a designated location in the factory, where cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) are stored, to a pallet loader 500 installed adjacent to the cylindrical grinding machine 1, and then transfers the pallet P1 to the pallet loader 500 by known means (workpiece W2 and pallet P2 in Figure 18).

The pallet loader 500 transports the pallet P2 received from the automated guided vehicle AGV1 to a predetermined standby position (workpiece W3 and pallet P3 in FIG. 18). The central axis _AXW of the workpiece W (workpiece W3 in FIG. 18) placed on the pallet P3 transported to the standby position extends in the X-axis direction.

Below, we will explain an example of the operation of the cylindrical grinding machine 1 installed in a factory, with reference to Figure 17 etc.

First, information about the workpiece W to be processed is acquired (step S10). The information about the workpiece W to be processed is, for example, the diameter D of the workpiece W to be processed (see Figure 2), and is affixed to a predetermined location on the pallet as a barcode. For example, the information (barcode) about the workpiece W to be processed is read by a barcode reader (not shown) attached to a predetermined location on the pallet loader 500 when the pallet P1 is handed over to the pallet loader 500. The control device 300 acquires this read information about the workpiece W to be processed. Note that the control device 300 may also acquire information about the workpiece W to be processed sent from another device.

Next, the processing conditions for the workpiece W to be processed (e.g., the amount of grinding on the outer surface of the workpiece W, whether or not additional processing such as a flat edge (OF) or a V-shaped notch is to be performed, etc.) are acquired (step S11). The processing conditions are input by the operator via the operation device 400, for example. The control device 300 acquires these input processing conditions. Note that the control device 300 may also acquire processing conditions transmitted from another device.

Next, the length L of the workpiece W (see FIG. 2) is measured (step S11A). For example, as shown in FIG. 15, the clamping mechanism 250 (light projector 257a and light receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W. This calculates the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveyance device 200) at which the workpiece W (workpiece W3 in FIG. 18) transported to the standby position blocks the light ray from the light projector 257a (see FIG. 14) received by the light receiver 257b, and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveyance device 200) at which the light receiver 257b receives the light ray from the light projector 257a (see FIG. 14), thereby measuring the length L of the workpiece W. This is achieved by the control device 300 (processor) executing a program loaded from ROM to RAM.

Next, as shown in Figures 19(a) and 19(b), the clamping mechanism 250 is moved above the workpiece W (workpiece W3 in Figure 18) that has been transported to the standby position (step S12).

19(a), the clamping mechanism 250 is moved in the Y-axis direction until the center Pa between one claw portion 251a and the other claw portion 251b coincides with a vertical line V1 passing through the central axis _AXW of the workpiece W, and, in the X-axis direction, the center Pb of the pair of claw portions 251a, 251b coincides with a vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined, which was automatically measured in step S11A). This is achieved by the control device 300 controlling the control motors (servomotors) 225, 233, 242.

Next, as shown in Fig. 20(a), the clamping mechanism 250 is moved (lowered) in the Z-axis direction until the center Pa between one claw portion 251a and the other claw portion 251b coincides with the central axis _AXW of the workpiece W (step S13). This is achieved by the control device 300 controlling the drive motor 242. The moving distance d (lowering distance; see Fig. 20(a)) of the clamping mechanism 250 at this time can be calculated based on the diameter D of the workpiece W to be machined, etc., acquired in step S10.

Next, as shown in FIG. 20(b), the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W, thereby clamping the workpiece W (step S14). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

Next, the workpiece W clamped as described above is transported to the cylindrical grinding machine main body 100 (between the spindle jaws 111 and the tail jaws 121) (step S15).

In this case, in the cylindrical grinding machine 1, for example, before the processing of step S10, the same processing as steps S12 to S15 is performed on the master work (not shown), so that the clamping mechanism 250 clamping the master work is moved so that the central axis AX _MW of the master work coincides with the rotation axis AX ₁₀₀ of the cylindrical grinding machine body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding machine body 100.

Therefore, in step S15, as shown in Fig. 21, first, the clamping mechanism 250 clamping the workpiece W is moved so that the set central axis AX- _MW of the master workpiece coincides with the rotation axis AX- ₁₀₀ of the cylindrical grinding machine body 100 between the spindle jaws 111 and tail jaws 121 of the cylindrical grinding machine body 100. This is achieved by the control device 300 controlling the control motors (servo motors) 225, 233, and 242. Next, as shown in Fig. 22(b), the workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121) with the set central axis AX- _MW of the master workpiece coincident with the rotation axis AX- ₁₀₀ of the cylindrical grinding machine body 100 (step S16).

Specifically, first, as shown in FIG. 22(a), the clamping mechanism 250 clamping the workpiece W is moved in the X-axis direction until the top end surface Wt of the workpiece W abuts against the spindle nozzle 111. This is achieved by the control device 300 controlling the control motor (servo motor) 225.

Next, as shown in FIG. 22(b), the tail unit 120 is moved in the X-axis direction so that the tail jaw 121 abuts against the bottom end face Wb of the workpiece W and applies pressure with sufficient force to withstand the weight of the workpiece and external machining forces. This is achieved by the control device 300 controlling the tail motor 123. At this time, the control device 300 measures (calculates) the length L of the workpiece W based on the position of the tail jaw 121 at the time it contacts the bottom end face Wb of the workpiece W. The length L of the workpiece W measured here is measured with higher accuracy than the length L of the workpiece W measured in step S11A. In the following description, this highly accurate measured length L will be used as the length L of the workpiece W.

Next, the pair of claws 251a, 251b release the clamp on the workpiece W (step S17). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

Next, the control device 300 executes the deviation measurement process (step S17A).

Figure 23 is a flowchart of the deviation measurement process.

The deviation amount measurement process is a process of measuring (calculating) the deviation amount (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W relative to the rotation axis _AX100 of the cylindrical grinding device main body 100.

The deviation measurement process (steps S17A1 to S17A3) is performed n times on the workpiece W. The following explanation uses an example where n is 2. n (the number of measurements) is input by the operator via the operation device 400, for example. n is input at any time before the deviation measurement process is performed. Note that an n that has been input in advance and stored in a specified memory unit may also be used. Note that n may be any integer greater than or equal to 2. In other words, the minimum value of n is 2. Furthermore, the maximum value of n is approximately 16, taking practicality into consideration.

When n is 2, the deviation amount measurement process (steps S17A1 to S17A3) is performed (a total of two times) for each of the workpiece W in the state shown in FIG. 24(a) (hereinafter referred to as the origin state or origin position) (hereinafter referred to as workpiece W _{W3 -W1) and the workpiece W rotated 180 degrees/n (here, 90 degrees) counterclockwise from the origin state (see FIG. 24(b) ; hereinafter referred to as workpiece W W2-W4} ).

First, the processes from step S17A1 onwards are executed on the workpiece W _W3-W1 (see FIG. 24(a)) in the origin state.

That is, the outer diameter of the top end face Wt is measured (step S17A1). Specifically, in the Z-axis direction, the outer diameter measuring mechanism 270 is lowered until the center between one probe 273a and the other probe 273b coincides with the rotation axis _AX100 near the top end face Wt of the workpiece W _W3-W1 . Next, the measuring arms 272a and 272b are moved toward each other (in the Y-axis direction). This brings the probes 273a and 273b into contact with the outer peripheral surface near the top end face Wt of the workpiece W _W3-W1 . This acquires the positions (position data) of each contact point. Based on these positions (position data), the control device 300 calculates the center position of the top end face Wt of the workpiece W _W3-W1 and the distance Δct between this center position and the rotation axis _AX100 .

Next, the outer diameter of the bottom-side end face Wb is measured (step S17A2). Figure 25 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom-side end face Wb. Note that for convenience of explanation, Figure 25 depicts the workpiece W in an unclamped state, but in reality, the outer diameter measuring mechanism 270 measures the outer diameter of the top-side end face Wt and the outer diameter of the bottom-side end face Wb of the workpiece W _W3-W1 in a state where the spindle jaws 111 are in contact with the top-side end face Wt and the tail jaws 121 are in contact with the bottom-side end face Wb (i.e., in a clamped state).

Specifically, the outer diameter measuring mechanism 270 is lowered in the Z-axis direction until the center between one probe 273a and the other probe 273b coincides with the rotation axis _AX100 near the bottom end face Wb of the workpiece W _W3-W1 (see FIG. 25). Next, the measuring arms 272a and 272b are moved toward each other (in the Y-axis direction) (see FIG. 25). This brings the probes 273a and 273b into contact with the outer peripheral surface near the bottom end face Wb of the workpiece W _W3-W1 . This acquires the positions (position data) of each contact point. Based on these positions (position data), the control device 300 calculates the center position of the bottom end face Wb of the workpiece W _W3-W1 and the distance Δcb between this center position and the rotation axis _AX100 .

Next, the control device 300 calculates the amount of deviation based on the measurement value (position data) (step S17A3). Specifically, the control device 300 calculates the amount of deviation as the deviation angle θ and deviation distance ΔY (see Figures 5(b) and 5(c)).

The angle θ is the angle of deviation of the central axis _{AX_W} of the workpiece W from the rotation axis _{AX_100} (see FIGS. 5(b) and 5(c)). ΔY is the distance between the center point CP of the workpiece W (the center point on the central axis _{AX_W} ) and the rotation axis _{AX_100} (see FIG. 5(c)).

The deviation angle θ can be calculated as follows:

As shown in FIG. 5A, when the central axis AX _{1 W} of the workpiece W and the rotation axis AX ₁₀₀ are aligned, the relationship Δct=Δcb=0 holds.

On the other hand, as shown in Figure 5(b), when the central axis AX- _W of the workpiece _W is inclined at an angle θ with respect to the rotation axis AX- _{100 (when the center point CP is on the rotation axis AX-100} ), the relationship Δct = Δcb ≠ 0 holds. In this case, the deviation angle θ can be calculated using the following equation 1.
5(c), when the central axis _AXW of the workpiece W is inclined at an angle θ with respect to the rotation axis _AX100 (when the center point CP is not on the rotation axis _AX100 ), the relationship is Δct>Δcb (or Δct<Δcb). In this case as well, the deviation angle θ can be calculated in the same manner as above.

Next, it is determined whether steps S17A1 to S17A3 have been performed n times (here, n = 2 times) (step S17A4), and if they have not been performed n times (step S17A4: No), the workpiece W is rotated 180 degrees/n (here, 90 degrees) (S17A5), and steps S17A1 to S17A3 are performed on the workpiece W _W2-W4 (see Figure 24 (b)) in the same manner as above (second execution).

Then, when steps S17A1 to S17A3 have been executed n times (here, n = 2 times) (step S17A4: Yes), the processing in Figure 23 ends.

Figure 26 is a table summarizing the measurement values Δct, Δcb, θ, and ΔY (stored in a specified storage unit) of each workpiece W _W3-W1 and W _W2-W4 measured as a result of the processing of Figure 23. In Figure 26, the measurement values Δct _W3-W1 , Δcb _W3-W1 , θ _W3-W1 , and ΔY _{W3- W1 represent measurement values obtained by measuring workpiece W W3-W1} . Similarly, the measurement values Δct _W2-W4 , Δcb _W2-W4 , θ _W2-W4 , and ΔY _W2-W4 represent measurement values obtained by measuring workpiece W _W2-W4 .

Next, returning to FIG. 17, it is determined whether the deviation measured in step S17A is less than or equal to the set value (predetermined threshold) (step S17B).

If the determination result in step S17B is No, the control device 300 executes the deviation amount correction process (step S17C).

Figure 27 is a flowchart of the misalignment correction process.

The deviation amount correction process is a process for correcting the deviation amount (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W relative to the rotation axis _AX100 of the cylindrical grinding device main body 100 measured in step S17A.

Specific examples 1 to 6 of the misalignment amount correction process will be described below.
<Specific Example 1>
FIG. 29 is a diagram for explaining a specific example 1 of the misalignment amount correction process.

In specific example 1, the workpiece W that is the subject of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaws 111 and the tail jaws 121, as shown in Figure 29(a). At that time, when viewed from the direction of arrow Ar1 (see Figure 29(b)), the central axis AX- _W of the workpiece W is deviated by an angle θ (θ _W3-W1 ) with respect to the rotation axis AX- ₁₀₀ . In addition, the center point CP of the workpiece W (the center point on the central axis AX- _W ) is on the rotation axis AX- ₁₀₀ .

On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 29(b)), the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ coincide with each other.

As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 29(c) are obtained. In Fig. 29(c), the measurement values θ _W3-W1 enclosed in a circle represent values other than 0.

First, in the Y-axis direction, the pair of claws 251a, 251b are moved toward each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _{W3- W1 (see FIGS. 29(a) and 29(b)), thereby clamping the workpiece W W3-W1} (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W _W3-W1 , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W3-W1 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpiece _W3-W1 is released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamps the workpiece W _W3-W1 is rotated by the deviation angle θ (θ _W3-W1 ) around the θ-axis AX _θ so that the deviation angle θ (θ W3 _-W1 ) circled in FIG. 29(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W3-W1 ) is corrected.

22(b), the workpiece W _W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the pair of claws 251a, 251b on the workpiece W _W3-W1 is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the deviation amount measured again for the workpiece W _W3-W1 in step S17A is equal to or less than the set value, this means that the central axis AX _W of the workpiece W and the rotation axis AX ₁₀₀ of the cylindrical grinding device main body 100 coincide (or substantially coincide), so the processes from step S18 onwards are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes.
<Specific Example 2>
FIG. 30 is a diagram for explaining a second specific example of the misalignment amount correction process.

In specific example 2, the workpiece W that is the target of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in Figure 30(a). At that time, when viewed from the direction of arrow Ar1 (see Figure 30(b)), the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ coincide with each other.

On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 30(b)), the central axis AX- _W of the workpiece W is offset by an angle θ (θ _W2-W4 ) with respect to the rotation axis _AX100 . Also, the center point CP of the workpiece W (the center point on the central axis AX- _W ) is on the rotation axis _AX100 .

As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 30(c) are obtained. In Fig. 30(c), the measurement values θ _W2-W4 enclosed in circles represent values other than 0.

First, the workpiece W _W3-W1 is rotated counterclockwise by 180 degrees/n (here, 90 degrees) from the origin state (see FIG. 30(b)) to become the workpiece W _W2-W4 state as shown in FIG. 30(d). This is achieved by the control device 300 controlling the spindle motor 113 and the tail motor 123.

Next, the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _W2-W4 (see FIG. 30(d)), thereby clamping the workpiece W _{W2-W4 (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W W2- W4} , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W2-W4 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpieces _W2-W4 are released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamps the workpieces W _W2-W4 is rotated by the deviation angle θ (θ _W2-W4 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W2-W4 ) circled in Figure 30(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W2-W4 ) is corrected.

22(b), the workpieces W _W2-W4 are clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the workpieces W _W2-W4 by the pair of claws 251a, 251b is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the amount of deviation measured again for the workpieces W _W2-W4 in step S17A is equal to or less than the set value, this means that the central axis AX- _W of the workpiece W and the rotation axis _AX100 of the cylindrical grinding device main body 100 coincide (or substantially coincide) with each other, and therefore the processes in step S18 and thereafter are executed. On the other hand, if the determination result in step S17B is No, that is, if the amount of deviation measured again for the workpieces W _W2-W4 in step S17A is not equal to or less than the set value, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes.
<Specific Example 3>
FIG. 31 is a diagram for explaining a specific example 3 of the misalignment amount correction process.

In specific example 3, the workpiece W that is the subject of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaws 111 and the tail jaws 121, as shown in Figure 31(a). At that time, when viewed from the direction of arrow Ar1 (see Figure 31(b)), the central axis AX- _W of the workpiece W is deviated by an angle θ (θ _W3-W1 ) with respect to the rotation axis _AX100 . Furthermore, the center point CP of the workpiece W (the center point on the central axis AX _-W ) is not on the rotation axis _AX100 , but is at a position deviated from the rotation axis _AX100 in the Y-axis direction by ΔY (ΔY _W3-W1 ).

On the other hand, when viewed from the direction of the arrow Ar2 (see FIG. 31(b)), the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ coincide with each other.

As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 31(c) are obtained. In Fig. 31(c), the measurement values θ _W3-W1 and ΔY _W3-W1 enclosed in circles indicate values other than 0.

First, in the Y-axis direction, the pair of claws 251a, 251b are moved toward each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _{W3- W1 (see FIGS. 31(a) and 31(b)), thereby clamping the workpiece W W3-W1} (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W _W3-W1 , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W3-W1 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpiece _W3-W1 is released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamps the workpiece W _W3-W1 is rotated by the deviation angle θ (θ _W3-W1 ) around the θ-axis AX _θ so that the deviation angle θ (θ W3 _-W1 ) circled in FIG. 31(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W3-W1 ) is corrected.

At the same time, the clamp mechanism 250 that clamps the workpiece W _W3-W1 is moved by the deviation distance ΔY (ΔY _W3-W1 ) so that the deviation distance ΔY (ΔY _W3-W1 ) circled in Figure 31(c) is eliminated. This is achieved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY _W3-W1 ) is corrected.

22(b), the workpiece W _W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the pair of claws 251a, 251b on the workpiece W _W3-W1 is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the deviation amount measured again for the workpiece W _W3-W1 in step S17A is equal to or less than the set value, this means that the central axis AX _W of the workpiece W and the rotation axis AX ₁₀₀ of the cylindrical grinding device main body 100 coincide (or substantially coincide), so the processes from step S18 onwards are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes.
<Specific example 4>
FIG. 32 is a diagram for explaining a specific example 4 of the misalignment amount correction process.

In Example 4, the workpiece W that is the target of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in Figure 32(a). At this time, when viewed from the direction of arrow Ar1 (see Figure 32(b)), the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ coincide with each other.

On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 32(b)), the central axis AX- _W of the workpiece W is offset by an angle θ (θ _W2-W4 ) with respect to the rotation axis _AX100 . Also, the center point CP (the center point on the central axis AX- _W ) of the workpiece W is not on the rotation axis _AX100 , but is offset from the rotation axis _AX100 in the Z-axis direction by ΔY (ΔY _W2-W4 ).

As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 32(c) are obtained. In Fig. 32(c), the measurement values θ _W2-W4 and ΔY _W2-W4 enclosed in circles indicate values other than 0.

First, the workpiece W _W3-W1 is rotated counterclockwise by 180 degrees/n (90 degrees in this case) from the origin state (see FIG. 32(b)) to become the workpiece W _W2-W4 state as shown in FIG. 32(d). This is achieved by the control device 300 controlling the spindle motor 113 and tail motor 123.

Next, the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _W2-W4 (see FIG. 32(d)), thereby clamping the workpiece W _{W2-W4 (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W W2- W4} , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W2-W4 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpieces _W2-W4 are released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamps the workpieces W _W2-W4 is rotated by the deviation angle θ (θ _W2-W4 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W2-W4 ) circled in FIG. 32(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W2-W4 ) is corrected.

At the same time, the clamp mechanism 250 that clamps the workpieces W _W2-W4 is moved by the deviation distance ΔY (ΔY _W2-W4 ) so that the deviation distance ΔY (ΔY _W2-W4 ) circled in Figure 32(c) is eliminated. This is achieved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY _W2-W4 ) is corrected.

22(b), the workpieces W _W2-W4 are clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the workpieces W _W2-W4 by the pair of claws 251a, 251b is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the deviation amount measured in step S17A for the workpieces _W2-W4 is equal to or less than the set value, this means that the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ of the cylindrical grinding device main body 100 coincide (or substantially coincide), and therefore the processes from step S18 onwards are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes.
<Specific Example 5>
FIG. 33 is a diagram for explaining a specific example 5 of the misalignment amount correction process.

In specific example 5, the workpiece W that is the subject of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaws 111 and the tail jaws 121, as shown in Figure 33(a). At that time, when viewed from the direction of arrow Ar1 (see Figure 33(b)), the central axis AX- _W of the workpiece W is deviated by an angle θ (θ _W3-W1 ) with respect to the rotation axis AX- ₁₀₀ . In addition, the center point CP of the workpiece W (the center point on the central axis AX- _W ) is on the rotation axis AX- ₁₀₀ .

On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 33(b)), the central axis AX- _W of the workpiece W is offset by an angle θ (θ _W2-W4 ) with respect to the rotation axis _AX100 . Also, the center point CP of the workpiece W (the center point on the central axis AX- _W ) is on the rotation axis _AX100 .

As a result of executing the deviation amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 33(c) are obtained. In Fig. 33(c), the measurement values θ _W3-W1 and θ _W2-W4 enclosed in circles indicate values other than 0.

First, in the Y-axis direction, the pair of claws 251a, 251b are moved toward each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _{W3- W1 (see FIGS. 33(a) and 33(b)), thereby clamping the workpiece W W3-W1} (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W _W3-W1 , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W3-W1 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpiece _W3-W1 is released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamped the workpiece W _W3-W1 is rotated by the deviation angle θ (θ _W3-W1 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W3-W1 ) circled in Figure 33(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W3-W1 ) is corrected as shown in Figure 33(d).

22(b), the workpiece W _W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the pair of claws 251a, 251b on the workpiece W _W3-W1 is released (step S17C5).

Next, the workpieces W _W3-W1 are rotated counterclockwise by 180 degrees/n (here, 90 degrees) from the state shown in FIG. 33(d) to become the state of the workpieces W _W2-W4 as shown in FIG. 33(e).

Next, similarly to step S17C1, the workpieces W _W2-W4 are clamped by the clamp mechanism 250. Then, the clamp mechanism 250 that has clamped the workpieces W _W2-W4 is rotated by the deviation angle θ (θ _W2-W4 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W2-W4 ) circled in FIG. 33(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W2-W4 ) is corrected.

22(b), the workpieces W _W2-W4 are clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the workpieces W _W2-W4 by the pair of claws 251a, 251b is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the amount of deviation measured again in step S17A for workpieces W _W3-W1 is equal to or less than the set value, and if the amount of deviation measured again in step S17A for workpieces _{W W2} -W4 is equal to or less than the set value, this means that the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ of the cylindrical grinding device main body 100 coincide (or substantially coincide), and therefore the processing from step S18 onwards is executed. On the other hand, if the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.
<Specific Example 6>
FIG. 34 is a diagram for explaining a specific example 6 of the misalignment amount correction process.

In specific example 6, the workpiece W that is the subject of the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaws 111 and the tail jaws 121, as shown in Figure 34(a). At that time, when viewed from the direction of arrow Ar1 (see Figure 34(b)), the central axis AX- _W of the workpiece W is deviated by an angle θ (θ _W3-W1 ) with respect to the rotation axis _AX100 . Furthermore, the center point CP of the workpiece W (the center point on the central axis AX _-W ) is not on the rotation axis _AX100 , but is at a position deviated from the rotation axis _AX100 in the Y-axis direction by ΔY (ΔY _W3-W1 ).

On the other hand, when viewed from the direction of arrow Ar2 (see FIG. 34(b)), the central axis AX- _W of the workpiece W is offset by an angle θ (θ _W2-W4 ) with respect to the rotation axis _AX100 . Also, the center point CP of the workpiece W (the center point on the central axis AX- _W ) is not on the rotation axis _AX100 , but is offset from the rotation axis _AX100 in the Z-axis direction by ΔY (ΔY _W2-W4 ).

As a result of performing the deviation measurement process (step S17A) on the clamped workpiece W as described above, the measurement values shown in Fig. 34(c) are obtained. In Fig. 34(c), the measurement values θ _W3-W1 , θ _W2-W4 , ΔY _W3-W1 , and ΔY _W2-W4 enclosed in circles represent values other than 0.

First, in the Y-axis direction, the pair of claws 251a, 251b are moved toward each other, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W _{W3- W1 (see FIGS. 34(a) and 34(b)), thereby clamping the workpiece W W3-W1} (step S17C1). In this manner, with the clamping mechanism 250 (pair of claws 251a, 251b) clamping the workpiece W _W3-W1 , the θ-axis AX _θ passes through the center (center on the central axis AX _W ) of the workpiece W _W3-W1 clamped by the clamping mechanism 250, and extends in the Z-axis direction.

Next, the workpiece _W3-W1 is released from the clamping of the spindle jaws 111 and tail jaws 121 (step S17C2).

Next, reloading is performed (step S17C3). That is, the clamp mechanism 250 that clamped the workpiece W _W3-W1 is rotated by the deviation angle θ (θ _W3-W1 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W3-W1 ) circled in Figure 34(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W3-W1 ) is corrected.

At the same time, the clamp mechanism 250 that clamps the workpiece W _W3-W1 is moved by the deviation distance ΔY (ΔY _W3-W1 ) so that the deviation distance ΔY (ΔY _W3-W1 ) circled in Figure 34(c) is eliminated. This is achieved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY _W3-W1 ) is corrected.

22(b), the workpiece W _W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W3-W1 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the pair of claws 251a, 251b on the workpiece W _W3-W1 is released (step S17C5).

Next, the workpieces W _W3-W1 are rotated counterclockwise by 180 degrees/n (here, 90 degrees) from the state shown in FIG. 34(d) to become the state of the workpieces W _W2-W4 as shown in FIG. 34(e).

Next, similarly to step S17C1, the workpieces W _W2-W4 are clamped by the clamp mechanism 250. Then, the clamp mechanism 250 that has clamped the workpieces W _W2-W4 is rotated by the deviation angle θ (θ _W2-W4 ) around the θ-axis AX _θ so that the deviation angle θ (θ _W2-W4 ) circled in FIG. 34(c) calculated in step S17A3 is eliminated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ _W2-W4 ) is corrected.

At the same time, the clamp mechanism 250 that clamps the workpieces W _W2-W4 is moved by the deviation distance ΔY (ΔY _W2-W4 ) so that the deviation distance ΔY (ΔY _W2-W4 ) circled in Figure 34(c) is eliminated. This is achieved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY _W2-W4 ) is corrected.

22(b), the workpiece W _W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the clamping mechanism 250 clamping the workpiece W is moved so that the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100 between the spindle jaws 111 and the tail jaws 121 of the cylindrical grinding device body 100. Next, with the central axis _AXW of the workpiece W after the correction of the angle θ (θ _W2-W4 ) coincides with the rotation axis _AX100 of the cylindrical grinding device body 100, the moved workpiece W is clamped between the spindle 101 (spindle jaws 111) and the tail jaws 102 (tail jaws 121).

Next, the clamping of the workpieces W _W2-W4 by the pair of claws 251a, 251b is released (step S17C5).

Next, return to Figure 17 and execute steps S17A and S17B again.

If the determination result in step S17B is Yes, that is, if the amount of deviation measured again in step S17A for workpieces W _W3-W1 is equal to or less than the set value, and if the amount of deviation measured again in step S17A for workpieces _{W W2} -W4 is equal to or less than the set value, this means that the central axis AX- _W of the workpiece W and the rotation axis AX- ₁₀₀ of the cylindrical grinding device main body 100 coincide (or substantially coincide), and therefore the processing from step S18 onwards is executed. On the other hand, if the determination result in step S17B is No, the processing in steps S17C and S17A is repeatedly executed until the determination result in step S17B becomes Yes.

Next, we will explain the processing from step S18 onwards.

That is, if the determination result in step S17B is Yes, the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is subjected to a predetermined machining process so as to satisfy the machining conditions acquired in step S11 (step S18). For example, the outer peripheral surface of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is ground.

Then, when the specified processing of the workpiece W to be processed (for example, grinding the outer surface of the workpiece, or additional processing such as creating a flat edge (OF) or a V-shaped notch) is completed (Step S19: Yes), the processed workpiece W is clamped by the clamping mechanism 250 in the same manner as above, and the clamped processed workpiece W is transported to a specified location (for example, pallet P4 in Figure 18) (Step S20).

The pallet P4 carrying this machined workpiece W (workpiece W4 in Figure 18) is then transferred to the automated guided vehicle AGV2 together with the pallet P4 by, for example, known means (workpiece W5 and pallet P5 in Figure 18).

Then, the automated guided vehicle AGV2 transports the pallet P5 carrying the machined workpiece W (workpiece W5 in Figure 18) to the next process.

As described above, according to this embodiment, the workpiece W can be clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121) with its central axis AX- _W coinciding with the rotation axis _AX100 of the cylindrical grinding device main body 100.

This is because the clamping mechanism 250 is equipped with a rotation mechanism (rotation motor 260) that rotates the clamping mechanism 250, which has clamped the workpiece W, around the θ-axis AX _θ (which passes through the center of the workpiece W clamped by the clamping mechanism 250 and extends in the Z-axis direction).

Furthermore, according to this embodiment, workpieces W of various lengths can be transported in a stable manner at all times.

This is because the clamping mechanism 250 moves in the Y-axis direction until the center Pb of the pair of claws 251a, 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined, automatically measured in step S11A) (step S12, see Figure 19(b)), and the clamping mechanism 250 (pair of claws 251a, 251b) clamps the center of the workpiece W in the Y-axis direction.

Next, we will explain modified examples.

Figure 28(a) is a diagram explaining the movement direction of each movable frame 220, 230, 240 of the cylindrical grinding device 1, and Figure 28(b) is a diagram explaining the movement direction of each movable frame 220, 230, 240 of a modified cylindrical grinding device 1.

In the above embodiment, as shown in FIG. 28( a), an example has been described in which the moving mechanisms of the present disclosure include a movable frame moving mechanism _M240 (an example of a first moving mechanism of the present disclosure) attached to the second movable frame 230 that moves the third movable frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction, a movable frame moving mechanism _M230 (an example of a second moving mechanism of the present disclosure) attached to the first movable frame 220 that moves the second movable frame ₂₃₀ (the clamping mechanism 250 and the movable frame moving mechanism _M240 ) in the Y-axis direction, and a movable frame moving mechanism _M220 (an example of a third moving mechanism of the present disclosure) attached to the fixed frame 210 that moves the first movable frame 220 (the clamping mechanism 250, the movable frame moving mechanism _M230 , and the movable frame moving mechanism M240) in the X-axis direction. However, the present disclosure is not limited to this.

For example, as shown in FIG. 28( b), the moving mechanisms of the present disclosure may include a movable frame moving mechanism _M240 (an example of a first moving mechanism of the present disclosure) attached to the second movable frame 230 and moving the third movable frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction, a movable frame moving mechanism _M230 (an example of a second moving mechanism of the present disclosure) attached to the first movable frame 220 and moving the second movable frame ₂₃₀ (the clamping mechanism 250 and the movable frame moving mechanism _M240 ) in the X-axis direction, and a movable frame moving mechanism _M220 (an example of a third moving mechanism of the present disclosure) attached to the fixed frame 210 and moving the first movable frame 220 (the clamping mechanism 250, the movable frame moving mechanism M230, and the movable frame moving mechanism _M240 ) in the Y-axis direction.

Other operational examples of the cylindrical grinding machine 1 will be described below with reference to Figure 35, etc.

Fig. 35 is a flowchart of another example of operation of the cylindrical grinding machine 1. Fig. 36 is a perspective view showing a state in which the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state in which the central axis _AXW of the workpiece W and the rotation axis _AX100 of the cylindrical grinding machine main body 100 are aligned.

In Fig. 36, the symbol AX- _C indicates the crystal axis of the workpiece W, which is a silicon crystal (single crystal). Hereinafter, this will be referred to as the crystal axis AX- _C . The crystal plane and the crystal axis AX- _C have the meanings as described in the rectangle in Fig. 36.

17, when the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state where the central axis AX- _W of the workpiece W coincides with the rotation axis AX- ₁₀₀ of the cylindrical grinding device body 100 (see FIG. 36), the crystal axis AX- _C is usually misaligned with the rotation axis AX _-100 of the cylindrical grinding device body 100. Therefore, in order to correct this misalignment, that is, to make the crystal axis AX- _C coincide (approximately coincide) with the rotation axis AX- ₁₀₀ of the cylindrical grinding device body 100, the processing of FIG. 35 is executed.

The processing of FIG. 35 is executed when steps S10 to S17C shown in FIG. 17 are executed, the determination result of step S17B is Yes, and the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state where the central axis _AXW of the workpiece W and the rotation axis _AX100 of the cylindrical grinding device main body 100 coincide (or substantially coincide) with each other (see FIG. 36).

First, it is determined whether or not a provisional notch is present (step S30). This is achieved, for example, by irradiating the workpiece W with a laser from a laser sensor (not shown) and rotating the workpiece 360 degrees to search for the presence or absence of a provisional notch (notch groove). If the determination result in step S30 is No, provisional notch machining is performed on the workpiece W (step S31). The location where the provisional notch machining is performed is automatically determined based on the measurement results of the X-ray device 150. The provisional notch machining is performed by the notch unit 140.

Next, the control device 300 executes the surface orientation measurement process (step S32).

Figure 37 is a flowchart of the surface orientation measurement process.

The plane orientation measurement process is a process for measuring (calculating) the deviation amount (deviation rotation angle Δδ and swing angle Δφ) of the crystal axis AX- _C with respect to the rotation axis AX _-100 of the cylindrical grinding machine body 100.

The surface orientation measurement process (steps S321 to S324) is performed n times on the workpiece W. The following explanation uses an example where n is 2. n (the number of measurements) is input by the operator via the operation device 400, for example. n is input at any time before the surface orientation measurement process is performed. Note that n may be input in advance and stored in a specified storage unit. Note that n may be any integer greater than or equal to 2. In other words, the minimum value of n is 2.

First, the control device 300 rotates the workpiece W until the provisional notch N1 is positioned at the reference position (step S321).

Next, the plane orientation is measured (step S322). This is achieved by the X-ray device 150. The X-ray device 150 measures the plane orientation by irradiating X-rays (toward the workpiece center Wc) onto surface A of the workpiece W positioned at the reference position as described above (see FIG. 36). The leftmost diagram in FIG. 38 and FIG. 40 show the X-ray device 150 irradiating X-rays onto the workpiece W to measure the plane orientation. The plane orientation measurement is performed for the workpiece center Wc because, since the workpiece center Wc is on the θ-axis AX _θ , the distance from the X-ray device 150 does not change during the correction process described below, even if the clamping mechanism 250 clamping the workpiece W is rotated about the θ-axis AX _θ . The X-ray device 150 outputs the plane orientation and correction value (the plane orientation and correction value of the C-plane relative to the notch) as the measurement value for surface A.

Next, it is determined whether step S322 has been executed n times (here, n = 2 times) (step S323). If it has not been executed n times (step S323: No), the workpiece W is rotated a predetermined angle (e.g., 90 degrees) (S324), and X-rays are irradiated (toward the workpiece center Wc) (see the center diagram in Figure 38) onto surface B (see Figure 36) of the workpiece W after the predetermined angle (e.g., 90 degrees) rotation to measure the surface orientation (step S322) (second execution). The X-ray device 150 outputs the surface orientation and correction value (the surface orientation and correction value of surface C based on the notch) as the measurement value for surface B.

Then, when step S322 has been executed n times (here, n = 2 times) (step S323: Yes), the axis misalignment rotation angle Δδ and the swing angle Δφ are calculated based on the measurements made in step S322 (step S325). The X-ray device 150 outputs the calculated axis misalignment rotation angle Δδ and swing angle Δφ. The axis misalignment rotation angle Δδ is the angle between a line L1 passing through the central axis _AXW of the workpiece W and the provisional notch N1 and a line L2 passing through the central axis _AXW of the workpiece W and the actual notch (planned location N2 for the actual notch) (see FIG. 38). Meanwhile, the workpiece W that is the target of the swing angle correction process (step S34) is clamped between the spindle jaws 111 and the tail jaws 121. When viewed from the direction of arrow Ar3 (see FIG. 38), the crystal axis _AXC of the workpiece W is misaligned by a swing angle Δφ with respect to the rotation axis _AX100 (see FIG. 35).

Next, returning to FIG. 35, it is determined whether the deviation amount (swing angle Δφ) measured in step S32 is less than or equal to the set value (predetermined threshold) (step S33).

If the determination result in step S33 is No, the control device 300 executes the rotation angle/swing angle correction process (step S34).

The rotation angle/swing angle correction process is a process for correcting the deviation amount (deviation rotation angle Δδ and swing angle Δφ) of the crystal axis AX- _C relative to the rotation axis AX _-100 of the cylindrical grinding machine body 100 measured (calculated) in step S32.

Figure 39 is a flowchart of the rotation angle/swing angle correction process.

First, the control device 300 rotates the workpiece W until the misalignment rotation angle of the plane orientation becomes horizontal (step S341). That is, as shown on the right side of Figure 38, the control device 300 rotates the workpiece W by a predetermined angle (270° ± misalignment rotation angle Δδ) until the actual notch (planned actual notch location N2) is positioned at the reference position. The misalignment rotation angle Δδ is a correction value that corrects the amount of misalignment of the actual notch (planned actual notch location N2) from the reference position.

Next, the pair of claws clamp the workpiece (step S342). Specifically, the pair of claws 251 a, 251 b are moved toward each other in the Y-axis direction, and the pair of claws 251 a, 251 b (respective tapered surfaces 256 a, 256 b) are brought into contact with the outer peripheral surface of the workpiece W, thereby clamping the workpiece W. In this manner, with the clamping mechanism 250 (pair of claws 251 a, 251 b) clamping the workpiece W, the θ-axis AX _θ passes through the workpiece W clamped by the clamping mechanism 250 (the center on the central axis AX _W ) and extends in the Z-axis direction.

Next, the spindle jaws 111 and tail jaws 121 are released from their clamping of the workpiece W (step S343).

Next, the clamping mechanism 250 is moved to a position where the angle of the plane orientation is corrected (step S344). Specifically, the clamping mechanism 250 clamping the workpiece W is rotated about the θ-axis AX-θ so as to cancel the swing angle _Δφ calculated in step S325. This is achieved by the control device 300 controlling the swing motor 260. As a result, the deviation amount (swing angle Δφ) is corrected. The swing angle Δφ is a correction value that corrects the deviation amount of the crystal axis AX- _C of the workpiece W relative to the rotation axis AX _-100 of the cylindrical grinding machine main body 100.

Next, the workpiece W whose deviation (swing angle Δφ) has been corrected as described above is clamped between the spindle jaws 111 and the tail jaws 121 (step S345). As a result, the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state in which the crystal axis AX- _C and the rotation axis AX- ₁₀₀ of the cylindrical grinding machine main body 100 are aligned.

Next, the pair of claws 251a, 251b release the clamp from the workpiece W (step S346).

Next, return to Figure 35 and execute steps S32 and S33 again.

If the determination result in step S33 is Yes, that is, if the deviation amount (swing angle Δφ) measured again for the workpiece W in step S32 is equal to or less than the set value (predetermined threshold value), this means that the crystal axis AX- _C and the rotation axis AX- ₁₀₀ of the cylindrical grinding device body 100 coincide (or substantially coincide), and therefore the processes in step S35 and thereafter are executed. On the other hand, if the determination result in step S33 is No, the processes in steps S34 and S32 are repeatedly executed until the determination result in step S33 becomes Yes.

Next, we will explain the processing from step S35 onwards.

That is, if the determination result in step S33 is Yes, the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is subjected to circular grinding so as to satisfy the machining conditions acquired in step S11 (step S35). That is, the outer peripheral surface of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is ground. In Figure 35 "Circular Grinding," the hatched area represents the area to be circularly ground (grinded). This is achieved by the circular grinding unit 130 (see Figure 6(a)).

Next, notching (main notching) is performed on the workpiece (step S36). The location where the notch is to be performed (main notch planned location N2) is determined based on the measurement results of the X-ray device 150. The notching is performed by the notch unit 140. Specifically, the workpiece W is rotated another 90° from the state shown at the right end of FIG. 38 so that the location where the notch is to be performed (main notch planned location N2) faces the notch unit 140, and then the main notch is formed at the main notch planned location N2 by the notch unit 140 (see FIG. 6(b)). This allows the main notch to be accurately formed in the workpiece W along the crystal axis _AXc (in a direction perpendicular to the crystal planes at both ends of the crystal axis _AXc ).

Once the circular grinding and notch machining (main notch machining) on the workpiece W is completed, the machined workpiece W is clamped by the clamping mechanism 250 in the same manner as described above, and the clamped machined workpiece W is transported to a predetermined location (for example, pallet P4 in Figure 18) (step S37).

All numerical values shown in the above embodiments are examples, and it goes without saying that other appropriate numerical values can be used.

The above-described embodiments are merely illustrative in all respects. The present invention should not be construed as being limited by the description of the above-described embodiments. The present invention can be embodied in various other forms without departing from its spirit or essential characteristics.

DESCRIPTION OF SYMBOLS 1... Cylindrical grinding machine 100... Cylindrical grinding machine main body 110... Spindle unit 111... Spindle jaw 112... Spindle body 113... Spindle motor 120... Tail unit 121... Tail jaw 122... Tail body 123... Tail motor 130... Circular grinding unit 131... Circular grinding wheel 132... Circular grinding base 133... Circular grinding motor 140... Notch unit 141... Notch grinding wheel 142... Notch frame 143... Notch motor 150... X-ray device 200... Work transport device 201... Vertical column 210... Fixed frame 211a... First frame 211b... First frame 212a... Second frame 212b... Second frame 220... First movable frame 221a... Third frame 221b... Third frame 222a...fourth frame 222b...fourth frame 223a...guide rail 223b...guide rail 224...ball screw 225...drive motor 230...second movable frame 231a...guide rail 231b...guide rail 232...ball screw 233...drive motor 240...third movable frame 241a, 241b...guide rail 242...drive motor 243...Z-axis frame base 244...slide rail 245...buffer axis frame base 250...clamp mechanism 251a, 251b...claw portion 252...frame 253a...guide rail 253b...guide rail 254a...movable frame 254b...movable frame 255...drive motor 256a...first abutment portion (tapered surface)
256b: First contact portion (tapered surface)
257a...light-emitter 257b...light-receiver 260...swivel motor 262...top plate 270...outer diameter measuring mechanism 271...lifting frame 272a, 272b...measuring arm 273a, 273b...measuring element 274...carriage 275...guide rail 276...drive motor 300...control device 400...operation device 500...pallet loader A1, A2...rectangular AGV1, AGV2...automated guided vehicle AX ₁₀₀ ...rotation axis AX _W ...central axis AX _θ ...θ-axis AX _MW ...master work central axis CP...center point M ₂₂₀ ...movable frame moving mechanism M ₂₃₀ ...movable frame moving mechanism M ₂₄₀ ...movable frame moving mechanism M ₂₅₀ ...Jaw moving mechanism P1 to P5...Pallet W...Workpiece Wt...Top end face Wb...Bottom end face d...Movement distance x1, x2...Grinding amount θ...Shift angle ΔY...Shift distance

Claims (4)

A workpiece machining method in which a workpiece conveyance device is used to correct a deviation amount of a crystal axis relative to a rotation axis of a cylindrical grinding device body, and the workpiece after the correction is subjected to cylindrical grinding,
The workpiece is cylindrical and has a crystal plane orientation and a crystal axis,
When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction,
a first holding step in which the cylindrical grinding device body holds the workpiece in a state in which a rotation axis of the cylindrical grinding device body coincides with a central axis of the workpiece and the workpiece is rotatable around the rotation axis of the cylindrical grinding device body;
an X-ray device irradiating the workpiece with X-rays and outputting a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body;
a first clamping step in which the clamping mechanism clamps the workpiece;
a holding release step in which the cylindrical grinding device main body releases the workpiece from being held by the cylindrical grinding device main body;
a misalignment correction step in which the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate the misalignment;
a second holding step in which the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body ;
a grinding process for grinding the workpiece , which is rotating around the rotation axis of the cylindrical grinding device body and whose deviation has been eliminated . 2. The workpiece machining method according to claim 1, wherein the deviation amount output step, the first clamping step, the holding release step, the deviation amount correction step, and the second holding step are repeatedly performed until the deviation amount becomes equal to or less than a set value. A program for implementing a workpiece machining method that corrects the amount of deviation of a crystal axis relative to a rotation axis of a cylindrical grinding machine body using a workpiece conveyance device and performs cylindrical grinding on the corrected workpiece,
The workpiece is cylindrical and has a crystal plane orientation and a crystal axis,
When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction,
a first holding step in which the cylindrical grinding device body holds the workpiece in a state in which a rotation axis of the cylindrical grinding device body and a central axis of the workpiece coincide with each other and the workpiece is rotatable around the rotation axis of the cylindrical grinding device body;
an X-ray device irradiating the workpiece with X-rays and outputting a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body;
a first clamping step in which the clamping mechanism clamps the workpiece;
a holding release step in which the cylindrical grinding device main body releases the workpiece from being held by the cylindrical grinding device main body;
a misalignment amount correcting step in which the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate the misalignment amount;
a second holding step in which the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body ;
a cylindrical grinding step of performing a circular grinding process on the workpiece rotating around the rotation axis of the cylindrical grinding device body and having the deviation amount eliminated . A cylindrical grinding machine that corrects the deviation of a crystal axis relative to a rotation axis of a cylindrical grinding machine body and performs circular grinding on the workpiece after the correction,
A workpiece transport device;
a cylindrical grinding device body that holds the workpiece such that the rotation axis of the cylindrical grinding device body and the central axis of the workpiece coincide with each other and the workpiece can rotate around the rotation axis of the cylindrical grinding device body;
A circle research unit;
The workpiece is cylindrical and has a crystal plane orientation and a crystal axis,
When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction,
the cylindrical grinding device body releases the holding of the workpiece by the clamping mechanism after the clamping mechanism has clamped the workpiece;
the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding machine body, the deviation amount being output by the X-ray device irradiating the workpiece with X-rays;
the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body;
The cylindrical grinding unit is a cylindrical grinding device that performs a circular grinding process on the workpiece that is rotating around the rotation axis of the cylindrical grinding device main body and whose misalignment has been eliminated.