JP7786807B2 - Conveyance device, processing system, control method, and article manufacturing method - Google Patents

Description

The present invention relates to a conveying device, a processing system, a control method, and a method for manufacturing an article.

Conveyor systems are commonly used in production lines for assembling industrial products, semiconductor exposure equipment, and the like. Conveyor systems in production lines, in particular, transport parts and other workpieces between multiple stations within factory-automated production lines or between production lines. They can also be used as transport devices within process equipment. Conveyor systems using moving magnet linear motors have already been proposed as a type of conveyor system.

Conveyance systems using moving magnet linear motors are constructed using guide devices that involve mechanical contact, such as linear guides. However, conveyance systems using guide devices such as linear guides have the problem of reduced productivity due to contaminants generated from the sliding parts of the linear guide, such as wear debris from rails and bearings, lubricating oil, and volatilized lubricating oil. Furthermore, during high-speed conveyance, friction in the sliding parts increases, shortening the lifespan of the linear guide.

Patent Documents 1 and 2 describe non-contact magnetic levitation type moving or transporting devices that do not have sliding parts as guides. The moving device described in Patent Document 1 is equipped with a total of seven rows of linear motors to control the movement and posture of the mover. Similarly, the transporting device described in Patent Document 2 is equipped with a total of six rows of levitation electromagnets, guide electromagnets, and propulsion electromagnets.

Japanese Patent Application Laid-Open No. 2015-230927 Special table 2016-532308 publication

However, in the case of the conveying device described in Patent Document 2, for example, permanent magnets that can be driven in the conveying direction and levitation direction cannot be arranged in the same location as permanent magnets that can be driven in a guide direction perpendicular to the conveying direction and levitation direction. For permanent magnets with different drive directions, measures must be taken to avoid magnetic interference, such as spacing them apart and not passing current through coils that straddle each other, resulting in the problem of an increased system size.

The present invention aims to provide a conveying device, processing system, control method, and article manufacturing method that can convey a mover in a non-contact manner while controlling the position of the mover, without increasing the size of the system configuration.

One aspect of the present invention provides a conveying device comprising a stator and a mover that is conveyed in a first direction along the stator, wherein one of the stator and the mover has a plurality of coils arranged along the first direction, and the other of the stator and the mover has a magnet row including a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils, wherein adjacent magnets in the first direction have different magnetic poles, and the plurality of coils include a first coil group that, when a current is applied, exerts a first force on the mover in the first direction through interaction with the magnet row, and a second coil group that, when a current is applied, exerts a second force on the mover in a second direction intersecting the first direction through interaction with the magnet row.

According to the present invention, the mover can be transported without contact while controlling its attitude, without increasing the size of the system configuration.

1 is a schematic diagram showing a conveying device according to a first embodiment of the present invention; 1 is a schematic diagram showing a conveying device according to a first embodiment of the present invention; 1 is a schematic diagram showing a conveying device according to a first embodiment of the present invention; 1 is a schematic diagram showing a conveying device according to a first embodiment of the present invention; FIG. 2 is a schematic view showing a mover in the transport device according to the first embodiment of the present invention. FIG. 2 is a schematic view showing a mover in the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams illustrating a thrust generation method for the transport device according to the first embodiment of the present invention. 5 is a graph showing a thrust constant depending on a transfer position in the transfer device according to the first embodiment of the present invention. 5 is a graph showing a thrust constant depending on a transfer position in the transfer device according to the first embodiment of the present invention. 5 is a graph showing a thrust constant depending on a transfer position in the transfer device according to the first embodiment of the present invention. FIG. 4 is a schematic diagram showing a method for calculating thrust with six degrees of freedom in the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams showing examples of arrangement of coil units for each transport step of the transport device according to the first embodiment of the present invention. 3A and 3B are schematic diagrams showing examples of arrangement of coil units for each transport step of the transport device according to the first embodiment of the present invention. 1 is a schematic diagram showing an example of application of a transfer device according to a first embodiment of the present invention to a vacuum device. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10A and 10B are schematic diagrams showing other configurations of the first coil unit in the transport device according to the first embodiment of the present invention. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. 10 is a schematic diagram showing another configuration of the second coil unit in the transport device according to the first embodiment of the present invention. FIG. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a second embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a third embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a third embodiment of the present invention. FIG. 10 is a schematic diagram showing a conveying device according to a third embodiment of the present invention.

Embodiments of the present invention will be described below with reference to the accompanying drawings. However, the following embodiments and examples merely exemplify preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations.

[First embodiment]
A transport device according to a first embodiment of the present invention will be described with reference to FIGS. 1A to 9L.

First, the schematic configuration of the conveying device 1 according to this embodiment will be described using Figures 1A to 2B. Figures 1A to 1D are schematic diagrams showing the conveying device 1 according to this embodiment. Figure 1A is a top view of the conveying device 1 as seen from the Z direction, which will be described later. Figure 1B is a side view of the conveying device 1 as seen from the Y direction, which will be described later. Figures 1C and 1D are side views as seen from one direction and the other direction in the X direction, which will be described later. Figures 2A and 2B are schematic diagrams showing the mover 10 in the conveying device 1 according to this embodiment. Figure 2A is a top view of the mover 10 as seen from the Z direction. Figure 2B is a side view of the mover 10 as seen from the Y direction. Hereinafter, for components that may exist multiple times, common numerals only will be used unless there is a need to distinguish between them, and lowercase or uppercase letters will be added after the numerals to distinguish between them as necessary.

As shown in Figures 1A to 1D, the conveying device 1 according to this embodiment includes a mover 10 that holds and conveys a workpiece 123, and a stator 20 that forms a conveying path along which the mover 10 travels. The conveying device 1 according to this embodiment is a magnetic levitation conveying device that conveys the workpiece by moving the mover 10, which is magnetically levitated against gravity by magnetic force. Note that this embodiment illustrates a conveying device using a moving magnet linear motor (moving permanent magnet linear motor, moving field linear motor) as an example of the conveying device 1, but the conveying device 1 may also be a conveying device using a moving coil linear motor. The conveying device 1 according to this embodiment constitutes part of a processing system that also includes a processing device 30 that processes the workpiece 123 conveyed by the mover 10. The processing system can manufacture an article by processing the workpiece 123 using the processing device 30.

The conveying device 1 conveys the workpiece 123 held by the mover 10, for example, by conveying the mover 10 along the stator 20, to a processing device 30 that processes the workpiece 123. The processing device 30 is not particularly limited, but may be, for example, a film-forming device such as a vapor deposition device or sputtering device that forms a film on a substrate such as a glass substrate, which is the workpiece 123.

The coordinate axes and directions used in the following description are defined below. The X-axis is taken along the horizontal direction, i.e., the direction in which the mover 10 travels, and the X-direction is the direction of movement of the mover 10. Arrow M in Figure 1 indicates the X-direction of movement of the mover 10. The Z-axis is taken along the vertical direction, which is perpendicular to the X-direction, and the Z-direction is the vertical direction. The Y-axis is taken along the direction perpendicular to the X- and Z-directions, and the Y-direction is the direction perpendicular to the X- and Z-directions. The rotation direction around the X-axis is taken as the Wx-direction, the rotation direction around the Y-axis is taken as the Wy-direction, and the rotation direction around the Z-axis is taken as the Wz-direction. The symbol "*" is used for multiplication. The Y-side of the mover 10 is referred to as the R-side, and the Y+ side is referred to as the L-side. The movement direction of the mover 10 does not necessarily have to be horizontal; in that case, the X-direction can be used to define the Y- and Z-directions in the same way. Note that the X, Y, and Z directions are not necessarily limited to being mutually orthogonal, but can also be defined as directions that intersect with each other.

The stator 20 has two or more different types of coil units. Figures 1A to 1D show an example in which the stator 20 has a first coil unit 100 and a second coil unit 110 as the multiple coil units. The first coil unit 100 has a coil core 101 and a coil 102 wound around the coil core 101. The second coil unit 110 has a coil core 111 and a coil 112 wound around the coil core 111. Below, we will explain the case in which the stator 20 has the first coil unit 100 and the second coil unit 110.

The first coil units 100 and second coil units 110 are arranged in a line along the transport direction (X direction) of the mover 10. Figures 1A to 1D illustrate an example in which 24 first coil units 100 and 8 second coil units 110 are installed, with three first coil units 100 and one second coil unit 110 arranged alternately on each of the R and L sides. In this case, three coils 102 of the first coil unit 100 are installed between two coils 112 of the second coil unit 110. The number of first coil units 100 and second coil units 110 is not particularly limited and can be changed as appropriate depending on the length of the transport path along which the mover 10 is to be transported, etc.

Furthermore, the number and order in which the first coil units 100 and second coil units 110 are arranged in succession are not particularly limited. The second coil units 110 may be installed in succession, or the first coil units 100 and second coil units 110 may be installed alternately one by one. The number of rows in which the first coil units 100 and second coil units 110 are arranged in the X direction is also not limited to the two rows shown in Figures 1A to 1D, and may be one row, or three or more rows.

As shown in Figures 2A and 2B, the mover 10 has a magnet group consisting of multiple permanent magnets 121, a mover yoke 120, and a holding portion 122. The mover yoke 120 is attached and arranged on both the R side and L side of the mover 10 in the X direction. The multiple permanent magnets 121 are installed on the mover yoke 120 so that they are lined up in two rows along the X direction, which is the longitudinal direction of the mover yoke 120, to form magnet rows. The holding portion 122 is attached and installed on the bottom surface of the mover 10. The mover 10 is transported in the X direction along the stator 20.

Specifically, the multiple permanent magnets 121R on the R side are installed on the mover yoke 120R so as to be aligned in two rows along the X direction, which is the longitudinal direction of the mover yoke 120R, to form a magnet row. The multiple permanent magnets 121R have opposite polarities on adjacent surfaces in both the X and Y directions, with N and S poles arranged alternately, and are arranged at intervals such that one period of magnetic poles in the X direction is Pm. Similar to the R side, the multiple permanent magnets 121L on the L side are installed on the mover yoke 120L so as to be aligned in two rows along the X direction, which is the longitudinal direction of the mover yoke 120L, to form a magnet row. The multiple permanent magnets 121L have opposite polarities on adjacent surfaces in both the X and Y directions, with N and S poles arranged alternately, and are arranged at intervals such that one period of magnetic poles in the X direction is Pm. In the following, unless a distinction is required, the permanent magnet attached to the mover 10 will be referred to simply as the "permanent magnet 121" and the mover yoke will be referred to simply as the "mover yoke 120."

In this way, the multiple permanent magnets 121 form multiple magnet rows in which adjacent permanent magnets 121 in the X and Y directions have different magnetic poles. Note that the magnet rows of permanent magnets 121 along the X direction may be arranged in multiple rows in the Y direction, or just one row.

The multiple permanent magnets 121 are arranged so that they can face both or either of the first coil unit 100 and second coil unit 110 of the stator 20 in the Z direction. The first coil unit 100 and second coil unit 110 are installed so that three of them lined up in the X direction are positioned within the magnetic pole period Pm of the permanent magnets 121.

The holding unit 122 is configured to hold the workpiece 123, which is the object to be transported, for example, below the mover 10. Note that the holding unit 122 only needs to be able to hold the workpiece 123 on the mover 10, and the location and holding mechanism by which the holding unit 122 holds the workpiece 123 are not particularly limited. The workpiece 123, while held by the holding unit 122 on the mover 10, is transported in the X direction as the mover 10 is transported. The mover 10 may be guided by a linear guide (not shown) or the like so that it can move along the X direction.

The conveying device 1 according to this embodiment also includes a control unit 40 that controls the conveyance of the mover 10 in the X direction along the stator 20. The control unit 40 detects the translational position (X-axis, Y-axis, Z-axis) and rotational orientation (Wx-axis, Wy-axis, Wz-axis) of the mover 10 using position detection means such as a linear encoder or laser length measuring device (not shown). The control unit 40 also calculates the amount of current to be passed through each coil 102 of the stator 20 based on the detected position of the mover 10, and energizes each coil 102, 112. As described below, the control unit 40 can pass three-phase AC current, consisting of U, V, and W phases, through the coils 102, 112. This allows the control unit 40 to generate, between each coil 102 and the permanent magnet 121 of the mover 10, a magnetic force that serves as a thrust to levitate the mover 10 in the Z direction and a thrust to drive the mover 10 to travel in the X direction. In addition, a magnetic force can be generated between each coil 112 and the permanent magnet 121 of the mover 10, which serves as a thrust to guide the mover 10 in the Y direction.

Note that magnetic forces acting as attractive forces act as part of the levitation force between the permanent magnet 121 and either or both of the first coil unit 100 and the second coil unit 110. By combining the thrust forces generated by coils 102 and 112, the control unit 40 can transport the mover 10 along the X direction to transport the workpiece 123 while controlling the six degrees of freedom of the mover 10: the X-axis, Y-axis, Z-axis, Wx-axis, Wy-axis, and Wz-axis. While this embodiment illustrates a case in which the mover 10 is transported while controlling the six degrees of freedom of the mover 10, this is not limited to this. It is also possible to install an axial guide mechanism that guides the mover 10 in the direction of one or more axes, and control the degrees of freedom of axes other than the axis guided by the guide mechanism. For example, the mover 10 may be transported while controlling fewer degrees of freedom than six, such as controlling two degrees of freedom of the mover 10: the X-axis and Y-axis.

Note that this embodiment illustrates a conveying device using a moving magnet linear motor in which the stator 20 has a first coil unit 100 and a second coil unit 110, and the mover 10 has multiple permanent magnets 121, but this is not limited to this. The conveying device 1 may also be a conveying device using a moving coil linear motor. In this case, the first coil unit 100 and the second coil unit 110 are installed on the mover 10, and multiple permanent magnets 121 are installed on the stator 20.

Next, details of the first and second coil units 100, 110 according to this embodiment and the principle of thrust generation will be described using Figures 3A to 4C. Figures 3A to 3F are schematic diagrams showing the thrust generation method of the conveying device 1 according to this embodiment. Figures 3A and 3B show the current flow method when generating a thrust in the X direction using the first coil unit 100. Figures 3C and 3D show the current flow method when generating a thrust in the Z direction using the first coil unit 100. Figures 3E and 3F show the current flow method when generating a thrust in the Y direction using the second coil unit 110. Note that Figures 3A, 3C, and 3E are views of the permanent magnet 121 of the mover 10 and the first coil unit 100 or second coil unit 110 of the stator 20, respectively, viewed from the Y direction. Figures 3B, 3D, and 3F are views of the permanent magnet 121 and the first coil unit 100 or the second coil unit 110 shown in the corresponding Figures 3A, 3C, and 3E, respectively, viewed from the X direction.

The first coil unit 100 is composed of a coil core 101 and a coil 102. The coil core 101 consists of a back yoke portion 103 and two teeth portions 104a and 104b. The back yoke portion 103 is arranged along the Y direction. The teeth portions 104a and 104b are aligned in the Y direction and protrude downward in the Z direction from one end and the other end of the back yoke portion 103 in the Y direction towards the side along which the mover 10 travels. The coil 102 is wound around the back yoke portion 103 with an axis along the Y direction as the winding axis.

When a current is applied to the multiple coils 102 of the multiple first coil units 100, as described below, they form a coil group that applies electromagnetic forces to the mover 10 in the X and Z directions through interaction with a magnet array consisting of permanent magnets 121.

The second coil unit 110 is composed of a coil core 111 and a coil 112. The coil core 111 consists of a back yoke portion 113 and three teeth 114a, 114b, and 114c. The back yoke portion 113 is arranged along the Y direction. The teeth 114a, 114b, and 114c are aligned in the Y direction and protrude downward in the Z direction from one end, the center, and the other end of the back yoke portion 113 in the Y direction, respectively, toward the side along which the mover 10 travels. The coil 112 is wound around the central tooth 114b, with an axis along the Z direction as the winding axis.

When a current is applied to the multiple coils 112 of the multiple second coil units 110, as described below, they form a coil group that applies an electromagnetic force to the mover 10 in the Y direction through interaction with a magnet array consisting of permanent magnets 121.

In Figures 3A to 3F, the arrows Fx, Fz, and Fy shown at the bottom of the mover yoke 120 indicate the direction of the thrust force generated. The arrows shown in the coils 102 and 112 indicate the direction of the current flowing through the coils 102 and 112, respectively. The N and S marks on the permanent magnet 121 indicate the magnetic poles on the top surface of the permanent magnet 121. The N and S marks on the teeth 104a, 104b, 114a, 114b, and 114c indicate the magnetic poles on the bottom surfaces of the teeth 104a, 104b, 114a, 114b, and 114c that result from passing a predetermined current through the coils 102 and 112. Figures 3A to 3F show examples of the arrangement of the first coil unit 100 and the second coil unit 110 to explain the principle of thrust generation, but the arrangement of the first coil unit 100 and the second coil unit 110 for thrust generation is not limited to these arrangements.

The period of the magnetic poles of the permanent magnet 121 in the X direction is Pm, the position of the mover 10 including the permanent magnet 121 and the mover yoke 120 in the X direction is x, and the coordinate of the position x where the center of any U-phase coil 102 or coil 112 in the X direction coincides with the center of the N pole of the permanent magnet is the origin. The control unit 40 can generate thrust in the X direction, Z direction, or Y direction on the mover 10 by controlling the value of the current flowing through the coil 102 of the first coil unit 100 or the coil 112 of the second coil unit 110 as follows:

To generate thrust in the X direction, the control unit 40 energizes the coils 102 of the first coil unit 100 as shown in FIGS. 3A and 3B . As a result, the control unit 40 sets the current command to Ix0 and energizes the U-phase coil 102 with a current value expressed by Equation (1), the V-phase coil 102 with a current value expressed by Equation (2), and the W-phase coil 102 with a current value expressed by Equation (3). By energizing the coils 102 of the first coil unit 100, thrust in the X direction and Z direction are generated. However, by energizing the coils 102 with the current values expressed by Equations (1) to (3), the Z-direction thrusts generated by the U-phase coil 102, the V-phase coil 102, and the W-phase coil 102 cancel each other out, and a force with a constant thrust constant acts in the X direction. In this way, thrust in the X direction can be generated in the mover 10.

Furthermore, when generating a thrust in the Z direction, the control unit 40 energizes the coils 102 of the first coil unit 100 as shown in Figures 3C and 3D. As a result, the control unit 40 sets the current command to Iz0 and energizes the U-phase coil 102 with a current value expressed by Equation (4), the V-phase coil 102 with a current value expressed by Equation (5), and the W-phase coil 102 with a current value expressed by Equation (6). As described above, energizing the coils 102 of the first coil unit 100 generates thrust in the X and Z directions. However, by energizing as expressed by Equations (4) to (6), the X-direction thrusts generated by the U-phase coil 102, the V-phase coil 102, and the W-phase coil 102 cancel each other out, and a force with a constant thrust constant acts in the Z direction. In this way, thrust in the Z direction can be generated on the mover 10.

Furthermore, when generating a thrust in the Y direction, the control unit 40 energizes the coils 112 of the second coil unit 110 as shown in Figures 3E and 3F. As a result, the control unit 40 sets the current command to Iy0 and energizes the U-phase coil 112 with a current value shown in Equation (7), the V-phase coil 112 with a current value shown in Equation (8), and the W-phase coil 112 with a current value shown in Equation (9). By energizing the coils 112 of the second coil unit 110, a thrust in the Y direction is generated, and by energizing the coils 112 with a current value shown in Equations (7) to (9), a force with a constant thrust constant acts in the Y direction. In this way, a thrust in the Y direction can be generated for the mover 10.

Figures 4A to 4C are graphs showing the thrust constants depending on the transport position in the transport device 1 according to this embodiment. The thrust constants are the thrust forces generated when a unit current command is given as the current command in the above-described equations (1) to (9). Specifically, Figure 4A shows the X-direction thrust constant, which is the X-direction thrust generated when a unit current command Ix0 is given in equations (1) to (3). Figure 4B shows the Y-direction thrust constant, which is the Y-direction thrust generated when a unit current command Iy0 is given in equations (7) to (9). Figure 4C shows the Z-direction thrust constant, which is the Z-direction thrust generated when a unit current command Iz0 is given in equations (4) to (6). It can be seen from Figures 4A to 4C that the thrust constants are constant in all directions, X, Y, and Z, regardless of the position of the mover 10 in the X direction.

Thrust is generated in both the X and Z directions using the same first coil unit 100. Therefore, by superimposing the currents shown in equations (1) to (3) and the currents shown in equations (4) to (6) and passing them through the coil 102, it is possible to generate independent thrusts in both the X and Z directions.

Furthermore, when energizing the coils 102 of the multiple first coil units 100 with three-phase AC, the number of energized U-phase coils 102, the number of energized V-phase coils 102, and the number of energized W-phase coils 102 can be made the same. This allows the thrust constants in the X and Z directions to be constant regardless of the position of the mover 10 in the X direction.

Furthermore, when energizing the coils 112 of multiple second coil units 110 with three-phase AC, the number of energized U-phase coils 112, the number of energized V-phase coils 112, and the number of energized W-phase coils 112 can be made the same. This allows the thrust constant in the Y direction to be constant regardless of the position of the mover 10 in the X direction.

In addition, the control unit 40 can pass three-phase AC current through at least one of the coil group consisting of multiple coils 102 and the coil group consisting of multiple coils 112 so that the number of coils in each phase is the same, as described above.

The control unit 40 can control the mover 10 by passing three-phase AC current through the coil 102 of the first coil unit 100 and the coil 112 of the second coil unit 110 as described above, thereby generating thrust in the X, Y, and Z directions on the mover 10.

Next, the thrust calculation method for six degrees of freedom in the conveying device 1 according to this embodiment will be explained using Figure 5. Figure 5 is a schematic diagram showing the thrust calculation method for six degrees of freedom in the conveying device 1 according to this embodiment, and is a top view showing the mover 10 and stator 20.

When the magnetically levitated mover 10 is moved and transported, assuming that the center of gravity of the mover 10 is G as shown in FIG. 5 , it is necessary to control six degrees of freedom of the center of gravity G: three translational degrees of freedom (X-axis, Y-axis, and Z-axis) and three rotational degrees of freedom (Wx-axis, Wy-axis, and Wz-axis). Here, the center of gravity G of the mover 10 is the origin, and the coordinates of an arbitrary coil unit (the second coil unit 110 in the example of FIG. 5 ) on the XY plane are (Lx, Ly). Furthermore, the thrust acting in the X direction, which is the translational direction of the mover 10, is Fx, the thrust acting in the Y direction is Fy, and the thrust acting in the Z direction is Fz. Furthermore, the moment force acting in the Wx direction, which is the rotational direction of the mover 10, is Tx, the moment force acting in the Wy direction is Ty, and the moment force acting in the Wz direction is Tz. These forces are then expressed by the following equations (10) to (15).
Fx = Σ (Kx * Ix) (10)
Fy = Σ (Ky * Iy) (11)
Fz = Σ (Kz * Iz) (12)
Tx = Σ (Kz * Iz * Ly) (13)
Ty =-Σ (Kz * Iz * Lx) (14)
Tz =-Σ (Kx * Ix * Ly) + Σ (Ky * Iy ・Lx) (15)

Here, Kx is the thrust generated in the X direction when a unit current command is given to the first coil unit 100. Ky is the thrust generated in the Y direction when a unit current command is given to the second coil unit 110. Kz is the thrust generated in the Z direction when a unit current command is given to the first coil unit 100. Kx, Ky, and Kz change periodically depending on the position x of the mover 10 in the X direction, and are expressed as in equations (16) to (24), with Kx0, Ky0, and Kz0 being constants.

As shown in equations (10) to (12), the translational thrust forces Fx, Fy, and Fz acting on the mover 10 are the sum of the forces acting in the axial direction from each coil unit. Furthermore, as shown in equations (13) to (15), the rotational moment forces Tx, Ty, and Tz acting on the mover 10 are the sum of the products of the distances Lx and Ly from the center of gravity G of the mover 10 to each coil unit, which are components perpendicular to the rotation axis, and the force acting in the rotational direction from each coil unit.

The control unit 40 shown in Figure 1 feeds back the detected values of the six degrees of freedom of the position and orientation of the mover 10, and applies and controls the six degrees of freedom of thrust to the mover 10 so that it reaches the target position and orientation, thereby achieving six degrees of freedom of levitation control and transport of the mover 10. At this time, the control unit 40 superimposes currents that generate the six degrees of freedom of thrust and energizes each of the coils 102, 112, so that, for example, different currents are passed through coils of the same U phase.

Next, an example of the arrangement of the first coil unit 100 and the second coil unit 110 for each transport process of the transport device 1 according to this embodiment will be described using Figures 6A and 6B. Figures 6A and 6B are schematic diagrams showing an example of the arrangement of the first coil unit 100 and the second coil unit 110 for each transport process of the transport device 1 according to this embodiment.

As described above, the conveying device 1 according to this embodiment constitutes part of a processing system that processes workpieces 123 transported by movers 10, and has multiple processes within its transport section. For example, when multiple workpieces 123 are transported continuously by multiple movers 10, there is an "acceleration/deceleration catch-up process" in which the movers 10 are accelerated and decelerated to shorten the distance between the preceding workpiece 123 and the mover 10 currently being transported, in order to transport them efficiently. There is also another "processing process" in which the workpiece 123 is aligned to a predetermined position and processed. In such cases, coil units can be arranged to suit each process.

Figure 6A shows an example of the arrangement of the first coil unit 100 and the second coil unit 110 in the acceleration/deceleration catch-up process. When accelerating and decelerating the mover 10 to shorten the distance to the preceding mover 10, the acceleration and deceleration of the mover 10 transporting the workpiece 123 often take priority over the accuracy of the transport position of the workpiece 123. Therefore, in the section where the acceleration/deceleration catch-up process is performed, more first coil units 100 capable of generating thrust in the X and Z directions are arranged than second coil units 110 capable of generating thrust in the Y direction. In the example shown in Figure 6A, one U-phase second coil unit 110d, one W-phase second coil unit 110c, and one V-phase second coil unit 110b are arranged so as to face the permanent magnet 121. All other coil units are first coil units 100a, 100b, 100c, and 100d. The first coil units 100a, 100b, 100c, and 100d are arranged between the second coil units 110 so that the U-phase, V-phase, and W-phase units are in different phases in the X direction. By arranging them in this manner, it is possible to control the six degrees of freedom of the mover 10 while applying large acceleration and deceleration to the mover 10.

In this way, in the region of the stator 20 facing the mover 10, the multiple coils 102 can be arranged to include at least one U-phase coil 102, one V-phase coil 102, and one W-phase coil 102. Furthermore, in the region of the stator 20 facing the mover 10, the multiple coils 112 can also be arranged to include at least one U-phase coil 112, one V-phase coil 112, and one W-phase coil 112. In this case, in the region of the stator 20 facing the mover 10, the multiple coils 102 and the multiple coils 112 can be arranged so that the number of coils differs from one another. By appropriately setting the number of coils, the acceleration and deceleration that can be applied to the mover can be appropriately set.

Figure 6B shows an example of the arrangement of the first coil unit 100 and the second coil unit 110 in the machining process. When the mover 10 transports the workpiece 123 to the machining process and then aligns and processes the workpiece 123 at a predetermined position, high thrust may be required for each of the six degrees of freedom of the mover 10 to achieve high-precision positioning and holding of the workpiece 123. In the example shown in Figure 6B, the first coil units 100a, 100b, 100c, 100d, and 100e and the second coil units 110a, 110b, 110c, and 110d are arranged symmetrically with respect to the six degrees of freedom around the center of gravity G of the mover 10. This arrangement improves the control performance of the six degrees of freedom of the mover 10 during the machining process, enabling the workpiece 123 to be machined while moving the machining device 30 in the X direction (arrow D in Figure 6B) while being positioned and held with high alignment area precision.

The first coil unit 100 and the second coil unit 110 are detachable and replaceable on the stator 20. This allows the first coil unit 100 and the second coil unit 110 to be repositioned to suit the process when the transport process is rearranged. Furthermore, in the event of a coil unit failure, only the failed coil unit can be replaced.

Next, an example of applying the conveying device 1 described in the above embodiment to a vacuum device to form a vacuum magnetic levitation conveying device will be described using Figure 7. Figure 7 is a schematic diagram showing an example of applying the conveying device 1 to a vacuum device.

In the case of a vacuum magnetic levitation transport device, a coil unit is placed inside a vacuum chamber, and the magnetic levitation force generated between the mover and stator is used as the levitation force to transport the mover in a magnetically levitated state. In such vacuum magnetic levitation transport devices, gate valves that open and close gates are sometimes placed at the boundaries between adjacent vacuum chambers. The presence of gate valves makes it impossible to place the coil units continuously on the stator without any gaps.

In this embodiment, stable transport control of the mover 10 is achieved even in the space 304 where the gate valve 300 described below is installed, where it is not possible to arrange coil units continuously without gaps.

As shown in Figure 7, the vacuum magnetic levitation transport device 2 of this embodiment has the same configuration as the first embodiment, but with the addition of vacuum chambers 301a and 301b and a gate valve 300.

The transport device 1 is installed inside the vacuum chambers 301a and 301b. That is, the stator 20 is installed inside the vacuum chambers 301a and 301b. The mover 10 is transported inside the vacuum chambers 301a and 301b by the stator 20. The vacuum chambers 301a and 301b are connected to each other via a gate valve 300, and the internal space in which the transport device 1 is installed can be connected or separated from each other. The vacuum chambers 301a and 301b are connected to a vacuum pump (not shown) so that an appropriate degree of vacuum can be maintained.

Gate valve 300 is provided in space 304, which is the connection between vacuum chamber 301a and vacuum chamber 301b. Gate valve 300 moves up and down in the Z direction, functioning as a valve unit that opens and closes vacuum chambers 301a and 301b at the connection between vacuum chambers 301a and 301b. That is, as shown in FIG. 7, when gate valve 300 moves up, it opens vacuum chambers 301a and 301b on both sides, connecting them to each other. When gate valve 300 moves down using gate valve lifting unit 303, it closes vacuum chambers 301a and 301b on both sides, separating them from each other.

As such, the vacuum magnetic levitation transport device 2 includes an area where the vacuum chambers 301a and 301b are installed, and space 304, which is an area where the gate valve 300 is installed. The area where the vacuum chambers 301a and 301b are installed is an area where the first coil unit 100 and the second coil unit 110 are installed. The space 304, which is sandwiched between and adjacent to the areas where the vacuum chambers 301a and 301b are installed, is an area where neither the first coil unit 100 nor the second coil unit 110 is installed.

The first coil unit 100 and the second coil unit 110 cannot be arranged continuously without gaps in the space 304 in which the gate valve 300 is installed. Therefore, as shown in FIG. 7, when the tip of the mover 10 in the transport direction M is positioned within the space 304, the attractive force acting between the permanent magnet 121 at the tip of the mover 10 and the coil unit, and the thrust force due to the coil current, may decrease. If this attractive force or thrust decreases, attitude controllability may decrease, particularly in the Wy direction.

In contrast, in the configuration shown in Figure 7, first coil units 100a and 100b and second coil unit 110a are arranged inside vacuum chamber 301a, and first coil unit 100c is arranged inside vacuum chamber 301b.

The second coil unit 110a, which generates thrust in the Y direction, is positioned so that it is located on or near the Wy-direction rotation axis that passes through the center of gravity G of the mover 10 when the mover 10 is in the illustrated transfer position with its tip portion located within space 304. The Wy-direction rotation axis that passes through the center of gravity G is an axis along the Y direction. Furthermore, the first coil unit 100a and first coil unit 100b, which generate thrust in the X and Z directions, are positioned before and after the second coil unit 110a in the X direction. The first coil unit 100c, which also generates thrust in the X and Z directions, is positioned adjacent to space 304 inside vacuum chamber 301b.

By arranging the coil units as described above, it is possible to generate a larger moment force Ty acting in the Wy direction, thereby improving posture controllability in the Wy direction. In other words, when the leading end of the mover 10 in the transport direction M passes through space 304, the second coil unit 110a is positioned off the Wy-direction rotation axis or its vicinity, which passes through the center of gravity G of the mover 10. At this time, the Wy-direction moment force Ty acting on the rear end of the mover 10 in the transport direction M decreases. However, after passing space 304, the permanent magnet 121 at the leading end of the mover 10 in the transport direction M is positioned opposite the first coil unit 100c, so the Wy-direction moment force Ty acting on the entire mover 10 increases. Therefore, the mover 10 can be transported stably across space 304, where it is not possible to arrange coil units continuously without gaps.

Next, other configurations of the first coil unit 100 in the conveying device 1 according to this embodiment will be described using Figures 8A to 8J. Figures 8A to 8J show other configurations of the first coil unit 100 in the conveying device 1 according to this embodiment. Figures 8A, 8C, 8E, 8G, and 8I are side views of first coil units 100 having different configurations, viewed from the Y direction. Figures 8B, 8D, 8F, 8H, and 8J are side views of the first coil units 100 shown in the corresponding Figures 8A, 8C, 8E, 8G, and 8I, viewed from the X direction. Figures 8A, 8C, 8E, 8G, and 8I show simplified views of one set of U-phase coils 102, V-phase coils 102, and W-phase coils 102 of the stator 20, as well as one set of permanent magnets 121 in the conveying direction of the mover 10. The arrows in the coil 102 indicate the direction of current flow. The N and S marks on the permanent magnet 121 indicate the magnetic poles on the top surface of the permanent magnet 121. The N and S marks on the teeth 104 indicate the magnetic poles on the bottom surface of each tooth 104 that result when a predetermined current is passed through the coil 102.

Figures 8A and 8B show an example configuration of the first coil unit 100 described in Figure 1. Figures 8C and 8D show an example configuration in which, instead of the coil 102 being wound around the back yoke portion 103, coils 102a and 102b are wound around the teeth portions 104a and 104b.

Figures 8E and 8F, as well as Figures 8G and 8H, each show an example configuration in which magnet rows aligned along the X direction of the permanent magnets 121 are arranged adjacently in three rows in the Y direction. In these cases, the coil core 101 has a back yoke portion 103 arranged along the Y direction and three teeth portions 104a, 104b, and 104c aligned in the Y direction and protruding downward in the Z direction from one end, the center, and the other end of the back yoke portion 103 in the Y direction. Figures 8E and 8F show an example configuration in which coils 102a and 102b are wound around the portions of the back yoke portion 103 between teeth portions 104a and 104b and between teeth portions 104b and 104c. Figures 8G and 8H show an example configuration in which coils 102a, 102b, and 102c are wound around teeth portions 104a, 104b, and 104c.

Figures 8I and 8J show an example configuration in which only one magnet row aligned along the X direction of the permanent magnets 121 is arranged in the Y direction. In this case, the coil core 101 has one tooth portion 104 protruding downward in the Z direction from the back yoke portion 103, and the coil 102 is wound around the tooth portion 104. Note that when there is only one tooth portion 104 in the Y direction like this, the teeth portion 104 aligned in the X direction may be connected by the back yoke portion 103 to reduce magnetic resistance.

As shown in Figures 8A and 8B, 8C and 8D, if the number of rows of permanent magnets 121 in the Y direction is even, the first coil unit 100 can be configured with an even number of teeth 104 in the Y direction. On the other hand, as shown in Figures 8E and 8F, 8G and 8H, 8I and 8J, if the number of rows of permanent magnets 121 in the Y direction is odd, the first coil unit 100 can be configured with an odd number of teeth 104 in the Y direction. Furthermore, as long as the coils 102 can generate equivalent magnetic flux, they may be wound around the back yoke portion 103 or the teeth 104.

Next, other configurations of the second coil unit 110 in the conveying device 1 according to this embodiment will be described using Figures 9A to 9L. Figures 9A to 9L show other configuration examples of the second coil unit 110 in the conveying device 1 according to this embodiment. Figures 9A, 9C, 9E, 9G, 9I, and 9K are side views of second coil units 110 having different configurations, viewed from the Y direction. Figures 9B, 9D, 9F, 9H, 9J, and 9L are side views of the second coil units 110 shown in the corresponding Figures 9A, 9C, 9E, 9G, 9I, and 9K, viewed from the X direction. Figures 9A, 9C, 9E, 9G, 9I, and 9K show simplified views of one set of U-phase coils 112, V-phase coils 112, and W-phase coils 112 of the stator 20, as well as one set of permanent magnets 121 in the transport direction of the mover 10. The arrows in the coils 112 indicate the direction of current flow. The N and S marks on the permanent magnets 121 indicate the magnetic poles on the top surface of the permanent magnets 121. The N and S marks on the teeth 114 indicate the magnetic poles on the bottom surface of each tooth 114 that result when a predetermined current is passed through the coils 112.

Figures 9A and 9B show configuration examples of the second coil unit described in Figure 1. Figures 9C and 9D, as well as Figures 9E and 9F, show configuration examples in which coil 112 is wound around tooth portion 114b. Figures 9C and 9D show configuration examples in which coil 112a is wound around the portion between tooth portions 114a and 114b of back yoke portion 113, and coil 112b is wound around the portion between tooth portions 114b and 114c of back yoke portion 113. Figures 9E and 9F show configuration examples in which coils 112a, 112b, and 112c are wound around teeth portions 114a, 114b, and 114c.

Figures 9G and 9H, and Figures 9I and 9J each show an example configuration in which three rows of permanent magnets 121 aligned along the X direction are arranged adjacently in the Y direction.

As shown in Figures 9G and 9H, the coil core 111 has a back yoke portion 113 arranged along the Y direction, and two teeth portions 114a, 114b that are aligned in the Y direction and protrude downward in the Z direction from one end and the other end of the back yoke portion 113 in the Y direction. Figures 9G and 9H show an example configuration in which a coil 112 is wound around the back yoke portion 113.

Also, as shown in Figures 9I and 9J, the coil core 111 has a back yoke portion 113 arranged along the Y direction, and four teeth 114a, 114b, 114c, and 114d that are aligned in the Y direction and protrude downward in the Z direction from the back yoke portion 113. In this case, the four teeth 114a, 114b, 114c, and 114d are spaced apart from one end of the back yoke portion 113 in the Y direction. Figures 9I and 9J show an example configuration in which coils 102a, 102b, and 102c are wound around the portions of the back yoke portion 113 between teeth 114a and 114b, between teeth 114b and 114c, and between teeth 114c and 114d.

Figures 9K and 9L show an example configuration in which only one magnet row aligned along the X direction of the permanent magnets 121 is arranged in the Y direction. In this case, the coil core 111 has a back yoke portion 113 arranged along the Y direction, and two teeth portions 114a, 114b aligned in the Y direction and protruding downward in the Z direction from one end and the other end of the back yoke portion 113 in the Y direction. Figures 9K and 9L show an example configuration in which a coil 112 is wound around the back yoke portion 113.

As shown in Figures 9A and 9B, 9C and 9D, and 9E and 9F, if the number of rows of permanent magnets 121 in the Y direction is even, the second coil unit 110 can be configured with an odd number of teeth 114 in the Y direction. On the other hand, as shown in Figures 9G and 9H, 9I and 9J, and 9K and 9L, if the number of rows of permanent magnets 121 in the Y direction is odd, the second coil unit 110 can be configured with an even number of teeth 114 in the Y direction. Furthermore, as long as the coil 112 can generate an equivalent magnetic flux, it may be wound around either the back yoke portion 113 or the teeth 114.

As such, according to this embodiment, the first coil unit 100 applies forces to the mover 10 in the X and Z directions, and the second coil unit 110 applies forces to the mover 10 in the X and Z directions. Therefore, according to this embodiment, the mover 10 can be transported non-contact while controlling the attitude of the mover 10 without increasing the size of the system configuration.

Second Embodiment
Next, a conveying device according to a second embodiment of the present invention will be described with reference to Figures 10A to 11C. Note that components similar to those in the first embodiment are given the same reference numerals, and descriptions thereof will be omitted or simplified.

In the first embodiment, an example was described in which thrust was generated by passing current through a coil and creating a gradient of magnetic co-energy. In contrast, in this embodiment, an example is described in which thrust is generated by the Lorentz force, in which an electric charge passing through a magnetic field is subjected to a force.

Figures 10A, 10B, and 10C show an example of a coreless type conveying device according to this embodiment. Figures 11A, 11B, and 11C show another example of a coreless type conveying device according to this embodiment. Figures 10A, 10B, and 10C are a front view from the Y direction, a top view from the Z direction, and a side view from the X direction, respectively, of an example of a conveying device according to this embodiment. Figures 11A, 11B, and 11C are a front view from the Y direction, a top view from the Z direction, and a side view from the X direction, respectively, of another example of a conveying device according to this embodiment. Figures 10A to 11C only show the first and second coil units 100, 110, permanent magnet 221, and mover yoke 220 on either the R side or L side of the configuration corresponding to the mover 10 and stator 20 in the conveying device 1 shown in Figure 1, and others are omitted. Additionally, the back yoke 203 is omitted from the top views of Figures 10A and 11A.

The conveying device 3 according to this embodiment has a mover 10 and a stator 20. The configuration of the conveying device 3 according to this embodiment is the same as the configuration of the conveying device 1 according to the first embodiment, except for the first coil unit 100 and second coil unit 110 in the stator 20.

As shown in Figures 10A to 11C, the mover 10 has multiple permanent magnets 221 and a mover yoke 220. As in the first embodiment, the permanent magnets 221 are installed on the mover yoke 220 so that they are lined up in two rows along the X direction, which is the longitudinal direction of the mover yoke 220, to form a magnet row. The multiple permanent magnets 221 are arranged so that the polarities of adjacent surfaces are different in both the X and Y directions, with N poles and S poles arranged alternately.

The stator 20 has first and second coil units 100, 110 with a different configuration from that of the first embodiment. The example shown in Figures 10A, 10B, and 10C and another example shown in Figures 11A, 11B, and 11C have different configurations for the first and second coil units 100, 110.

In the examples shown in Figures 10A, 10B, and 10C, the first coil unit 100, which generates thrust in the X and Z directions, consists of a coil 202 and a back yoke 203a. The second coil unit 110, which generates thrust in the Y direction, consists of a coil 212 and a back yoke 203b. Coils 202 and 212 are each coreless coils wound around an axis along the Z direction. The first coil unit 100 has two coils 202 arranged side by side along the Y direction. The second coil unit 110 has one coil 212. The back yokes 203a and 203b may be made of a single magnetic material, or there may be a gap between them. To take advantage of the coreless type's advantage of low cogging torque, it is desirable for each back yoke to be a single piece. However, it is also possible to reduce cogging torque by leaving a gap between adjacent back yokes 203a and 203b and inserting a magnetic material between them. Two coils 202 arranged side by side in the Y direction may be connected in a figure-8 pattern.

In another example shown in Figures 11A, 11B, and 11C, a coil unit 210 that serves as both the first coil unit 100 and the second coil unit 110 is installed in place of the first coil unit 100 and the second coil unit 110. The coil unit 210 consists of a back yoke 203 and coils 202 and 212. The coil 202 generates thrust in the X and Z directions. The coil 212 generates thrust in the Y direction. The coils 202 and 212 are installed so that they overlap in the Z direction. Note that the coils 202 and 212 may be overlapped so that the coil 202 is located on the mover 10 side, or so that the coil 212 is located on the mover 10 side.

In each of the examples shown in Figures 10A, 10B, and 10C, and Figures 11A, 11B, and 11C, the magnetic force acting as an attractive force between the back yoke 203 and the permanent magnet 221 acts as part of the levitation force.

Coreless motors are often used for precision positioning, which requires high responsiveness. The coreless transport device 3 of this embodiment is configured to share the mover 10 with the transport device 1 of the first embodiment. That is, the shared mover 10 can run on a transport path configured with the stator 20 of the first embodiment and the stator 20 of the second embodiment aligned in the X direction. This allows the coreless transport device 3 of this embodiment to be incorporated into the cored transport device 1 of the first embodiment. This allows a precision positioning process performed by the coreless transport device 3 of this embodiment to be provided between multiple transport processes performed by the transport device 1 of the first embodiment.

[Third embodiment]
Next, a conveying device 4 according to a third embodiment of the present invention will be described with reference to Figures 12A to 12C. Note that components similar to those in the first and second embodiments are given the same reference numerals, and descriptions thereof will be omitted or simplified.

In this embodiment, as with the second embodiment, thrust is generated by the Lorentz force, and an example of a transport device using a moving coil type coreless linear motor with permanent magnets arranged on both sides of the coil will be described.

Figures 12A to 12C show the conveying device 4 according to this embodiment. Figure 12A is a view of the conveying device 4 according to this embodiment from the X direction. Figure 12B is a cross-sectional view taken along line A-A' in Figure 12A. Figure 12C is a cross-sectional view taken along line B-B' in Figure 12A.

As shown in Figures 12A to 12C, in the conveying device 4 according to this embodiment, the mover 10 includes coils 302, 312 and a mover housing 330. The stator 20 includes a permanent magnet 321 and a stator yoke 320.

Coil 302 corresponds to coil 202 of the first coil unit 100 according to the second embodiment and is a coreless coil that generates thrust in the X and Z directions. Coil 312 corresponds to coil 212 of the second coil unit 110 according to the second embodiment and is a coreless coil that generates thrust in the Y direction. Coils 302, 312 are installed in a non-magnetic mover housing 330. Figures 12A to 12C show an example in which coils 302, 312 are arranged similarly to coils 202, 212 shown in Figures 10A and 10C. It is also possible to arrange coils 302, 312 similarly to coils 202, 212 in Figures 11A to 11C.

The coils 302 and 312 are connected to the control unit 40. The control unit 40 detects the position (X-axis, Y-axis, Z-axis) and rotational orientation (Wx-axis, Wy-axis, Wz-axis) of the mover 10 using position detection means such as a linear encoder or laser length measuring device (not shown), and controls the flow of current to the coils 302 and 312 based on the detection results.

A plurality of permanent magnets 321 are installed on the stator yoke 320 so that they can face the coils 302, 312 of the mover 10 from above and below in the Z direction. Similar to the permanent magnets 121 in the first embodiment, the multiple permanent magnets 321 are arranged on both the above and below sides of the mover 10 in the Z direction, forming two rows of magnets aligned along the X direction, which is the longitudinal direction of the stator yoke 320.

The multiple permanent magnets 321 are arranged so that adjacent surfaces have different polarities in the X, Y, and Z directions, with north and south poles arranged alternately. The stator yoke 320 and permanent magnets 321 are held in the stator housing 331.

As in this embodiment, coils 302 and 312 can be installed on the mover 10, and a permanent magnet 321 can be installed on the stator 20 to configure a conveying device 4 using a moving-coil coreless linear motor.

REFERENCE SIGNS LIST 1 Conveying device 2 Vacuum magnetic levitation conveying device 3 Conveying device 4 Conveying device 10 Mover 20 Stator 30 Processing device 40 Control unit 100 First coil unit 101 Coil core 102 Coil 103 Back yoke unit 104 Teeth unit 110 Second coil unit 111 Coil core 112 Coil 113 Back yoke unit 114 Teeth unit 120 Mover yoke 121 Permanent magnet 122 Holding unit 123 Workpiece 202 Coil 203 Back yoke 210 Coil unit 212 Coil 220 Mover yoke 221 Permanent magnet 300 Gate valve 301 Vacuum chamber 302 Coil 303 Gate valve lifting unit 304 Space 312 Coil 320 Stator yoke 321 Permanent magnet 330 Mover housing 331 Stator housing

Claims (12)

A stator;
a mover that is conveyed in a first direction along the stator;
the stator has a plurality of coils arranged along the first direction,
the mover has a magnet row including a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils, wherein the magnets adjacent in the first direction have magnetic poles different from each other,
The plurality of coils
a first coil group that applies a first force in the first direction to the mover by interaction with the magnet array when a current is applied thereto;
a second coil group that , when a current is applied thereto, applies a second force to the mover in a second direction intersecting the first direction through interaction with the magnet array ;
At least three of the coils of the first coil group are disposed between two of the coils of the second coil group.
A conveying device characterized by: 2. The conveying device according to claim 1, wherein, when a current is applied to the first coil group, the first coil group interacts with the magnet array to apply a force to the mover in a third direction that intersects both the first direction and the second direction. the magnet array is arranged in a plurality of rows in the second direction,
The conveying device according to claim 1 or 2, wherein the magnets adjacent to each other in the second direction have magnetic poles different from each other. a control unit that applies three-phase AC current to the first coil group and the second coil group,
The conveying device according to any one of claims 1 to 3, characterized in that the control unit applies the three-phase AC so that the number of coils in the U phase, the number of coils in the V phase, and the number of coils in the W phase are the same in at least one of the first coil group and the second coil group. the transport device includes a first region in which the first coil group and the second coil group are installed, and a second region in which neither the first coil group nor the second coil group is installed,
5. A conveying device according to claim 1, wherein the first coil group and the second coil group are arranged so that, when the tip portion of the mover is located within the second region, the coils of the second coil group are located on an axis along the second direction passing through the center of gravity of the mover in the first region, and the coils of the first coil group are located in front of and behind the axis in the first direction. in a third region of the stator facing the mover, the first coil group includes at least one U-phase coil, one V-phase coil, and one W-phase coil,
In the third region, the second coil group includes at least one U-phase coil, one V-phase coil, and one W-phase coil;
The transport device according to claim 4 , wherein in the third region, the first coil group and the second coil group have different numbers of coils. 5. The transport device according to claim 4, wherein the first coil group and the second coil group are arranged symmetrically with respect to six degrees of freedom around the center of gravity of the mover. the coils of the first coil group are wound around a first core having one or more first teeth;
A conveying device as described in any one of claims 1 to 7, characterized in that the number of rows of the magnet row in the second direction is an even number and the number of first teeth portions in the second direction is an even number, or the number of rows of the magnet row in the second direction is an odd number and the number of first teeth portions in the second direction is an odd number. the coils of the second coil group are wound around a second core having one or more second teeth,
A conveying device as described in any one of claims 1 to 8, characterized in that the number of rows of the magnet row in the second direction is an even number and the number of second teeth portions in the second direction is an odd number, or the number of rows of the magnet row in the second direction is an odd number and the number of second teeth portions in the second direction is an even number. A conveying device according to any one of claims 1 to 9 ;
a processing device that processes the workpiece transported by the mover. A method for manufacturing an article using the processing system according to claim 10 ,
a step of transporting the workpiece by the mover;
and performing the processing on the workpiece transported by the mover using the processing device. A stator;
a mover that is conveyed in a first direction along the stator;
the stator has a plurality of coils arranged along the first direction,
the mover has a magnet row including a plurality of magnets arranged along the first direction so as to be able to face the plurality of coils, wherein the magnets adjacent in the first direction have magnetic poles different from each other,
The plurality of coils
a first coil group that applies a first force in the first direction to the mover by interaction with the magnet array when a current is applied thereto;
a second coil group that applies a second force to the mover in a second direction intersecting the first direction by interaction with the magnet array when a current is applied thereto, and at least three coils of the first coil group are disposed between two coils of the second coil group ,
applying a current to the first coil group to apply the first force to the mover in the first direction;
a control method comprising: applying a current to the second coil group to apply the second force in the second direction to the mover.