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JP7790716B2 - thermoelectric conversion module - Google Patents
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JP7790716B2 - thermoelectric conversion module - Google Patents

thermoelectric conversion module

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JP7790716B2
JP7790716B2 JP2022051820A JP2022051820A JP7790716B2 JP 7790716 B2 JP7790716 B2 JP 7790716B2 JP 2022051820 A JP2022051820 A JP 2022051820A JP 2022051820 A JP2022051820 A JP 2022051820A JP 7790716 B2 JP7790716 B2 JP 7790716B2
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conversion module
thermoelectric conversion
thermoelectric
sheet
thermoelectric element
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JP2023144709A (en
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知也 古志
顕次郎 大川
康孝 天谷
憲彦 坂本
学 吉田
健一 野村
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National Institute of Advanced Industrial Science and Technology AIST
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Description

本発明は、温度差を与えられる一対の主面の間に跨がって熱電素子を配置させたシート状の熱電変換モジュールに関する。 The present invention relates to a sheet-like thermoelectric conversion module in which thermoelectric elements are arranged across a pair of main surfaces to which a temperature difference can be applied.

温度差を有する界面に与えられ、この温度差を与えられる一対の主面の間に跨がってゼーベック効果を用いた熱電素子を複数並べて配置させたシート状の熱電変換モジュールが知られている。かかる熱電変換素子には、p型及びn型半導体片を一対として直方体のチップ状に形成された小型半導体熱電素子が広く用いられ、かかる小型半導体熱電素子同士を多数、適宜、配線にて電気的に接続して所定の電力を取り出すことができる。 A sheet-like thermoelectric conversion module is known in which multiple thermoelectric elements that utilize the Seebeck effect are arranged across a pair of main surfaces that are provided with an interface with a temperature difference and that are exposed to this temperature difference. Such thermoelectric conversion elements are commonly made up of small semiconductor thermoelectric elements formed into rectangular chips with pairs of p-type and n-type semiconductor pieces. A large number of such small semiconductor thermoelectric elements can be electrically connected together with appropriate wiring to extract a specified amount of power.

例えば、特許文献1では、表裏の一方に冷却面が設けられ、他方に加熱面が設けられた熱電変換モジュールが開示されている。かかる熱電変換モジュールは、ゼーベック効果を用いた複数の熱電素子と、該熱電素子を挟持し冷却面及び加熱面を形成する一対のフレキシブル基板と、フレキシブル基板の互いの対向面に設けられて熱電素子を電気的に接続する複数の素子間電極と、電気的な配列の端部に位置する端部素子を接続する端部電極に電気的に接続されたリード線と、を含む。フレキシブル基板上に熱電素子を設けることで変形能を与えられて熱部材の形状に合わせて取り付けが可能である。 For example, Patent Document 1 discloses a thermoelectric conversion module with a cooling surface on one of the front and back sides and a heating surface on the other. This thermoelectric conversion module includes multiple thermoelectric elements that use the Seebeck effect, a pair of flexible substrates that sandwich the thermoelectric elements and form the cooling and heating surfaces, multiple inter-element electrodes provided on the opposing surfaces of the flexible substrates and electrically connecting the thermoelectric elements, and lead wires electrically connected to the end electrodes that connect the end elements located at the ends of the electrical arrangement. By providing the thermoelectric elements on the flexible substrate, the flexible substrate is given the ability to deform, allowing it to be attached to fit the shape of a heating element.

特開2016-171230号公報JP 2016-171230 A

ここでシート状の熱電変換モジュールでは、柔軟性を有し変形能を高めるようにシートを薄くすると、一対の主面の間の温度差が十分に得られず、発電量が低下してしまう。また、様々な形状の曲面や動的な変形を生じる面への取付けを考慮すると、可撓性だけではなく伸縮性も与える必要がある上に、変形後に荷重を除去したときに元の形状に戻る形状安定性も要求される。 However, if the sheet of a sheet-type thermoelectric conversion module is made thin to improve flexibility and deformability, a sufficient temperature difference between the pair of main surfaces cannot be achieved, resulting in a decrease in power generation. Furthermore, when considering attachment to curved surfaces of various shapes and surfaces that undergo dynamic deformation, it is necessary to provide not only flexibility but also stretchability, as well as shape stability, which allows the module to return to its original shape when the load is removed after deformation.

本発明は、上記したような状況に鑑みてなされたものであって、その目的とするところは、可撓性や伸縮性を含む柔軟性を有し高い変形能を有しながら形状安定性にも優れ、高い発電量を得られる熱電変換モジュールを提供することにある。 The present invention was made in consideration of the above-mentioned circumstances, and its purpose is to provide a thermoelectric conversion module that has flexibility, including flexibility and stretchability, high deformability, excellent shape stability, and can generate a high amount of power.

本発明は、温度差を与えられる一対の主面の間に跨がって熱電素子を配置させたシート状の熱電変換モジュールであって、前記主面のうちの第1主面及び第2主面の間に跨って与えられたp型熱電素子片及びn型熱電素子片を電気的に交互に接続するように前記第1主面側及び前記第2主面側に交互に金属配線を与えてなり、少なくとも前記第2主面側の前記金属配線を蛇行配線としてその両端に接続された前記p型熱電素子片と前記n型熱電素子片との距離を可変とし、前記p型熱電素子片及び前記n型熱電素子片について気泡を含むゴム弾性体からなるシート体に貫挿させて少なくともその側面を封入させていることを特徴とする。 The present invention is a sheet-like thermoelectric conversion module in which thermoelectric elements are arranged across a pair of main surfaces across which a temperature difference can be applied, and in which metal wiring is provided alternately on the first and second main surfaces to electrically connect p-type and n-type thermoelectric element pieces provided across the first and second main surfaces, and at least the metal wiring on the second main surface side is a serpentine wiring, allowing the distance between the p-type and n-type thermoelectric element pieces connected to both ends to be variable, and the p-type and n-type thermoelectric element pieces are inserted into a sheet made of a rubber elastic material containing bubbles, and at least the sides of the sheet are sealed.

かかる特徴によれば、ゴム弾性体からなるシート体及び蛇行配線により、可撓性や伸縮性を含む柔軟性を有し高い変形能を有しながら、気泡を含むゴム弾性体により形状安定性に優れるとともに、一対の主面の間の温度差を十分に得られ、高い発電量を得られるのである。 With these features, the sheet made of rubber elastic material and the serpentine wiring provide flexibility, including flexibility and stretchability, and high deformability, while the rubber elastic material containing air bubbles provides excellent shape stability. A sufficient temperature difference can be achieved between the pair of main surfaces, resulting in a high amount of power generation.

上記した発明において、前記ゴム弾性体は、前記気泡を表面に連通させた連続気泡を与えられたエラストマースポンジであることを特徴としてもよい。また、エラストマースポンジの弾性率は1~100kPaの範囲内にあることを特徴としてもよい。かかる特徴によれば、柔軟性を有し高い変形能を有しながら、高い発電量を得られる In the above invention, the rubber elastic body may be an elastomer sponge with open cells that connect the cells to the surface. The elastomer sponge may also have a modulus of elasticity in the range of 1 to 100 kPa. This feature allows for high power generation while maintaining flexibility and high deformability.

上記した発明において、前記熱電素子及び前記金属配線の下部には、前記主面の一方に沿った支持基板を与えられていることを特徴としてもよい。また、前記支持基板はポリイミドからなることを特徴としてもよい。かかる特徴によれば、柔軟性を有し高い変形能を有しながら、形状安定性により優れるのである。
のである。
In the above invention, a support substrate may be provided along one of the main surfaces below the thermoelectric element and the metal wiring. The support substrate may be made of polyimide. This feature provides flexibility, high deformability, and excellent shape stability.
That is why.

上記した発明において、前記第1主面側の前記金属配線とその両側の前記p型熱電素子片及び前記n型熱電素子片とを封止し一体化したチップ状素子を含むことを特徴としてもよい。かかる特徴によれば、柔軟性を有し高い変形能を有しながら、高い発電量を得られるのである。 The above invention may also be characterized in that it includes a chip-shaped element in which the metal wiring on the first principal surface and the p-type thermoelectric element component and the n-type thermoelectric element component on both sides of the metal wiring are sealed and integrated. This characteristic allows for a high amount of power generation while maintaining flexibility and high deformability.

上記した発明において、前記エラストマースポンジの熱伝導率は0.01~0.1W/m・Kの範囲内にあることを特徴としてもよい。また、前記金属配線の導電率は1.0×10~1.0×10S/mの範囲内にあることを特徴としてもよい。さらに、前記p型熱電素子片のゼーベック係数は1~1000μV/Kの範囲内にあることを特徴としてもよい。また、前記n型熱電素子片のゼーベック係数は-1000~-1μV/Kの範囲内にあることを特徴としてもよい。かかる特徴によれば、柔軟性を有し高い変形能を有しながら、より高い発電量を得ることができる。 In the above invention, the thermal conductivity of the elastomer sponge may be in the range of 0.01 to 0.1 W/m·K. The electrical conductivity of the metal wiring may be in the range of 1.0×10 4 to 1.0×10 8 S/m. The Seebeck coefficient of the p-type thermoelectric element piece may be in the range of 1 to 1000 μV/K. The Seebeck coefficient of the n-type thermoelectric element piece may be in the range of -1000 to -1 μV/K. These characteristics enable a higher power generation capacity to be obtained while maintaining flexibility and high deformability.

上記した発明において、前記シート体よりも熱伝導度の高いゴム弾性体からなる一対の表層シート体の間に挟まれていることを特徴としてもよい。かかる特徴によれば、柔軟性を有し高い変形能を有しながら、高い発電量を得られるのである。 The above invention may be characterized in that the sheet body is sandwiched between a pair of surface sheet bodies made of a rubber elastic material with higher thermal conductivity than the sheet body. This characteristic allows for high power generation while maintaining flexibility and high deformability.

本発明による実施例としての熱電変換モジュールの外観写真である。1 is a photograph showing the appearance of a thermoelectric conversion module as an example according to the present invention. 熱電変換モジュールのシート体を透過表示した場合の(a)上面図及び(b)側面図である。1A and 1B are a top view and a side view, respectively, of a sheet body of a thermoelectric conversion module, which is transparently displayed; 熱電変換モジュールのシート体を透過表示した場合の要部の上面図である。FIG. 2 is a top view of a main part of the thermoelectric conversion module when a sheet body is displayed in a transparent manner. 熱電発電モジュールの要部の断面図である。FIG. 2 is a cross-sectional view of a main part of a thermoelectric power generation module. 熱電発電モジュールに手で変形を与える様子を示す写真である。10 is a photograph showing a state in which a thermoelectric power generation module is deformed by hand. 伸縮耐久試験用の試験体の外観写真である。1 is a photograph showing the appearance of a test specimen for a stretch durability test. 各試験体に用いたシート体の弾性率と熱伝導率の測定結果を示す表である。1 is a table showing the measurement results of the elastic modulus and thermal conductivity of the sheet body used for each test specimen. (a)伸縮耐久試験の結果を示すグラフ、及び、(b)同試験における破断を示す抵抗変化率についてのグラフである。1A is a graph showing the results of a stretch durability test, and FIG. 1B is a graph showing the resistance change rate indicating breakage in the same test. 発電性能試験用の試験体の外観写真である。This is a photograph of the exterior of a test specimen used in power generation performance tests. 熱源温度と開放電圧の関係を示すグラフである。1 is a graph showing the relationship between heat source temperature and open-circuit voltage. 柔軟ゴムスポンジ封止構造の試験体における発電量を示すグラフである。10 is a graph showing the amount of power generated in a test specimen having a flexible rubber sponge sealing structure.

以下に、本発明による1つの実施例である熱電変換モジュールについて、図1乃至図4を用いて説明する。 Below, a thermoelectric conversion module, which is one embodiment of the present invention, will be described using Figures 1 to 4.

図1及び図2に示すように、熱電変換モジュール10は、複数個の熱電素子1をシート体2の主面に沿って並べて、それぞれをシート体2に貫挿させて配置させて備える。熱電素子1のそれぞれは金属配線である配線3にて電気的に接続されており、外部へ電力を取り出すための端子電極4に接続される。ここでは、熱電素子1の数を30個として5列×6行の全てを直列に接続して配置した例を示す。 As shown in Figures 1 and 2, the thermoelectric conversion module 10 comprises a plurality of thermoelectric elements 1 arranged along the main surface of a sheet body 2, with each element penetrating the sheet body 2. Each thermoelectric element 1 is electrically connected by metal wiring 3, and is connected to a terminal electrode 4 for extracting power to the outside. Here, an example is shown in which 30 thermoelectric elements 1 are arranged in 5 columns and 6 rows, all of which are connected in series.

熱電素子1のそれぞれは、シート体2の表側と裏側との温度差によって起電力を得るようその向きを定められて配置される。また、熱電素子1は上記したようにシート体2に貫挿されており、少なくともその側面をシート体2に封入されている。これによって、シート体2の一対の主面の高温側と低温側とに温度差を与えることで、両主面間に跨がって配置された熱電素子1が電力を発生することになり、シート状の熱電変換モジュール10を得ることができる。 Each thermoelectric element 1 is oriented and positioned so that it generates electromotive force due to the temperature difference between the front and back sides of the sheet 2. Furthermore, as described above, the thermoelectric elements 1 are inserted into the sheet 2, and at least their sides are enclosed by the sheet 2. By creating a temperature difference between the high-temperature and low-temperature sides of the pair of main surfaces of the sheet 2, the thermoelectric elements 1 positioned across both main surfaces generate electricity, resulting in a sheet-like thermoelectric conversion module 10.

シート体2は、気泡を含むゴム弾性体からなり、これによって両主面間の断熱性に優れるとともに、主面を屈曲させる方向への曲げ性(可撓性)と、主面に沿った方向への伸縮性とを備える。特に、シート体2は、気泡の内部を表面に連通させた連続気泡を与えられていることが好ましい。気泡を連続気泡とすることで、独立気泡のシート体を用いる場合に比べて、熱電変換モジュール10のヤング率を小さくできる。つまり、連続気泡とすることによって、伸縮性と曲げ性をより向上させ得て好ましい。このようなシート体2として、例えば、柔軟シリコーンゴムスポンジなどのエラストマースポンジを好適に用い得る。 The sheet body 2 is made of a rubber elastic material containing air bubbles, which provides excellent thermal insulation between the two main surfaces, as well as bendability (flexibility) in the direction of bending the main surfaces and stretchability in the direction along the main surfaces. In particular, the sheet body 2 preferably has open cells, with the interiors of the cells connected to the surface. By using open cells, the Young's modulus of the thermoelectric conversion module 10 can be reduced compared to when a sheet body with closed cells is used. In other words, open cells are preferable because they can further improve stretchability and bendability. For example, an elastomer sponge such as a flexible silicone rubber sponge can be suitably used as this sheet body 2.

なお、シート体2の弾性率は1~100kPaの範囲内から選択されたものとすることが好ましい。特に、シート体2の弾性率を低くすると、熱電変換モジュール10を変形させたときに内部の配線3に過度の応力を付与せず、配線3の変形の阻害を抑制できる。つまり、シート体2の弾性率を低くすることは、熱電変換モジュールとしての変形能を高めるとともに、寿命の向上にも寄与し、好ましい。 It is preferable that the modulus of elasticity of the sheet body 2 be selected from the range of 1 to 100 kPa. In particular, if the modulus of elasticity of the sheet body 2 is low, excessive stress is not applied to the internal wiring 3 when the thermoelectric conversion module 10 is deformed, and inhibition of deformation of the wiring 3 can be suppressed. In other words, a low modulus of elasticity of the sheet body 2 is preferable, as it not only increases the deformability of the thermoelectric conversion module but also contributes to an improved lifespan.

また、シート体2の熱伝導率は0.01~0.1W/m・Kの範囲内から選択されたものであることが好ましい。特に、熱伝導率を低く抑えることによって、熱電変換モジュールとしての両主面間の温度差を大きく保つことができて、発電量を大きくし得る。 Furthermore, it is preferable that the thermal conductivity of the sheet member 2 be selected from the range of 0.01 to 0.1 W/m·K. In particular, by keeping the thermal conductivity low, it is possible to maintain a large temperature difference between the two main surfaces of the thermoelectric conversion module, thereby increasing the amount of power generation.

図3に示すように、配線3は、熱電素子1同士の距離を可変とし得る金属薄膜からなる蛇行配線とされる。かかる蛇行配線により、熱電変換モジュール10の延びや曲げに熱電素子の位置を容易に追従させ得る。配線3の材料としては電気抵抗が比較的小さく安価な銅を好適に用い得る。配線3を銅箔とすることで、配線3の幅を大きくでき、曲げに対する変形能を高く維持しつつ配線の電気抵抗を低くできる。つまり、熱電変換モジュール10としてその内部抵抗を低くできて発電量を大きくし得る。なお、配線3の導電率は1.0×10~1.0×10S/mの範囲内から選択されたものであることも好ましい。特に、導電率が高いほど熱電変換モジュール10の内部抵抗を低くできて好ましい。 As shown in FIG. 3 , the wiring 3 is a serpentine wiring made of a metal thin film that can change the distance between the thermoelectric elements 1. Such serpentine wiring allows the thermoelectric elements to easily follow the expansion and bending of the thermoelectric conversion module 10. Copper, which has a relatively low electrical resistance and is inexpensive, is preferably used as the material for the wiring 3. By using copper foil for the wiring 3, the width of the wiring 3 can be increased, and the electrical resistance of the wiring can be reduced while maintaining high deformability against bending. In other words, the internal resistance of the thermoelectric conversion module 10 can be reduced, and the amount of power generation can be increased. It is also preferable that the electrical conductivity of the wiring 3 is selected from the range of 1.0×10 4 to 1.0×10 8 S/m. In particular, a higher electrical conductivity is preferable, as it allows the internal resistance of the thermoelectric conversion module 10 to be reduced.

図4を併せて参照すると、熱電素子1としては、例えば、2種類の熱電素子片であるp型半導体片11p及びn型半導体片11nを封止材15で封止して低温側を接続させて一体化させたπ型構造のチップ状素子を用いることができる。半導体の場合には、例えば、Bi-Te系熱電材料を用いると高い熱電変換効率を得られて好ましい。封止材15には例えばエポキシ樹脂等の絶縁性を有する材料を用い得る。p型半導体片11pとn型半導体片11nとは封止材15によって左右に隔てるようにして配置され、互いに低温側(紙面上側)を銅からなる低温側電極14で接続している。銅からなる低温側電極14は、低融点はんだ13を介してp型半導体片11p及びn型半導体片11nの上面に取り付けられた、例えば、Niからなる高温側電極12に接続される。一方、高温側(紙面下側)ではp型半導体片11p及びn型半導体片11nのそれぞれの下面に取り付けられた高温側電極12に低融点はんだ13を介して配線3が接続され、それぞれの間は封止材15で隔てられる。 Referring also to Figure 4, the thermoelectric element 1 can be, for example, a chip-shaped element with a π-type structure, in which two types of thermoelectric element pieces, a p-type semiconductor piece 11p and an n-type semiconductor piece 11n, are sealed with a sealing material 15 and connected at their low-temperature sides to form an integrated unit. In the case of semiconductors, a Bi-Te thermoelectric material, for example, is preferably used to achieve high thermoelectric conversion efficiency. The sealing material 15 can be an insulating material such as epoxy resin. The p-type semiconductor piece 11p and the n-type semiconductor piece 11n are arranged so as to be separated on the left and right by the sealing material 15, and their low-temperature sides (upper side of the drawing) are connected to each other by a low-temperature electrode 14 made of copper. The low-temperature electrode 14 made of copper is connected via low-melting-point solder 13 to a high-temperature electrode 12 made of, for example, Ni, attached to the top surfaces of the p-type semiconductor piece 11p and the n-type semiconductor piece 11n. On the other hand, on the high-temperature side (the lower side of the drawing), wiring 3 is connected via low-melting-point solder 13 to high-temperature electrodes 12 attached to the undersides of the p-type semiconductor piece 11p and the n-type semiconductor piece 11n, and they are separated by a sealing material 15.

なお、p型半導体片とn型半導体片とはチップ状素子に封入されたものでなく個々に配置されたものであってもよい。例えば、高温側及び低温側の両主面に跨ってp型半導体片及びn型半導体片が配置され、p型半導体片及びn型半導体片が交互に電気的に接続される。このとき、かかる接続は両主面に交互に与えられた金属配線によってなされる。そして、両主面側のうちの少なくとも一方の側の金属配線を蛇行配線とする。つまり、p型半導体片とn型半導体片とを用いた熱電変換モジュールとし、蛇行配線の両端に接続されたp型半導体片及びn型半導体片の距離を可変とするのである。これによっても上記したチップ型素子を用いた場合と同様の熱電変換モジュールを得られる。両主面側の電気配線を共に蛇行配線として、全てのp型半導体片及びn型半導体片同士の距離を可変としてもよい。 The p-type and n-type semiconductor pieces do not necessarily have to be encapsulated in a chip-type element, but may be individually arranged. For example, the p-type and n-type semiconductor pieces are arranged across both the high-temperature and low-temperature main surfaces, and the p-type and n-type semiconductor pieces are electrically connected alternately. In this case, such connections are made using metal wiring provided alternately on both main surfaces. The metal wiring on at least one of the main surfaces is made serpentine. In other words, a thermoelectric conversion module is made using p-type and n-type semiconductor pieces, and the distance between the p-type and n-type semiconductor pieces connected to both ends of the serpentine wiring is variable. This also results in a thermoelectric conversion module similar to that using the chip-type element described above. The electrical wiring on both main surfaces may be made serpentine, making the distance between all of the p-type and n-type semiconductor pieces variable.

また、p型半導体片11p及びn型半導体片11nのゼーベック係数は、それぞれ、1~1000μV/Kの範囲内から選択されたものであることも好ましい。どちらもゼーベック係数を大とすることでより発電量を大きくでき、好ましい。 It is also preferable that the Seebeck coefficients of the p-type semiconductor piece 11p and the n-type semiconductor piece 11n are each selected from the range of 1 to 1000 μV/K. In both cases, a large Seebeck coefficient is preferable, as it allows for greater power generation.

さらに配線3と熱電素子1は、その下部に接着層16によって接着された支持基板17を備える。支持基板17は、シート体2の主面のうちの高温側に沿って配置されるが、柔軟性と形状安定性を有することが好ましい。このような支持基板17としては、ポリイミドを好適に使用し得る。ポリイミドを用いた支持基板17と銅箔による配線3との二層構造によって、熱電変換モジュール10を柔軟性と高い変形能を有するとともに形状安定性に優れるものとし得る。なお、支持基板17は、熱電変換モジュール10の製作中における形状安定性にも寄与する。 Furthermore, the wiring 3 and thermoelectric element 1 are provided with a support substrate 17 adhered to their lower portions by an adhesive layer 16. The support substrate 17 is arranged along the high-temperature side of the main surface of the sheet member 2, and preferably has flexibility and shape stability. Polyimide can be suitably used as such a support substrate 17. The two-layer structure of the polyimide support substrate 17 and the copper foil wiring 3 can give the thermoelectric conversion module 10 flexibility, high deformability, and excellent shape stability. The support substrate 17 also contributes to the shape stability of the thermoelectric conversion module 10 during its fabrication.

また、熱電素子1及び配線3は、その全体を絶縁膜18で覆われた上で、シート体2の内部に配置されている。連続気泡を有するシート体2に極端な曲げを付与した場合に熱電素子1や配線3が気泡を超えて接触する可能性を考慮した場合、絶縁膜18によってこのような接触による短絡を防止できる。また、絶縁膜18としてパラキシリレン系ポリマーを用いることで、外気の湿度に対しても防護膜となって好ましい。 The thermoelectric elements 1 and wiring 3 are placed inside the sheet 2, completely covered with an insulating film 18. Considering the possibility that the thermoelectric elements 1 and wiring 3 may come into contact beyond the bubbles when the sheet 2, which has open cells, is bent excessively, the insulating film 18 can prevent short circuits caused by such contact. Furthermore, using a paraxylylene-based polymer as the insulating film 18 is preferable as it also acts as a protective film against the humidity of the outside air.

熱電変換モジュール10は、さらに一対の表層シート体2a及び2bを含み、これによって全体を挟まれている。表層シート体2a及び2bについては、シート体2よりも熱伝導度の高いゴム弾性体とし、主面に沿った方向の熱伝導度を高くすることで、熱電素子1の部分の高温側と低温側との温度差を高く維持できて好ましい。この熱伝導度の観点から、表層シート体2a及び2bには気泡を含まないことが好ましい。表層シート体2a及び2bは、例えば、シリコーンエラストマーに銀フレーク等の高い熱伝導度を有する材料を混合してシート形状としたものなどであるとさらに熱伝導度を高くできて好ましい。 The thermoelectric conversion module 10 further includes a pair of surface sheets 2a and 2b, which sandwich the entire module. The surface sheets 2a and 2b are preferably made of a rubber elastic material with higher thermal conductivity than the sheet 2, and by increasing the thermal conductivity in the direction along the main surface, a high temperature difference can be maintained between the high-temperature side and the low-temperature side of the thermoelectric element 1. From the perspective of thermal conductivity, it is preferable that the surface sheets 2a and 2b do not contain air bubbles. For example, the surface sheets 2a and 2b are preferably made of a silicone elastomer mixed with a material with high thermal conductivity, such as silver flakes, in a sheet shape, which further increases the thermal conductivity.

[製造試験]
次に、実際に製造した熱電変換モジュール10について性能を評価する試験を行った結果について図5乃至図11を用いて説明する。
[Manufacturing test]
Next, the results of a test conducted to evaluate the performance of the actually manufactured thermoelectric conversion module 10 will be described with reference to FIGS.

図5に示すように、熱電変換モジュール10を実際に製造し、変形試験を行った。なお、熱電変換モジュール10は、前出の図面に示したものと同じ構造であり、シート体2として、連続気泡を与えられた柔軟シリコーンゴムスポンジを用いた。また、配線3を銅箔、支持基板17をポリイミド、絶縁膜18をパラキシリレン系ポリマーで構成した。熱電素子1には、Bi-Te系半導体によるチップ型熱電素子を用いた。なお、表層シート体2a及び2bにはシリコーンゴムを用い、他の材料を混合させてはいない。 As shown in Figure 5, a thermoelectric conversion module 10 was actually manufactured and a deformation test was conducted. The thermoelectric conversion module 10 had the same structure as that shown in the previous drawing, and the sheet body 2 was made of a flexible silicone rubber sponge with open cells. The wiring 3 was made of copper foil, the support substrate 17 was made of polyimide, and the insulating film 18 was made of a paraxylylene-based polymer. A chip-type thermoelectric element made of a Bi-Te-based semiconductor was used for the thermoelectric element 1. The surface sheet bodies 2a and 2b were made of silicone rubber, with no other materials mixed in.

略長方形の平板形状の熱電変換モジュール10を、同図(a)に示すように曲げ、(b)に示すように引っ張り、(c)に示すように不作為に丸めて折り畳み、それぞれの変形を指で与えた後に、変形を与えた力を除去した。すると同図(d)に示すように元の略長方形の平板形状に戻った。つまり、熱電変換モジュール10は、可撓性や伸縮性を含む柔軟性と高い変形能を有しながら、形状安定性に優れることが判った。 The thermoelectric conversion module 10, which has a roughly rectangular, flat plate shape, was bent as shown in Figure 1(a), pulled as shown in Figure 1(b), and randomly rolled and folded as shown in Figure 1(c). After each deformation was applied with fingers, the deforming force was removed. The module then returned to its original roughly rectangular, flat plate shape as shown in Figure 1(d). In other words, it was found that the thermoelectric conversion module 10 has excellent shape stability while possessing flexibility, including flexibility and stretchability, and high deformability.

次に、熱電変換モジュールのシート体の材料を変えて3種類の試験体を作製し比較試験を行った。3種類の試験体は、シート体の材料を硬質シリコーンゴムとした試験体Ta、柔軟シリコーンゴムとした試験体Tb、気泡を含むゴム弾性体である柔軟シリコーンゴムスポンジとした試験体Tcとした。その他の材料については、上記した変形試験に用いたものと同一である。 Next, three types of test specimens were fabricated by changing the material of the thermoelectric conversion module sheet, and comparative tests were conducted. The three types of test specimens were: Test specimen Ta, in which the sheet material was hard silicone rubber; Test specimen Tb, in which the sheet material was soft silicone rubber; and Test specimen Tc, in which the sheet material was soft silicone rubber sponge, a rubber elastic body containing air bubbles. The other materials were the same as those used in the deformation test described above.

まず、図6に外観を示すような熱電素子を3つとした伸縮耐久試験用の試験体Ta~Tcを作成した。なお、後述する発電性能試験用の試験体(図9参照)においても符号Ta~Tcを共通で用いる。 First, we created specimens Ta to Tc for the expansion and contraction durability test, each consisting of three thermoelectric elements, as shown in Figure 6. The symbols Ta to Tc are also used commonly for the specimens for the power generation performance test (see Figure 9), which will be described later.

図7に示すように、各試験体Ta~Tcに用いた各シート体の弾性率及び熱伝導率をそれぞれ測定した。その結果、弾性率については、試験体Taに用いた硬質シリコーンゴムでは1.32MPaと他の2つに比べて大きく、試験体Tcに用いた柔軟シリコーンゴムスポンジが最も小さかった。つまり、一定の応力に対する変形能は試験体Tcが最も大きくなると推定できた。熱伝導率については、試験体Taに用いた硬質シリコーンゴム及び試験体Tbに用いた柔軟シリコーンゴムにてそれぞれ0.16及び0.20W/m・Kと大きく、試験体Tcに用いた柔軟シリコーンゴムスポンジにおいては0.08W/m・Kと小さかった。つまり、柔軟シリコーンゴムスポンジによる熱電変換モジュールによれば、高温側と低温側との温度差を高く維持でき、高い発電量を得られるものと考えられた。 As shown in Figure 7, the elastic modulus and thermal conductivity of each sheet used for specimens Ta to Tc were measured. The results showed that the hard silicone rubber used for specimen Ta had a higher elastic modulus of 1.32 MPa than the other two, while the soft silicone rubber sponge used for specimen Tc had the lowest. In other words, it was estimated that specimen Tc had the greatest deformability for a given stress. The hard silicone rubber used for specimen Ta and the soft silicone rubber used for specimen Tb had high thermal conductivities of 0.16 and 0.20 W/m·K, respectively, while the soft silicone rubber sponge used for specimen Tc had a low thermal conductivity of 0.08 W/m·K. In other words, a thermoelectric conversion module using soft silicone rubber sponge is believed to be able to maintain a high temperature difference between the high-temperature side and the low-temperature side, resulting in high power generation.

図8(a)には、伸縮耐久試験用の試験体Ta(硬質シリコーンゴム使用)、試験体Tb(柔軟シリコーンゴム使用)、試験体Tc(柔軟シリコーンゴムスポンジ使用)による伸縮耐久試験の結果を示した。伸縮耐久試験では、試験体を引張試験機に取り付けて四端子法で試験体の熱電変換モジュールとしての内部抵抗を測定しつつ所定の伸長率となるよう引張変形を繰り返し印加して、破断までの繰り返し数を記録した。試験中には内部抵抗の変化率を監視し、内部抵抗の変化率が100%以上になったときを破断として判定した。つまり、電気的な絶縁を破断として判定した。例えば、プロットされた点Pについての内部抵抗の変化率を同図(b)に示した。この例では、硬質シリコーンゴムを用いた試験体Taにおいて伸長率を20%とした場合にサイクル数(繰り返し数)を78としたところで内部抵抗の変化率が急激に増大して100%に達し、破断との判定に至った。 Figure 8(a) shows the results of a stretching durability test using specimens Ta (made of hard silicone rubber), Tb (made of soft silicone rubber), and Tc (made of soft silicone rubber sponge). In the stretching durability test, the specimens were attached to a tensile testing machine and repeatedly subjected to tensile deformation to achieve a predetermined elongation rate while measuring the internal resistance of the specimen as a thermoelectric conversion module using the four-terminal method. The number of repetitions required for failure was recorded. The rate of change in internal resistance was monitored during the test, and failure was determined when the rate of change in internal resistance reached 100% or greater. In other words, failure was determined as electrical insulation. For example, Figure 8(b) shows the rate of change in internal resistance at plotted point P. In this example, when the elongation rate for specimen Ta, made of hard silicone rubber, was set to 20%, the rate of change in internal resistance suddenly increased to 100% at 78 cycles (repetitions), leading to a failure determination.

伸縮耐久試験においては、硬質シリコーンゴムを用いた試験体Taについての耐久性が最も低く、柔軟シリコーンゴムスポンジを用いた試験体Tcについての耐久性が最も高いことが判った。試験体Tcでは、最大伸長率を125%とし、伸長率50%のときの破断までの繰り返し数は1025回となった。なお、最大伸長率は1回の引張変形で破断するまで伸長させたときの伸長率とした。 In the stretch durability test, specimen Ta, which used hard silicone rubber, was found to have the lowest durability, while specimen Tc, which used soft silicone rubber sponge, was found to have the highest durability. For specimen Tc, the maximum elongation was set to 125%, and the number of repetitions until breakage at an elongation rate of 50% was 1,025. Note that the maximum elongation rate was defined as the elongation rate when stretched until breakage occurred after a single tensile deformation.

図9には、発電性能試験用の試験体Ta~Tcの外観を示した。それぞれの試験体において熱電素子は30個を5列×6行に配置した。各試験体の高温側を熱源となるホットプレート上に密着させるとともに低温側を室内の空気に曝すように配置して温度差を与え、ホットプレートの表面温度を熱源温度として測定しつつ、それぞれの開放電圧を測定した。また、各試験体を同様にホットプレート上に配置するとともに、その下面及び上面の温度を測定しつつ発電量を測定した。 Figure 9 shows the appearance of test specimens Ta to Tc used for the power generation performance test. Each test specimen had 30 thermoelectric elements arranged in 5 columns and 6 rows. The high-temperature side of each test specimen was placed in close contact with the hot plate, which served as the heat source, and the low-temperature side was placed so that it was exposed to the room air, creating a temperature difference. The surface temperature of the hot plate was measured as the heat source temperature, and the open-circuit voltage of each specimen was measured. Each test specimen was also placed on the hot plate, and the power generation amount was measured while measuring the temperatures of its top and bottom surfaces.

図10に示すように、熱源温度60~100℃のいずれにおいても開放電圧は柔軟シリコーンゴムスポンジを用いた試験体Tcにおいて最も大きく、硬質シリコーンゴムを用いた試験体Taと柔軟シリコーンゴムを用いた試験体Tbとはほぼ同様の値となった。これは、上記した熱伝導率(図7参照)の差に準じた温度差が高温側と低温側との間に生じたためであると考えられた。つまり、熱伝導率が大きいと温度差を小さくして開放電圧も小さくし、熱伝導率が小さいと温度差を大きくして開放電圧も大きくしたものと考えられた。 As shown in Figure 10, at heat source temperatures between 60 and 100°C, the open-circuit voltage was greatest for test specimen Tc, which used soft silicone rubber sponge, while test specimen Ta, which used hard silicone rubber, and test specimen Tb, which used soft silicone rubber, had similar values. This is thought to be because a temperature difference corresponding to the difference in thermal conductivity (see Figure 7) described above occurred between the high-temperature side and the low-temperature side. In other words, it is thought that a high thermal conductivity reduces the temperature difference and reduces the open-circuit voltage, and a low thermal conductivity increases the temperature difference and increases the open-circuit voltage.

図11には、柔軟シリコーンゴムスポンジを用いた試験体Tcの発電量を示した。高温側(下面)と低温側(上面)との温度差を大とすることで発電量を大きくすることが確認された。このとき、温度差8.6℃で最大発電量32.2μWを得ることができた。 Figure 11 shows the power generation capacity of test specimen Tc, which uses a flexible silicone rubber sponge. It was confirmed that the power generation capacity can be increased by increasing the temperature difference between the high-temperature side (bottom surface) and the low-temperature side (top surface). In this case, a maximum power generation capacity of 32.2 μW was achieved at a temperature difference of 8.6°C.

以上のように、柔軟シリコーンゴムスポンジを用いた試験体Tcにおいて、可撓性及び伸縮性を含む柔軟性を有し高い変形能を有しながら、高い発電量を得られることが判った。 As described above, it was found that test specimen Tc, which uses a flexible silicone rubber sponge, has flexibility, including flexibility and stretchability, and high deformability, while also producing a high amount of power generation.

以上、本発明による実施例及びこれに基づく変形例を説明したが、本発明は必ずしもこれに限定されるものではなく、当業者であれば、本発明の主旨又は添付した特許請求の範囲を逸脱することなく、様々な代替実施例及び改変例を見出すことができるであろう。 The above describes embodiments of the present invention and variations based thereon, but the present invention is not necessarily limited to these, and those skilled in the art will be able to find various alternative embodiments and modifications without departing from the spirit of the present invention or the scope of the appended claims.

1 熱電素子
2 シート体
3 配線
10 熱電変換モジュール
REFERENCE SIGNS LIST 1 thermoelectric element 2 sheet body 3 wiring 10 thermoelectric conversion module

Claims (10)

温度差を与えられる一対の主面の間に跨がって熱電素子を配置させたシート状の熱電変換モジュールであって、
前記主面のうちの第1主面及び第2主面の間に跨って与えられたp型熱電素子片及びn型熱電素子片を電気的に交互に接続するように前記第1主面側及び前記第2主面側に交互に金属配線を与えてなり、
少なくとも前記第2主面側の前記金属配線を蛇行配線としてその両端に接続された前記p型熱電素子片と前記n型熱電素子片との距離を可変とし、
前記p型熱電素子片及び前記n型熱電素子片について気泡を含むゴム弾性体からなるシート体に貫挿させて少なくともその側面を封入させており、
前記ゴム弾性体は、前記気泡を表面に連通させた連続気泡を与えられたエラストマースポンジであることを特徴とする熱電変換モジュール。
A sheet-like thermoelectric conversion module in which thermoelectric elements are arranged across a pair of main surfaces that can be given a temperature difference,
metal wiring is provided alternately on the first main surface side and the second main surface side so as to electrically connect alternately p-type thermoelectric element components and n-type thermoelectric element components provided across a first main surface and a second main surface of the main surfaces,
The metal wiring on at least the second main surface side is formed as a meandering wiring, and the distance between the p-type thermoelectric element component and the n-type thermoelectric element component connected to both ends of the meandering wiring is variable;
the p-type thermoelectric element pieces and the n-type thermoelectric element pieces are inserted into a sheet made of a rubber elastic material containing bubbles, and at least the side surfaces of the sheet are sealed;
The thermoelectric conversion module is characterized in that the rubber elastic body is an elastomer sponge having open cells that connect the cells to the surface .
前記エラストマースポンジの弾性率は、1~100kPaの範囲内にあることを特徴とする請求項記載の熱電変換モジュール。 2. The thermoelectric conversion module according to claim 1 , wherein the modulus of elasticity of the elastomer sponge is within a range of 1 to 100 kPa. 前記主面の一方に沿って前記金属配線の上には支持基板を与えられていることを特徴とする請求項1記載の熱電変換モジュール。 The thermoelectric conversion module described in claim 1, characterized in that a support substrate is provided on the metal wiring along one of the main surfaces. 前記支持基板はポリイミドからなることを特徴とする請求項記載の熱電変換モジュール。 4. The thermoelectric conversion module according to claim 3 , wherein the support substrate is made of polyimide. 前記第1主面側の前記金属配線とその両側の前記p型熱電素子片及び前記n型熱電素子片とを封止し一体化したチップ状素子を含むことを特徴とする請求項1記載の熱電変換モジュール。 The thermoelectric conversion module of claim 1, characterized in that it includes a chip-shaped element in which the metal wiring on the first main surface and the p-type thermoelectric element piece and the n-type thermoelectric element piece on both sides of the metal wiring are sealed and integrated. 前記エラストマースポンジの熱伝導率は、0.01~0.1W/m・Kの範囲内にあることを特徴とする請求項記載の熱電変換モジュール。 2. The thermoelectric conversion module according to claim 1 , wherein the thermal conductivity of the elastomer sponge is within a range of 0.01 to 0.1 W/m·K. 前記金属配線の導電率は、1.0×10~1.0×10S/mの範囲内にあることを特徴とする請求項1記載の熱電変換モジュール。 2. The thermoelectric conversion module according to claim 1, wherein the electrical conductivity of the metal wiring is in the range of 1.0×10 4 to 1.0×10 8 S/m. 前記p型熱電素子片のゼーベック係数は、1~1000μV/Kの範囲内にあることを特徴とする請求項1記載の熱電変換モジュール。 The thermoelectric conversion module described in claim 1, characterized in that the Seebeck coefficient of the p-type thermoelectric element piece is in the range of 1 to 1000 μV/K. 前記n型熱電素子片のゼーベック係数は、-1000~-1μV/Kの範囲内にあることを特徴とする請求項1記載の熱電変換モジュール。 The thermoelectric conversion module described in claim 1, characterized in that the Seebeck coefficient of the n-type thermoelectric element piece is in the range of -1000 to -1 μV/K. 前記シート体よりも熱伝導度の高いゴム弾性体からなる一対の表層シート体の間に挟まれていることを特徴とする請求項1乃至のうちの1つに記載の熱電変換モジュール。 10. The thermoelectric conversion module according to claim 1 , wherein the thermoelectric conversion module is sandwiched between a pair of surface layer sheets made of a rubber elastic material having a higher thermal conductivity than the sheet body.
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