JP7791794B2 - Substrate storage container - Google Patents

Description

The present invention relates to a substrate storage container that can store not only semiconductor wafers but also reticle storage containers for reticles.

In the lithography process on semiconductor manufacturing lines, multiple reticles are used to form electronic circuits on semiconductor wafers. However, the number of semiconductor wafers and reticles that can be transported at one time differs, and multiple reticles must be transported multiple times to form electronic circuits on a single semiconductor wafer, which can hinder efforts to improve semiconductor wafer transport efficiency. Furthermore, substrate storage containers for semiconductor wafers and containers for reticles differ in size and transport format, requiring separate transport lines. This necessitates the installation of multiple transport lines, which creates problems in terms of equipment, costs, and space occupation.

To solve these problems, a technology has been proposed in the past (not shown) in which a reticle storage container for reticles is stored in the container body of a substrate storage container for semiconductor wafers via a dedicated adapter, allowing for transportation using a single type of substrate storage container (see Patent Documents 1, 2, 3, and 4).

Japanese Patent Application Publication No. 7-58192 JP 2011-3723 A JP 2013-239507 A JP 2013-239643 A

When a reticle container is stored in a substrate container for semiconductor wafers via a dedicated adapter, it is possible to improve the efficiency of transporting semiconductor wafers and to solve problems such as equipment, costs, and space occupation.
However, if the reticle container is simply mounted on the adapter, the reticle container may float up and become misaligned or fall off the adapter, which may result in damage to the reticle inside the reticle container.

The present invention has been developed in consideration of the above, and aims to provide a substrate storage container that can prevent reticle storage containers mounted on an adapter inside the container body from floating up or falling off, thereby eliminating the risk of damage to the reticles inside the reticle storage container.

In order to solve the above problems, the present invention provides a container comprising a container body capable of storing a plurality of semiconductor wafers arranged vertically, a lid body detachably fitted to the open front surface of the container body, and an adapter for mounting a reticle storage container stored in the container body,
A pair of support pieces capable of supporting the semiconductor wafers substantially horizontally are provided facing each other on both sides inside the container body, and a plurality of pairs of support pieces are arranged at predetermined intervals in the vertical direction;
The adapter is formed in a generally plate-like shape and is supported by a pair of support pieces within the container body. The adapter has a front portion located on the front side of the container body that is linearly cut out. A mounting surface of the adapter on which the reticle storage container is mounted is provided with a front positioning member adjacent to the front periphery of the reticle storage container, a rear positioning member adjacent to the rear periphery of the reticle storage container, and a pair of side positioning members adjacent to the side periphery of the reticle storage container, all arranged at a predetermined interval. At least the front positioning member of the front positioning member and the pair of side positioning members rotatably supports a clamp member that engages with the periphery of the reticle storage container from above. The rear positioning member is formed with a generally inverted L-shaped cross section and is divided into an upright portion that faces the rear periphery of the reticle storage container from the side, and a locking cover portion that is detachably screwed to the upright portion via a fastener and engages with the rear periphery of the reticle storage container from above .

At least one of the adapter, the front positioning member, the rear positioning member, the pair of side positioning members, and the clamp member can be molded from a molding material containing resin and conductive filler.

The semiconductor wafers referred to in the claims include silicon wafers with a diameter of at least 300 mm or 450 mm. At least a portion of the container body or lid may be transparent, opaque, or translucent. A stopper for the semiconductor wafer or adapter may be formed on at least the front of the surface of the support piece of the container body. The reticle storage container may be a box-shaped, flat polygonal container capable of storing 5- to 7-inch reticles, or a cassette-type container.

The adapter can be appropriately formed into a flat circular, elliptical, rectangular, polygonal, square, or other shape. Furthermore, the term "rotation" of the clamp member includes rotation and swing. The "approximately inverted L-shaped cross section" of the rear positioning member includes both an inverted L-shaped cross section and similar shapes that are roughly recognized as an inverted L-shaped cross section (e.g., an inverted J-shaped cross section or an inverted Γ-shaped cross section). Furthermore, while the substrate storage container is primarily a FOUP for semiconductor factories, it may also be a FOSB for shipping and transportation.

According to the present invention, when storing a reticle storage container in the container body of a substrate storage container via an adapter, first prepare the adapter and fit the reticle storage container between the multiple positioning members on its mounting surface to position it. Once the reticle storage container is fitted and positioned, the adapter's clamping members are engaged with the reticle storage container to prevent it from floating up. The adapter is then placed inside the container body, with both sides supported by a pair of opposing support pieces on the container body, and the lid is fitted onto the open front of the container body. This allows the reticle storage container to be stored in the container body via the adapter, allowing for safe storage and transportation of the reticle storage container.

According to the present invention, the reticle container mounted on the adapter inside the container body is prevented from floating up or falling off, thereby eliminating the risk of damage to the reticle inside the reticle container. Furthermore, the front portion of the adapter located on the front side of the container body is linearly cut out, making it easy to identify the orientation. Furthermore, the mounting surface of the adapter is provided with a front positioning member adjacent to the front peripheral edge of the reticle container, a rear positioning member adjacent to the rear peripheral edge of the reticle container, and a pair of side positioning members adjacent to the side peripheral edges of the reticle container, all arranged at a predetermined interval. This allows the reticle container to be positioned by surrounding most of it except for the four corners.
Furthermore, at least the front positioning member of the pair of side positioning members rotatably supports a clamp member that engages the peripheral edge of the reticle container from above, effectively preventing the reticle container from floating up and becoming misaligned or falling off the adapter. Furthermore, since the rear positioning member is not a single unit but is comprised of a disassembled upright portion and a locking covering portion, assembly of the rear positioning member is facilitated. Furthermore, since the rear peripheral portion of the reticle container mounted on the mounting surface of the adapter is positioned and locked to the rear positioning member, it is possible to prevent the reticle container from shifting in the front-to-rear direction of the adapter and also to prevent the rear portion of the reticle container from floating up and becoming misaligned or falling off the adapter.

According to the invention of claim 2, at least one of the adapter, the front positioning member, the rear positioning member, the pair of side positioning members, and the clamp member is molded from a molding material containing resin and conductive filler, thereby imparting conductivity and preventing electrostatic damage to the reticle.

1 is an overall perspective view schematically showing an embodiment of a substrate storage container according to the present invention. 1 is a cross-sectional explanatory view schematically showing a plurality of adapters stored in a container body in an embodiment of a substrate storing container according to the present invention. FIG. 1 is a perspective view illustrating a reticle storage container mounted on an adapter in an embodiment of a substrate storage container according to the present invention; FIG. 1A and 1B are explanatory views schematically showing a reticle storage container in an embodiment of a substrate storage container according to the present invention, in which FIG. 1A is a plan view and FIG. 1B is a side view. 10A and 10B are explanatory views schematically showing a state in which a reticle storage container is mounted on an adapter in the embodiment of the substrate storage container according to the present invention. 10 is a main part explanatory view schematically showing a rear positioning bar of an adapter in an embodiment of a substrate storing container according to the present invention. FIG. FIG. 10 is an exploded perspective view schematically showing the relationship between an adapter, a plurality of positioning bars, and a plurality of clamps in an embodiment of a substrate storing container according to the present invention. 10 is a perspective view of a main part, schematically showing a state in which a clamp is engaged with a peripheral edge portion of a reticle storage container in an embodiment of a substrate storage container according to the present invention. FIG. FIG. 10 is a perspective explanatory view schematically showing the relationship between a container body and an adapter in a substrate storing container according to a second embodiment of the present invention. FIG. 11 is a perspective explanatory view schematically showing the relationship between a container body and an adapter in a substrate storing container according to a third embodiment of the present invention.

A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in FIGS. 1 to 8, the substrate storage container in this embodiment is a FOUP for use in a semiconductor factory, comprising a container body 1 capable of storing multiple semiconductor wafers W, a lid 10 that fits onto the open front of the container body 1, and an adapter 40 for mounting reticle storage containers, the required number of which are stored in the container body 1 instead of semiconductor wafers W. A plurality of positioning bars 43 for positioning the reticle storage container 30 are disposed on the mounting surface 41 of the adapter 40 on which the reticle storage container 30 is mounted, and clamps 50 that can be engaged with the reticle storage container 30 are supported by these positioning bars 43, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

As shown in Figure 1, the semiconductor wafers W are round silicon wafers, for example, 300 mm in diameter, and 25 of them are stored in a vertically aligned arrangement inside the container body 1, with each semiconductor wafer W supported horizontally.

The container body 1 and lid 10 are constructed by combining multiple parts that are each injection-molded using a molding material containing a specific resin. Examples of resins used in this molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, as well as alloys of these. To impart conductivity to the thermoplastic resin, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, etc. is added.

As shown in Figures 1 and 2, the container body 1 is formed as a tall, front-opening box with a horizontally elongated opening at the front. A pair of support pieces 2 are provided on both sides of the interior, in other words, on the inner surfaces of the left and right side walls, to horizontally support the peripheral sides of the semiconductor wafers W from below. A plurality of pairs of support pieces 2 are arranged vertically at a predetermined interval. The container body 1 is formed to a size that can store, for example, 25 semiconductor wafers W aligned vertically. Each support piece 2 is formed, for example, as a flat shelf extending in the front-to-rear direction of the container body 1, and a stopper 3 is integrally formed on at least the front of the front and rear portions of the surface, protruding to prevent the stored semiconductor wafers W from shifting forward.

A bottom plate 4 is selectively attached to the underside of the bottom plate of the container body 1, and a flat, rectangular robotic flange 5, a carrier for automatic transport, is detachably attached to the center of the ceiling of the container body 1. This robotic flange 5 is gripped and suspended by a ceiling transport device in a semiconductor factory, and then transported along the semiconductor production line. Additionally, multiple rear supports are lined up on the interior back surface of the container body 1, which can clamp the rear peripheral portion of the semiconductor wafer W in an emergency. The front peripheral portion of the container body 1 is bent outward in the width direction and bulged outward, and locking holes 6 for the lid 10 are recessed into both the upper and lower sides of the inner surface of this front peripheral portion.

Operating handles 7 for manual operation are removably attached to the outer surfaces of both side walls of the container body 1, and conveyor rails 8, which are automatic conveyors, are removably attached to the bottom of each side wall as needed and are oriented horizontally in the front-to-back direction.

As shown in Figure 1, the lid body 10 comprises a lid body 11 with a generally dish-shaped cross section that is removably fitted to the front of the container body 1, and a cover plate 14 that covers the open surface of the lid body 11. A locking mechanism 16 is built in between the lid body 11 and the cover plate 14. The lid body 11 is formed in a generally rectangular shape with a horizontally elongated shape, and a front retainer 12 that resiliently holds the front peripheral edge of the semiconductor wafer W with an elastic piece is removably attached to the center of the back surface. In addition, a frame-shaped gasket that is pressed against and deformed on the inner periphery of the front of the container body 1 is fitted to the peripheral wall of the lid body 11, and access holes 13 for the locking mechanism 16 are drilled through both the upper and lower sides of the peripheral wall of the lid body 11.

The cover plate 14 is formed from a transparent, translucent, or opaque plate, with operation holes 15 for the locking mechanism 16 drilled through both sides. A rotatable operation key for the lid opening and closing device passes through each operation hole 15 from the outside.

As shown in Figure 1, the locking mechanism 16 is composed of a pair of left and right rotating plates 17 that are rotated by the operating key of the lid opening/closing device that passes through the operating hole 15 in the cover plate 14, multiple slide bars 19 that slide up and down in response to the rotation of each rotating plate 17, and multiple retractable locking claws 20 that are connected and pivoted to the tip of each slide bar 19 and pass through the retractable holes 13 in the peripheral wall of the lid body to fit into the locking holes 6 in the container body 1.

The locking mechanism 16 is molded from the same molding material as the container body 1 and lid body 10. The multiple rotating plates 17 and slide bars 19 are supported and journaled via support ribs provided within the lid body 11, and the ends of the slide bars 19 are loosely fitted via pins into a pair of arc-shaped slots 18 near the periphery of each rotating plate 17. Each locking claw 20 is bent, for example, into a roughly L-shaped cross section, and a friction-reducing roller is rotatably journaled at its free end.

In this type of substrate storage container, multiple semiconductor wafers W are sequentially stored within the container body 1, and the lid 10 is press-fitted into the front of the container body 1 by the lid opening/closing device. The front retainer 12 holds the front peripheral edge of each semiconductor wafer W, and the locking mechanism 16 locks the lid opening/closing device to firmly secure the lid 10. Once the lid 10 is firmly secured, the robotic flange 5 of the container body 1 is suspended from an overhead transport device in the semiconductor factory and transported to the next processing stage, where each semiconductor wafer W is processed and treated in sequence, resulting in the formation of electronic circuits on the surface of the semiconductor wafer W.

The reticle storage container 30 is not particularly limited, but as shown in Figures 3 to 5, it is a reticle SMIF pod (RSP) that includes a flat rectangular bottom plate 31 that can store one 6-inch reticle and is mounted on the adapter 40, and a flat, approximately rectangular top lid 32 that is detachably fitted to the bottom plate 31 from above via a seal gasket. The bottom plate 31 and top lid 32 of the reticle storage container 30 are each molded from a predetermined molding material (e.g., various synthetic resins such as polycarbonate resin, polybutylene terephthalate resin, polyacetal resin, polyether ether ketone resin, etc.) that contains a conductive material such as carbon, in order to prevent damage to the reticle due to static electricity, for example.

The bottom plate 31 comprises opposing, flat, roughly rectangular upper and lower plates, with a gap defined between them that houses a locking mechanism. A pair of support members are spaced apart on the upper surface of the upper plate to horizontally support the peripheral edge of a single reticle. Each support member is formed into a rail, and a resiliently deformable, flat, frame-shaped sealing gasket is attached near the peripheral edge of the upper surface of the upper plate.

The top cover 32 is, for example, transparent or translucent and formed with a roughly hat-shaped cross section. When mated with the bottom plate 31, a flange that protrudes horizontally outward in the width direction presses and deforms the seal gasket, ensuring a seal. A pair of spaced-apart holding members that contact and hold the top peripheral edge of the reticle are installed on the interior ceiling of the top cover 32, and each holding member is formed, for example, as a rail and faces the support member from above.

The flange that protrudes outward in the width direction of the top cover 32 has its peripheral edge 33 bent downward at a short angle to face the peripheral surface of the bottom plate 31, and the inner surface of this edge has locking grooves recessed therein that fit into the tips of the retractable bars of the locking mechanism. In addition, a transport flange 34 that can be gripped by a transport device or the like is attached to the outer ceiling of the top cover 32.

Examples of reticle storage containers 30 include RSP-150 and RSP-200 (product names manufactured by Dainichi Shoji Co., Ltd.), reticle cases (product names manufactured by Nagase Engineering Co., Ltd.), and reticle cassettes (product names manufactured by Sanyo Materials Co., Ltd.).

As shown in Figures 2, 3, 5 to 8, the adapter 40 is molded in a generally plate-like shape supported by a pair of support pieces 2 within the container body 1. A plurality of positioning bars 43 are arranged on the flat top mounting surface 41 on which the reticle storage container 30 is mounted, surrounding most of the reticle storage container 30 except for the four corners. A plurality of clamps 50 that engage with the reticle storage container 30 are rotatably supported on some of these positioning bars 43. The adapter 40 is molded from a predetermined molding material into a disk of a thickness and size that allows it to be inserted between adjacent support pieces 2 of the container body 1. The front portion 42, located on the front side of the container body 1, is linearly notched left and right to indicate the positioning direction, and both sides are supported horizontally by the pair of support pieces 2 of the container body 1.

The molding material for the adapter 40 may be, for example, a lightweight polypropylene resin, which has excellent chemical resistance, abrasion resistance, impact resistance, and versatility, as well as various synthetic resins such as polycarbonate resin, polybutylene terephthalate resin, polyacetal resin, and polyether ether ketone resin, as well as thermoplastic elastomers such as polyester, polystyrene, and polyolefin. To impart conductivity to the molding material and prevent electrostatic breakdown of the reticle, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, etc. is preferably added.

The adapter 40 is formed to be approximately the same size as the semiconductor wafer W, for example. Near the periphery of the mounting surface 41, multiple positioning bars 43 are screwed at intervals to define a planar rectangular mounting area 49, closely positioning the top lid peripheral portion 33 of the reticle storage container 30 from the front, rear, left, and right. Each positioning bar 43 is formed in a planar, approximately semicircular, or the like. The multiple positioning bars 43 are molded from the same molding material as the adapter 40. To impart conductivity to this molding material and prevent electrostatic breakdown of the reticle, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, or the like is preferably added.

As shown in Figures 3, 5, and 7, the multiple positioning bars 43 include a front positioning bar 44 that positions the reticle storage container 30 adjacent to the front peripheral edge of the top lid 32, a rear positioning bar 45 that positions the reticle storage container 30 adjacent to the rear peripheral edge of the top lid 32, and a pair of left and right side positioning bars 48 that position the reticle storage container 30 adjacent to both sides of the peripheral edge. Gaps are defined between these bars 44, 45, and 48, and the rear positioning bar 45 is bent to form a slightly tall, approximately inverted L-shaped cross section.

Of the multiple positioning bars 43, the rear positioning bar 45 is divided into a block-shaped upright portion 46 that faces closely to the rear peripheral edge of the top cover 32 from the side, as shown in Figures 5 and 6, and an L-shaped locking cover portion 47 that is removably attached to the upright portion 46 via multiple fasteners such as screws and locks onto the rear peripheral edge of the top cover 32 from above, performing a locking function in addition to a positioning function.

As shown in Figures 3, 5, 7, and 8, multiple clamps 50 (three in this embodiment) are supported via bolts 52 at the center of the front positioning bar 44 and the pair of side positioning bars 48, and rotate horizontally. Each clamp 50 is molded in a roughly inverted L-shape from the same molding material as the adapter 40 and positioning bar 43, and functions to engage its long piece from above with the upper lid rim 33 of the reticle storage container 30 to prevent it from lifting up in the Z direction, and to release the engagement of the long piece to enable removal of the reticle storage container 30.

To prevent electrostatic damage to the reticle, the molding material of the clamp 50 preferably contains an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, etc. The bolt 52 is molded from, but is not limited to, a high-performance polyether ether ketone resin with excellent heat resistance and mechanical properties, and is threaded into the short-end tubular portion 51 of the clamp 50 from above.

In the above configuration, when storing a reticle storage container 30 containing reticles in the container body 1 of the substrate storage container via the adapter 40, first prepare the adapter 40 and orient the long pieces of its multiple clamps 50 in the longitudinal direction of the positioning bar 43 (see Figure 5), then contact the rear of the tilted reticle storage container 30 with the mounting surface 41 of the adapter 40, slide the reticle storage container 30 rearward until the rear peripheral edge of its top lid 32 engages with the locking covering portion 47 of the rear positioning bar 45, and position the reticle storage container 30 by fitting it into the mounting area 49 between the front positioning bar 44, rear positioning bar 45, and pair of side positioning bars 48.

Once the reticle storage container 30 is inserted and loaded, the long pieces of each clamp 50 are rotated toward the center of the adapter 40 (see Figure 8), and the long pieces of the clamps 50 engage with the peripheral edge 33 of the reticle storage container 30 to prevent the reticle storage container 30 from floating up in the Z direction (see Figure 3). Then, multiple adapters 40 are sequentially placed inside the empty container body 1, with both sides supported by a pair of opposing support pieces 2 on the container body 1. After stabilizing the position and orientation of the adapters 40, the lid 10 is press-fit into the open front of the container body 1, allowing the reticle storage container 30 to be safely stored in the container body 1 via the adapters 40. It is preferable to leave some space between the adapters 40 to prevent the reticle storage container 30 from colliding with the underside of the adapter 40.

With the above configuration, not only is the reticle storage container 30 stably mounted on the mounting surface 41 of the adapter 40, but multiple clamps 50 are each engaged with the peripheral edge 33 of the reticle storage container 30. Therefore, even if an external force is applied due to a collision with a substrate storage container, the reticle storage container 30 is effectively prevented from floating up from the adapter 40, becoming misaligned in the Z direction, rattling, or falling off. This significantly reduces the risk of damage to the reticles inside the reticle storage container 30. Furthermore, because the adapter 40, multiple positioning bars 43, and multiple clamps 50 are each molded from molding materials containing resin and conductive filler, the added conductivity prevents electrostatic damage to the reticles.

In addition, the upright portion 46 of the rear positioning bar 45 is positioned close to the rear peripheral edge of the reticle storage container 30 mounted on the mounting surface 41 of the adapter 40, and the locking cover portion 47 of the rear positioning bar 45 is locked, preventing the reticle storage container 30 from shifting in the front-to-rear direction of the adapter 40. Furthermore, it is possible to prevent the rear portion of the reticle storage container 30 from floating up from the adapter 40 and becoming misaligned, rattling, or falling off. Furthermore, because the rear positioning bar 45 is constructed by assembling the separate upright portion 46 and locking cover portion 47, even rear positioning bars 45 with complex shapes can be easily assembled and used.

9 shows a second embodiment of the present invention, in which a clamp 50 that can rotate horizontally and laterally is supported at the center of the front positioning bar 44 via a bolt 52. The other parts are the same as those of the above embodiment, so a description thereof will be omitted.
In this embodiment, the same effects as those of the above embodiment can be expected, and furthermore, since the clamps 50 of the side positioning bars 48 are omitted, it is clear that a significant reduction in the number of parts can be expected.

10 shows a third embodiment of the present invention, in which a pair of left and right clamps 50 that can rotate horizontally and laterally are supported on the front positioning bar 44 via bolts 52. The other parts are the same as those of the above-mentioned embodiment, so a description thereof will be omitted.
This embodiment is expected to have the same effects as the above embodiment, and furthermore, it is expected to reduce the number of parts by omitting the clamps 50 on each side positioning bar 48. Furthermore, since a pair of clamps 50 is used, even if one clamp 50 comes loose, the other clamp 50 can reliably prevent the reticle container 30 from shifting position, rattling, falling off, etc.

In the above embodiment, the adapter 40, the multiple positioning bars 43, and the multiple clamps 50 are molded from a molding material containing resin and conductive filler, but at least one of these may also be molded from a molding material containing resin and conductive filler. Also, notches may be formed on both side edges of the underside of the adapter 40 near the stoppers 3 of the support pieces 2 so that they are thinner than the other parts, and each notch may come into contact with the stoppers 3 of the support pieces 2 to prevent the adapter 40 from shifting in the front-to-rear direction, particularly the forward direction, or from rattling.

Mounting holes for the positioning bars 50 may also be drilled radially through the adapter 40, and the positioning bars 50 may be selectively screwed into the mounting holes depending on the size of the reticle storage container 30. In the above embodiment, the clamps 50 are supported by at least the front positioning bar 44 of the adapter 40's front positioning bar 44 and pair of side positioning bars 48, but the required number of clamps 50 may also be rotatably supported by only the pair of side positioning bars 48. Furthermore, if no particular obstacles arise, multiple clamps 50 may be rotatably supported on the mounting surface 41 of the adapter 40.

In addition, the mounting surface 41 of the adapter 40 can be patterned with the required number of projections and recesses to create a gap between the adapter 40 and the bottom surface of the reticle container 30, facilitating the installation and removal of the reticle container 30. Also, shallow holes for the reticle container 30 can be selectively drilled into the mounting surface 41 of the adapter 40. The upright surface of the locking cover 47 of the rear positioning bar 45 facing the reticle container 30 can be tilted to increase the upward tilt angle of the reticle container 30, facilitating the removal of the reticle container 30. Furthermore, each positioning bar 43 can be made flexible or springy to fit tightly against the peripheral edge 33 of the reticle container 30, preventing the reticle container 30 from shifting or falling off.

The substrate storage container of the present invention can be used in fields that handle semiconductors and reticles.

REFERENCE SIGNS LIST 1 Container body 2 Support piece 5 Robotic flange 8 Transport rail 10 Lid body 11 Lid body 14 Cover plate 16 Locking mechanism 30 Reticle storage container 31 Bottom plate 32 Top lid 33 Peripheral edge portion 40 Adapter 41 Mounting surface 43 Positioning bar (positioning member)
44 Front positioning bar (positioning member, front positioning member)
45 Rear positioning bar (positioning member, rear positioning member)
46 Standing portion 47 Locking covering portion 48 Side positioning bar (positioning member, side positioning member)
49 Mounting area 50 Clamp (clamp member)
W Semiconductor wafer

Claims (2)

A substrate storage container comprising: a container body capable of storing a plurality of semiconductor wafers arranged vertically; a lid body detachably fitted to the open front surface of the container body; and an adapter for mounting a reticle storage container stored in the container body,
A pair of support pieces capable of supporting the semiconductor wafers substantially horizontally are provided facing each other on both sides inside the container body, and a plurality of pairs of support pieces are arranged at predetermined intervals in the vertical direction;
a front positioning member adjacent to the front periphery of the reticle container, a rear positioning member adjacent to the rear periphery of the reticle container, and a pair of side positioning members adjacent to the side periphery of the reticle container, are arranged at a predetermined interval on a mounting surface of the adapter on which the reticle container is mounted; a front positioning member adjacent to the front periphery of the reticle container, a rear positioning member adjacent to the rear periphery of the reticle container, and a pair of side positioning members adjacent to the side periphery of the reticle container; a clamp member that engages with the periphery of the reticle container from above is rotatably supported on at least the front positioning member of the front positioning member and the pair of side positioning members; the rear positioning member is formed into a substantially inverted L-shaped cross section; and the rear positioning member is divided into an upright portion that laterally faces the rear periphery of the reticle container, and a locking cover portion that is detachably screwed to the upright portion via a fastener and locks with the rear periphery of the reticle container from above . 2. The substrate storage container according to claim 1, wherein at least one of the adapter, the front positioning member, the rear positioning member, the pair of side positioning members, and the clamp member is molded from a molding material containing resin and conductive filler.