JP7793955B2 - Device-equipped equipment - Google Patents

Description

The present invention relates to device-equipped equipment.

Device-equipped equipment containing devices such as MEMS (Micro Electro Mechanical Systems) elements is well known. Examples of such device-equipped equipment include spectroscopes that perform spectroscopic analysis of light from an object. For example, spectroscopes are used to identify the resin type of an object through spectroscopic analysis, and then sort and recover the object by resin type as recyclable material.

In order to provide a light source device that can suppress the generation of residual stress during bonding and maintain high output over a long period of time as a device-mounted device, a configuration has been disclosed in which a deformable holding portion is provided between the peripheral portion of the optical element other than the center and the light-emitting element, restricting movement of the optical element and the light-emitting element in directions that move them apart or toward each other (see, for example, Patent Document 1).

However, the configuration described in Patent Document 1 may result in damage to the circuit pattern portion included in the device.

The purpose of this invention is to prevent damage to the circuit pattern portion contained in the device.

A device-mounted equipment according to one aspect of the present invention comprises a device including a held surface and a circuit pattern portion provided on at least a portion of the held surface, a holding member that holds the device using a holding surface facing the held surface, and a spacer member provided between the holding surface and the held surface, wherein the thickness of the spacer member is greater than the thickness of the circuit pattern portion provided on the held surface, and when viewed from the normal direction of the holding surface, the holding member has an opening having a rectangular shape, and the spacer member includes four spacer members arranged in positions that are point-symmetrical with respect to the center of the opening .

This invention can prevent damage to the circuit pattern portion contained in the device.

1 is a perspective view illustrating an example of the overall configuration of a spectrometer according to an embodiment. FIG. 2 is a perspective view illustrating an example of a housing in the spectrometer of FIG. 1 . 2. FIG. 2 is a cross-sectional view taken along line II-II of FIG. FIG. 2 is a perspective view illustrating a configuration of a frame in the spectrometer of FIG. 1 . 2 is a plan view illustrating the configuration of a movable member in the spectrometer of FIG. 1 . 1 is a perspective view illustrating a configuration of a spacer member according to an embodiment. FIG. 10A and 10B are side views illustrating the configuration of a spacer member according to the embodiment.

The following describes in detail the embodiments of the invention with reference to the drawings. In each drawing, identical components or components of the same quality are designated by the same reference numerals, and duplicate descriptions will be omitted where appropriate.

In the figures below, directions may be indicated by the X, Y, and Z axes, but the X direction along the X axis indicates a direction approximately perpendicular to the oscillation axis of the movable member of the device-mounted equipment according to the embodiment, and the Y direction along the Y axis indicates a direction along the oscillation axis. The Z direction along the Z axis is a direction approximately perpendicular to both the X and Y directions, and indicates a direction along the direction of movement of the movable member.

The direction in which the arrow points in the X direction is referred to as the +X direction or +X side, and the direction opposite to the +X direction is referred to as the -X direction or -X side. The direction in which the arrow points in the Y direction is referred to as the +Y direction or +Y side, and the direction opposite to the +Y direction is referred to as the -Y direction or -Y side. Furthermore, the direction in which the arrow points in the Z direction is referred to as the +Z direction or +Z side, and the direction opposite to the +Z direction is referred to as the -Z direction or -Z side. As an example, the device-equipped equipment according to the embodiment emits light in the +X direction. However, these do not limit the orientation of the device-equipped equipment when in use, and the orientation of the device-equipped equipment is arbitrary.

The following describes an embodiment using a spectrometer equipped with a movable member that performs spectroscopic analysis of light from an object as an example of a device-mounted instrument.

<Example of overall configuration of spectroscope 100>
1 is a perspective view illustrating the overall configuration of a spectrometer 100 according to an embodiment. The spectrometer 100 is a handy device-mounted instrument that is compact and portable so that a user of the spectrometer 100 can hold it in their hand or store it in a pocket, bag, etc. As shown in FIG. 1 , the spectrometer 100 has a housing 1 and a buffer member 2.

The spectroscope 100 irradiates an object with light from a light source inside the housing 1 and performs spectroscopic analysis of the light reflected by the object. Spectroscopic analysis involves examining the spectrum of light emitted or absorbed by a substance and identifying or specifying the components of the substance.

The target objects include, for example, components containing resin, fruits and vegetables, grains, meat, fish, pharmaceutical tablets, concrete, etc. The spectrometer 100 is used to identify the resin type of the target objects through spectroscopic analysis and to sort and recover the target objects by resin type as recyclable materials.

The housing 1 is a box-shaped member that houses a light source, a movable member, etc., inside the housing 1. The movable member swings around a swing axis along the Y axis inside the housing 1. The movable direction 10 along the Z axis indicates the direction in which the movable member moves due to the swing. Note that, while this embodiment illustrates a housing 1 that is a box-shaped member in the shape of a rectangular prism, this is not limited to this. The housing 1 may have any shape, such as a cylindrical, elliptical, or polygonal prism, as long as it can house a movable member inside.

The buffer member 2 is a member that absorbs impacts on the movable member 13. The buffer member 2 is made of an elastic material such as rubber, and is detachably provided so as to cover the housing 1. However, the buffer member 2 does not necessarily have to be detachable, and may be built into the housing 1.

If the spectrometer 100 is dropped to the ground or hits a wall while being carried or used, the spectrometer 100 may be subjected to an impact, which may result in damage to the spectrometer 100. The movable components housed within the housing 1 are particularly susceptible to damage from impact. The buffer member 2 absorbs the impact on the spectrometer 100 with its elasticity, thereby reducing the damage to the spectrometer 100, and in particular to the movable components of the spectrometer 100.

When the spectrometer 100 hits the ground or other object, the edges or corners of the spectrometer 100 are likely to be the first to be struck. For this reason, it is preferable that the buffer member 2 be provided on the housing 1 so as to primarily cover the edges and corners of the housing 1 in both the X and Z directions.

Figure 2 is a perspective view illustrating the housing 1. Figure 2 shows the spectrometer 100 with the buffer member 2 removed. The housing 1 has a window 11 provided on the +X side of the housing 1 and a switch 12 provided on the +Z side of the housing 1.

Window 11 allows light from the light source inside housing 1 to exit housing 1, and also allows light irradiated from spectroscope 100 and reflected by an object to enter housing 1. Window 11 includes glass or resin that is translucent to the light emitted by the light source. Translucent here means having a transmittance of 60% or more for the light emitted by the light source.

Switch 12 is a switch that turns the power of spectrometer 100 on or off. Switch 12 turns the power on or off in response to a user operation of sliding switch 12 in the X direction. However, switch 12 is not limited to a slide type, and various types such as a push button type can be used.

When the buffer member 2 is attached to the housing 1, the buffer member 2 has openings at positions where at least the window 11 and switch 12 are located. Through these openings, the window 11 can allow light to enter or exit, and the switch 12 can accept user operation.

<Example of internal configuration of housing 1>
Fig. 3 is a cross-sectional view taken along line II-II of Fig. 2. Fig. 4 is a perspective view illustrating the configuration of the frame 209 in the spectrometer 100.

As shown in FIG. 3, the spectrometer 100 includes a light source 216, a concave diffraction grating 202, a movable member 13, and a light receiving unit 217. The spectrometer 100 also includes a frame 209, a processing unit 215a, and a battery 218. The spectrometer 100 houses these components inside the housing 1.

The light source 216 irradiates light onto the object to be spectroscopically analyzed. The light source 216 is, for example, an LED (Light Emitting Diode) or a halogen lamp. The light source 216 is selected to irradiate light in an appropriate wavelength band for the object to be spectroscopically analyzed, and is positioned outside the outer frame 210.

The concave diffraction grating 202 is a diffraction unit that diffracts light emitted from the light source 216 and reflected by an object. The concave diffraction grating 202 is an optical element in which evenly spaced thin lines are formed on the surface of a metal concave mirror. However, the material of the base material of the concave diffraction grating 202 is not limited to metal, and may be semiconductor, glass, resin, etc. However, when using a material such as semiconductor, glass, or resin, it is preferable to form a reflective mirror film on the surface of the thin lines.

The thin lines in the concave diffraction grating 202 may be formed directly on the substrate, or may be formed in a thin layer of resin or the like formed on the substrate. The concave diffraction grating 202 combines the light dispersion function of a diffraction grating with the light focusing function of a concave mirror. Light incident on the concave diffraction grating 202 is diffracted and dispersed by the concave diffraction grating 202, and is focused toward the movable member 13. Note that light dispersion refers to the phenomenon in which incident light is separated into individual wavelengths.

The movable member 13 is, for example, a MEMS mirror in which a mirror section is integrally formed on a substrate with an elastic beam section acting as a connecting section. The mirror section reflects incident light. The mirror section also oscillates in the direction of the arrow around oscillation axis E due to the elastic movement of the elastic beam section. Oscillating around oscillation axis E causes both ends of the mirror section of the movable member 13 in the X-axis direction to move back and forth in the movable direction 10 along the Z direction.

In the movable member 13, the mirror portion moves in a direction that includes curvature as it oscillates, but for example, both ends of the mirror portion in the X-axis direction move back and forth so as to move approximately linearly in the movable direction 10. The movable direction 10 includes the direction of movement in which the mirror portion moves approximately linearly.

In Figure 3, the movable member 13 is slightly tilted with respect to the X axis, but the movable member 13 may also be arranged substantially parallel to the X axis. In this embodiment, the movable direction 10 is the direction of movement in which both ends of the mirror section move substantially linearly when the movable member 13 is arranged tilted with respect to the X axis as shown in Figure 3.

In this embodiment, an oscillating movable member 13 is illustrated as an example, but this is not limited to this. For example, the movement of the movable member includes movements such as oscillation, vibration, rotation, linear movement, precession, and translation. The moving direction 10 includes the direction in which the movable member 13 moves in accordance with these movements.

The movable member 13 swings the mirror portion to change the reflection angle of the incident light. The movable member 13 guides the light diffracted by the concave diffraction grating 202 to the light receiving unit 217, for example, by reflecting the light toward the light receiving unit 217 using the mirror portion.

The light receiving unit 217 is a photoelectric conversion element such as a photodiode. The light receiving unit 217 outputs an electrical signal corresponding to the light intensity of the light diffracted by the concave diffraction grating 202.

The processing unit 215a performs calculations to obtain a spectrum based on the electrical signal input from the light receiving unit 217. The spectrum refers to the intensity distribution for each wavelength in the light reflected from the object. The spectroscope 100 can perform spectroscopic analysis based on the spectrum.

The processing unit 215a controls the movable member 13 to emit light of a predetermined wavelength toward the light receiving unit, and also controls the light irradiation by the light source 216, for example, the light intensity.

The battery 218 supplies power to drive components included in the spectrometer 100, such as the light source 216, the movable member 13, and the processing unit 215a. The battery 218 may be a battery or a secondary battery (storage battery). However, the spectrometer 100 may be powered by a commercial power source instead of or in addition to the battery 218.

As shown in Figure 4, frame 209 is a rectangular columnar member with a polygonal cross section and a hollow interior. The frame 209 may be made of resin, metal, ceramic, or other material, but is not particularly limited. Frame 209 has an entrance slit 201 and an exit slit 204. Frame 209 also has rectangular openings 209a to 209d at predetermined positions on the surface that makes up frame 209, which connect the outside of frame 209 with the hollow portion inside frame 209.

As shown in Figures 3 and 4, concave diffraction grating 202 is positioned at the position of opening 209b in frame 209 and is fixed to the outer surface of frame 209. Light incident through opening 209a passes through opening 209b and enters concave diffraction grating 202 positioned outside frame 209. The light incident on concave diffraction grating 202 is diffracted and dispersed by concave diffraction grating 202, and propagates while converging toward opening 209c.

The movable member 13 is positioned at the position of the opening 209c and is fixed to the outer surface of the frame 209. The light dispersed by the concave diffraction grating 202 passes through the opening 209c and enters the movable member 13, which is positioned outside the frame 209. The light that enters the mirror portion of the movable member 13 is reflected by the mirror portion and propagates toward the opening 209d.

The mirror portion of the movable member 13 oscillates around the oscillation axis E, but because the mirror portion oscillates within the area included in the opening 209c of the frame 209, the mirror portion does not come into contact with the frame 209 during oscillation.

The light ray L shown by the dashed line in Figure 3 represents a portion of the light ray that enters the frame 209, is diffracted by the concave diffraction grating 202, is reflected by the mirror portion of the movable member 13, and then reaches the light receiving portion 217.

The entrance slit 201 is a long, narrow, approximately rectangular opening that allows light incident from the tapered hole 203 in the outer frame 210 to enter the frame 209. The longitudinal direction of the opening in the entrance slit 201 corresponds to the X direction, and the lateral direction corresponds to a direction approximately perpendicular to the X direction.

The width of the entrance slit 201's opening in the short direction is, for example, several tens of microns to several hundreds of microns. The entrance slit 201 is formed by creating a rectangular through-hole in a metal substrate such as nickel. However, the material of the substrate on which the entrance slit 201 is formed is not limited to metal, and may be semiconductor, resin, or the like. Furthermore, the entrance slit 201 is not limited to a rectangular opening, and may be a circular opening such as a pinhole. Light entering the frame 209 through the entrance slit 201 is incident on the concave diffraction grating 202.

The exit slit 204 is a long, narrow, approximately rectangular opening that allows the dispersed light to exit the frame 209. The material and shape of the exit slit 204 can be the same as those of the entrance slit 201.

The exit slit 204 is positioned at a position where the light dispersed by the concave diffraction grating 202 is approximately focused. The focusing position of the light dispersed by the concave diffraction grating 202 shifts laterally depending on the wavelength. The spectrometer 100 changes the reflection angle of the light dispersed by the concave diffraction grating 202 at the mirror portion of the movable member 13, thereby changing the wavelength of the light passing through the exit slit 204, thereby selectively directing light of a specific wavelength from the dispersed light to the light receiving unit 217.

<Configuration example of movable member 13>
5 is a plan view illustrating the configuration of the movable member 13. The movable member 13 is a MEMS mirror with a beam supported at both ends. The movable member 13 deflects light incident on the mirror surface 14 provided on the mirror member 120 about the oscillation axis E by oscillating the mirror section 120 about the oscillation axis E parallel to the Y axis. Deflection refers to changing the direction of light.

The movable member 13 is an example of a device that includes a circuit pattern portion 123 and a held surface 13a. The circuit pattern portion 123 is provided on at least a portion of the held surface 13a.

As shown in Figure 5, in this embodiment, the movable member 13 has, in addition to the circuit pattern portion 123 and the held surface 13a, a mirror portion 120, drive beams 130a and 130b, and support portions 140a and 140b.

The mirror section 120 is a plate-like section that is formed in a roughly rectangular shape in a plan view and can oscillate around the oscillation axis E. The -X side end of the mirror section 120 is connected to the drive beam 130a, and the +X side end is connected to the drive beam 130b. A mirror surface 14 is formed on the -Y side surface of the mirror section 120. Note that while Figure 5 shows an example of a mirror surface 14 that is rectangular in a plan view, the shape of the mirror surface 14 is not limited to this and may be other shapes such as circular or elliptical.

Drive beams 130a and 130b are arranged to sandwich mirror section 120 from both sides in the Y direction and support mirror section 120 so that it can swing around oscillation axis E. Drive beams 130a and 130b swing mirror section 120, thereby changing the tilt of mirror surface 14 around oscillation axis E.

The drive beam 130a is a serpentine beam with a meander structure (folded structure) that includes multiple beam members 133. One end of the drive beam 130a is connected to the outer periphery of the mirror section 120, and the other end is connected to the inner periphery of the support section 140a. Each of the multiple beam members 133 included in the drive beam 130a is provided with a piezoelectric drive unit 131a to 131d. Each of the piezoelectric drive units 131a to 131d includes a piezoelectric element and deforms the drive beam 130a in response to the applied drive voltage.

The drive beam 130b is a serpentine beam with a meandering structure including multiple beam members 133. One end of the drive beam 130b is connected to the outer periphery of the mirror section 120, and the other end is connected to the inner periphery of the support section 140b. Each of the multiple beam members 133 included in the drive beam 130b is provided with a piezoelectric drive unit 132a to 132d. Each of the piezoelectric drive units 132a to 132d includes a piezoelectric element and deforms the drive beam 130b in response to the applied drive voltage.

The point where drive beam 130a connects to mirror section 120 and the point where drive beam 130b connects to mirror section 120 are positioned symmetrically with respect to the center of mirror surface 14. The point where drive beam 130a connects to support section 140a and the point where drive beam 130b connects to support section 140b are positioned symmetrically with respect to the center of mirror surface 14. However, they may also be positioned symmetrically with respect to a line on a plane parallel to mirror surface 14 that is perpendicular to oscillation axis E (i.e., a line parallel to the X-axis).

Support portion 140a supports drive beam 130a. Support portion 140b supports drive beam 130b.

Support portion 140b has an electrode connection portion 150 on its -Z side for inputting a drive voltage. Electrode connection portion 150 includes a positive electrode connection portion 150a for inputting a positive voltage, a GND connection portion 150b for connection to GND, and a negative electrode connection portion 150c for inputting a negative voltage.

The positive electrode connection portion 150a, the GND connection portion 150b, and the negative electrode connection portion 150c are multiple voltage input portions arranged along the X direction. The positive electrode connection portion 150a, the GND connection portion 150b, and the negative electrode connection portion 150c are arranged along the X direction, which is the longitudinal direction of each of the multiple beam members 133 that make up the actuation beam 130a or actuation beam 130b.

At least one circuit pattern portion 123 is provided on the area other than the mirror surface 14 on the -Z side surface of the mirror portion 120, and on the -Z side surfaces of each of the drive beams 130a and 130b.

Circuit pattern portion 123 is a portion where wiring is patterned to supply the drive voltage input from electrode connection portion 150 to piezoelectric drive units 131a to 131d and piezoelectric drive units 132a to 132d. When there are multiple circuit pattern portions 123, it is preferable to arrange them so that they surround mirror surface 14, as this helps to prevent weight imbalance.

Piezoelectric drive units 131a to 131d provided on drive beam 130a are electrically connected to electrode connection unit 150 provided on support unit 140b by circuit pattern unit 123. Circuit pattern unit 123 conducts the drive voltage input via electrode connection unit 150 to each of piezoelectric drive units 132a to 132d, and also conducts it over the surface of mirror unit 120 to each of piezoelectric drive units 131a to 131d. The drive voltage input from electrode connection unit 150 is applied to both drive beams 130a and 130b by circuit pattern unit 123.

The circuit pattern portion 123 includes a positive voltage conductor 123a that conducts a positive voltage, a GND conductor 123b that is connected to GND, and a negative voltage conductor 123c that conducts a negative voltage. The positive voltage conductor 123a is connected to the positive electrode connection portion 150a, the GND conductor 123b is connected to the GND connection portion 150b, and the negative voltage conductor 123c is connected to the negative electrode connection portion 150c.

The movable member 13 has light passage areas 16 and 17, which are open areas free of obstacles such as supports, on both sides of the mirror portion 120 along the X direction between the support portions 140a and 140b. The light passage areas 16 and 17 allow light reflected by the mirror surface 14 to pass through when the mirror portion 120 oscillates. The light passage areas 16 and 17 may be voids with no material present, or may contain a material such as glass that transmits light in at least a portion of the void. The light passage areas 16 and 17 may be tapered, with their width along the oscillation axis E increasing with increasing distance from the oscillation axis E.

The movable member 13 is formed by etching a single SOI (Silicon On Insulator) substrate, and then forming the mirror surface 14, drive beams 130a and 130b, electrode connection portion 150, etc. on the formed substrate, thereby forming each component integrally. Note that each component may be formed after or during the formation of the SOI substrate.

The movable member 13 includes multiple movable parts, such as the mirror portion 120 and drive beams 130a and 130b, which are integrally formed using a semiconductor process. However, the movable member 13 does not necessarily have to be integrally formed; it may also be formed by combining multiple parts.

The movable member 13 does not necessarily have to be formed using a semiconductor process, but producing the movable member 13 using a semiconductor process is preferable because it allows for the production of a small movable member 13, increases production efficiency, and improves formation accuracy.

From the perspective of including multiple movable parts, the movable member 13 can also be called a movable device. In this embodiment, the movable direction 10 of the movable member 13 particularly refers to the direction in which the mirror part 120, which oscillates around the oscillation axis E, moves.

<Configuration example of spacer member 300>
The configuration of the spacer member 300 of the spectrometer 100 will be described with reference to Figures 6 and 7. Figures 6 and 7 are diagrams illustrating the configuration of the spacer member 300. Figure 6 is a perspective view illustrating the frame 209 on which the spacer member 300 is provided, and Figure 7 is a side view illustrating the movable member 13 held by the frame 209 via the spacer member 300 and a part of the frame 209.

As shown in FIG. 6, the spacer member 300 is fixed to a holding surface 301, which is the surface on the -Z direction side of the frame 209, by bonding with an adhesive or the like. The frame 209 is an example of a holding member that holds the movable member 13 with the holding surface 301 facing the held surface 13a.

As shown in FIG. 7, when the movable member 13 is held by the frame 209, the spacer member 300 is provided between the holding surface 301 and the held surface 13a. The thickness t1 of the spacer member 300 is greater than the thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. Note that the spacer member 300 may also be fixed to the held surface 13a by adhering it with an adhesive or the like, rather than to the holding surface 301.

The spacer members 300 include a first spacer member 300a, a second spacer member 300b, a third spacer member 300c, and a fourth spacer member 300d. The first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d are fixed near the four corners of the rectangular opening 209b.

The first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d are examples of multiple spacer members. In this embodiment, the number of multiple spacer members is four, but this is not limited to four and any number may be used. The multiple spacer members may be arranged in any position between the holding surface 301 and the held surface 13a. However, from the perspective of stably holding the movable member 13, it is preferable that the multiple spacer members be arranged in positions that are point-symmetrical with respect to the center of the opening 209b.

When no distinction is made between the first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d, they will be collectively referred to as spacer members 300.

In this embodiment, the spacer member 300 is provided in an area of the movable member 13 other than the predetermined functional area. Here, the functional area refers to the area of the movable member 13 where the movable member 13 performs its predetermined function.

In this embodiment, the functional area includes the circuit pattern portion 123, the movable area of the movable member 13, and the path through which light passes when it is incident on the mirror surface 14 of the movable member 13. The movable area of the movable member 13 refers to the area through which the mirror surface 14 or the drive beams 130a and 130b, etc., pass as they move. The path through which light passes when it is incident on the mirror surface 14 is, for example, opening 209b.

There are no particular restrictions on the material of the spacer member 300, and the spacer member 300 can be made of materials including resin materials or metal materials. In this embodiment, the spacer member 300 is made of an elastic material such as rubber, and has elasticity.

<Functions and Effects of Spectrometer 100>
As described above, the spectrometer 100 according to this embodiment has a movable member 13 (device) including a held surface 13a and a circuit pattern portion 123 provided on at least a portion of the held surface 13a. The spectrometer 100 also has a frame 209 (holding member) that holds the movable member 13 with a holding surface 301 facing the held surface 13a, and a spacer member 300 provided between the holding surface 301 and the held surface 13a. The thickness t1 of the spacer member 300 is thicker than the thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. For example, the circuit pattern portion 123 includes wiring.

Here, in order to reduce production costs and production efficiency, the frame 209 is manufactured without processes such as polishing to smooth its surface, and therefore the surface of the frame 209 contains some unevenness. For this reason, when the frame 209 holds the movable member 13 so that the circuit pattern portion 123 included in the movable member 13 contacts the holding surface 301, protrusions included in the holding surface 301 may come into contact with the circuit pattern portion 123. As a result, the circuit pattern portion 123 may be scratched, or the wiring included in the circuit pattern portion 123 may be broken or short-circuited. Similarly, scratches, breaks, short-circuits, etc. may occur if foreign matter adheres to the holding surface 301. Scratches on the circuit pattern portion 123 or breaks or short-circuits in the wiring may prevent the movable member 13 from operating normally.

In this embodiment, the spectrometer 100 has a spacer member 300 between the holding surface 301 and the held surface 13a, the spacer member 300 having a thickness t1 that is thicker than the thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. This prevents the circuit pattern portion 123 from coming into contact with the holding surface 301 when the frame 209 holds the movable member 13 using the holding surface 301. As a result, in this embodiment, it is possible to prevent scratches on the circuit pattern portion 123 and breaks or short-circuits in the wiring included in the circuit pattern portion 123, and to prevent damage to the circuit pattern portion 123 included in the movable member 13.

In this embodiment, a configuration in which the circuit pattern portion 123 includes wiring has been illustrated, but the circuit pattern portion 123 may also include an electrode connection portion 150, an electric circuit, an electronic circuit, etc., in addition to or instead of wiring. The thickness t2 of the circuit pattern portion 123 corresponds to the thickest thickness of the components included in the circuit pattern portion 123.

In addition, in this embodiment, the spacer member 300 is provided in an area other than the predetermined functional area of the movable member 13. This functional area includes at least one of the movable area of the movable member 13 and the path through which light incident on the movable member 13 passes. With this configuration, the spectrometer 100 can prevent damage to the circuit pattern portion 123 included in the movable member 13 without impeding the function of the movable member 13.

Furthermore, in this embodiment, the spacer member 300 includes a first spacer member 300a, a second spacer member 300b, a third spacer member 300c, and a fourth spacer member 300d. This allows the frame 209 to stably hold the movable member 13 while reducing the contact area between the spacer member 300 and the holding surface 301 and the held surface 13a. Furthermore, since the probability of protrusions or foreign objects being caught between the holding surface 301 and the held surface 13a can be reduced, damage to the circuit pattern portion 123 can be more effectively prevented.

In addition, in this embodiment, the spacer member 300 is elastic. As a result, even if there is a protrusion or foreign object on the holding surface 301, the spacer member 300 can deform to absorb the unevenness caused by the protrusion or foreign object. As a result, the movable member 13 can be stably held and damage to the circuit pattern portion 123 can be effectively prevented.

[Other Preferred Embodiments]
Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the claims.

In this embodiment, the movable member 13 is used as an example of a device, but this is not limited to this and any device including a circuit pattern portion and a held surface may be used.

In the embodiment, a spectrometer 100 is illustrated, but the device-equipped equipment according to the embodiment is not limited to the spectrometer 100. For example, the device-equipped equipment may be a projector, a head-mounted display, a head-up display, or the like, including devices such as a DMD (Digital Mirror Device). Furthermore, the movable member 13 is not limited to a MEMS mirror, and may be any movable member.

All ordinal numbers, quantities, and other figures used in the description of the embodiments are provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to these figures. Furthermore, the interconnections between components are provided as examples to specifically explain the technology of the present invention, and do not limit the interconnections that realize the functions of the present invention.

1 Housing 2 Buffer member 10 Movable direction 11 Window 12 Switch 13 Movable member 13a Hold surface 14 Mirror surfaces 16, 17 Light passing area 100 Spectrometer (an example of a device-mounted equipment)
120 Mirror portion 123 Circuit pattern portions 130a, 130b Drive beams 131a to 131d Piezoelectric drive portions 132a to 132d Piezoelectric drive portion 133 Beam members 140a, 140b Support portion 150 Electrode connection portion 201 Entrance slit 202 Concave diffraction grating 203 Tapered hole 204 Exit slit 209 Frame (an example of a holding member)
209a, 209b, 209c, 209d Opening 210 Outer frame 215a Processing section 216 Light source 217 Light receiving section 218 Battery 300 Spacer member 300a First spacer member 300b Second spacer member 300c Third spacer member 300d Fourth spacer member 301 Holding surface E Swing axes t1, t2 Thickness

JP 2016-111133 A

Claims (5)

A device including a held surface and a circuit pattern portion provided on at least a part of the held surface;
a holding member that holds the device with a holding surface facing the held surface;
a spacer member provided between the holding surface and the held surface,
The thickness of the spacer member is greater than the thickness of the circuit pattern portion provided on the held surface,
When viewed from the normal direction of the holding surface
The holding member is provided with a rectangular opening,
The device-mounted equipment includes four spacer members arranged near the four corners of the opening and at positions that are point-symmetrical with respect to the center of the opening. The device-mounted equipment described in claim 1, wherein the circuit pattern portion includes wiring. The device-mounted equipment described in claim 1, wherein the spacer member is provided in an area other than a predetermined functional area of the device. the device has a movable member;
The device-mounted equipment according to claim 3 , wherein the functional area includes at least one of a movable area of the movable member and a path through which light incident on the device passes. The device-mounted equipment according to claim 1 , wherein the spacer member has elasticity.