JP7799528B2 - Melting molding device and method for manufacturing glass vibrator - Google Patents

Description

This specification relates to a glass vibrator melting and molding device and a glass vibrator manufacturing method.

Patent Document 1 discloses a Bird-bath Resonator Gyroscope (BRG) that uses a fused silica vibrator as a gyroscope capable of achieving high accuracy. Specifically, a workpiece (e.g., a quartz plate, fused silica plate, or glass plate) is placed in a fusion molding die with a hole formed in its surface, so as to fill the hole. While reducing the pressure inside the hole, the top surface of the workpiece is heated with a burner flame. By melting and deforming the workpiece so that it fills the hole, a hemispherical vibrator can be created.

US Patent Application Publication No. 2018/079129

The heat from the heated workpiece material (glass, silica, quartz) is released to the melting mold through the contact surface between the workpiece material and the melting mold surface. However, if the contact between the workpiece material and the melting mold is insufficient or uneven, fluctuations or unevenness in heat transfer can occur in the heat release path from the workpiece material to the melting mold. As a result, the hemispherical shape of the vibrator after melting and deformation can become asymmetric.

The melt molding apparatus disclosed in this specification comprises a melt molding die having a flat upper surface, a hole formed in part of the upper surface, and a mold vent hole formed in the upper surface surrounding the hole. The melt molding die is configured so that a plate-shaped workpiece can be placed on the upper surface to cover the hole. The melt molding apparatus comprises a heating means configured to heat the hole. The melt molding apparatus comprises a hole negative pressure generating means configured to generate negative pressure in the hole. The melt molding apparatus comprises a mold vent negative pressure generating means configured to generate negative pressure in the mold vent hole. The melt molding apparatus comprises a control unit configured to control the heating means, hole negative pressure generating means, and mold vent negative pressure generating means. The control unit is configured to generate negative pressure in the mold vent hole using the mold vent negative pressure generating means before heating of the hole by the heating means begins.

After the workpiece material has been sufficiently adsorbed and fixed to the top surface of the melt forming mold by the mold vent negative pressure generating means, the workpiece material can be heated by the heating means. Because heat can be input while the workpiece material and the top surface of the melt forming mold are in uniform and sufficient contact, fluctuations and non-uniformity in heat transfer can be suppressed in the heat exhaust path from the workpiece material to the melt forming mold. Because the temperature distribution can be made highly symmetrical with respect to the hole, it is possible to create a vibrator with high symmetry.

The melt-forming device disclosed in this specification includes a melt-forming mold having a flat upper surface and a hole formed in part of the upper surface. The melt-forming mold is configured so that a plate-shaped workpiece can be placed on the upper surface so that it covers the hole. The melt-forming device includes a plate having a plate vent hole formed in its surface and in contact with the lower surface of the melt-forming mold. The melt-forming device includes a heating means configured to heat the hole. The melt-forming device includes a hole negative pressure generating means configured to generate negative pressure in the hole. The melt-forming device includes a plate vent negative pressure generating means configured to generate negative pressure in the plate vent. The melt-forming device includes a control unit configured to control the heating means, hole negative pressure generating means, and plate vent negative pressure generating means. The control unit is configured to generate negative pressure in the plate vent by the plate vent negative pressure generating means before heating of the hole by the heating means begins.

After the melt forming mold is sufficiently adsorbed and fixed to the surface of the plate by the plate vent negative pressure generating means, the workpiece can be heated by the heating means. Because heat can be input while the melt forming mold and plate surface are in uniform and sufficient contact, fluctuations and non-uniformity in heat transfer can be suppressed in the heat exhaust path from the workpiece material to the plate via the melt forming mold. Because the temperature distribution can be made highly symmetrical with respect to the hole, it is possible to create a vibrator with high symmetry.

The control unit may be configured to generate negative pressure in the hole using the hole negative pressure generating means after heating of the hole by the heating means has begun. Details of the effects will be explained in the examples.

The melt molding device may further include a thermometer configured to measure the temperature of the melt molding mold. The control unit may be configured to detect when the temperature measured by the thermometer has risen to a predetermined temperature and to generate negative pressure in the hole using the hole negative pressure generating means. Details of the effects will be explained in the examples.

The hole may have a cylindrical hollow shape centered on an axis perpendicular to the top surface and may have a hole bottom. The hole may have a support extending upward from the hole bottom centered on the axis. The thermometer may be configured to be able to measure the temperature of the support. Details of the effects will be explained in the examples.

The melt-molding device may further include a heat sink configured to adjust the temperature of the melt-molding mold. Details of the effects will be explained in the examples.

The heating means may be a device that generates a flame using fuel gas and oxygen gas. The heating means may also be equipped with a premixing chamber that premixes the fuel gas and oxygen gas. Details of the effects will be explained in the examples.

One embodiment of the molding method disclosed herein is a method for manufacturing a glass vibrator using a fusion molding die having a flat upper surface, a hole formed in part of the upper surface, and a mold vent formed in the upper surface surrounding the hole. The manufacturing method includes a placement step of placing a plate-shaped workpiece material on the upper surface of the fusion molding die so that it covers the hole. The manufacturing method also includes a mold vent negative pressure generation step of generating negative pressure in the mold vent. After the mold vent negative pressure generation step, the manufacturing method also includes a heating step of heating the upper surface of the workpiece material with a heating means. The manufacturing method also includes a hole negative pressure generation step of generating negative pressure in the hole. Details of the effects will be explained in the examples.

One embodiment of the molding method disclosed herein is a method for manufacturing a glass vibrator using a fusion molding die having a flat upper surface, a hole formed in a portion of the upper surface, and a molding die vent formed in the upper surface so as to surround the hole. The manufacturing method includes a step of placing the fusion molding die on the upper surface of a plate having a plate vent formed in its surface. The manufacturing method also includes a plate vent negative pressure generating step of generating negative pressure in the plate vent. The manufacturing method also includes a placement step of placing a plate-shaped workpiece material on the upper surface of the fusion molding die so as to cover the hole. The manufacturing method also includes a heating step of heating the upper surface of the workpiece material with a heating means. The manufacturing method also includes a hole negative pressure generating step of generating negative pressure in the hole. Details of the effects will be explained in the examples.

The hole negative pressure generating process may generate negative pressure in the hole after heating in the heating process has begun. Details of the effect will be explained in the examples.

The method for manufacturing a glass vibrator may further include a temperature measurement step in which a thermometer is used to measure the temperature of the fusion mold corresponding to the temperature of the material to be processed. The hole negative pressure generation step may generate negative pressure in the hole after it is detected that the temperature of the fusion mold has risen to a predetermined temperature. Details of the effects will be explained in the examples.

1 is a schematic cross-sectional view of a melt-molding apparatus 1 of Example 1. FIG. 1 is a top view of a melt-molding apparatus 1 according to a first embodiment. FIG. FIG. FIG. 2 is a flow chart illustrating a manufacturing process of the glass vibrator according to the first embodiment. 3 is a schematic diagram showing a cross section of a quartz plate 30 after melting and deformation. FIG. 1A and 1B are a top view and a cross-sectional view of a BRG 160. FIG. 10 is a cross-sectional view of a melt-molding apparatus 201 according to a second embodiment. FIG. 10 is a top view of a melt-molding apparatus 201 according to a second embodiment. FIG. 10 is a flow chart illustrating a manufacturing process of the glass vibrator according to the second embodiment. FIG. 10 is a top view showing a suction groove 20t according to a modified example.

Figure 1 shows a schematic cross-sectional view of the melt-forming apparatus 1. Figure 2 shows a top view of the melt-forming apparatus 1. Figure 1 corresponds to the cross-sectional view taken along line I-I in Figure 2. Note that Figure 2 omits the illustration of the burner 50, radiation thermometer 60, and motorized stage 45. The melt-forming apparatus 1 mainly comprises a plate 10, a molding die 20, a quartz plate 30, a heat sink 40, a motorized stage 45, a burner 50, a radiation thermometer 60, a control unit 70, a hole negative pressure generating means 81, and a molding die vent negative pressure generating means 82.

Figure 3 shows a perspective view of the molding die 20. The molding die 20 is a die for melting and deforming the quartz plate 30 to form a hemispherical vibrator. The material of the molding die 20 is graphite. In this embodiment, the molding die 20 is disk-shaped with a central axis CA. The molding die 20 has a lower surface 20r, an upper surface 20s, a hole 20h, a support 20p, a through hole 20e, and an air vent 20v. The lower surface 20r and the upper surface 20s are flat surfaces perpendicular to the central axis CA. The upper surface 20s is parallel to the lower surface 20r. A hole 20h is formed in a portion of the upper surface 20s. The hole 20h is a deformation space for melting and deforming the quartz plate 30. In this embodiment, the hole 20h has a cylindrical hollow shape centered on the central axis CA. The hole 20h has a bottom surface 20b. A support pillar 20p is disposed in the center of the hole 20h, extending vertically upward from the bottom surface 20b. The support pillar 20p is a cylinder with a central axis CA. The bottom surface 20b has multiple through holes 20e formed therein, penetrating to the lower surface 20r. The through holes 20e communicate with the first communication hole 10c1.

The ventilation holes 20v are formed in the upper surface 20s so as to surround the hole 20h. The ventilation holes 20v penetrate to the lower surface 20r. Eight ventilation holes 20v are arranged rotationally symmetrically about the central axis CA. The ventilation holes 20v are an example of mold ventilation holes.

The plate 10 is a stainless steel base on which the forming mold 20 is placed. The plate 10 has the function of cooling the forming mold 20. A first communication hole 10c1 and a second communication hole 10c2 are formed on the surface 10s of the plate 10. The first communication hole 10c1 is located at a position corresponding to the through hole 20e and is connected to the through hole 20e. The first communication hole 10c1 is connected to the hole negative pressure generating means 81 via the first communication path 10p1. The hole negative pressure generating means 81 is capable of generating negative pressure in the hole 20h. The second communication hole 10c2 is located at a position corresponding to the vent hole 20v and is connected to the vent hole 20v. The second communication hole 10c2 is connected to the forming mold vent hole negative pressure generating means 82 via the second communication path 10p2. The forming mold vent hole negative pressure generating means 82 is capable of generating negative pressure in the vent hole 20v.

The hole negative pressure generating means 81 and the mold vent negative pressure generating means 82 can operate independently of each other and can operate continuously while the quartz plate 30 is being processed. The hole negative pressure generating means 81 and the mold vent negative pressure generating means 82 may be, for example, a vacuum pump.

The heat sink 40 is in contact with the underside 10r of the plate 10. A circulation pipe 41 is arranged inside the heat sink 40. The circulation pipe 41 is connected to a chiller system 42. A refrigerant maintained at a constant temperature by the chiller system 42 circulates through the circulation pipe 41. This allows the heat sink 40 to maintain a constant temperature during processing. Fluctuations in the heat dissipation performance from the mold 20 to the plate 10 during processing of the quartz plate 30 can be suppressed. In other words, the heat sink 40 is configured to be able to adjust the temperature of the mold 20 via the plate 10. As a result, it is possible to improve the processing reproducibility of the vibrator.

The heat sink 40, plate 10, and molding die 20 are placed on the motorized stage 45. The motorized stage 45 is configured to be movable in the x and y directions (horizontal direction).

A quartz plate 30 is placed on the upper surface 20s of the mold 20 so as to cover the hole 20h. The quartz plate 30 is the material to be processed to form the vibrator. The thickness of the quartz plate 30 is, for example, 100 μm or less. In this embodiment, the quartz plate 30 is circular, but it may also be square, regular hexagonal, or regular octagonal.

The burner 50 is a means for heating the quartz plate 30 with a flame. The burner 50 is fixed to a movable mechanism 53 that moves in the vertical direction (±z direction). This allows the burner 50 to move up and down along the central axis CA. The burner 50 is equipped with a premixing chamber 50c. Fuel gas G1 and oxygen gas G2 are supplied to the premixing chamber 50c from a gas supply facility 51 via a gas flow regulator 52. The premixing chamber 50c allows the fuel gas G1 and oxygen gas G2 to be mixed in advance before burning, making it possible to generate a stable flame.

By focusing the radiation thermometer 60 on the support 20p, the radiation thermometer 60 can measure the temperature of the support 20p without contact. The temperature of the support 20p indicates a temperature that corresponds to the temperature of the quartz plate 30 being processed. Because it is extremely difficult to focus the measurement point of the radiation thermometer 60 on the transparent quartz plate 30, it is possible to indirectly measure the temperature of the quartz plate 30 by measuring the temperature of the support 20p.

The control unit 70 is connected to the hole negative pressure generating means 81 to the plate vent negative pressure generating means 83, the movable mechanism 53, the gas flow regulator 52, and the radiation thermometer 60, and acquires various information from these devices and controls them. The control unit 70 may be, for example, a PC.

(Glass vibrator manufacturing process)
The manufacturing process of the glass vibrator will be described using the flow diagram of Figure 4. In step S10, the mold 20 is placed on the surface 10s of the plate 10. In addition, a refrigerant is constantly circulated from the chiller equipment 42 through the circulation pipe 41 to maintain the heat sink 40 at a constant temperature.

In step S30, the quartz plate 30 is placed on the upper surface 20s of the mold 20. At this time, it is positioned so that the central axis CA and the center of the quartz plate 30 coincide. In step S40, the mold vent negative pressure generating means 82 generates negative pressure in the vent hole 20v via the second communication hole 10c2. The quartz plate 30 can be fixed by suction to the upper surface 20s. This results in the state shown in Figure 1.

In step S50, the control unit 70 begins measuring the temperature of the support 20p using the radiation thermometer 60. In step S60, the control unit 70 ignites the burner 50. Specifically, the flow rates of the fuel gas G1 and oxygen gas G2 provided from the gas supply equipment 51 are controlled by the gas flow regulator 52. The control unit 70 then waits until the flame stabilizes. In step S70, the control unit 70 controls the movable mechanism 53 to lower the burner 50 to a predetermined position and apply the flame to the quartz plate 30. This starts heating the quartz plate 30 with the flame.

In step S80, the control unit 70 determines whether the temperature of the support 20p has risen to a predetermined temperature. In this embodiment, the predetermined temperature is the temperature of the support 20p when the quartz plate 30 above the hole 20h reaches its softening temperature. This makes it possible to detect that the quartz plate 30 has been heated to its softening temperature. If it detects that the temperature of the support 20p has risen to the predetermined temperature (S80: YES), the process proceeds to step S90.

In step S90, the control unit 70 operates the hole negative pressure generating means 81. This generates negative pressure in the hole 20h via the first communication hole 10c1 and the through-hole 20e. In step S100, the quartz plate 30 is melted and deformed so as to enter the hole 20h due to the heat input from the flame and the distributed load caused by the pressure difference between the negative pressure generated in the hole 20h and atmospheric pressure. This allows the quartz plate 30 to be melted and deformed into the desired shape, as shown in Figure 5. Note that Figure 5 only shows the plate 10, forming die 20, and burner 50.

In step S110, the control unit 70 raises the burner 50 and extinguishes it in response to detecting the end point of processing. The end point of processing may be detected in various ways. For example, it may be detected that the temperature of the support 20p has risen to a temperature indicating the end point of processing. Alternatively, it may be detected that a predetermined time has passed. In step S120, the control unit 70 stops the hole negative pressure generating means 81 and the forming mold vent negative pressure generating means 82, in that order. In step S130, the fused and formed quartz plate 30 is removed from the forming mold 20. The unformed area UR (see Figure 5) on the periphery of the quartz plate 30 is removed by a method such as CMP, thereby completing the glass vibrator.

In step S140, the Bird-bath Resonator Gyroscope (BRG) is assembled. Figure 6(A) shows a top view of the BRG 160. Figure 6(B) shows a cross-sectional view taken along line B-B in Figure 6(A). The BRG 160 comprises a vibrator 131, a glass substrate 161, and a silicon electrode 162. The vibrator 131 comprises an anchor 131a and a rim 131r. The anchor 131a is fixed to a fixed portion 161f of the glass substrate 161. The silicon electrode 162 is arranged to surround the periphery of the rim 131r.

The operation of the BRG 160 will now be explained. A voltage of the desired frequency is applied between the vibrator 131 and the silicon electrode 162, causing the vibrator 131 to resonate. When rotation around the z-axis acts on the BRG 160 in this state, the vibration mode changes. By measuring the electrostatic capacitance between the vibrator 131 and the silicon electrode 162 that accompanies this change, the angular velocity can be detected with high precision.

(effect)
In the technology described herein, when it is determined that the temperature of the support 20p has risen to a predetermined temperature (softening temperature) (step S80), the hole negative pressure generating means 81 generates negative pressure in the hole 20h (step S90). This allows a differential pressure distribution load to be applied to the quartz plate 30 after the burner 50 has uniformly heated the entire quartz plate 30. Therefore, melting and deformation can be initiated simultaneously at any location on the quartz plate 30 above the hole 20h. This allows for highly reproducible processing of a vibrator having a highly symmetrical shape with respect to the central axis CA. The vibrator manufactured using this technology has a high Q value with minimal vibration loss. Therefore, using this high-Q vibrator makes it possible to fabricate a highly accurate gyro sensor.

By generating negative pressure in the vent hole 20v using the mold vent negative pressure generator 82, the quartz plate 30 can be adsorbed and fixed to the upper surface 20s of the mold 20 (step S40). This reduces the minute air gap (air layer) between the quartz plate 30 and the upper surface 20s, improving heat transfer from the quartz plate 30 to the mold 20 and reducing location dependency. The mold vent negative pressure generator 82 operates continuously during the flame process (steps S70-S100). This reduces fluctuations and non-uniformities in heat transfer along the exhaust heat path from the quartz plate 30 through the mold 20 to the plate 10 during this flame process. Because the temperature distribution of the quartz plate 30 can be made highly symmetrical with respect to the central axis CA, it is possible to produce a vibrator with a highly symmetrical shape.

Figure 7 shows a cross-sectional view of the melt-molding apparatus 201 of Example 2. Figure 8 shows a top view of the melt-molding apparatus 201. Figure 7 corresponds to the cross-sectional view taken along line VII-VII in Figure 8. Components that are common to the molding apparatus 1 of Example 1 are given the same reference numerals, and descriptions thereof will be omitted. Furthermore, components unique to Example 2 are distinguished by being given reference numerals in the 200s.

The surface 10s of the plate 10 is formed with a first communication hole 10c1, an air vent 210v, and a suction groove 210t. As shown by the dotted line in Figure 8, a double-ring-shaped suction groove 210t is formed on the surface 10s of the plate 10. The suction groove 210t is connected to the air vent 210v. The air vent 210v is connected to the plate air vent negative pressure generating means 283 via the third communication path 210p3. The plate air vent negative pressure generating means 283 is capable of generating negative pressure in the air vent 210v and the suction groove 210t. The air vent 210v is an example of a plate air vent.

Furthermore, compared to the melt molding apparatus 1 of Example 1, the melt molding apparatus 201 of Example 2 does not include the molding die vent negative pressure generating means 82, the second communication path 10p2, the second communication hole 10c2, or the vent hole 20v.

(Glass vibrator manufacturing process)
The manufacturing process of the glass vibrator according to Example 2 will be described using the flow diagram of Figure 9. Note that steps common to the flow diagram of Example 1 (Figure 4) are given the same reference numerals and will not be described again. Steps unique to Example 2 are distinguished by adding the letter "a" to the end of the step number.

In step S20a, the plate vent negative pressure generating means 283 generates negative pressure in the suction grooves 210t through the vent holes 210v of the plate 10. This allows the casting mold 20 to be fixed by suction to the plate 10. Also, step S40 in Example 1 is not performed. In step S120a, the control unit 70 stops the hole negative pressure generating means 81 and the plate vent negative pressure generating means 283 in that order.

(effect)
By generating negative pressure in the suction grooves 210t using the plate vent negative pressure generating means 283, the forming die 20 can be suction-fixed to the plate 10 (step S20a). Since the minute voids (air layers) existing between the forming die 20 and the surface 10s of the plate 10 can be reduced, heat transfer from the forming die 20 to the plate 10 can be improved and location dependency can be reduced. Since the temperature distribution of the forming die 20 can be made to maintain high symmetry with respect to the central axis CA, it becomes possible to form a vibrator having a highly symmetrical shape.

Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and variations of the specific examples given above.

(Modification)
The shape, arrangement, and number of the vent holes 20v formed in the upper surface 20s of the forming mold 20 are not particularly limited and may be variously configured. As shown in the modified example of Fig. 10, the upper surface 20s may be formed with a ring-shaped suction groove 20t surrounding the outer periphery of the hole 20h. The suction groove 20t is in communication with the vent holes 20v. By generating a negative pressure in the suction groove 20t using the forming mold vent negative pressure generating means 82, the quartz plate 30 can be adsorbed and fixed to the upper surface 20s (step S40).

The shape and number of the ventilation holes 210v and suction grooves 210t formed on the surface 10s of the plate 10 may vary. For example, the suction grooves 210t may not be provided.

The melt molding device 1 may have a variety of configurations. For example, it may not be equipped with a radiation thermometer 60. In this case, the hole negative pressure generating means 81 may be operated to generate negative pressure in the hole 20h when a predetermined time has elapsed since the start of heating.

The melt-forming apparatus 1 of Example 1 and the melt-forming apparatus 201 of Example 2 may be combined. This allows the quartz plate 30 to be fixed by suction to the upper surface 20s of the forming mold 20, and the forming mold 20 to be fixed by suction to the plate 10.

The flows in Figures 4 and 9 are examples, and the order of the steps may vary. For example, the step (S90) of generating negative pressure in the hole 20h may be performed at any position between steps S30 and S80 in Figures 4 and 9.

Temperature measurement may be either non-contact or contact. There are no restrictions on the placement or measurement position of the radiation thermometer 60. The measurement location of the radiation thermometer 60 is not limited to the support 20p, and various locations may be measured.

The material of the vibrator is not limited to the quartz plate 30. It can also be borosilicate glass, which is quartz mixed with sodium or other glass materials.

The forming mold 20 may have multiple holes 20h. The motorized stage 45 is driven in the x and y directions to position it, and the burner 50 is moved in the z direction by the movable mechanism 53, just as in the case of a single hole, to melt and form the quartz plate 30.

Furthermore, the technical elements described in this specification or drawings may exhibit technical utility either alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Furthermore, the technologies illustrated in this specification or drawings may achieve multiple objectives simultaneously, and achieving any one of those objectives is itself technically useful.

1: Melt molding apparatus 10: Plate 20: Mold 20h: Hole 20p: Support 30: Quartz plate 50: Burner 60: Radiation thermometer 70: Control unit 81: Hole negative pressure generating means 82: Mold vent hole negative pressure generating means 283: Plate vent hole negative pressure generating means

Claims (11)

a melt-forming mold having a flat upper surface, a hole formed in a part of the upper surface, and a mold vent formed in the upper surface so as to surround the hole, the melt-forming mold being configured so that a plate-shaped workpiece can be placed on the upper surface so as to cover the hole;
a heating means configured to be able to heat the hole;
a hole negative pressure generating means configured to generate a negative pressure in the hole;
a molding die vent negative pressure generating means configured to generate negative pressure in the molding die vent;
a control unit configured to be able to control the heating means, the hole negative pressure generating means, and the molding mold vent negative pressure generating means;
A melt molding apparatus comprising:
the control unit is configured to generate negative pressure in the molding mold air hole by the molding mold air hole negative pressure generating means before the heating means starts to heat the hole portion. a melt-forming mold having a flat upper surface and a hole formed in a part of the upper surface, the melt-forming mold being configured so that a plate-shaped workpiece can be placed on the upper surface so as to cover the hole;
a plate having plate vent holes formed on its surface and in contact with the lower surface of the melt-molding mold;
a heating means configured to be able to heat the hole;
a hole negative pressure generating means configured to generate a negative pressure in the hole;
a plate vent hole negative pressure generating means configured to generate a negative pressure in the plate vent hole;
a control unit configured to be able to control the heating means, the hole negative pressure generating means, and the plate vent negative pressure generating means;
A melt molding apparatus comprising:
The control unit is configured to generate negative pressure in the plate air hole using the plate air hole negative pressure generating means before the heating means starts to heat the hole portion. The melt molding device according to claim 1 or 2, wherein the control unit is configured to generate negative pressure in the hole using the hole negative pressure generating means after heating of the hole by the heating means begins. the melt-molding device further includes a thermometer configured to be able to measure the temperature of the melt-molding mold,
The melt molding device according to any one of claims 1 to 3, wherein the control unit is configured to detect that the temperature measured by the thermometer has risen to a predetermined temperature and to generate negative pressure in the hole using the hole negative pressure generating means. the hole portion has a cylindrical hollowed-out shape centered on an axis perpendicular to the top surface and has a hole bottom surface,
The hole portion includes a support pillar extending upward from the bottom surface of the hole around the axis,
The melt-molding device according to claim 4 , wherein the thermometer is configured to be able to measure the temperature of the support. The melt-forming device according to any one of claims 1 to 5, further comprising a heat sink configured to adjust the temperature of the melt-forming mold. the heating means is a device that generates a flame using fuel gas and oxygen gas,
7. The melt-molding apparatus according to claim 1, wherein the heating means includes a premixing chamber for premixing the fuel gas and the oxygen gas. A method for manufacturing a glass vibrator using a fusion molding die having a flat upper surface, a hole formed in a part of the upper surface, and a molding die vent formed in the upper surface so as to surround the periphery of the hole,
a placement step of placing a plate-shaped workpiece material on the upper surface of the melt-forming mold so as to cover the hole;
a molding mold vent negative pressure generating step of generating a negative pressure in the molding mold vent;
a heating step of heating the upper surface of the workpiece with a heating means after the forming mold vent hole negative pressure generating step;
a hole negative pressure generating step of generating a negative pressure in the hole;
A method for manufacturing a glass vibrator, comprising: A method for manufacturing a glass vibrator using a fusion molding die having a flat upper surface, a hole formed in a part of the upper surface, and a molding die vent formed in the upper surface so as to surround the periphery of the hole,
a step of placing the melt-molding mold on an upper surface of a plate having plate vent holes formed on the surface;
a plate vent hole negative pressure generating step of generating a negative pressure in the plate vent hole;
a placement step of placing a plate-shaped workpiece material on the upper surface of the melt-forming mold so as to cover the hole;
a heating step of heating the upper surface of the workpiece with a heating means;
a hole negative pressure generating step of generating a negative pressure in the hole;
A method for manufacturing a glass vibrator, comprising: The method for manufacturing a glass vibrator according to claim 8 or 9, wherein the hole negative pressure generating step generates negative pressure in the hole after heating in the heating step begins. The method for manufacturing a glass vibrator further includes a temperature measurement step of measuring a temperature of the melt forming mold corresponding to a temperature of the workpiece material using a thermometer,
The manufacturing method of a glass vibrator according to at least one of claims 8 to 10, wherein the hole negative pressure generating step generates a negative pressure in the hole after it is detected that the temperature of the molten molding mold has risen to a predetermined temperature.