JP7824044B2 - Dispersion composition, its manufacturing method, manufacturing method of fluororesin film, and manufacturing method of metal-clad laminate - Google Patents
Dispersion composition, its manufacturing method, manufacturing method of fluororesin film, and manufacturing method of metal-clad laminateInfo
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Description
本発明は、分散組成物、その製造方法、フッ素系樹脂フィルムの製造方法、及び、金属張積層板の製造方法に関する。 The present invention relates to a dispersion composition, a method for producing the same, a method for producing a fluororesin film, and a method for producing a metal-clad laminate.
近年、電子機器の小型化、軽量化、省スペース化の進展に伴い、薄く軽量で、可撓性を有し、屈曲を繰り返しても優れた耐久性を持つフレキシブルプリント配線板(FPC;Flexible Printed Circuits)の需要が増大している。FPCは、限られたスペースでも立体的かつ高密度の実装が可能であるため、例えば、HDD、DVD、スマートフォン等の電子機器の可動部分の配線や、ケーブル、コネクター等の部品にその用途が拡大しつつある。 In recent years, with the advancement of smaller, lighter, and more space-saving electronic devices, there has been growing demand for flexible printed circuits (FPCs), which are thin, lightweight, flexible, and highly durable even when repeatedly bent. Because FPCs allow for three-dimensional, high-density mounting even in limited spaces, their applications are expanding to include wiring for moving parts in electronic devices such as HDDs, DVDs, and smartphones, as well as components such as cables and connectors.
FPCは、材料となる銅張積層板(CCL)などの金属張積層板の金属層をエッチングして配線加工することによって製造される。現在は、金属張積層板として、金属箔と接する絶縁樹脂層に耐熱性の高いポリイミドを用いたものが汎用されている。 FPCs are manufactured by etching and wiring the metal layer of metal-clad laminates such as copper-clad laminates (CCL). Currently, metal-clad laminates that use a highly heat-resistant polyimide as the insulating resin layer in contact with the metal foil are commonly used.
ところで、近年の通信機器の高速化に伴い、5G通信、更には6G通信の開発が進んでおり、回路基板材料についても、高速通信規格に対応可能なミリ波レーダー用基板、アンテナ基板などに向けて材料の検討が行われている。そのような材料の中で、フッ素系樹脂は、誘電正接が低いことから注目を浴びている。しかし、フッ素系樹脂は熱膨張係数が大きいため、低誘電正接という特性を活かしながら回路基板用の絶縁材料としての要求特性である低熱膨張化を図るため、無機フィラーを併用する検討が行われている。例えば、フッ素系樹脂フィルムを作製するために、フッ素系樹脂のパウダーと無機フィラーを水もしくは有機溶剤に分散した分散液を用いる方法が提案されている(特許文献1,2)。しかしながら、フッ素系樹脂のパウダーと無機フィラーを含む分散液は粘度が低いため、厚膜塗工が困難であり、塗工時に厚みムラが発生し易くなることや、長期間保管後には再分散が必要になるなどの問題があった。 With the recent increase in communication speeds, development of 5G and even 6G communications is progressing, and circuit board materials are being investigated for millimeter-wave radar substrates and antenna substrates that are compatible with high-speed communication standards. Among these materials, fluororesins have attracted attention due to their low dielectric dissipation factor. However, because fluororesins have a high thermal expansion coefficient, their use in combination with inorganic fillers has been considered to achieve the low thermal expansion required for insulating materials for circuit boards while taking advantage of their low dielectric dissipation factor. For example, a method has been proposed for producing fluororesin films using a dispersion in which fluororesin powder and inorganic filler are dispersed in water or an organic solvent (Patent Documents 1 and 2). However, the low viscosity of dispersions containing fluororesin powder and inorganic filler makes thick film coating difficult, leading to problems such as uneven thickness during coating and the need for redispersion after long-term storage.
本発明は、凝集粒子が少なく、粉粒状フッ素系樹脂と無機フィラーとが均一に分散された分散組成物を提供することを目的とする。 The object of the present invention is to provide a dispersion composition in which the particulate fluororesin and inorganic filler are uniformly dispersed with minimal agglomeration.
本発明者らは、鋭意検討した結果、粉粒状フッ素系樹脂と無機フィラーと分散剤を、少量の極性溶剤を用いて高固形分濃度で固練りすることによって、凝集粒子が少なく、固形分の分散状態が均一な分散組成物が得られることを見出し、本発明を完成するに至った。 After extensive research, the inventors discovered that by kneading a powdered fluororesin, inorganic filler, and dispersant at a high solids concentration using a small amount of polar solvent, it is possible to obtain a dispersion composition with few agglomerated particles and a uniformly dispersed solid content, leading to the completion of the present invention.
すなわち、本発明の分散組成物は、下記の成分(A)~(C);
(A)粉粒状フッ素系樹脂、
(B)無機フィラー、
(C)分散剤、
を含有し、E型粘度計を用い、25℃で測定した粘度が1000cP以上である。
ただし、粘度測定において設定する回転数は、設定された回転数で得られた粘度が設定した回転数のトルクの10%~90%範囲内の粘度範囲であるようにし、固体状となり粘度測定ができないものも含むものとする(以下、同様である)。
That is, the dispersion composition of the present invention comprises the following components (A) to (C):
(A) a powdery fluorine-based resin;
(B) an inorganic filler;
(C) a dispersant,
and has a viscosity of 1000 cP or more measured at 25°C using an E-type viscometer.
However, the rotation speed set in viscosity measurement should be such that the viscosity obtained at the set rotation speed is within a viscosity range of 10% to 90% of the torque of the set rotation speed, and this includes materials that become solid and whose viscosity cannot be measured (the same applies hereinafter).
本発明の分散組成物は、全重量に対して、成分(A)及び成分(B)の合計割合が75重量%以上であってもよく、固体状であってもよい。この場合、本発明の分散組成物は、下記の組成;
成分(A)と成分(B)の合計割合…全重量の75~99重量%の範囲内、
成分(A)と成分(B)の体積比率(A:B)…15:85~95:5の範囲内、
成分(C)の割合…全重量の1~15重量%の範囲内、
成分(D)としての極性溶剤の割合…0~24重量%、
を有するものであってよい。
The dispersion composition of the present invention may have a total weight ratio of component (A) and component (B) of 75% by weight or more, and may be solid. In this case, the dispersion composition of the present invention has the following composition:
The total ratio of component (A) and component (B) is within the range of 75 to 99% by weight of the total weight.
The volume ratio of component (A) to component (B) (A:B) is within the range of 15:85 to 95:5.
Proportion of component (C): in the range of 1 to 15% by weight of the total weight,
Proportion of polar solvent as component (D): 0 to 24% by weight
It may have the following structure.
また、本発明の分散組成物は、下記の組成;
成分(A)と成分(B)の合計…全重量の60~75重量%、
成分(A)と成分(B)の体積比率(A:B)…15:85~95:5の範囲内、
成分(C)の割合…全重量の0.8~13.2重量%の範囲内、
成分(D)としての極性溶剤の割合…全重量の11.8~39.2重量%、
を有するとともに、E型粘度計を用い、25℃で測定した粘度が1000cP~50000cPの範囲内であってもよい。
The dispersion composition of the present invention has the following composition:
The total of component (A) and component (B) is 60 to 75% by weight of the total weight.
The volume ratio of component (A) to component (B) (A:B) is within the range of 15:85 to 95:5.
Proportion of component (C): Within the range of 0.8 to 13.2% by weight of the total weight;
Proportion of polar solvent as component (D): 11.8 to 39.2% by weight of the total weight,
and the viscosity measured at 25° C. using an E-type viscometer may be in the range of 1,000 cP to 50,000 cP.
本発明の分散組成物は、成分(B)の無機フィラーのモース硬度が2以上であってもよい。 In the dispersion composition of the present invention, the inorganic filler of component (B) may have a Mohs hardness of 2 or more.
本発明の分散組成物の製造方法は、粉粒状フッ素系樹脂と無機フィラーを含む複数の材料を混練する分散組成物の製造方法であって、
前記粉粒状フッ素系樹脂と、前記無機フィラーと、分散剤と、極性溶剤と、を混合する工程と、
混合物の全重量に対して前記粉粒状フッ素系樹脂及び前記無機フィラーの合計割合が75重量%以上となる状態で固練りすることによって固体状の第1の分散組成物を得る工程と、
を含むことを特徴とする。
The method for producing a dispersion composition of the present invention is a method for producing a dispersion composition by kneading a plurality of materials including a powdery fluororesin and an inorganic filler,
a step of mixing the powdery fluorine-based resin, the inorganic filler, a dispersant, and a polar solvent;
a step of obtaining a solid first dispersion composition by kneading the mixture in a state in which the total weight of the mixture contains the powdery fluororesin and the inorganic filler at 75% by weight or more;
The present invention is characterized by comprising:
本発明の分散組成物の製造方法は、さらに、前記第1の分散組成物を極性溶剤で希釈することによって、全成分の合計重量に対する前記粉粒状フッ素系樹脂と前記無機フィラーとの合計割合が60~75重量%の範囲内であり、E型粘度計を用い、25℃で測定した粘度が1000cP~50000cPの範囲内である第2の分散組成物を得る工程、
を含んでいてもよい。
The method for producing a dispersion composition of the present invention further includes a step of diluting the first dispersion composition with a polar solvent to obtain a second dispersion composition, in which the total ratio of the powdery fluororesin and the inorganic filler to the total weight of all components is within a range of 60 to 75 wt %, and the viscosity measured at 25°C using an E-type viscometer is within a range of 1,000 cP to 50,000 cP;
may also include:
本発明のフッ素系樹脂フィルムの製造方法は、上記方法によって得られた前記第2の分散組成物を基材に塗布して塗布膜を形成する工程と、
前記塗布膜を熱処理することによりフッ素系樹脂層を形成する工程と、
を含んでいる。
The method for producing a fluorine-based resin film of the present invention includes the steps of: applying the second dispersion composition obtained by the above method to a substrate to form a coating film;
a step of forming a fluorine-based resin layer by heat-treating the coating film;
Contains:
本発明の金属張積層板の製造方法は、上記方法によって得られた前記第2の分散組成物を金属箔に塗布して塗布膜を形成する工程と、
前記塗布膜を熱処理することにより、フッ素系樹脂層と金属層とが積層された金属張積層板を得る工程と、
を含んでいる。
The method for producing a metal-clad laminate of the present invention includes the steps of applying the second dispersion composition obtained by the above method to a metal foil to form a coating film;
a step of heat-treating the coating film to obtain a metal-clad laminate in which a fluororesin layer and a metal layer are laminated;
Contains:
本発明の分散組成物は、凝集粒子が少なく、粉粒状フッ素系樹脂と無機フィラーとが均一な状態で分散している。しかも、溶剤の含有比率が少ない固体状態では、長期間にわたる分散安定性を有し、また、所定比率で溶剤を含む液状態では、厚膜塗工のための適度な粘度に調節が可能で塗工性や分散安定性に優れている。そのため、本発明の分散組成物を塗工して得られる樹脂フィルムや、これを絶縁樹脂層として備えた金属張積層板は、絶縁層の厚膜化が可能であるとともに、フッ素系樹脂による優れた誘電特性と、無機フィラーの添加による低熱膨張性との両立が図られている。したがって、本発明の分散組成物を使用して得られる樹脂フィルムや金属張積層板は、高速通信規格に対応可能な回路基板材料として有用である。 The dispersion composition of the present invention has few agglomerated particles, and the granular fluororesin and inorganic filler are uniformly dispersed. Furthermore, in a solid state containing a low solvent content, it maintains dispersion stability over long periods of time. Furthermore, in a liquid state containing a specified solvent content, it can be adjusted to an appropriate viscosity for thick-film coating, providing excellent coatability and dispersion stability. Therefore, resin films obtained by applying the dispersion composition of the present invention and metal-clad laminates incorporating this composition as an insulating resin layer can be thickened to thick insulating layers, while achieving both the excellent dielectric properties of the fluororesin and the low thermal expansion properties of the added inorganic filler. Therefore, resin films and metal-clad laminates obtained using the dispersion composition of the present invention are useful as circuit board materials capable of complying with high-speed communication standards.
次に、適宜図面を参照しながら、本発明の実施の形態について説明する。本発明の実施の形態に係る分散組成物は、下記の成分(A)~(C);
(A)粉粒状フッ素系樹脂、
(B)無機フィラー、
(C)分散剤、
を含有し、粘度が1000cP以上である。ここで、粘度が1000cP以上であるものには、固体状も含まれる。この分散組成物は、固体状の第1の分散組成物と、これを溶剤で希釈した液状の第2の分散組成物の二通りの形態をとり得る。
Next, an embodiment of the present invention will be described with reference to the accompanying drawings. The dispersion composition according to the embodiment of the present invention comprises the following components (A) to (C):
(A) a powdery fluorine-based resin;
(B) an inorganic filler;
(C) a dispersant,
and has a viscosity of 1000 cP or more. Here, a viscosity of 1000 cP or more includes a solid form. This dispersion composition can take two forms: a solid first dispersion composition, and a liquid second dispersion composition obtained by diluting the first dispersion composition with a solvent.
成分(A):
成分(A)は粉粒状フッ素系樹脂である。ここで、「粉粒状」とは、例えば、平均粒子径(D50)が0.05~100μmの範囲内、好ましくは0.5~50μmの範囲内、より好ましくは0.5~10μmの範囲内の粒子の集合体を意味する。なお、粉粒状フッ素系樹脂の平均粒子径(D50)は、例えばレーザー回折・散乱法によって粉粒の粒度分布を測定し、その粉粒の全体積を100%として累積カーブを求め、その累積カーブ上で累積体積が50%となる点の粒子径測定することで求めることが可能である。
Component (A):
Component (A) is a granular fluororesin. Here, "granular" means, for example, an aggregate of particles having an average particle diameter (D 50 ) in the range of 0.05 to 100 μm, preferably 0.5 to 50 μm, and more preferably 0.5 to 10 μm. The average particle diameter (D 50 ) of the granular fluororesin can be determined, for example, by measuring the particle size distribution of the powder particles by laser diffraction/scattering, determining a cumulative curve with the total volume of the powder particles as 100%, and measuring the particle diameter at the point on the cumulative curve where the cumulative volume is 50%.
フッ素系樹脂は、フッ素原子を含むポリマーであり、その種類は特に限定されないが、例えば、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレン―パーフルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン-ヘキサフルオロプロピレン共重合体(FEP)、エチレン-テトラフルオロエチレン共重合体(ETFE)、エチレン-テトラフルオロエチレン-ヘキサフルオロプロピレン共重合体(EFEP)、ポリフッ化ビニル(PVF)、ポリフッ化ビニリデン(PVDF)等が挙げられる。これらは、2種以上を組み合わせて用いてもよく、また、フッ素系樹脂の一部に官能基を有するパーフルオロオレフィンに基づくモノマー単位を含んでいてもよい。官能基としては、カルボニル基含有基、ヒドロキシ基、エポキシ基、アミド基、アミノ基及びイソシアネート基が好ましい。
これらのフッ素系樹脂の中でも、低い誘電正接を示すものとして、ポリテトラフルオロエチレン(PTFE)、テトラフルオロエチレン―パーフルオロアルキルビニルエーテル共重合体(PFA)、テトラフルオロエチレン-ヘキサフルオロプロピレン共重合体(FEP)がより好ましい。
The fluorine-based resin is a polymer containing fluorine atoms, and the type thereof is not particularly limited, but examples thereof include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), ethylene-tetrafluoroethylene-hexafluoropropylene copolymer (EFEP), polyvinyl fluoride (PVF), polyvinylidene fluoride (PVDF), etc. These may be used in combination of two or more types, or may contain a monomer unit based on a perfluoroolefin having a functional group in a portion of the fluorine-based resin. Preferred functional groups are carbonyl group-containing groups, hydroxy groups, epoxy groups, amide groups, amino groups, and isocyanate groups.
Among these fluorine-based resins, polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), and tetrafluoroethylene-hexafluoropropylene copolymer (FEP) are more preferred as they exhibit low dielectric tangents.
成分(B):
成分(B)は、無機フィラーであり、その種類は特に限定されないが、樹脂フィルムの熱膨張係数を低下させる観点から、例えば、二酸化ケイ素(シリカ)、酸化アルミニウム(アルミナ)、酸化マグネシウム(マグネシア)、酸化ベリリウム、酸化ニオブ、酸化チタン、窒化ホウ素、窒化アルミニウム、窒化ケイ素、フッ化アルミニウム、フッ化カルシウム、フッ化マグネシウム、ケイフッ化カリウム、タルク、ガラス、チタン酸バリウム等が好ましい。これらは、2種以上を組み合わせて用いてもよい。これらの中でも、熱膨張係数が低いものとして、二酸化ケイ素(シリカ)、酸化アルミニウム、窒化ホウ素、ガラス等がより好ましい。
Ingredient (B):
Component (B) is an inorganic filler, and the type thereof is not particularly limited. However, from the viewpoint of reducing the thermal expansion coefficient of the resin film, for example, silicon dioxide (silica), aluminum oxide (alumina), magnesium oxide (magnesia), beryllium oxide, niobium oxide, titanium oxide, boron nitride, aluminum nitride, silicon nitride, aluminum fluoride, calcium fluoride, magnesium fluoride, potassium silicofluoride, talc, glass, barium titanate, etc. are preferred. These may be used in combination of two or more. Among these, silicon dioxide (silica), aluminum oxide, boron nitride, glass, etc. are more preferred because they have a low thermal expansion coefficient.
成分(B)の平均粒子径(D50)は、特に限定されないが、回路基板で使用される場合の絶縁樹脂層の厚みとの比率を考慮するとともに、絶縁樹脂層の穴あけ加工性を担保するの観点から、例えば、0.05~50μmの範囲内、好ましくは0.1~20μmの範囲内がよい。また、比表面積は、特に限定されないが、誘電正接悪化抑制の観点から0.1~20m2/gの範囲内、好ましくは0.1~10m2/gの範囲内がよい。
なお、無機フィラーの平均粒子径は、例えばレーザー回折・散乱法によって粉粒の粒度分布を測定し、その粉粒の全体積を100%として累積カーブを求め、その累積カーブ上で累積体積が50%となる点の粒子径測定することで求めることが可能であり、比表面積についてはBET法によって測定することが可能である。
The average particle size (D 50 ) of component (B) is not particularly limited, but is preferably in the range of 0.05 to 50 μm, and more preferably 0.1 to 20 μm, in consideration of the ratio to the thickness of the insulating resin layer when used in a circuit board and from the viewpoint of ensuring the drilling processability of the insulating resin layer. The specific surface area is also not particularly limited, but is preferably in the range of 0.1 to 20 m 2 /g, and more preferably 0.1 to 10 m 2 /g, in consideration of suppressing deterioration of the dielectric loss tangent.
The average particle diameter of the inorganic filler can be determined by, for example, measuring the particle size distribution of the powder particles by a laser diffraction/scattering method, determining a cumulative curve with the total volume of the powder particles set to 100%, and measuring the particle diameter at the point on the cumulative curve where the cumulative volume is 50%. The specific surface area can be measured by the BET method.
成分(B)の形状は、特に限定されないが、厚み方向と面方向の熱膨張係数の差を低減する観点から、例えば、球状、破砕球状等が好ましい。また、成分(B)は中空状であってもよい。 The shape of component (B) is not particularly limited, but from the perspective of reducing the difference in thermal expansion coefficient between the thickness direction and the plane direction, for example, spherical or crushed spherical shapes are preferred. Component (B) may also be hollow.
成分(B)の硬さは、特に限定されないが、固練り時のせん断による凝集物を解砕する観点から、モース硬度が2以上であることが好ましく、2~9の範囲内がより好ましい。モース硬度が2未満であると固練り時のせん断力で材料が変形し、凝集物の解砕が困難となることがある。 The hardness of component (B) is not particularly limited, but from the perspective of breaking down agglomerates due to shearing during kneading, it is preferable for the Mohs hardness to be 2 or higher, and more preferably within the range of 2 to 9. If the Mohs hardness is less than 2, the material may deform due to shearing forces during kneading, making it difficult to break down agglomerates.
成分(B)は、特に限定されないが、カップリング剤等により表面処理することが好ましい。表面処理に用いるカップリング剤としては、例えば3-アミノプロピルエトキシシラン、ビニルトリメトキシシラン、3-メルカプトプロピルトリメトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、3-メタクリロキシプロピルエトキシシラン、3-イソシアネートプロピルエトキシシランまたはヘキサメチルジシラザン等が挙げられる。 Although component (B) is not particularly limited, it is preferable to surface treat it with a coupling agent or the like. Examples of coupling agents used for surface treatment include 3-aminopropylethoxysilane, vinyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-methacryloxypropylethoxysilane, 3-isocyanatopropylethoxysilane, and hexamethyldisilazane.
成分(C):
成分(C)の分散剤は、成分(A)及び成分(B)に対する分散作用を有するものであれば種類は特に限定されないが、フッ素樹脂を分散する観点から、例えば、フッ素系界面活性剤が好ましい。フッ素系界面活性剤としては、例えば、分子内に二重結合を有するパーフルオロアルケニル構造のノニオン系のフッ素系界面活性剤がより好ましい。
Component (C):
The dispersant for component (C) is not particularly limited as long as it has a dispersing effect on components (A) and (B), but from the viewpoint of dispersing the fluororesin, for example, a fluorosurfactant is preferred. As the fluorosurfactant, for example, a nonionic fluorosurfactant having a perfluoroalkenyl structure having a double bond in the molecule is more preferred.
本実施の形態の分散組成物は、凝集粒子が少なく、粉粒状フッ素系樹脂と無機フィラーとが均一な状態で安定的に分散している。また、以下に説明するように、溶剤の含有比率が少ない固体状の第1の分散組成物の状態では長期間にわたる分散安定性を有し、所定比率で溶剤を含む液状の第2の分散組成物の状態では厚膜の塗工性や分散安定性に優れている。 The dispersion composition of this embodiment has few agglomerated particles, and the powdered fluororesin and inorganic filler are uniformly and stably dispersed. Furthermore, as explained below, the first dispersion composition, which is a solid with a low solvent content, has long-term dispersion stability, while the second dispersion composition, which is a liquid with a specified solvent content, has excellent thick-film coating properties and dispersion stability.
<第1の分散組成物>
第1の分散組成物は、固体状であり、全重量に対して、成分(A)及び成分(B)の合計割合が75重量%以上である。ここで、「固体状」とは、粘性変形がほとんどないために、E型粘度計による測定ができない状態を意味する。成分(A)と成分(B)の合計割合は、第1の分散組成物が「固体状」での混練、すなわち固練りによって製造されるものであることから、全重量の75~99重量%の範囲内が好ましく、75~90重量%の範囲内がより好ましい。成分(A)と成分(B)の合計割合が75重量%未満であると固練りによって製造することが困難となり、99重量%を超えると粉体状となる。
<First dispersion composition>
The first dispersion composition is solid, and the total weight of the component (A) and the component (B) is 75% by weight or more. Here, "solid" means a state in which there is almost no viscous deformation, making it impossible to measure using an E-type viscometer. Since the first dispersion composition is produced by kneading in a "solid state," i.e., by hard kneading, the total weight of the component (A) and the component (B) is preferably in the range of 75 to 99% by weight, more preferably in the range of 75 to 90% by weight. If the total weight of the component (A) and the component (B) is less than 75% by weight, it becomes difficult to produce the composition by hard kneading, and if it exceeds 99% by weight, it becomes powdery.
また、第1の分散組成物は、固練りにより分散によって製造されるものであることから、成分(A)と成分(B)の体積比率(A:B)が、15:85~95:5の範囲内が好ましく、20:80~80:20の範囲内がより好ましい。成分(B)に対する成分(A)の体積比率が15未満であると、樹脂が脆化しフィルム化が困難となり、95を超えると混練時の粘性が上昇し、固練りによる分散によって製造することが困難となる。 Furthermore, since the first dispersion composition is produced by dispersion through stiff kneading, the volume ratio (A:B) of component (A) to component (B) is preferably in the range of 15:85 to 95:5, and more preferably in the range of 20:80 to 80:20. If the volume ratio of component (A) to component (B) is less than 15, the resin becomes brittle and film formation becomes difficult, while if it exceeds 95, the viscosity increases during kneading, making it difficult to produce by dispersion through stiff kneading.
また、第1の分散組成物は、固形分の分散性を良好にするため、全重量に対して成分(C)の含有割合が1~15重量%の範囲内が好ましく、1~10重量%の範囲内がより好ましい。成分(C)の含有割合が1重量%未満であると、固形分を十分に分散させることができず、15重量%を超えると誘電正接が悪化する恐れがある。 In addition, to improve the dispersibility of the solids in the first dispersion composition, the content of component (C) is preferably in the range of 1 to 15 wt %, and more preferably in the range of 1 to 10 wt %, relative to the total weight. If the content of component (C) is less than 1 wt %, the solids cannot be sufficiently dispersed, and if it exceeds 15 wt %, the dielectric loss tangent may deteriorate.
また、第1の分散組成物は、固練りによって製造することや固体状での長期保管の観点から、全重量に対して、成分(D)としての極性溶剤の含有割合が、0~24重量%が好ましく、9~24重量%の範囲内がより好ましい。ここで、第1の分散組成物において、成分(D)は任意成分であり、含有しなくてもよい。成分(D)の含有割合が24重量%を超えると流動性が高くなりすぎるため、固練りによる製造ができなくなり分散状態が悪化することや長期間の保存において固形分の沈降や凝集が生じ、経時的分散安定性が低下しやすくなる。 Furthermore, from the viewpoint of producing the first dispersion composition by kneading and long-term storage in a solid state, the content of the polar solvent as component (D) is preferably 0 to 24 wt %, more preferably in the range of 9 to 24 wt %, relative to the total weight. Here, component (D) is an optional component in the first dispersion composition and may not be included. If the content of component (D) exceeds 24 wt %, the fluidity becomes too high, making it impossible to produce the composition by kneading, resulting in a deterioration in the dispersion state, and causing sedimentation and aggregation of solids during long-term storage, which tends to reduce dispersion stability over time.
成分(D)の極性溶剤の種類は特に限定されないが、固練り時及び分散組成物に溶剤としての作用を発現させる観点から、25℃で液状であることが好ましい。前記観点より、例えば、水、N,N-ジメチルホルムアミド(DMF)、N,N-ジメチルアセトアミド(DMAc)、N,N-ジエチルアセトアミド、N-メチル-2-ピロリドン(NMP)、2-ブタノン、ジメチルスルホキシド(DMSO)、ヘキサメチルホスホルアミド、N-メチルカプロラクタム、硫酸ジメチル、シクロヘキサノン、ジオキサン、テトラヒドロフラン、ジグライム、トリグライム、クレゾール、メタノール、エタノール、イソプロパノール、メチルエチルケトン、シクロヘキサノン、γ-ブチロラクトン等が好ましい。これらの中でも、固練り時の発熱による溶剤蒸発量を抑制する観点から、例えば、N,N-ジメチルホルムアミド(DMF)、N,N-ジメチルアセトアミド(DMAc)、N,N-ジエチルアセトアミド、N-メチル-2-ピロリドン(NMP)等の高沸点溶媒がより好ましい。 The type of polar solvent for component (D) is not particularly limited, but it is preferably liquid at 25°C from the perspective of exerting its solvent function during kneading and in the dispersion composition. From this perspective, for example, water, N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), N,N-diethylacetamide, N-methyl-2-pyrrolidone (NMP), 2-butanone, dimethyl sulfoxide (DMSO), hexamethylphosphoramide, N-methylcaprolactam, dimethyl sulfate, cyclohexanone, dioxane, tetrahydrofuran, diglyme, triglyme, cresol, methanol, ethanol, isopropanol, methyl ethyl ketone, cyclohexanone, and γ-butyrolactone are preferred. Among these, from the viewpoint of suppressing the amount of solvent evaporation due to heat generation during kneading, high-boiling point solvents such as N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), N,N-diethylacetamide, and N-methyl-2-pyrrolidone (NMP) are more preferred.
<第2の分散組成物>
第2の分散組成物は、極性溶剤を含む分散液であり、厚膜での塗工可能な粘度とする観点から、全重量に対して成分(A)と成分(B)の合計割合が60~75重量%の範囲内が好ましく、60~70重量%の範囲内がより好ましい。成分(A)と成分(B)の合計割合が60重量%未満であると、固形分濃度が低すぎて厚膜の場合の塗膜形成性が低下することがあり、75重量%を超えると固形分濃度が高すぎてキャストによる塗膜形成が困難となることがある。
<Second Dispersion Composition>
The second dispersion composition is a dispersion containing a polar solvent, and from the viewpoint of achieving a viscosity that allows for thick film coating, the total proportion of components (A) and (B) is preferably in the range of 60 to 75 wt%, more preferably 60 to 70 wt%, based on the total weight. If the total proportion of components (A) and (B) is less than 60 wt%, the solids concentration may be too low, which may reduce the film-forming ability in the case of thick films, and if it exceeds 75 wt%, the solids concentration may be too high, which may make it difficult to form a film by casting.
また、第2の分散組成物は、成分(A)と成分(B)の体積比率(A:B)が、15:85~95:5の範囲内が好ましく、20:80~80:20の範囲内がより好ましい。体積比率(A:B)を上記範囲内とする理由は、第1の分散組成物と同様である。 Furthermore, the volume ratio (A:B) of component (A) to component (B) of the second dispersion composition is preferably within the range of 15:85 to 95:5, and more preferably within the range of 20:80 to 80:20. The reasons for setting the volume ratio (A:B) within the above range are the same as those for the first dispersion composition.
また、第2の分散組成物は、分散性担保と誘電正接の悪化を抑制する観点から、全重量に対して成分(C)の含有割合が0.8~13.2重量%の範囲内が好ましく、1~10重量%の範囲内がより好ましい。成分(C)の含有割合が0.8重量%未満であると分散不良が生じやすく、13.2重量%を超えると分散組成物より得られる樹脂フィルムの誘電正接が悪化する原因となる。 In addition, from the viewpoint of ensuring dispersibility and preventing deterioration of the dielectric loss tangent, the content of component (C) in the second dispersion composition is preferably in the range of 0.8 to 13.2 wt %, and more preferably in the range of 1 to 10 wt %, based on the total weight. If the content of component (C) is less than 0.8 wt %, poor dispersion is likely to occur, and if it exceeds 13.2 wt %, the dielectric loss tangent of the resin film obtained from the dispersion composition will deteriorate.
また、第2の分散組成物は、厚膜での塗工可能な粘度で分散組成物を作製する観点から、全重量に対して、成分(D)としての極性溶剤の含有割合が11.8~39.2重量%の範囲内が好ましく、20~39重量%の範囲内がより好ましい。ここで、第2の分散組成物において、成分(D)は必須成分である。成分(D)が11.8重量%未満であると粘性が高すぎてキャストによる塗膜形成が困難となり、39.2重量%を超えると流動性が高くなりすぎるため、厚膜での塗膜形成が困難となるほか、固形分の沈降や凝集が生じやすくなる。 Furthermore, from the viewpoint of preparing a dispersion composition with a viscosity that allows for thick film application, the content of the polar solvent as component (D) is preferably in the range of 11.8 to 39.2 wt %, and more preferably in the range of 20 to 39 wt %, relative to the total weight of the second dispersion composition. Here, component (D) is an essential component of the second dispersion composition. If component (D) is less than 11.8 wt %, the viscosity will be too high, making it difficult to form a coating film by casting. If it exceeds 39.2 wt %, the fluidity will be too high, making it difficult to form a thick coating film and making it more susceptible to sedimentation and aggregation of solids.
第2の分散組成物における極性溶剤としては、第1の分散組成物で例示したものを使用できる。ただし、第1の分散組成物と第2の分散組成物で極性溶剤の種類が異なっていてもよい。 The polar solvent in the second dispersion composition can be any of the solvents exemplified for the first dispersion composition. However, the types of polar solvents used in the first dispersion composition and the second dispersion composition may be different.
また、第2の分散組成物は、厚膜形成を可能とする観点から、E型粘度計を用い、温度25℃で測定される粘度が1000cP~50000cPの範囲内が好ましく、1000~30000cPの範囲内がより好ましい。なお、粘度測定において設定する回転数は、設定された回転数で得られた粘度が設定した回転数のトルクの10%~90%範囲内の粘度範囲であるようにする。粘度が1000cP未満では、第2の分散組成物を任意の基材上にキャストするときに、流動性が高くなりすぎるため、厚膜での塗膜形成が困難となる。特に、高周波伝送用途向けに30~150μmの範囲内の比較的厚い塗膜の形成が不可能となる。また、粘度が1000cP未満では、固形分の沈降や凝集が生じることがある。一方、第2の分散組成物の粘度が50000cPを超える場合は、粘性が高すぎてキャストによる塗膜形成が困難となる。 In addition, from the viewpoint of enabling thick film formation, the viscosity of the second dispersion composition, measured using an E-type viscometer at 25°C, is preferably in the range of 1000 cP to 50,000 cP, more preferably in the range of 1000 to 30,000 cP. The rotation speed set in the viscosity measurement is set so that the viscosity obtained at the set rotation speed is within a viscosity range of 10% to 90% of the torque at the set rotation speed. If the viscosity is less than 1000 cP, the fluidity becomes too high when the second dispersion composition is cast onto a substrate, making it difficult to form a thick coating film. In particular, it becomes impossible to form a relatively thick coating film in the range of 30 to 150 μm for high-frequency transmission applications. If the viscosity is less than 1000 cP, sedimentation or aggregation of solids may occur. On the other hand, if the viscosity of the second dispersion composition exceeds 50,000 cP, the viscosity is too high, making it difficult to form a coating film by casting.
上記第1の分散組成物及び第2の分散組成物は、任意成分として、例えば、有機フィラー、硬化剤、可塑剤、エラストマー、カップリング剤、顔料、難燃剤等を含有することができる。 The first dispersion composition and the second dispersion composition may contain optional components such as organic fillers, curing agents, plasticizers, elastomers, coupling agents, pigments, and flame retardants.
<第1の分散組成物の製造方法>
第1の分散組成物は、以下に例示する工程を実施し、粉粒状フッ素系樹脂と無機フィラーを含む複数の材料を混練することによって製造することができる。
<Method for producing first dispersion composition>
The first dispersion composition can be produced by carrying out the steps exemplified below and kneading a plurality of materials including a powdery fluorine-based resin and an inorganic filler.
(混合工程)
本工程では、成分(A)の粉粒状フッ素系樹脂、成分(B)の無機フィラー、成分(C)の分散剤及び成分(D)の極性溶剤を混合する。
ここで、成分(D)の極性溶剤は、粉粒状フッ素系樹脂と無機フィラーの表面を湿潤させて混練時の凝集を防ぐために用いられ、全重量に対して24重量%以下とすることが好ましい。極性溶剤の量が多すぎると、次の固練り工程で十分な剪断力を加えることができなくなる。
したがって、本工程は、混合物が、全重量に対して、成分(A)を10~80重量%の範囲内、成分(B)を3.5~73.5重量%の範囲内、成分(C)を1~15重量%の範囲内、成分(D)を1.5~24重量%の範囲内で含有する組成で実施することが好ましい。
(Mixing process)
In this step, a particulate fluororesin as component (A), an inorganic filler as component (B), a dispersant as component (C), and a polar solvent as component (D) are mixed together.
The polar solvent of component (D) is used to wet the surfaces of the particulate fluororesin and inorganic filler to prevent aggregation during kneading, and is preferably used in an amount of 24% by weight or less based on the total weight. If the amount of polar solvent is too large, it will be impossible to apply sufficient shear force in the subsequent kneading step.
Therefore, this step is preferably carried out with a composition in which, relative to the total weight of the mixture, component (A) is in the range of 10 to 80 wt %, component (B) is in the range of 3.5 to 73.5 wt %, component (C) is in the range of 1 to 15 wt %, and component (D) is in the range of 1.5 to 24 wt %.
なお、各成分の配合順序は特に制限されないが、例えば、成分(A)、成分(B)、成分(D)、成分(C)の順に添加、混合することが好ましい。 There are no particular restrictions on the order in which the components are added, but it is preferable to add and mix them in the following order: component (A), component (B), component (D), and component (C).
(固練り工程)
本工程では、混合工程で得られた混合物の全重量に対して、成分(A)及び成分(B)の合計割合が75重量%以上となる状態で固練りすることによって、固体状の第1の分散組成物を得る。ここで、「固練り」とは、ほとんど流動性がない塊状固体の状態の混合物に対して、大きな剪断力を加えて混練することを意味する。固練りによって、混合物中の固形分である粉粒状フッ素系樹脂及び無機フィラーの粒子の凝集が解消され、これらがほぼ一次粒子の状態で均一に分散される。この目的のため、固練りは、粉粒状フッ素系樹脂及び無機フィラーの合計割合が全重量に対して75重量%以上、好ましくは75~99重量%の範囲内、より好ましくは75~83.5重量%の範囲内で実施することがよい。粉粒状フッ素系樹脂及び無機フィラーの合計割合が75重量%未満であると、固形分に十分な剪断力が加わらず、凝集粒子が残存した状態となって、均一で安定な分散状態が得られない。
(hardening process)
In this step, a solid first dispersion composition is obtained by kneading the mixture obtained in the mixing step so that the total proportion of component (A) and component (B) is 75 wt % or more relative to the total weight of the mixture. Here, "kneading" refers to applying a large shear force to a mixture in a solid, almost non-fluid state. Kneading eliminates agglomerations of the particulate fluororesin and inorganic filler particles, which are the solid components in the mixture, and uniformly disperses them in the form of approximately primary particles. For this purpose, kneading is preferably performed when the total proportion of the particulate fluororesin and inorganic filler is 75 wt % or more, preferably in the range of 75 to 99 wt %, and more preferably in the range of 75 to 83.5 wt %, relative to the total weight. If the total proportion of the particulate fluororesin and inorganic filler is less than 75 wt %, sufficient shear force is not applied to the solid components, resulting in agglomerated particles remaining, making it impossible to obtain a uniform and stable dispersion.
固練りは、例えば遊星式混練機を用い、温度40℃以下、30分以上の条件で実施することが好ましい。 The hard kneading is preferably carried out using, for example, a planetary mixer at a temperature of 40°C or less for 30 minutes or more.
<第2の分散組成物の製造方法>
第2の分散組成物は、第1の分散組成物に成分(D)の極性溶剤を加え希釈することによって製造することができる。
すなわち、第1の分散組成物を成分(D)で希釈して、全重量に対する成分(A)と成分(B)の合計が60~75重量%の範囲内、好ましくは60~70重量%の範囲内であり、粘度が1000cP~50000cPの範囲内、好ましくは1000~30000cPの範囲内となるように調整する工程を実施することにより、第2の分散組成物を得ることができる。
<Method for producing second dispersion composition>
The second dispersion composition can be produced by diluting the first dispersion composition with the polar solvent of component (D).
That is, the second dispersion composition can be obtained by carrying out a step of diluting the first dispersion composition with component (D) so that the sum of components (A) and (B) is in the range of 60 to 75 wt %, preferably in the range of 60 to 70 wt %, relative to the total weight, and the viscosity is in the range of 1000 cP to 50,000 cP, preferably in the range of 1000 to 30,000 cP.
第2の分散組成物は、第1の分散組成物を経て得られるため、固形分である粉粒状フッ素系樹脂及び無機フィラーの粒子がほぼ一次粒子の状態で均一に分散している。そのため、各成分を極性溶剤中で低固形分濃度の状態で混合・分散させて得られるものとは異なり、固形分の沈降や凝集が生じ難い。 Because the second dispersion composition is obtained via the first dispersion composition, the solid components, the particulate fluororesin and inorganic filler particles, are uniformly dispersed in the form of almost primary particles. Therefore, unlike a dispersion obtained by mixing and dispersing each component in a polar solvent at a low solids concentration, sedimentation and aggregation of the solids are less likely to occur.
<樹脂フィルム及び金属張積層板の製造方法>
第2の分散組成物を使用して樹脂フィルムを製造する方法については特に限定されないが、以下の方法を例示できる。
<Method of manufacturing resin film and metal-clad laminate>
The method for producing a resin film using the second dispersion composition is not particularly limited, but the following method can be exemplified.
(塗布膜形成工程)
本工程では、第2の分散組成物を任意の基材に塗布して塗布膜を形成する。
すなわち、任意の基材の上に、熱処理工程後に所望の厚みとなるように、第2の分散組成物を塗布し、乾燥させることによって、基材上に塗布膜を形成する。使用する基材としては、特に限定されないが、耐熱性を有する素材として、例えば銅箔などの金属箔、接着層付き銅箔やポリイミドフィルムを用いることが好ましい。第2の分散組成物を基材上に塗布する方法としては特に制限されず、例えばコンマ、ダイ、ナイフ、リップ等のコーターにて塗布することが可能である。
(Coating film forming process)
In this step, the second dispersion composition is applied to an arbitrary substrate to form a coating film.
That is, the second dispersion composition is applied to an arbitrary substrate so as to have a desired thickness after the heat treatment step, and then dried to form a coating film on the substrate. The substrate to be used is not particularly limited, but it is preferable to use a heat-resistant material such as a metal foil such as copper foil, a copper foil with an adhesive layer, or a polyimide film. The method for applying the second dispersion composition to the substrate is not particularly limited, and it can be applied using, for example, a coater such as a comma, die, knife, or lip.
(熱処理工程)
本工程では、塗布膜形成工程で得た塗布膜を熱処理することによりフッ素系樹脂層を形成する。
すなわち、塗布膜を基材とともに熱処理し、粉粒状フッ素系樹脂を溶融させた後、冷却して固化させることによってフィルム化し、基材上にフッ素系樹脂層を形成する。粉粒状フッ素系樹脂を溶融させるための熱処理温度としては、フッ素系樹脂の融点以上であればよく、上限は樹脂種に応じて適宜定めることができるが、例えば融点より10℃~80℃の範囲内で高い温度とすることが好ましい。
(Heat treatment process)
In this step, the coating film obtained in the coating film forming step is heat-treated to form a fluorine-based resin layer.
That is, the coating film and the substrate are heat-treated to melt the particulate fluororesin, and then cooled and solidified to form a film, thereby forming a fluororesin layer on the substrate. The heat treatment temperature for melting the particulate fluororesin may be equal to or higher than the melting point of the fluororesin, and the upper limit can be determined appropriately depending on the type of resin, but it is preferable to set the temperature to be, for example, 10°C to 80°C higher than the melting point.
複数のフッ素系樹脂層を形成する場合は、第2の分散組成物を塗布、乾燥する毎に熱処理してもよいし、第2の分散組成物を塗布、乾燥する工程を複数回繰り返した後、一括して熱処理してもよい。 When forming multiple fluororesin layers, the heat treatment may be performed each time the second dispersion composition is applied and dried, or the process of applying and drying the second dispersion composition may be repeated multiple times and then all layers may be heat-treated at once.
必要に応じて基材を剥離することによって、フッ素系樹脂の樹脂フィルムを得ることができる。
また、本製法では、基材として金属箔を用いることによって、フッ素系樹脂層と金属層とを備えた金属張積層板を製造できる。例えば、基材として金属箔を用いる場合、そのまま金属層の片面にフッ素系樹脂層を有する片面金属張積層板となる。また、基材として金属箔を用いるとともに、樹脂フィルムの基材とは反対側の面に別の金属層を形成することや片面金属張積層板同士を貼り合わせることによって、両面金属張積層板とすることも可能である。
If necessary, the substrate can be peeled off to obtain a resin film of a fluorine-based resin.
Furthermore, this manufacturing method can produce a metal-clad laminate having a fluororesin layer and a metal layer by using a metal foil as the substrate. For example, when a metal foil is used as the substrate, a single-sided metal-clad laminate having a fluororesin layer on one side of the metal layer is produced. Furthermore, a double-sided metal-clad laminate can be produced by using a metal foil as the substrate and forming another metal layer on the side of the resin film opposite the substrate, or by bonding two single-sided metal-clad laminates together.
<樹脂フィルム>
以上のようにして得られる樹脂フィルムは、フッ素系樹脂層を含むものである。
樹脂フィルムの厚みは、特に限定されるものではないが、回路基板の樹脂層として用いる場合は、高周波信号伝送への適用を考慮して、好ましくは30~150μmの範囲内、より好ましくは75~150μmの範囲内がよい。
<Resin film>
The resin film obtained in the above manner contains a fluorine-based resin layer.
The thickness of the resin film is not particularly limited, but when used as a resin layer of a circuit board, taking into consideration application to high-frequency signal transmission, the thickness is preferably in the range of 30 to 150 μm, more preferably in the range of 75 to 150 μm.
樹脂フィルムは、温度24~26℃、湿度45~55%の条件のもと72時間調湿後に、スプリットポスト誘電体共振器(SPDR)もしくはスプリットシリンダ共振器により測定される60GHz以下における誘電正接(Df)が好ましくは0.003以下、より好ましくは0.0025以下であり、更に好ましくは0.0020以下である。また、同条件で測定される比誘電率(Dk)が好ましくは4.0以下、より好ましくは3.5以下、更に好ましくは3.0以下であることがよい。誘電正接(Df)及び比誘電率(Dk)が上記数値を超えると、回路基板に適用した際に、誘電損失の増大に繋がり、周波数がGHz帯域(例えば1~80GHz)の高周波信号の伝送経路上で電気信号のロスなどの不都合が生じやすくなる。 After conditioning the resin film for 72 hours at a temperature of 24-26°C and a humidity of 45-55%, the dielectric loss tangent (Df) at frequencies below 60 GHz, as measured using a split post dielectric resonator (SPDR) or split cylinder resonator, is preferably 0.003 or less, more preferably 0.0025 or less, and even more preferably 0.0020 or less. Furthermore, the relative dielectric constant (Dk) measured under the same conditions is preferably 4.0 or less, more preferably 3.5 or less, and even more preferably 3.0 or less. If the dielectric loss tangent (Df) and relative dielectric constant (Dk) exceed the above values, this will lead to increased dielectric loss when the film is applied to a circuit board, making it more likely to experience problems such as electrical signal loss in the transmission path of high-frequency signals in the GHz range (e.g., 1-80 GHz).
また、樹脂フィルムの熱膨張係数(CTE)は、寸法安定性を確保するため、10~30ppm/Kの範囲内が好ましく、15~25ppm/Kの範囲内であることがより好ましい。 In addition, to ensure dimensional stability, the coefficient of thermal expansion (CTE) of the resin film is preferably in the range of 10 to 30 ppm/K, and more preferably in the range of 15 to 25 ppm/K.
なお、本実施の形態の樹脂フィルムは、フッ素系樹脂層以外の任意の樹脂層を含むことができる。 The resin film of this embodiment may include any resin layer other than the fluorine-based resin layer.
<金属張積層板>
以上のようにして得られる金属張積層板は、フッ素系樹脂層と、フッ素系樹脂層の片面または両面に積層された金属層とを備えている。つまり、本実施の形態の金属張積層板は、片面金属張積層板でもよいし、両面金属張積層板でもよい。
<Metal-clad laminate>
The metal-clad laminate obtained as described above comprises a fluororesin layer and a metal layer laminated on one or both sides of the fluororesin layer. That is, the metal-clad laminate of this embodiment may be a single-sided metal-clad laminate or a double-sided metal-clad laminate.
金属層の材質としては、特に制限はないが、例えば、銅、ステンレス、鉄、ニッケル、ベリリウム、アルミニウム、亜鉛、インジウム、銀、金、スズ、ジルコニウム、タンタル、チタン、鉛、マグネシウム、マンガン及びこれらの合金等が挙げられる。この中でも、特に銅又は銅合金が好ましい。 The material of the metal layer is not particularly limited, but examples include copper, stainless steel, iron, nickel, beryllium, aluminum, zinc, indium, silver, gold, tin, zirconium, tantalum, titanium, lead, magnesium, manganese, and alloys thereof. Of these, copper or copper alloys are particularly preferred.
金属層の厚みは特に限定されるものではないが、例えば銅箔等の金属箔を用いる場合、好ましくは35μm以下であり、より好ましくは5~25μmの範囲内がよい。生産安定性及びハンドリング性の観点から金属箔の厚みの下限値は5μmとすることが好ましい。なお、銅箔を用いる場合は、圧延銅箔でも電解銅箔でもよく、例えば5μm以下の薄銅箔とキャリア箔の間に離形層を形成したピーラブル銅箔でもよい。また、銅箔としては、市販されている銅箔を用いることができる。金属層の表面粗度は、特に限定されるものではないが、フッ素系樹脂層との密着性を担保と導体損失を両立させる観点から、十点平均粗さ(Rzjis)を0.3~2.0の範囲内とすることが好ましい。 The thickness of the metal layer is not particularly limited, but when a metal foil such as copper foil is used, it is preferably 35 μm or less, and more preferably in the range of 5 to 25 μm. From the perspective of production stability and handleability, the lower limit of the metal foil thickness is preferably 5 μm. When copper foil is used, it may be rolled copper foil or electrolytic copper foil, or it may be, for example, a peelable copper foil in which a release layer is formed between a thin copper foil of 5 μm or less and a carrier foil. Commercially available copper foil can also be used as the copper foil. The surface roughness of the metal layer is not particularly limited, but from the perspective of ensuring adhesion to the fluororesin layer while also reducing conductor loss, it is preferable that the ten-point average roughness (Rzjis) be in the range of 0.3 to 2.0.
また、金属箔は、例えば、防錆処理や、接着力の向上を目的として、例えばサイディング、アルミニウムアルコラート、アルミニウムキレート、シランカップリング剤等による表面処理を施してもよい。 The metal foil may also be surface treated with, for example, siding, aluminum alcoholate, aluminum chelate, or silane coupling agent for the purposes of rust prevention or improving adhesive strength.
金属張積層板におけるフッ素系樹脂層の構成及び厚みは、上記樹脂フィルムと同様である。なお、本実施の形態の金属張積層板は、フッ素系樹脂層以外の任意の樹脂層を含むことができる。 The configuration and thickness of the fluororesin layer in the metal-clad laminate are the same as those of the resin film described above. Note that the metal-clad laminate of this embodiment may also include any resin layer other than the fluororesin layer.
本実施の形態の金属張積層板は、回路基板材料として好ましく用いられる。すなわち、金属張積層板の片側または両側の金属層をエッチングなどにより配線回路加工することによって、片面FPC又は両面FPCなどの回路基板を製造することができる。 The metal-clad laminate of this embodiment is preferably used as a circuit board material. That is, by processing the metal layer on one or both sides of the metal-clad laminate into wiring circuits by etching or the like, circuit boards such as single-sided FPCs or double-sided FPCs can be manufactured.
以下に実施例を示し、本発明の特徴をより具体的に説明する。ただし、本発明の範囲は、実施例に限定されない。なお、以下の実施例において、特にことわりのない限り各種測定、評価は下記によるものである。 The following examples are provided to more specifically explain the features of the present invention. However, the scope of the present invention is not limited to these examples. In the following examples, various measurements and evaluations were performed as follows, unless otherwise noted.
[粘度の測定]
E型粘度計(ブルックフィールド社製、商品名;DV-II+Pro)を用いて、25℃における粘度を測定した。なお、測定された粘度は、トルクが10%~90%の範囲で測定可能な粘度になるよう回転数を設定し、測定を開始してから2分経過後、粘度が安定した時の値を読み取った。
[Viscosity measurement]
The viscosity was measured at 25°C using an E-type viscometer (manufactured by Brookfield, trade name: DV-II+Pro). The rotation speed was set so that the viscosity could be measured in the torque range of 10% to 90%, and the viscosity was read when the viscosity stabilized 2 minutes after the start of measurement.
[熱膨張係数(CTE)の測定]
3mm×20mmのサイズのポリイミドフィルムを、サーモメカニカルアナライザー(日立ハイテクテクノロジー社(旧セイコーインスツルメンツ社製)、商品名;TMA/SS6100)を用い、5.0gの荷重を加えながら一定の昇温速度で30℃から260℃まで昇温させ、更にその温度で10分保持した後、5℃/分の速度で冷却し、250℃から100℃までの平均熱膨張係数(熱膨張係数)を求めた。
[Measurement of coefficient of thermal expansion (CTE)]
A polyimide film measuring 3 mm x 20 mm was heated from 30°C to 260°C at a constant heating rate while applying a load of 5.0 g using a thermomechanical analyzer (trade name: TMA/SS6100, manufactured by Hitachi High-Technologies Corporation (formerly Seiko Instruments Inc.)), and then held at that temperature for 10 minutes. The film was then cooled at a rate of 5°C/min, and the average thermal expansion coefficient (thermal expansion coefficient) from 250°C to 100°C was determined.
[比誘電率及び誘電正接の測定]
ベクトルネットワークアナライザ(Agilent社製、商品名;E8363C)及びスプリットポスト誘電体共振器(SPDR共振器)を用いて、周波数10GHzにおけるフィルムの比誘電率(Dk)および誘電正接(Df)を測定した。
また、上記と同様にスプリットシリンダ共振器(SCR共振器)を用いて60GHzにおけるフィルムの誘電率(Dk)および誘電正接(Df)を測定した。
なお、調湿時のDk、Dfは、測定に使用したフィルムを温度;24~26℃、湿度;45~55%の条件下で、72時間放置した後に測定したものである。
[Measurement of relative permittivity and dielectric loss tangent]
The relative dielectric constant (Dk) and dielectric loss tangent (Df) of the film at a frequency of 10 GHz were measured using a vector network analyzer (manufactured by Agilent, trade name: E8363C) and a split post dielectric resonator (SPDR resonator).
Furthermore, the dielectric constant (Dk) and dielectric loss tangent (Df) of the film at 60 GHz were measured using a split cylinder resonator (SCR resonator) in the same manner as above.
The Dk and Df values in the conditioned state were measured after the film used for the measurement was left to stand for 72 hours under conditions of a temperature of 24 to 26° C. and a humidity of 45 to 55%.
[銅箔の表面粗度の測定]
銅箔の表面粗度は、AFM(ブルカー・エイエックスエス社製、商品名;Dimension Icon型SPM)、プローブ(ブルカー・エイエックスエス社製、商品名;TESPA(NCHV)、先端曲率半径10nm、ばね定数42N/m)を用いて、タッピングモードで、銅箔表面の80μm×80μmの範囲で測定し、十点平均粗さ(Rzjis)を求めた。
[Measurement of copper foil surface roughness]
The surface roughness of the copper foil was measured in a tapping mode over an area of 80 μm × 80 μm on the copper foil surface using an AFM (manufactured by Bruker AXS, trade name: Dimension Icon type SPM) and a probe (manufactured by Bruker AXS, trade name: TESPA (NCHV), tip curvature radius 10 nm, spring constant 42 N/m), and the ten-point average roughness (Rzjis) was calculated.
実施例及び比較例に用いた化合物以下を示す。
フッ素樹脂系パウダー(1):Fluon+(Fluonは登録商標) EA-2000 PW 10:AGC製フッ素樹脂系パウダー、平均粒子径2~3μm
シリカフィラー(1):SPH507-05:日鉄ケミカル&マテリアル製非晶質シリカフィラー、平均粒子径(D50)0.7μm、比表面積9.0m2/g
シリカフィラー(2):SPH60-05:日鉄ケミカル&マテリアル製非晶質シリカフィラー、平均粒子径(D50)1.7μm、比表面積9.2m2/g
分散剤(1):フタージェント710FL:ネオス製ノニオン系フッ素含有分散剤(成分50重量%、酢酸エチル50重量%)
The compounds used in the examples and comparative examples are as follows:
Fluorine resin powder (1): Fluon+ (Fluon is a registered trademark) EA-2000 PW 10: Fluorine resin powder manufactured by AGC, average particle size 2 to 3 μm
Silica filler (1): SPH507-05: amorphous silica filler manufactured by Nippon Steel Chemical & Material, average particle size (D 50 ) 0.7 μm, specific surface area 9.0 m 2 /g
Silica filler (2): SPH60-05: amorphous silica filler manufactured by Nippon Steel Chemical & Material, average particle size (D 50 ) 1.7 μm, specific surface area 9.2 m 2 /g
Dispersant (1): Futergent 710FL: a nonionic fluorine-containing dispersant manufactured by Neos (50% by weight of components, 50% by weight of ethyl acetate)
<実施例1>
プライミクス株式会社(旧社名:特殊機化工業株式会社)のT.K.HIVIS MIX(型式2P-03)の容器内に、粉粒状のフッ素系樹脂としてフッ素樹脂系パウダー(1)を58.7g、無機フィラーとしてヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)を141.3g、分散剤として分散剤(1)を20g及びDMAcを21.1g加え、30rpmで5分間撹拌をした。
Example 1
In a container of T.K.HIVIS MIX (Model 2P-03) manufactured by Primix Corporation (formerly Tokushu Kika Kogyo Co., Ltd.), 58.7 g of fluororesin powder (1) as a granular fluororesin, 141.3 g of silica filler (1) surface-treated with hexamethyldisilazane as an inorganic filler, and 20 g of dispersant (1) and 21.1 g of DMAc as dispersants were added, and the mixture was stirred at 30 rpm for 5 minutes.
次に、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)の全量に対する割合を微調整するため、DMAcを混練物に少量加え30rpmで5分間撹拌し混錬物の状態確認を行う作業を混練物が塊状になるまで繰り返し実施した。なお本検討では、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)の合計割合が全量に対して79重量%となった際に塊状となり、混錬物の塊内部にも粉状部分は観察されなかった。前記塊状になった状態から30rpmでの固練りを開始し、15分間隔で停止し、撹拌翼及び容器側壁の混練物のかき取りを実施した。この作業を計4回、合計60分間の固練りを行い、分散組成物1-1を得た。
分散組成物1-1は、流動性がなく粘度の測定ができないため、「固体」と判断した。
Next, in order to fine-tune the ratio of the fluororesin powder (1) and the silica filler (1) surface-treated with hexamethyldisilazane to the total amount, a small amount of DMAc was added to the kneaded mixture, and the mixture was stirred at 30 rpm for 5 minutes. The state of the kneaded mixture was then confirmed. This process was repeated until the mixture became lumpy. In this study, the mixture became lumpy when the total ratio of the fluororesin powder (1) and the silica filler (1) surface-treated with hexamethyldisilazane reached 79 wt% of the total amount, and no powdery portions were observed inside the kneaded mixture. From the lumpy state, kneading at 30 rpm was started, stopped at 15-minute intervals, and the kneaded mixture was scraped off from the stirring blades and the side walls of the container. This process was repeated four times for a total of 60 minutes, yielding Dispersion Composition 1-1.
Dispersion Composition 1-1 was determined to be a "solid" because it had no fluidity and its viscosity could not be measured.
その後、分散組成物1-1について、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)の合計割合が全量に対して70重量%となるようにDMAcで段階的な希釈及び撹拌を行い、50rpmで測定時の粘度1750cP、100rpmで測定時の粘度1420cPの分散組成物1-2を得た。 Dispersion composition 1-1 was then gradually diluted with DMAc and stirred so that the combined proportion of fluororesin powder (1) and silica filler surface-treated with hexamethyldisilazane (1) was 70% by weight of the total amount, yielding dispersion composition 1-2 with a viscosity of 1750 cP when measured at 50 rpm and 1420 cP when measured at 100 rpm.
分散組成物1-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが50μmとなるように塗工後、熱風オーブンを用いて120℃で3分、280℃で3分、340℃で6分の熱処理を行い、片面金属張積層板1を得た。得られた片面金属張積層板1に凝集物等は見られなかった。 Dispersion composition 1-2 was applied to copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 50 μm. The coating was then heat-treated in a hot air oven at 120°C for 3 minutes, 280°C for 3 minutes, and 340°C for 6 minutes to obtain single-sided metal-clad laminate 1. No agglomerates or other particles were observed in the resulting single-sided metal-clad laminate 1.
次に片面金属張積層板1の樹脂面同士を重ね合わせ、320℃で5分間、2MPaの圧力をかけてプレスを実施し、両面金属張積層板1を得た。得られた両面金属張積層板1について、塩化第二鉄水溶液を用いて銅箔をエッチング除去して、フッ素樹脂フィルム1を調製した。
フッ素樹脂フィルム1のCTEは22.8ppm/Kであり、調湿時の10GHzのDk=2.52、Df=0.0020、調湿時の60GHzのDk=2.61、Df=0.0023であった。
Next, the resin surfaces of the single-sided metal-clad laminates 1 were placed together and pressed at 320°C for 5 minutes under a pressure of 2 MPa to obtain a double-sided metal-clad laminate 1. The copper foil of the obtained double-sided metal-clad laminate 1 was etched away using an aqueous ferric chloride solution to prepare a fluororesin film 1.
The CTE of Fluororesin Film 1 was 22.8 ppm/K, and at 10 GHz after humidity conditioning, Dk was 2.52 and Df was 0.0020, and at 60 GHz after humidity conditioning, Dk was 2.61 and Df was 0.0023.
<実施例2>
プライミクス株式会社(旧社名:特殊機化工業株式会社)のT.K.HIVIS MIX(型式2P-03)の容器内に、粉粒状のフッ素系樹脂としてフッ素樹脂系パウダー(1)を58.7g、無機フィラーとしてヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)を141.3g、分散剤として分散剤(1)を20g及びDMAcを21.1g加え、30rpmで5分間撹拌をした。
Example 2
In a container of T.K.HIVIS MIX (Model 2P-03) manufactured by Primix Corporation (formerly Tokushu Kika Kogyo Co., Ltd.), 58.7 g of fluororesin powder (1) as a granular fluororesin, 141.3 g of silica filler (2) surface-treated with hexamethyldisilazane as an inorganic filler, and 20 g of dispersant (1) and 21.1 g of DMAc as dispersants were added, and the mixture was stirred at 30 rpm for 5 minutes.
次に、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の全量に対する割合を微調整するため、DMAcを混練物に少量加え30rpmで5分間撹拌し混錬物の状態確認を行う作業を混練物が塊状になるまで繰り返し実施した。なお本検討では、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して80.9重量%となった際に塊状となり、混錬物の塊内部にも粉状部分は観察されなかった。前記塊状になった状態から30rpmでの固練りを開始し、15分間隔で停止し、撹拌翼及び容器側壁の混練物のかき取りを実施した。この作業を計4回、合計60分間の固練りを行い、分散組成物2-1を得た。
分散組成物2-1は、流動性がなく粘度の測定ができないため、「固体」と判断した。
Next, to fine-tune the ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane to the total amount, a small amount of DMAc was added to the kneaded mixture, and the mixture was stirred at 30 rpm for 5 minutes. The state of the kneaded mixture was then confirmed. This process was repeated until the mixture became lumpy. In this study, the mixture became lumpy when the total ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane reached 80.9 wt% of the total amount, and no powdery portions were observed inside the kneaded mixture. From the lumpy state, kneading at 30 rpm was started, stopped at 15-minute intervals, and the kneaded mixture was scraped off from the stirring blades and the side walls of the container. This process was repeated four times for a total of 60 minutes, yielding Dispersion Composition 2-1.
Dispersion composition 2-1 was determined to be "solid" because it had no fluidity and its viscosity could not be measured.
その後、分散組成物2-1について、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して70重量%となるようにDMAcで段階的な希釈及び撹拌を行い、50rpmで測定時の粘度1980cP、100rpmで測定時の粘度1450cPの分散組成物2-2を得た。 Dispersion composition 2-1 was then gradually diluted with DMAc and stirred so that the combined weight of the fluororesin powder (1) and the silica filler surface-treated with hexamethyldisilazane (2) was 70% by weight, yielding dispersion composition 2-2 with a viscosity of 1980 cP when measured at 50 rpm and 1450 cP when measured at 100 rpm.
分散組成物2-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが50μmとなるように塗工後、熱風オーブンを用いて120℃で3分、280℃で3分、340℃で6分の熱処理を行い、片面金属張積層板2-1を得た。得られた片面金属張積層板2-1に凝集物等は見られなかった。 Dispersion composition 2-2 was applied to copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 50 μm. The coating was then heat-treated in a hot air oven at 120°C for 3 minutes, 280°C for 3 minutes, and 340°C for 6 minutes to obtain single-sided metal-clad laminate 2-1. No agglomerates or other particles were observed in the resulting single-sided metal-clad laminate 2-1.
次に片面金属張積層板2-1の樹脂面同士を重ね合わせ、320℃で5分間、2MPaの圧力をかけてプレスを実施し、両面金属張積層板2-1を得た。得られた両面金属張積層板2-1について、塩化第二鉄水溶液を用いて銅箔をエッチング除去して、フッ素樹脂フィルム2-1を調製した。
フッ素樹脂フィルム2-1のCTEは23.2ppm/Kであり、調湿時の10GHzのDk=2.67、Df=0.0024、調湿時の60GHzのDk=2.78、Df=0.0025であった。
Next, the resin surfaces of the single-sided metal-clad laminates 2-1 were placed together and pressed at 320°C for 5 minutes under a pressure of 2 MPa to obtain a double-sided metal-clad laminate 2-1. The copper foil of the obtained double-sided metal-clad laminate 2-1 was etched away using an aqueous ferric chloride solution to prepare a fluororesin film 2-1.
The CTE of the fluororesin film 2-1 was 23.2 ppm/K, and the values of Dk=2.67 and Df=0.0024 at 10 GHz after humidity conditioning, and Dk=2.78 and Df=0.0025 at 60 GHz after humidity conditioning.
<実施例3>
プライミクス株式会社(旧社名:特殊機化工業株式会社)のT.K.HIVIS MIX(型式2P-03)の容器内に、粉粒状のフッ素系樹脂としてフッ素樹脂系パウダー(1)を78.5g 、無機フィラーとしてヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)を121.5g、分散剤として分散剤(1)を20g及びDMAcを21.1g加え、30rpmで5分間撹拌をした。
Example 3
In a container of T.K. HIVIS MIX (Model 2P-03) manufactured by Primix Corporation (formerly Tokushu Kika Kogyo Co., Ltd.), 78.5 g of fluororesin powder (1) as a granular fluororesin, 121.5 g of silica filler (2) surface-treated with hexamethyldisilazane as an inorganic filler, and 20 g of dispersant (1) and 21.1 g of DMAc as dispersants were added, and the mixture was stirred at 30 rpm for 5 minutes.
次に、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の全量に対する割合を微調整するため、DMAcを混練物に少量加え30rpmで5分間撹拌し混錬物の状態確認を行う作業を混練物が塊状になるまで繰り返し実施した。なお本検討では、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して78.7重量%となった際に塊状となり、混錬物の塊内部にも粉状部分は観察されなかった。前記塊状になった状態から30rpmでの固練りを開始し、15分間隔で停止し、撹拌翼及び容器側壁の混練物のかき取りを実施した。この作業を計4回、合計60分間の固練りを行い、分散組成物3-1を得た。
分散組成物3-1は、流動性がなく粘度の測定ができないため、「固体」と判断した。
Next, to fine-tune the ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane to the total amount, a small amount of DMAc was added to the kneaded mixture, and the mixture was stirred at 30 rpm for 5 minutes. The state of the kneaded mixture was then confirmed. This process was repeated until the mixture became lumpy. In this study, the mixture became lumpy when the total ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane reached 78.7 wt% of the total amount, and no powdery portions were observed inside the kneaded mixture. From the lumpy state, kneading at 30 rpm was started, stopped at 15-minute intervals, and the kneaded mixture was scraped off from the stirring blades and the side walls of the container. This process was repeated four times for a total of 60 minutes, yielding Dispersion Composition 3-1.
Dispersion composition 3-1 was determined to be "solid" because it had no fluidity and its viscosity could not be measured.
その後、分散組成物3-1について、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して70重量%となるようにDMAcで段階的な希釈及び撹拌を行い、50rpmで測定時の粘度2590cP、100rpmで測定時の粘度1700cPの分散組成物3-2を得た。 Dispersion composition 3-1 was then gradually diluted with DMAc and stirred so that the combined weight of the fluororesin powder (1) and the silica filler surface-treated with hexamethyldisilazane (2) was 70% by weight, yielding dispersion composition 3-2 with a viscosity of 2590 cP when measured at 50 rpm and 1700 cP when measured at 100 rpm.
分散組成物3-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが50μmとなるように塗工後、熱風オーブンを用いて120℃で3分、280℃で3分、340℃で6分の熱処理を行い、片面金属張積層板3を得た。得られた片面金属張積層板3に凝集物等は見られなかった。 Dispersion composition 3-2 was applied to copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 50 μm. The coating was then heat-treated in a hot air oven at 120°C for 3 minutes, 280°C for 3 minutes, and 340°C for 6 minutes to obtain single-sided metal-clad laminate 3. No agglomerates or other particles were observed in the resulting single-sided metal-clad laminate 3.
次に片面金属張積層板3の樹脂面同士を重ね合わせ、320℃で5分間、2MPaの圧力をかけてプレスを実施し、両面金属張積層板3を得た。得られた両面金属張積層板3について、塩化第二鉄水溶液を用いて銅箔をエッチング除去して、フッ素樹脂フィルム3を調製した。
フッ素樹脂フィルム3のCTEは58.1ppm/Kであり、調湿時の10GHzのDk=2.96、Df=0.0023、調湿時の60GHzのDk=3.03、Df=0.0027であった。
Next, the resin surfaces of the single-sided metal-clad laminates 3 were placed together and pressed at 320°C for 5 minutes under a pressure of 2 MPa to obtain a double-sided metal-clad laminate 3. The copper foil of the obtained double-sided metal-clad laminate 3 was etched away using an aqueous ferric chloride solution to prepare a fluororesin film 3.
The CTE of the fluororesin film 3 was 58.1 ppm/K, and the values of Dk=2.96 and Df=0.0023 at 10 GHz after humidity conditioning, and Dk=3.03 and Df=0.0027 at 60 GHz after humidity conditioning.
<実施例4>
プライミクス株式会社(旧社名:特殊機化工業株式会社)のT.K.HIVIS MIX(型式2P-03)の容器内に、粉粒状のフッ素系樹脂としてフッ素樹脂系パウダー(1)を98.4g、無機フィラーとしてヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)を101.6g、分散剤として分散剤(1)を20g及びDMAcを21.1g加え、30rpmで5分間撹拌をした。
Example 4
In a container of T.K.HIVIS MIX (Model 2P-03) manufactured by Primix Corporation (formerly Tokushu Kika Kogyo Co., Ltd.), 98.4 g of fluororesin powder (1) as a granular fluororesin, 101.6 g of silica filler (2) surface-treated with hexamethyldisilazane as an inorganic filler, and 20 g of dispersant (1) and 21.1 g of DMAc as dispersants were added, and the mixture was stirred at 30 rpm for 5 minutes.
次に、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の全量に対する割合を微調整するため、DMAcを混練物に少量加え30rpmで5分間撹拌し混錬物の状態確認を行う作業を混練物が塊状になるまで繰り返し実施した。なお本検討では、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して78.3重量%となった際に塊状となり、混錬物の塊内部にも粉状部分は観察されなかった。前記塊状になった状態から30rpmでの固練りを開始し、15分間隔で停止し、撹拌翼及び容器側壁の混練物のかき取りを実施した。この作業を計4回、合計60分間の固練りを行い、分散組成物4-1を得た。
分散組成物4-1は、流動性がなく粘度の測定ができないため、「固体」と判断した。
Next, to fine-tune the ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane to the total amount, a small amount of DMAc was added to the kneaded mixture, and the mixture was stirred at 30 rpm for 5 minutes. The state of the kneaded mixture was then confirmed. This process was repeated until the mixture became lumpy. In this study, the mixture became lumpy when the total ratio of the fluororesin powder (1) and the silica filler (2) surface-treated with hexamethyldisilazane reached 78.3 wt% of the total amount, and no powdery portions were observed inside the kneaded mixture. From the lumpy state, kneading at 30 rpm was started, stopped at 15-minute intervals, and the kneaded mixture was scraped off from the stirring blades and the side walls of the container. This process was repeated four times for a total of 60 minutes, yielding Dispersion Composition 4-1.
Dispersion composition 4-1 was determined to be "solid" because it had no fluidity and its viscosity could not be measured.
その後、分散組成物4-1について、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して70重量%となるようにDMAcで段階的な希釈及び撹拌を行い、50rpmで測定時の粘度2320cP、100rpmで測定時の粘度1720cPの分散組成物4-2を得た。 Dispersion composition 4-1 was then gradually diluted with DMAc and stirred so that the combined weight of the fluororesin powder (1) and the silica filler surface-treated with hexamethyldisilazane (2) was 70% by weight, yielding dispersion composition 4-2 with a viscosity of 2,320 cP when measured at 50 rpm and 1,720 cP when measured at 100 rpm.
分散組成物4-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが50μmとなるように塗工後、熱風オーブンを用いて120℃で3分、280℃で3分、340℃で6分の熱処理を行い、片面金属張積層板4を得た。得られた片面金属張積層板4に凝集物等は見られなかった。 Dispersion composition 4-2 was applied to copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 50 μm. The coating was then heat-treated in a hot air oven at 120°C for 3 minutes, 280°C for 3 minutes, and 340°C for 6 minutes to obtain single-sided metal-clad laminate 4. No agglomerates or other particles were observed in the resulting single-sided metal-clad laminate 4.
次に片面金属張積層板4の樹脂面同士を重ね合わせ、320℃で5分間、2MPaの圧力をかけてプレスを実施し、両面金属張積層板4を得た。得られた両面金属張積層板4について、塩化第二鉄水溶液を用いて銅箔をエッチング除去して、フッ素樹脂フィルム4を調製した。
フッ素樹脂フィルム4のCTEは117.5ppm/Kであり、調湿時の10GHzのDk=2.73、Df=0.0023、調湿時の60GHzのDk=2.78、Df=0.0027であった。
Next, the resin surfaces of the single-sided metal-clad laminates 4 were placed together and pressed at 320°C for 5 minutes under a pressure of 2 MPa to obtain a double-sided metal-clad laminate 4. The copper foil of the obtained double-sided metal-clad laminate 4 was etched away using an aqueous ferric chloride solution to prepare a fluororesin film 4.
The CTE of Fluororesin Film 4 was 117.5 ppm/K, and at 10 GHz after humidity conditioning, Dk was 2.73 and Df was 0.0023, and at 60 GHz after humidity conditioning, Dk was 2.78 and Df was 0.0027.
<実施例5>
実施例2で得られた分散組成物2-1をフッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(2)の合計割合が全量に対して74重量%又は72重量%となるように、それぞれDMAcで段階的な希釈及び撹拌を行った。74重量%とした分散組成物2-3の粘度は、50rpmで測定時に5160cP、100rpmで測定時に3310cPであり、72重量%とした分散組成物2-4では50rpmで測定時の粘度3320cP、100rpmで測定時の粘度2350cPであった。
Example 5
The dispersion composition 2-1 obtained in Example 2 was diluted stepwise with DMAc and stirred so that the total proportion of the fluororesin powder (1) and the silica filler surface-treated with hexamethyldisilazane (2) was 74 wt % or 72 wt % of the total amount. The viscosity of the 74 wt % dispersion composition 2-3 was 5160 cP when measured at 50 rpm and 3310 cP when measured at 100 rpm, while the viscosity of the 72 wt % dispersion composition 2-4 was 3320 cP when measured at 50 rpm and 2350 cP when measured at 100 rpm.
<実施例6>
実施例2で得られた分散組成物2-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが75μmとなるように塗工後、熱風オーブンを用いて120℃で4分30秒、280℃で4分30秒、340℃で9分の熱処理を行い、片面金属張積層板2-2を得た。
得られた片面金属張積層板2-2に凝集物等は見られなかった。
Example 6
The dispersion composition 2-2 obtained in Example 2 was applied to a copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 75 μm, and then heat treatment was carried out using a hot air oven at 120°C for 4 minutes 30 seconds, 280°C for 4 minutes 30 seconds, and 340°C for 9 minutes to obtain a single-sided metal-clad laminate 2-2.
No agglomerates or the like were observed in the resulting single-sided metal-clad laminate 2-2.
次に片面金属張積層板2-2の樹脂面同士を重ね合わせ、320℃で5分間、2MPaの圧力をかけてプレスを実施し、両面金属張積層板2-2を得た。得られた両面金属張積層板2-2について、塩化第二鉄水溶液を用いて銅箔をエッチング除去して、フッ素樹脂フィルム2-2を調製した。
フッ素樹脂フィルム2-2のCTEは23.4ppm/Kであり、調湿時の10GHzのDk=2.65、Df=0.0024、調湿時の60GHzのDk=2.76、Df=0.0025であった。
Next, the resin surfaces of the single-sided metal-clad laminates 2-2 were placed together and pressed at 320°C for 5 minutes under a pressure of 2 MPa to obtain a double-sided metal-clad laminate 2-2. The copper foil of the obtained double-sided metal-clad laminate 2-2 was etched away using an aqueous ferric chloride solution to prepare a fluororesin film 2-2.
The fluororesin film 2-2 had a CTE of 23.4 ppm/K, Dk=2.65 and Df=0.0024 at 10 GHz after humidity conditioning, and Dk=2.76 and Df=0.0025 at 60 GHz after humidity conditioning.
<比較例1>
プライミクス株式会社(旧社名:特殊機化工業株式会社)のT.K.HIVIS MIX(型式2P-03)の容器内に、粉粒状のフッ素系樹脂としてフッ素樹脂系パウダー(1)を58.7g、無機フィラーとしてヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)を141.3g、分散剤として分散剤(1)を20g及びDMAcを55.1g加え、30rpmで5分間撹拌をした。この際、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)の合計割合が全量に対して72.7重量%であり、高粘度の粘性混錬物となり、固練りが実施できない状態であった。前記高粘度の粘性混練物について、30rpmでの撹拌を行い、15分間隔で停止、撹拌翼及び容器側壁の混練物のかき取りを実施した。この作業を計4回、合計60分間の撹拌を行い、分散組成物5-1を得た。
分散組成物5-1の粘度は、5rpmで測定時の粘度89300cP、10rpmで測定時の粘度52300cPであった。
<Comparative Example 1>
Into a container of a T.K. HIVIS MIX (Model 2P-03) manufactured by PRIMIX Corporation (formerly Tokushu Kika Kogyo Co., Ltd.), 58.7 g of fluororesin powder (1) as a granular fluororesin, 141.3 g of silica filler (1) surface-treated with hexamethyldisilazane as an inorganic filler, 20 g of dispersant (1) and 55.1 g of DMAc as dispersants were added, and the mixture was stirred at 30 rpm for 5 minutes. At this time, the total proportion of fluororesin powder (1) and silica filler (1) surface-treated with hexamethyldisilazane was 72.7 wt% of the total amount, resulting in a highly viscous kneaded mixture that could not be kneaded into a solid state. The highly viscous kneaded mixture was stirred at 30 rpm, stopped at 15-minute intervals, and the kneaded mixture was scraped off the stirring blades and the side walls of the container. This operation was repeated four times for a total of 60 minutes of stirring, to obtain Dispersion Composition 5-1.
The viscosity of Dispersion Composition 5-1 was 89,300 cP when measured at 5 rpm and 52,300 cP when measured at 10 rpm.
その後、分散組成物5-1について、フッ素樹脂系パウダー(1)とヘキサメチルジシラザンでの表面処理をしたシリカフィラー(1)の合計割合が全量に対して70重量%となるようにDMAcで段階的な希釈及び撹拌を行い、50rpmで測定時の粘度1720cP、100rpmで測定時の粘度1410cPの分散組成物5-2を得た。 Dispersion composition 5-1 was then gradually diluted with DMAc and stirred so that the combined proportion of fluororesin powder (1) and silica filler surface-treated with hexamethyldisilazane (1) was 70% by weight of the total amount, yielding dispersion composition 5-2 with a viscosity of 1720 cP when measured at 50 rpm and 1410 cP when measured at 100 rpm.
分散組成物5-2について、銅箔(電解銅箔、厚さ;12μm、樹脂層側の表面粗度Rz;0.6μm)の上に、熱処理後の厚みが50μmとなるように塗工後、熱風オーブンを用いて120℃で3分、280℃で3分、340℃で6分の熱処理を行い、金属張積層板5を得た。得られた金属張積層板5には目視で観察できる100μm以上の凝集物が全面に見られた。 Dispersion composition 5-2 was applied to copper foil (electrolytic copper foil, thickness: 12 μm, surface roughness Rz on the resin layer side: 0.6 μm) so that the thickness after heat treatment would be 50 μm. The coating was then heat-treated in a hot air oven at 120°C for 3 minutes, 280°C for 3 minutes, and 340°C for 6 minutes to obtain metal-clad laminate 5. Visually observable aggregates of 100 μm or larger were observed over the entire surface of the obtained metal-clad laminate 5.
以上、本発明の実施の形態を例示の目的で詳細に説明したが、本発明は上記実施の形態に制約されることはなく、種々の変形が可能である。
Although the embodiments of the present invention have been described in detail above for the purpose of illustration, the present invention is not limited to the above-described embodiments and various modifications are possible.
Claims (7)
(A)粉粒状フッ素系樹脂、
(B)無機フィラー、
(C)分散剤、
を含有し、E型粘度計を用い、25℃で測定した粘度が1000cP以上であり、
全重量に対して、成分(A)及び成分(B)の合計割合が75重量%以上であり、固体状である分散組成物。
(ただし、粘度測定において設定する回転数は、設定された回転数で得られた粘度が設定した回転数のトルクの10%~90%範囲内の粘度範囲であるようにし、固体状となり粘度測定ができないものも含むものとする。) A dispersion composition for use in forming an insulating resin layer of a circuit board, comprising the following components (A) to (C):
(A) a powdery fluorine-based resin;
(B) an inorganic filler;
(C) a dispersant,
and having a viscosity of 1000 cP or more measured at 25°C using an E-type viscometer,
A dispersion composition that is solid and contains component (A) and component (B) in a total amount of 75% by weight or more based on the total weight.
(However, the rotation speed set in viscosity measurement should be such that the viscosity obtained at the set rotation speed is within a viscosity range of 10% to 90% of the torque at the set rotation speed, and this includes cases where the viscosity becomes solid and cannot be measured.)
成分(A)と成分(B)の合計割合…全重量の75~99重量%の範囲内、
成分(A)と成分(B)の体積比率(A:B)…15:85~95:5の範囲内、
成分(C)の割合…全重量の1~15重量%の範囲内、
成分(D)としての極性溶剤の割合…全重量の0~24重量%、
を有する請求項1に記載の分散組成物。 The composition below:
The total ratio of component (A) and component (B) is within the range of 75 to 99% by weight of the total weight.
The volume ratio of component (A) to component (B) (A:B) is within the range of 15:85 to 95:5.
Proportion of component (C): in the range of 1 to 15% by weight of the total weight,
Proportion of polar solvent as component (D): 0 to 24% by weight of the total weight;
The dispersion composition of claim 1 having the formula:
粉粒状フッ素系樹脂と無機フィラーを含む複数の材料を混練する分散組成物の製造方法であって、
前記粉粒状フッ素系樹脂と、前記無機フィラーと、分散剤と、極性溶剤と、を混合する工程と、
混合物の全重量に対して前記粉粒状フッ素系樹脂及び前記無機フィラーの合計割合が75重量%以上となる状態で固練りすることによって固体状の第1の分散組成物を得る工程と、
を含むことを特徴とする分散組成物の製造方法。 A method for producing the dispersion composition according to claim 1,
A method for producing a dispersion composition by kneading a plurality of materials including a particulate fluorine-based resin and an inorganic filler,
a step of mixing the powdery fluorine-based resin, the inorganic filler, a dispersant, and a polar solvent;
a step of obtaining a solid first dispersion composition by kneading the mixture in a state in which the total weight of the mixture contains the powdery fluororesin and the inorganic filler at 75% by weight or more;
A method for producing a dispersion composition, comprising:
を含む分散組成物の製造方法。
(ただし、粘度測定において設定する回転数は、設定された回転数で得られた粘度が設定した回転数のトルクの10%~90%範囲内の粘度範囲であるようにするものとする。) a step of diluting the first dispersion composition obtained by the method according to claim 4 with a polar solvent to obtain a second dispersion composition in which the total weight of the particulate fluororesin and the inorganic filler is in the range of 60 to 75% by weight based on the total weight of all components, and the viscosity measured at 25°C using an E-type viscometer is in the range of 1000 cP to 50000 cP;
A method for producing a dispersion composition comprising:
(However, the rotation speed set in viscosity measurement should be such that the viscosity obtained at the set rotation speed is within a viscosity range of 10% to 90% of the torque at the set rotation speed.)
前記塗布膜を熱処理することによりフッ素系樹脂層を形成する工程と、
を含むフッ素系樹脂フィルムの製造方法。 A step of applying the second dispersion composition obtained by the method according to claim 5 to a substrate to form a coating film;
a step of forming a fluorine-based resin layer by heat-treating the coating film;
A method for producing a fluorine-based resin film, comprising:
前記塗布膜を熱処理することにより、フッ素系樹脂層と金属層とが積層された金属張積層板を得る工程と、
を含む金属張積層板の製造方法。
A step of applying the second dispersion composition obtained by the method according to claim 5 to a metal foil to form a coating film;
a step of heat-treating the coating film to obtain a metal-clad laminate in which a fluororesin layer and a metal layer are laminated;
A method for producing a metal-clad laminate comprising:
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Citations (6)
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|---|---|---|---|---|
| JP2000073001A (en) | 1998-08-28 | 2000-03-07 | Asahi Glass Co Ltd | Fluororesin coating composition |
| WO2008078704A1 (en) | 2006-12-22 | 2008-07-03 | Asahi Glass Company, Limited | Fluororesin film and method for producing the same |
| WO2020184438A1 (en) | 2019-03-12 | 2020-09-17 | Agc株式会社 | Liquid composition, ferroelectric insulation sheet, and method for producing same |
| WO2020235532A1 (en) | 2019-05-21 | 2020-11-26 | Agc株式会社 | Dispersion solution and molded product |
| WO2021024883A1 (en) | 2019-08-06 | 2021-02-11 | Agc株式会社 | Substrate and metal laminate |
| WO2021221038A1 (en) | 2020-04-30 | 2021-11-04 | Agc株式会社 | Method for producing dispersion, paste, and kneaded powder |
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|---|---|---|---|---|
| JP2000073001A (en) | 1998-08-28 | 2000-03-07 | Asahi Glass Co Ltd | Fluororesin coating composition |
| WO2008078704A1 (en) | 2006-12-22 | 2008-07-03 | Asahi Glass Company, Limited | Fluororesin film and method for producing the same |
| WO2020184438A1 (en) | 2019-03-12 | 2020-09-17 | Agc株式会社 | Liquid composition, ferroelectric insulation sheet, and method for producing same |
| WO2020235532A1 (en) | 2019-05-21 | 2020-11-26 | Agc株式会社 | Dispersion solution and molded product |
| WO2021024883A1 (en) | 2019-08-06 | 2021-02-11 | Agc株式会社 | Substrate and metal laminate |
| WO2021221038A1 (en) | 2020-04-30 | 2021-11-04 | Agc株式会社 | Method for producing dispersion, paste, and kneaded powder |
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