JP7832049B2 - ELID processing apparatus, ELID processing method, and method for manufacturing electronic components - Google Patents

Description

This invention relates to an ELID processing apparatus, an ELID processing method, and a method for manufacturing electronic components using these.

ELID (Electrolytic In-Process Dressing) is a well-known technology for grinding and processing hard materials such as ceramics, glass, and metals. In ELID, the dressing of the grinding wheel (blade) is performed in parallel with the processing process by supplying an electrolyte solution between the grinding wheel and the electrode.

ELID can be used in various processing steps such as grinding, polishing, and cutting. For example, ELID is seeing increasing industrial applications in surface grinding machines and lens mirror polishing. On the other hand, applications of ELID in other fields are also conceivable; for instance, it could be used in wet cutting machines (dicers) for cutting ceramic substrates used as materials for small electronic components.

Japanese Patent Publication No. 2005-74544

However, the inventors have revealed that when ELID is industrially applied to fields such as wet cutting, challenges arise in supplying electrolyte to a vertically rotating blade. In particular, as the blade rotation speed increases, conventional devices find it difficult to accurately supply electrolyte to the area near the blade's top, even when aiming to dispense it between the blade's top and the electrode. This results in problems such as improper blade dressing. This is thought to be due to the high-speed rotation of the blade causing the dispensed electrolyte to be dragged along by the blade's rotation, resulting in a deviation from the intended discharge position. Furthermore, the increased airflow generated in the direction of the blade's rotation also contributes to the problem, as this airflow can cause the dispensed electrolyte to deviate from the target position.

This disclosure provides a vertical rotation type ELID processing apparatus, etc., that can properly dress the blade with an electrolyte solution even when the blade rotation speed is high.

An ELID processing apparatus according to one embodiment of the present disclosure,
A vertically rotating blade,
A nozzle section that discharges electrolyte toward the vicinity of the top position of the blade,
An electrode portion provided on the side of the blade in the rotational direction from near the top position,
A power supply unit that forms an electric field between the electrode portion and the blade,
The system includes a drive unit that rotates the blade,
The height t from the lower end of the nozzle opening through which the nozzle portion discharges the electrolyte to the horizontal plane of the rotation center, which is the horizontal plane passing through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
That is the case.

Such an ELID processing apparatus is advantageous in that it supplies electrolyte to the vicinity of the blade's apex, thereby ensuring proper electrolyte supply between the high-speed rotating blade and the electrode. Furthermore, by ensuring that the relationship between the height t from the lower end of the nozzle opening that discharges the electrolyte to the horizontal plane of the rotation center and the blade's radius r is within a predetermined range, the electrolyte is properly supplied between the vicinity of the blade's apex and the electrode, allowing for proper blade dressing by the electric field and electrolyte. If the nozzle opening height is too high, the electrolyte will veer upward from the vicinity of the blade's apex; if the nozzle opening height is too low, the electrolyte will not be retained near the blade's apex until the electric field is formed, making proper blade dressing difficult in either case.

Also, for example, the height t is,
0.036 ≤ (r - t) / r ≤ 0.073 is also acceptable.

Thus, the height t from the lower end of the nozzle opening to the horizontal plane of the rotation center is preferably within a predetermined range close to the blade radius r, and more preferably within a predetermined range slightly lower than the blade radius r.

Furthermore, for example, the flow path direction in the nozzle portion, which is the direction in which the electrolyte flows, may be inclined toward the nozzle opening in a direction that approaches the horizontal plane of the rotation center.

By tilting the nozzle's flow path downwards in this manner, it is possible to correct the deviation of the discharged electrolyte from the target discharge position due to the influence of the airflow in the rotational direction generated by the blade's rotation. This is advantageous for properly supplying the electrolyte between the blade and the electrode.

Furthermore, for example, the flow path direction, which is the direction in which the electrolyte flows through the nozzle, may be substantially parallel to the horizontal plane of the rotation center.

By arranging the nozzle's flow path approximately parallel to the horizontal rotation plane in this manner, the electrolyte can be supplied to the vicinity of the blade's apex from the tangential direction of the blade. Therefore, this is advantageous for supplying the electrolyte to the vicinity of the blade's apex and in the direction of the blade's rotation.

Furthermore, for example, the magnitude of the first angle formed by the first line connecting the lower end of the nozzle opening and the rotation center of the blade with a second line passing through the rotation center and perpendicular to the horizontal plane of the rotation center may be between 18.5 and 27.0 degrees.

By setting the first angle to 27.0 degrees or less, interference between the nozzle opening and the blade can be avoided. Furthermore, by setting the first angle to 18.5 degrees or more, the nozzle opening and the top of the blade can be brought closer together, allowing for efficient supply of the electrolyte to the vicinity of the blade's top.

Furthermore, for example, the magnitude of the second angle formed by the first line connecting the lower end of the nozzle opening and the rotation center of the blade with the third line connecting the upper end of the nozzle opening and the rotation center of the blade may be between 25.5 and 34.0 degrees.

By setting the second angle to this range, interference between the nozzle and the blade can be avoided, the center of the nozzle opening can be brought closer to the top of the blade, and the nozzle can be brought closer to the electrode.

Furthermore, for example, at least a portion of the opening surface of the nozzle opening may be curved in an arc shape.

Because the outer edge of the blade is arc-shaped, a nozzle opening with such an arc-shaped opening surface can have its opening center positioned closer to the top of the blade.

Furthermore, for example, the first extension line extending from the lower end of the nozzle opening parallel to the flow path direction toward the electrode portion may intersect the blade.
The second extension line, which extends from the upper end of the nozzle opening parallel to the flow direction toward the electrode portion, does not have to intersect the blade.

By positioning the nozzle opening in this manner relative to the blade, the electrolyte can be efficiently supplied to the vicinity of the blade's top.

Furthermore, for example, the nozzle portion may have an opposing surface that curves in an arc toward the outer edge of the blade and on which at least a portion of the nozzle opening is formed, and an outer surface on which an inlet opening, which is the opening of the flow path opposite to the nozzle opening, is formed.

Such a nozzle section allows for the nozzle opening to be positioned close to the top of the blade, while also forming a flow path inside, and positioning the inlet opening in a location that facilitates connection from other components.

Furthermore, for example, the nozzle portion may have an opposing surface on which at least a portion of the nozzle opening is formed and which curves in an arc facing the outer edge of the blade, and a cover portion that protrudes toward the rotation center from one end and the other end of the blade in the direction of rotation axis on the opposing surface, and sandwiches the outer edge of the blade from both sides in the direction of rotation axis.

By having a cover portion, this type of nozzle can suppress the problem of the electrolyte deviating from the target position due to the airflow generated by the rotating blade.

Furthermore, an ELID processing method according to one embodiment of this disclosure includes a step of rotating a blade vertically with a drive unit,
A process of discharging electrolyte from the nozzle towards the vicinity of the top of the blade,
A step of generating an electric field between the blade and an electrode portion provided on the side of the blade in the rotational direction from near the top position of the blade,
The process includes the step of bringing the blade into contact with the workpiece,
The height t from the lower end of the nozzle opening through which the nozzle portion discharges the electrolyte to the horizontal plane of the rotation center, which is the horizontal plane passing through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
That is the case.

According to this ELID processing method, even when the blade rotation speed and rotational frequency are further increased, the electrolyte is appropriately supplied between the vicinity of the blade's apex and the electrode, allowing for proper dressing of the blade by the electric field and electrolyte.

Furthermore, a method for manufacturing an electronic component according to one embodiment of this disclosure includes a step of processing a ceramic material using the ELID processing method described above.

This method of manufacturing electronic components allows for efficient processing of ceramic materials using the ELID (Electron-Liquid Ion) processing method, thereby increasing the production efficiency of electronic components.

Figure 1 is a front view showing the main parts of the ELID processing apparatus according to the embodiment. Figure 2 is a cross-sectional view showing the positional relationship between the blade and the electrode section of the ELID processing apparatus shown in Figure 1. Figure 3 is a conceptual diagram showing the overall configuration of the ELID processing apparatus shown in Figure 1. Figure 4 is a conceptual diagram illustrating the arrangement of the nozzle section in the ELID processing apparatus shown in Figure 1. Figure 5 is a plan view showing the shape of the nozzle body of the nozzle section in the ELID processing apparatus shown in Figure 1. Figure 6 is a plan view showing the shape of the nozzle cover member in the ELID processing apparatus shown in Figure 1. Figure 7 is a magnified view of the area around the nozzle opening of the ELID processing apparatus shown in Figure 4. Figure 8 is a conceptual diagram illustrating the non-conductive coating formed on the outer edge of the blade shown in Figure 2.

In the following first embodiments , the present disclosure will be described based on embodiments shown in the drawings. Figure 1 is a schematic diagram of an ELID processing apparatus 10 according to one embodiment of the present disclosure. As shown in Figure 1, the ELID processing apparatus 10 has a vertically rotating blade 20, a nozzle section 30 for discharging an electrolytic solution, and an electrode section 50.

The blade 20 of the ELID processing apparatus 10 rotates vertically around the rotation center 24 in the rotational direction 23 indicated by the arrow in Figure 1. The blade 20 can, for example, include a conductive binder (bond) and diamond abrasive particles embedded in the binder, but is not particularly limited as long as it is capable of being dressed by ELID.

The top position 22 of the blade 20 is the highest point on the blade 20, and is also the position where a second line 26, which passes through the rotation center 24 and is perpendicular to the rotation center horizontal plane 25, intersects the outer edge 21 of the blade 20 above the rotation center 24. The electrode portion 50 is provided near the top position 22 of the blade 20, on the side of the blade 20 in the rotational direction 23.

In the description of the ELID processing apparatus 10, the height direction perpendicular to the horizontal plane is referred to as the Z-axis direction, the direction perpendicular to the Z-axis direction and parallel to the rotation plane of the blade 20 is referred to as the X-axis direction, and the direction perpendicular to the Z-axis direction and parallel to the rotation axis of the blade 20 is referred to as the Y-axis direction.

Figure 2 is a cross-sectional view of the ELID processing apparatus 10 shown in Figure 1, taken along the II-II line parallel to the Z-axis. As shown in Figure 2, the electrode portion 50 faces the outer edge 21 of the blade 20, which is rotatably supported by the blade support portion 66. The electrode portion 50 includes an electrode body portion 51 facing the outer edge 21 of the blade 20 from the outer diameter direction, an electrode support portion 53 that supports the electrode body portion 51, and an electrode cover member 52 that sandwiches the electrode body portion 51 between the electrode support portion 53 and the electrode cover member 52.

As shown in Figure 2, the electrode support portion 53 and the electrode cover member 52 are positioned on both sides of the electrode body portion 51 in the rotation axis direction 27 of the blade 20. The electrode body portion 51, the electrode support portion 53, and the electrode cover member 52 form grooves through which the outer edge 21 of the blade 20 passes. The end of the groove opposite to the rotational direction 23 is the electrolyte introduction portion 54, which is supplied with electrolyte by the nozzle portion 30, described later.

The electrolyte introduction section 54 is positioned near the top position 22, preferably within a region of 45 degrees from the top position 22 toward the rotational direction 23, and more preferably within a region of 30 degrees. In this embodiment, the electrolyte introduction section 54 is positioned within a region of 15 degrees from the top position 22 toward the rotational direction 23 relative to the blade 20.

As shown in Figure 1, the nozzle portion 30 is positioned on the reverse rotation side of the electrode portion 50, opposite to the forward rotation direction 23. The nozzle portion 30 has a flow path 40 through which the electrolyte flows, and discharges the electrolyte toward the vicinity of the top position 22 of the blade 20. As previously mentioned, the electrolyte introduction portion 54 of the electrode portion 50 is located near the top position 22, and the electrolyte discharged from the nozzle portion 30 is supplied to the minute gap (see Figure 2) between the vicinity of the top position 22 of the blade 20 and the electrode body portion 51. The shape and arrangement of the nozzle portion 30 will be described in detail later using Figures 5 and 7.

Figure 3 is a conceptual diagram showing the overall configuration of the ELID processing apparatus 10 shown in Figure 1. In addition to the blade 20, nozzle section 30, and electrode section 50, the ELID processing apparatus 10 includes a drive unit 65, electrolyte supply unit 70, power supply unit 60, and movement control unit 75, etc.

The drive unit 65 rotates the blade 20 at a predetermined rotational speed. While the rotational speed of the blade 20 achieved by the drive unit 65 is not particularly limited, it is preferably 10,000 to 60,000 rpm, and more preferably 40,000 to 50,000 rpm. By setting the blade 20 to such a rotational speed, suitable mass productivity can be ensured even when the ELID processing apparatus 10 is applied as a wet cutting machine (dicer) for cutting ceramic substrates.

The power supply unit 60 generates a potential difference between the blade 20, which acts as the dynamic electrode, and the electrode body 51 (see Figure 2) of the electrode unit 50, which acts as the static electrode, thereby forming an electric field between the electrode unit 50 and the blade 20. As shown in Figures 1 and 2, when electrolyte is supplied from the nozzle unit 30 between the electrode unit 50 and the outer edge 21 of the blade 20, the bond contained in the blade 20 is electrolyzed, causing abrasive particles to protrude and dressing the blade 20. Furthermore, a portion of the electrolytically dissolved bond forms a non-conductive film on the outer edge 21 of the blade 20. Because the electrolytic current changes due to this non-conductive film, the dissolution of the bond is automatically adjusted (ELID cycle).

The electrolyte supply unit 70 supplies the electrolyte to the flow path 40 formed in the nozzle unit 30. Examples of electrolytes used in the ELID processing apparatus 10 include alkaline electrolytes such as sodium hydroxide aqueous solution or potassium hydroxide aqueous solution, but other electrolytes that form the ELID cycle may also be used.

The movement control unit 75 changes the relative position between the workpiece 80, which is the target of processing by the ELID processing device 10, and the blade 20, thereby enabling processing of the workpiece 80 by the blade 20. For example, the movement control unit 75 controls the position of the stage on which the workpiece 80 is placed, and by bringing the blade 20 into contact with the workpiece 80, it can advance the cutting and grinding of the workpiece 80 by the ELID processing device 10.

Figure 4 is a conceptual diagram showing the arrangement of the nozzle section 30 in the ELID processing apparatus 10 shown in Figure 1. The nozzle section 30 is composed of two components: the nozzle body section 31 shown in Figure 5 and the nozzle cover member 43 shown in Figure 6. The nozzle section 30 is positioned opposite the outer edge 21 of the blade 20 and adjacent to the electrode section 50.

Figure 5 is a plan view of the nozzle body 31 from four directions: the negative Y-axis direction (Figure 5(a)), the positive X-axis direction (Figure 5(b)), the positive Y-axis direction (Figure 5(c)), and the negative X-axis direction (Figure 5(d)). As shown in Figures 4 and 5, the flow path 40 formed in the nozzle portion 30 is composed of a through-hole that penetrates the nozzle portion 30 in a substantially horizontal direction.

In other words, as shown in Figure 4, the flow direction 41, which is the direction in which the flow path 40 through which the electrolyte flows in the nozzle portion 30 extends, is parallel to the horizontal plane of the rotation center 25, which is the horizontal plane passing through the rotation center 24 of the blade 20. The nozzle opening 33 through which the electrolyte is discharged from the nozzle portion 30 opens on the side of the nozzle portion 30 on the electrode portion 50 side (positive X-axis direction side), as shown in Figure 5(b).

As shown in Figures 4 and 5(c), the nozzle portion 30 has an opposing surface 32 that curves in an arc shape opposite the outer edge 21 of the blade 20. As shown in Figure 5(b), at least a portion of the nozzle opening 33 is formed on the opposing surface 32. More specifically, the lower portion of the nozzle opening 33, including the opening center 34 (see Figure 7) and the lower end 35 of the nozzle opening 33, is formed on the curved opposing surface 32. Therefore, at least a portion of the opening surface 37 (see Figure 7) of the nozzle opening 33 is curved in an arc shape, similar to the opposing surface 32.

Furthermore, as shown in Figures 5(a) and 5(b), the upper end 36 of the nozzle opening 33 is formed on the inner surface 46, which is perpendicular to the flow path direction 41 and faces the electrode portion 50 side (positive X-axis direction). That is, the nozzle opening 33 of the nozzle portion 30 is formed spanning the inner surface 46 perpendicular to the flow path direction 41 and the opposing surface 32 that curves opposite to the outer edge 21 of the blade 20.

As shown in Figures 5(c) and 5(d), the inlet opening 39, which is the opening of the flow path 40 opposite to the nozzle opening 33, is formed on the outer surface 38 of the nozzle section 30. The outer surface 38 is perpendicular to the flow path direction 41 and faces the opposite side (negative X-axis direction) from the electrode section 50. Electrolyte is supplied to the inlet opening 39 from the electrolyte supply section 70 shown in Figure 3. Note that the inner surface 46 and outer surface 38 of the nozzle section 30 are also surfaces perpendicular to the rotation center horizontal plane 25 shown in Figure 4.

As shown in Figure 4, the height t from the lower end 35 of the nozzle opening 33 to the horizontal plane 25 of the rotation center satisfies the following equation 1, where r is the radius of the blade 20.

0.036 ≤ (r - t) / r ≤ 0.092 (Equation 1)

By satisfying Equation 1, the height t of the lower end 35 of the opening coincides with, or is very close to, the top position 22 of the blade 20. This makes it possible to properly supply the electrolyte to the gap between the outer edge 21 of the blade 20 and the electrode body 51, as shown in Figure 2, even at high rotational speeds of the blade 20.

Furthermore, it is even more preferable that the height t of the opening center 34 from the rotation center horizontal plane 25 satisfies the following equation 2.

0.036 ≤ (r - t) / r ≤ 0.073 (Equation 2)

By satisfying equation 2, the height t of the lower end 35 of the opening becomes slightly lower than the top position 22 of the blade 20. This allows for more efficient supply of electrolyte to the gap between the outer edge 21 of the blade 20 and the electrode body 51. Even when the blade's rotation speed and rotation rate are further increased, the electrolyte is properly supplied between the vicinity of the blade's top position and the electrode, enabling proper dressing of the blade by the electric field and electrolyte.

Figure 7 is a magnified partial view of the area around the nozzle opening 33 of the ELID processing apparatus 10 shown in Figure 4. As shown in Figure 7, the first angle θ1 formed by the first line 35a, which connects the lower end 35 of the nozzle opening 33 and the rotation center 24 of the blade 20, with respect to a second line 26 that passes through the rotation center 24 and is perpendicular to the rotation center horizontal plane 25, is preferably 18.5 to 27.0 degrees. This allows the nozzle opening 33 to be positioned closer to the top position 22 of the blade 20 while avoiding interference between the nozzle section 30 and the blade 20, thereby shortening the travel distance of the electrolyte from the nozzle opening 33 to the electrode section 50 (electrolyte introduction section 54).

Furthermore, as shown in Figure 7, the second angle θ2 formed by the first line 35a, which connects the lower end 35 of the nozzle opening 33 and the rotation center 24 of the blade 20, with respect to the third line 36a, which connects the upper end 36 of the nozzle opening 33 and the rotation center 24 of the blade 20, is preferably 25.5 to 34.0 degrees. This prevents the electrolyte from traveling an excessively long distance while increasing the opposing length between the nozzle opening 33 and the outer edge 21 of the blade 20, thereby allowing for more efficient supply of the electrolyte to the gap between the outer edge 21 of the blade 20 and the electrode body 51.

As shown in Figure 7, in the nozzle section 30, the first extension line 35b, which extends from the lower end 35 of the nozzle opening 33 toward the electrode section 50 parallel to the flow path direction 41, intersects the blade 20. On the other hand, the second extension line 36b, which extends from the upper end 36 of the nozzle opening 33 toward the electrode section 50 parallel to the flow path direction 41, does not intersect the blade 20. This type of nozzle section 30, combined with the fact that the height t of the opening center 34 satisfies equation 2, enables efficient supply of electrolyte to the electrolyte introduction section 54 near the top position 22.

Furthermore, as shown in Figure 7, in the nozzle section 30, the second angle θ2 is greater than the first angle θ1. Therefore, the upper end 36 of the nozzle opening 33 is positioned in the rotational direction 23 relative to the top position 22 of the blade 20, while the lower end 35 of the nozzle opening 33 is positioned in the rotational direction opposite to the top position 22 of the blade 20. This arrangement of the nozzle section 30 also contributes to the efficient supply of electrolyte to the electrolyte introduction section 54, which is located near the top position 22.

The nozzle cover member 43 shown in Figure 6 is attached to the mounting surface 45 of the nozzle body 31 shown in Figure 5(c). The nozzle cover member 43 has an arc-shaped outer form, and the second protruding edge 44, which is the inner periphery of the nozzle cover member 43, overlaps the blade 20 when viewed from the rotation axis direction 27 (Y-axis direction), as shown in Figure 4. Similarly, the first protruding edge 42, which is the inner periphery of the nozzle body 31 shown in Figure 5(c), also overlaps the blade 20 when viewed from the rotation axis direction 27 (Y-axis direction), as shown in Figure 4.

Specifically, as shown in Figure 4, the first protruding edge 42 of the nozzle body and the second protruding edge 44 of the nozzle cover member 43 protrude toward the rotation center 24 from one and the other ends in the rotation axis direction 27 on the opposing surface 32, forming a cover portion 48 that sandwiches the outer edge 21 of the blade 20 from both sides in the rotation axis direction 27. The cover portion 48 covers the area around the portion where the nozzle opening 33 and the outer edge 21 of the blade 20 face each other, preventing the electrolyte exiting the nozzle opening 33 from being dispersed by wind caused by the rotation of the blade 20.

As shown in Figure 3, the ELID processing method using the ELID processing apparatus 10 can be carried out by, for example, the steps of: rotating the blade 20 vertically with the drive unit 65; discharging the electrolyte from the nozzle unit 30 toward the vicinity of the top position 22 of the blade 20; generating an electric field between the electrode unit 50 and the blade 20; and bringing the blade 20 into contact with the workpiece 80.

The workpiece 80 in the ELID processing method is not particularly limited, but examples include ceramic materials used in the manufacture of electronic components. According to the ELID processing method, the sharpening of the blade 20's tip can be performed in parallel with the cutting and grinding of the workpiece 80, thus enabling efficient processing.

Furthermore, the ELID processing apparatus 10 can appropriately supply electrolyte between the blade 20 and the electrode section 50, even when the blade 20 is rotating at high speed, because the position and height t of the nozzle opening 33 in the nozzle section 30 satisfy the conditions defined by formula 1, etc.

The following describes the ELID processing apparatus 10 in more detail, citing examples; however, the ELID processing apparatus 10 is not limited to these examples.

In Examples 1, 2, 3, Comparative Example 1, and Comparative Example 2, an ELID processing apparatus, which was a modified version of the ELID processing apparatus 10 shown in the embodiment, was used to form an electric field by the electrode section 50 and discharge the electrolyte, and to verify whether or not a non-conductive coating 29 was formed on the outer edge 21 of the blade 20. Figure 8 is a schematic conceptual diagram showing the non-conductive coating 29 formed on the outer edge 21 of the blade 20. In reality, when a non-conductive coating 29 is formed on the blade 20, the non-conductive coating 29 is formed so as to span the top position 22 on the outer edge 21 and the side surface portion 28 of the blade's outer edge. The quality of the non-conductive coating 29 can be evaluated by the length of the non-conductive coating 29 formed from the top position 22 of the blade 20 toward the center of the blade 20. (Hereinafter, this length of the non-conductive coating 29 formed from the top position 22 of the blade 20 toward the center of the blade 20 will be called the "width W of the non-conductive coating.") A larger width W of this non-conductive coating 29 is desirable. The width W of the non-conductive coating 29 directly indicates the degree to which the electric field acts on the blade 20. Therefore, a larger width W of the non-conductive coating 29 indicates that the electric field acted effectively and efficiently. In other words, by measuring the width W of the non-conductive coating 29, it is possible to estimate the electric field strength acting on the blade 20, which helps in determining whether ELID (Electromagnetic Insulation) is performed effectively and efficiently.

The ELID processing apparatus used in Examples 1, 2, 3, Comparative Example 1, and Comparative Example 2 is the same as the ELID processing apparatus 10 shown in the embodiment, except that the nozzle opening in the nozzle section is a simple circle, located 21.5 mm away from the top position 22 of the blade 20 in the negative X-axis direction, and does not have a nozzle cover member 43.

In Examples 1, 2, 3, Comparative Example 1, and Comparative Example 2, the height t of the lower end 35 of the nozzle opening 33 from the horizontal plane 25 of the rotation center was set to 25.8 mm, 24.8 mm, 24.3 mm, 26.2 mm, and 23.8 mm, respectively. In all examples and comparative examples, the diameter of the nozzle opening was 2.0 mm, the radius r of the blade 20 was 26.75 mm, and the rotation speed of the blade 20 was 15,500 rpm. The conditions and evaluation results for each example and comparative example are shown in Table 1.

As shown in Table 1, in Examples 1, 2, and 3, where the nozzle height ratio (r-t)/r satisfies Equation 1, a non-conductive coating formed by the electrolysis of the bond contained in the blade 20 was observed, confirming that the electrolyte was properly supplied between the blade 20 and the electrode. Furthermore, in a comparison of Examples 1, 2, and 3, the width W of the non-conductive coating formed in Example 1, where the values of the nozzle height t and the radius r of the blade 20 were closest, was the largest.

On the other hand, in Comparative Examples 1 and 2, where the nozzle height ratio (r-t)/r did not satisfy Equation 1, the formation of a non-conductive coating could not be confirmed, suggesting that the electrolyte was not properly supplied between the blade 20 and the electrode.

<Application of nozzle cover components>
The evaluation was performed under the same conditions as Comparative Examples 1 and 2 and Examples 1 to 3, except that the nozzle cover member 43 was further applied and the rotation speed of the blade 20 was changed to 45,000 rpm. In the cases corresponding to Examples 1 to 3, it was confirmed that even at high rotation speeds, a non-conductive coating 29 with a width W of 100 to 200 μm was formed, similar to the case where the rotation speed was low and the nozzle cover member 43 was not applied. In contrast, in the cases corresponding to Comparative Examples 1 and 2, even at high rotation speeds, the formation of a non-conductive coating 29 was not confirmed, similar to the case where the rotation speed was low and the nozzle cover member 43 was not applied.

The ELID processing apparatus 10 has been described above with reference to embodiments and examples. However, it goes without saying that the ELID processing apparatus 10 according to this disclosure includes other embodiments and modifications in addition to the embodiments and examples described above. For example, as shown in Figure 1, the flow direction 41 of the flow path 40 in the nozzle section 30 may be substantially parallel to the rotation center horizontal plane 25, but the flow direction 41 may be inclined toward the rotation center horizontal plane 25 toward the nozzle opening 33. Such an ELID processing apparatus has advantages in that it avoids interference with the blade 20 while bringing the nozzle opening 33 closer to the electrolyte introduction section 54.

10...ELID processing device 20...Blade 21...Outer edge r...Radius 22...Top position 23...Rotation direction 24...Rotation center 25...Rotation center horizontal plane 26...Second line 27...Rotation axis direction 28...Blade outer edge side surface 29...Insulated coating W...Width 30...Nozzle part 31...Nozzle body part 32...Opposite surface 33...Nozzle opening t...Height 34...Opening center 35...Opening lower end 35a...First line θ1...First narrow angle 35b...First extension line 36...Opening upper end 36a...Third Line θ2...Second narrowing angle 36b...Second extension line 37...Opening surface 38...Outer surface 39...Introducing opening 40...Flow path 41...Flow path direction 42...First protruding edge 43...Nozzle cover member 44...Second protruding edge 45...Mounting surface 46...Inner surface 48...Cover part 50...Electrode part 51...Electrode part main body 52...Electrode cover member 53...Electrode support part 54...Electrolyte introduction part 60...Power supply part 65...Drive part 66...Blade support part 70...Electrolyte supply part 75...Movement control unit 80...Workpiece

Claims (12)

A vertically rotating blade,
A nozzle section that discharges electrolyte toward the vicinity of the top position of the blade,
An electrode portion provided on the side of the blade in the rotational direction from near the top position,
A power supply unit that forms an electric field between the electrode portion and the blade,
The system includes a drive unit that rotates the blade,
The height t of the lower end of the nozzle opening from which the nozzle portion discharges the electrolyte, from the horizontal plane of the rotation center which passes through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
And,
An ELID processing apparatus in which the flow path direction, which is the direction in which the electrolyte flows through the nozzle portion, is substantially parallel to the horizontal plane of the rotation center . A vertically rotating blade,
A nozzle section that discharges electrolyte toward the vicinity of the top position of the blade,
An electrode portion provided on the side of the blade in the rotational direction from near the top position,
A power supply unit that forms an electric field between the electrode portion and the blade,
The system includes a drive unit that rotates the blade,
The height t of the lower end of the nozzle opening from which the nozzle portion discharges the electrolyte, from the horizontal plane of the rotation center which passes through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
And,
In the nozzle portion, the direction of the flow path through which the electrolyte flows is inclined toward the nozzle opening toward the horizontal plane of the rotation center, and toward the electrolyte introduction portion in the electrode portion.
An ELID processing apparatus in which the first line connecting the lower end of the nozzle opening and the rotation center of the blade makes a first narrow angle with respect to a second line passing through the rotation center and perpendicular to the horizontal plane of the rotation center, the magnitude of which is 18.5 to 27.0 degrees . The aforementioned height t is,
0.036≦(rt)/r≦0.073
The ELID processing apparatus according to claim 1 or claim 2 . The ELID processing apparatus according to claim 1, wherein the first line connecting the lower end of the nozzle opening and the rotation center of the blade forms a first narrow angle with respect to a second line passing through the rotation center and perpendicular to the horizontal plane of the rotation center, the magnitude of which is 18.5 to 27.0 degrees. The ELID processing apparatus according to claim 1, wherein the magnitude of the second angle formed by the first line connecting the lower end of the nozzle opening and the rotation center of the blade with respect to the third line connecting the upper end of the nozzle opening and the rotation center of the blade is 25.5 to 34.0 degrees. The ELID processing apparatus according to claim 5 , characterized in that at least a portion of the opening surface of the nozzle opening is curved in an arc shape. A first extension line extending from the lower end of the nozzle opening parallel to the flow path direction toward the electrode portion intersects the blade.
The ELID processing apparatus according to claim 1, wherein the second extension line, which extends from the upper end of the nozzle opening parallel to the flow direction toward the electrode portion, does not intersect the blade. The ELID processing apparatus according to claim 1, wherein the nozzle portion has at least a portion of the nozzle opening formed on an opposing surface that curves in an arc facing the outer edge of the blade, and an outer surface on which an introduction opening, which is the opening of the flow path opposite to the nozzle opening, is formed. The ELID processing apparatus according to claim 1, wherein the nozzle portion comprises an opposing surface having at least a portion of the nozzle opening formed thereon and curving in an arc toward the outer edge of the blade, and a cover portion protruding toward the rotation center from one end and the other end of the blade in the direction of rotation axis on the opposing surface, and sandwiching the outer edge of the blade from both sides in the direction of rotation axis. The process involves rotating the blade vertically using a drive unit,
A process of discharging electrolyte from the nozzle towards the vicinity of the top of the blade,
A step of generating an electric field between the blade and an electrode portion provided on the side of the blade in the rotational direction from near the top position of the blade,
The process includes the step of bringing the blade into contact with the workpiece,
The height t of the lower end of the nozzle opening from which the nozzle portion discharges the electrolyte, from the horizontal plane of the rotation center which passes through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
And,
An ELID processing method in which the flow path direction, which is the direction in which the electrolyte flows through the nozzle portion, is substantially parallel to the horizontal plane of the rotation center . The process involves rotating the blade vertically using a drive unit,
A process of discharging electrolyte from the nozzle towards the vicinity of the top of the blade,
A step of generating an electric field between the blade and an electrode portion provided on the side of the blade in the rotational direction from near the top position of the blade,
The process includes the step of bringing the blade into contact with the workpiece,
The height t of the lower end of the nozzle opening from which the nozzle portion discharges the electrolyte, from the horizontal plane of the rotation center which passes through the rotation center of the blade, is such that, when the radius of the blade is r,
0.036≦(rt)/r≦0.092
And,
An ELID processing method in which the flow path direction in the nozzle portion, which is the direction in which the flow path through which the electrolyte flows extends, is inclined toward the nozzle opening toward the horizontal plane of the rotation center and toward the electrolyte introduction portion in the electrode portion, and the size of the first narrow angle made between the first line connecting the lower end of the nozzle opening and the rotation center of the blade and the second line passing through the rotation center and perpendicular to the horizontal plane of the rotation center is 18.5 to 27.0 degrees . A method for manufacturing an electronic component, comprising the step of processing a ceramic material by the ELID processing method described in claim 10 or claim 11.