JP7835652B2 - Method for manufacturing a magnetic encoder - Google Patents
Method for manufacturing a magnetic encoderInfo
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- JP7835652B2 JP7835652B2 JP2022144727A JP2022144727A JP7835652B2 JP 7835652 B2 JP7835652 B2 JP 7835652B2 JP 2022144727 A JP2022144727 A JP 2022144727A JP 2022144727 A JP2022144727 A JP 2022144727A JP 7835652 B2 JP7835652 B2 JP 7835652B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
- H01F1/047—Alloys characterised by their composition
- H01F1/053—Alloys characterised by their composition containing rare earth metals
- H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
- H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
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- Transmission And Conversion Of Sensor Element Output (AREA)
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Description
本発明は、磁気エンコーダに関する。 This invention relates to a magnetic encoder.
従来、機器の回転位置検出に使用する磁気エンコーダが知られている。この磁気エンコーダとして、同心のリング状に設けられ、互いに磁極数が異なる2つの磁気トラックを有する磁気エンコーダと、これら各磁気トラックの磁界をそれぞれ検出する磁気センサとを備え、磁気センサの検出した磁界信号の位相差に基づいて、磁気エンコーダの絶対角度を算出するように構成した回転検出装置が提案されている(例えば、特許文献1参照)。 Conventionally, magnetic encoders used for detecting the rotational position of equipment are known. One proposed rotation detection device comprises a magnetic encoder arranged in a concentric ring shape, having two magnetic tracks with different numbers of magnetic poles, and magnetic sensors that detect the magnetic fields of each of these magnetic tracks. The device is configured to calculate the absolute angle of the magnetic encoder based on the phase difference of the magnetic field signals detected by the magnetic sensors (see, for example, Patent Document 1).
特許文献1の回転検出装置における磁気エンコーダは、例えば磁性体製の芯金に、磁性体粉が混入された弾性部材を加硫接着し、この弾性部材を、円周方向に交互に磁極を形成して磁気トラックを形成したゴム磁石として構成される。また、磁気エンコーダの他の構成例として、磁性体製の芯金に、磁性体粉が混入された樹脂を成形した樹脂成形体を設け、この樹脂成形体を、円周方向に交互に磁極を形成して磁気トラックを形成した樹脂磁石としても良いことが記載されている。このようなゴム磁石や樹脂磁石では、通常、磁性体粉として、フェライト系磁石粉末を用いている。 The magnetic encoder in the rotation detection device described in Patent Document 1 is constructed as a rubber magnet, for example, by vulcanizing and bonding an elastic member mixed with magnetic powder to a magnetic core, and then forming magnetic tracks by alternately forming magnetic poles in the circumferential direction on this elastic member. Another example of a magnetic encoder configuration is described as a resin magnet, where a resin molded body, made from a resin mixed with magnetic powder, is provided on a magnetic core, and this resin molded body is then formed to create magnetic tracks by alternately forming magnetic poles in the circumferential direction. In such rubber magnets and resin magnets, ferrite-based magnetic powder is typically used as the magnetic powder.
磁気エンコーダの磁気特性の向上を考えれば、磁気エンコーダに含まれる磁性体の配合量は多い方が好ましく、また、磁石粉末の磁気特性が高い方が好ましい。このため、フェライト系磁性粉末よりも希土類磁石粉末を用いた場合の方が、磁気特性が向上する。このため、被着磁物である磁気エンコーダを希土類ボンド磁石で構成することが考えられる。 To improve the magnetic properties of a magnetic encoder, it is preferable to have a higher proportion of magnetic material in the encoder, and also to have high magnetic properties in the magnet powder. Therefore, using rare-earth magnet powder results in improved magnetic properties compared to ferrite-based magnetic powder. For this reason, it is conceivable to construct the magnetic encoder, the object to be magnetized, using rare-earth bonded magnets.
磁気エンコーダに形成される磁気トラックとなる複数の磁極(N極、S極)を着磁する場合、一般にコイル通電方式の着磁装置(いわゆる、パルス着磁方式)が用いられている。このコイル通電方式の着磁装置は、例えば、着磁ヨークに巻回されたコイルを有する界磁部にパルス電流を流し、それによって発生する磁界により、被着磁物に対して着磁を行っているが、例えば、特許文献2の「発明が解決しようとする課題」の欄に記載されているように、磁気エンコーダの磁気トラックを検出する磁気センサの磁極幅が1.28mmに制限されている場合、被着磁物である磁気エンコーダが希土類ボンド磁石による構成に対して、上記のパルス着磁方式では、1.28mmのような狭い磁極ピッチで飽和着磁して複数の磁極を形成することは難しい。 When magnetizing multiple magnetic poles (N poles and S poles) that form the magnetic track of a magnetic encoder, a coil-energized magnetization device (the so-called pulse magnetization method) is generally used. This coil-energized magnetization device, for example, uses a field section having a coil wound around a magnetization yoke to apply a pulse current, thereby magnetizing the object to be magnetized using the resulting magnetic field. However, as described in the "Problems to be Solved by the Invention" section of Patent Document 2, if the magnetic pole width of the magnetic sensor that detects the magnetic track of the magnetic encoder is limited to 1.28 mm, and the magnetic encoder is constructed using rare-earth bonded magnets, it is difficult to saturate magnetize and form multiple magnetic poles with such a narrow pole pitch as 1.28 mm using the pulse magnetization method described above.
このため、被着磁物における磁石のキュリー点以上に加熱し、キュリー点未満まで冷却する間、界磁源である永久磁石によって被着磁物に着磁磁界を継続的に印加することによって、多極着磁しても好適に着磁できる手段が提案されている(例えば、特許文献3参照)。 Therefore, a method has been proposed to suitably magnetize even multi-pole magnetization by continuously applying a magnetizing magnetic field to the object to be magnetized using a permanent magnet acting as a field source while heating the object to be magnetized above the Curie point of the magnet and then cooling it to below the Curie point (see, for example, Patent Document 3).
特許文献3の着磁装置には、磁石粉末を所定温度で熱間塑性加工して異方性を付与した異方性希土類鉄系バルク磁石と、放電プラズマ焼結(SPS)装置を利用して、磁石粉末を所定温度で焼結した等方性希土類鉄系バルク磁石と、等方性磁石粉末とエポキシ樹脂とを混合、圧縮し、所定温度で硬化させた等方性希土類鉄系ボンド磁石と、等方性磁石粉末を用い、エポキシ樹脂と混合、圧縮した後、エポキシ樹脂を所定温度で硬化させた等方性の希土類鉄系ボンド磁石と、が記載され、1.28mmのような狭い磁極ピッチで多極着磁しても好適に着磁できることが記載されている。 Patent Document 3 describes a magnetization apparatus that includes an anisotropic rare-earth iron bulk magnet obtained by hot-plastic deformation of magnet powder at a predetermined temperature to impart anisotropy; an isotropic rare-earth iron bulk magnet obtained by sintering magnet powder at a predetermined temperature using a discharge plasma sintering (SPS) apparatus; an isotropic rare-earth iron bonded magnet obtained by mixing and compressing isotropic magnet powder and epoxy resin and curing it at a predetermined temperature; and an isotropic rare-earth iron bonded magnet obtained by using isotropic magnet powder, mixing and compressing it with epoxy resin, and then curing the epoxy resin at a predetermined temperature. It states that this apparatus can suitably magnetize multiple poles even with a narrow pole pitch such as 1.28 mm.
希土類ボンド磁石は、希土類磁石粉末と樹脂とを混合、圧縮してグリーン体である未加熱体を作製した後、グリーン体に含まれる樹脂を熱硬化してキュア体である熱硬化体を作製し、キュア体に所定の磁極ピッチで着磁することで得られる。 Rare-earth bonded magnets are obtained by mixing and compressing rare-earth magnet powder and resin to create an unheated green body, then thermally curing the resin contained in the green body to create a thermoset cured body, and finally magnetizing the cured body at a predetermined pole pitch.
ところが、磁石粉末は、様々な粒径を有する磁石粉末が混在していることにより、グリーン体を薄型化した際の成形性や、グリーン体の密度のバラツキによって熱硬化後の変形が生じ易くなる。また、磁力特性に貢献するのは磁石粉末のみであり、磁石粉末が偏りなく分布していることが、磁気エンコーダの高精度化のために重要となる。しかしながら、特許文献3には、等方性希土類鉄系ボンド磁石に対して、狭い磁極ピッチで多極着磁しても好適に着磁できることは記載されているが、グリーン体を薄型化した際の成形性や熱硬化後の変形に関しては、記載がなく、さらなる検討の余地がある。 However, because the magnetic powder contains a mixture of magnetic powders with varying particle sizes, the moldability when the green body is thinned and the deformation after heat curing due to variations in the density of the green body become more likely. Furthermore, since only the magnetic powder contributes to the magnetic properties, even distribution of the magnetic powder is crucial for high-precision magnetic encoders. While Patent Document 3 describes that isotropic rare-earth iron bonded magnets can be suitably magnetized even with a narrow pole pitch and multi-pole magnetization, it does not mention the moldability when the green body is thinned or the deformation after heat curing, leaving room for further investigation.
本発明は、上記に鑑みてなされたものであって、希土類ボンド磁石による磁気エンコーダにおいて、グリーン体を薄型化した際の成形性の向上や、グリーン体の熱硬化後の変形が生じ難く、狭い磁極ピッチで多極着磁しても好適に着磁できる磁気エンコーダを提供することを目的とする。 The present invention has been made in view of the above, and aims to provide a magnetic encoder using rare-earth bonded magnets that offers improved moldability when the green body is made thinner, is less prone to deformation after heat curing of the green body, and can be suitably magnetized even when multi-pole magnetization is performed with a narrow magnetic pole pitch.
上述した課題を解決し、目的を達成するために、本発明の一態様に係る磁気エンコーダは、希土類磁石粉末と樹脂とを混合、圧縮して未加熱体を作製した後、前記未加熱体に含まれる樹脂を熱硬化して熱硬化体を作製して得られ、周方向に互いに異なる磁極が所定の磁極ピッチで着磁された磁気トラックを有するリング状の磁気エンコーダにおいて、
前記未加熱体の厚さをT(mm)、前記希土類磁石粉末の最大粒径をG(μm)とした時の比率RをT/Gとした場合、前記比率Rが6.67以上であり、かつ前記希土類磁石粉末の粒径が、45μm~150μmである。
In order to solve the above-mentioned problems and achieve the objective, a magnetic encoder according to one aspect of the present invention is obtained by mixing and compressing rare earth magnet powder and resin to produce an unheated body, and then thermosetting the resin contained in the unheated body to produce a thermoset body, and having a ring-shaped magnetic encoder having magnetic tracks in which different magnetic poles in the circumferential direction are magnetized at a predetermined magnetic pole pitch,
When the thickness of the unheated body is T (mm) and the maximum particle size of the rare earth magnet powder is G (μm), the ratio R is T/G, and the ratio R is 6.67 or greater, and the particle size of the rare earth magnet powder is between 45 μm and 150 μm.
本発明の態様によれば、成形性を確保し、熱硬化後の変形が生じ難く、高い厚さ精度を有し、薄型化が可能な磁気エンコーダを提供することができるという効果を奏する。従って、本発明の態様による磁気エンコーダは、各種のロボットの関節部やモータの角度検出、車輛用途軸受の回転検出等に好適である。 According to an embodiment of the present invention, it is possible to provide a magnetic encoder that ensures moldability, is less prone to deformation after heat curing, has high thickness accuracy, and can be made thinner. Therefore, the magnetic encoder according to an embodiment of the present invention is suitable for applications such as angle detection in the joints and motors of various robots, and rotation detection in bearings for vehicle applications.
以下に、本発明の実施の形態に係る磁気エンコーダを図面に基づいて詳細に説明する。なお、この実施の形態により本発明が限定されるものではない。 A magnetic encoder according to an embodiment of the present invention will be described in detail below with reference to the drawings. However, the present invention is not limited to this embodiment.
[実施の形態に係る磁気エンコーダ]
実施の形態に係る磁気エンコーダについて説明する。磁気エンコーダの磁気特性向上の観点から、等方性の希土類ボンド磁石を磁気エンコーダに用いることが好適であり、希土類ボンド磁石を用いた場合、狭い磁極ピッチで多極着磁しても好適に着磁できると共に、コスト低減を期待できる。
[Magnetic encoder according to an embodiment]
A magnetic encoder according to an embodiment will now be described. From the viewpoint of improving the magnetic properties of the magnetic encoder, it is preferable to use isotropic rare-earth bonded magnets in the magnetic encoder. When rare-earth bonded magnets are used, magnetization can be performed effectively even with a narrow pole pitch and multi-pole magnetization, and cost reduction can be expected.
希土類ボンド磁石は、希土類磁石粉末と樹脂とを混合、圧縮して未加熱体であるグリーン体を作製した後、グリーン体に含まれる樹脂を熱硬化して熱硬化体であるキュア体を作製し、キュア体に所定の磁極ピッチで着磁することで得られる。希土類ボンド磁石は、希土類磁石粉末と、バインダーである樹脂と、ボイドと、から構成され、それぞれの体積比率は概ね、希土類磁石粉末が約80%、樹脂が約10%、ボイド(空孔)が約10%程度の数値となる。 Rare-earth bonded magnets are obtained by mixing and compressing rare-earth magnet powder and resin to create an unheated green body, then thermosetting the resin in the green body to create a cured body, and finally magnetizing the cured body at a predetermined pole pitch. Rare-earth bonded magnets are composed of rare-earth magnet powder, a binder resin, and voids. The volume ratios are approximately 80% rare-earth magnet powder, 10% resin, and 10% voids (pores).
希土類磁石粉末は、様々な粒径を有する希土類磁石粉末が混在していることにより、グリーン体を薄型化した際の成形性や、グリーン体の密度のバラツキによって熱硬化後の変形が生じ易くなる。また、磁力特性に貢献するのは希土類磁石粉末のみであり、希土類磁石粉末が偏りなく分布していることが、磁気エンコーダの高精度化のために重要となる。なお、希土類磁石粉末の粒径は、未加熱体、熱硬化体、及び着磁後の磁気エンコーダで略変化しない。 The presence of rare-earth magnet powder with varying particle sizes can affect the moldability when thinning the green material, and variations in density can easily lead to deformation after heat curing. Furthermore, since only the rare-earth magnet powder contributes to the magnetic properties, an even distribution of the rare-earth magnet powder is crucial for high-precision magnetic encoders. The particle size of the rare-earth magnet powder remains largely unchanged in the unheated, heat-cured, and magnetized magnetic encoders.
図1は、実施の形態による磁気エンコーダを模式的に表した概略斜視図であり、図2は、実施の形態による磁気エンコーダを模式的に表した概略部分平面図である。これらの図1及び図2に示すように、希土類ボンド磁石による磁気エンコーダ1は、主トラック2と、副トラック3との2つの磁気トラックを有し、主トラック2と副トラック3とは、無着磁領域4を挟んで同心状のそれぞれ外周及び内周に配置されている。 Figure 1 is a schematic perspective view of a magnetic encoder according to an embodiment, and Figure 2 is a schematic partial plan view of a magnetic encoder according to an embodiment. As shown in Figures 1 and 2, the magnetic encoder 1 using rare-earth bonded magnets has two magnetic tracks: a main track 2 and a sub-track 3. The main track 2 and the sub-track 3 are arranged concentrically on the outer and inner circumferences, respectively, with an unmagnetized region 4 in between.
主トラック2と、副トラック3とは、図2に示すように、それぞれN極とS極とが交互に隣接して配置されるように着磁されている。主トラック2及び副トラック3は、複数の磁極対(N極とS極)を周方向に等ピッチで着磁されており、主トラック2及び副トラック3の磁極数は互いに異ならせている。主トラック2及び副トラック3の磁界をそれぞれ検出する磁気センサ6A、6Bを備えたセンサモジュール5は、図2に示すように、主トラック2及び副トラック3の一部の磁極上に配置されている。 As shown in Figure 2, the main track 2 and the sub-track 3 are magnetized such that north and south poles are arranged alternately adjacent to each other. The main track 2 and sub-track 3 are magnetized with multiple magnetic pole pairs (north and south poles) at equal pitches in the circumferential direction, and the number of magnetic poles on the main track 2 and sub-track 3 differs from that of the sub-track 3. The sensor module 5, equipped with magnetic sensors 6A and 6B for detecting the magnetic fields of the main track 2 and sub-track 3, respectively, is positioned on some of the magnetic poles of the main track 2 and sub-track 3, as shown in Figure 2.
磁気エンコーダ1を同心中心の周りに回転させると、主トラック2の磁極数と副トラック3の磁極数とが互いに異なっているため、磁気センサ6Aと磁気センサ6Bとの間で位相ずれが生じる。この位相ずれを検出して磁気エンコーダ1の絶対角度を算出することにより、磁気エンコーダ1を設置した機器の回転位置を検出することができる。 When the magnetic encoder 1 is rotated around a concentric center, a phase shift occurs between magnetic sensors 6A and 6B because the number of magnetic poles on the main track 2 and the sub-track 3 are different. By detecting this phase shift and calculating the absolute angle of the magnetic encoder 1, the rotational position of the device on which the magnetic encoder 1 is installed can be detected.
[実施の形態に係る磁気エンコーダの製造]
磁気エンコーダ1の製造は、狭い磁極ピッチで多極着磁しても好適に着磁できると共に、コスト低減を期待できることから、希土類ボンド磁石を用いる。希土類ボンド磁石は、希土類磁石粉末を例えば、超急冷法により製造する。具体的には、希土類合金を減圧下又はアルゴン雰囲気中で、高周波誘導加熱して溶解させる。次に、溶解させた合金の溶湯を銅製の回転ロール上に噴射して超急冷(高速冷却)してリボン状の薄帯片を作製する。次に、この薄帯片を、例えば、数mm ~ 数十mm程度に破断した後、粉砕機などで粉砕して粉末を得る。
[Manufacturing of a magnetic encoder according to an embodiment]
The magnetic encoder 1 is manufactured using rare-earth bonded magnets because they allow for suitable magnetization even with a narrow pole pitch and multi-pole magnetization, while also offering the potential for cost reduction. Rare-earth bonded magnets are manufactured by, for example, ultra-rapid cooling of rare-earth magnet powder. Specifically, a rare-earth alloy is melted by high-frequency induction heating under reduced pressure or in an argon atmosphere. Next, the molten alloy is sprayed onto a copper rotating roll and ultra-rapidly cooled (rapidly cooled) to produce ribbon-shaped thin strips. These thin strips are then broken into pieces of, for example, several mm to several tens of mm in length, and then crushed in a pulverizer or the like to obtain powder.
次に、粉砕した粉末を所定のメッシュを有するふるいを用いて分級した後、これに熱処理を行う。さらに、希土類磁石粉末とバインダーである熱硬化性樹脂(エポキシ樹脂)を所定の配合比率で混合してコンパウンドを作製する。所定の配合比率は、例えば、希土類磁石粉末97~98重量%に対し、熱硬化性樹脂を2~3重量%配合する。また、コンパウンドに滑剤(例えば、ステアリン酸カルシウム)を少量添加してもよい。次に、コンパウンドを金型に充填し、所定の圧力を加えて圧縮し、リング状のグリーン体を作製する。金型から取り出したグリーン体をオーブンにセットし、所定温度、例えば150℃程度で所定時間、キュア(熱硬化)させてキュア体を作製する。 Next, the crushed powder is classified using a sieve with a predetermined mesh size, and then heat-treated. Furthermore, the rare-earth magnet powder and a thermosetting resin (epoxy resin) binder are mixed in a predetermined ratio to produce a compound. The predetermined ratio is, for example, 97-98% by weight of rare-earth magnet powder to 2-3% by weight of thermosetting resin. A small amount of lubricant (e.g., calcium stearate) may also be added to the compound. Next, the compound is filled into a mold and compressed under a predetermined pressure to produce a ring-shaped green body. The green body removed from the mold is placed in an oven and cured (heat-cured) at a predetermined temperature, for example, around 150°C, for a predetermined time to produce a cured body.
キュア体を作製した後、キュア体表面に酸化防止のための防錆手段を施す。防錆手段としては、電着塗装、スプレー塗装等、公知の手段で行う。キュア体表面に防錆手段を施した後、例えば、図2に記載されているように、キュア体の軸方向一方端面に同心状に2つの磁気トラックを形成したバーニヤ方式の磁気エンコーダを構成する。具体的には、外周側に主トラック2を所定の磁極ピッチで磁化し、内周側に副トラック3に所定の磁極ピッチで磁化する。ここで、磁極ピッチは、各磁気トラックにおいて、隣接するN極とS極との周方向における間隔である。 After fabricating the cured body, a rust-preventive measure is applied to the surface of the cured body to prevent oxidation. Known methods such as electrodeposition coating and spray coating are used for rust prevention. After applying the rust-preventive measure to the surface of the cured body, a vernier-type magnetic encoder is constructed, for example, as shown in Figure 2, with two magnetic tracks concentrically formed on one axial end face of the cured body. Specifically, the main track 2 on the outer circumference is magnetized with a predetermined pole pitch, and the sub-track 3 on the inner circumference is magnetized with a predetermined pole pitch. Here, the pole pitch is the circumferential distance between adjacent north and south poles on each magnetic track.
主トラック2にn極対で磁化した場合、副トラック3は(n-1)極対で磁化する。磁極ピッチは、磁気エンコーダ1の磁気トラックを検出する磁気センサ6A、6Bの磁極幅が制限されている場合、磁気エンコーダ1に形成する磁気トラックの磁極ピッチは磁気センサ6A、6Bの磁極幅と同じ幅に形成される。例えば、磁気センサ6Aの磁極幅が1.28mm(又は1.5mm)に制限されている場合、図1に示すような、磁気エンコーダ1の主トラック2は、1.28mm(又は1.5mm)に磁化する。 When the main track 2 is magnetized with n pole pairs, the sub-track 3 is magnetized with (n-1) pole pairs. The magnetic pole pitch is determined by the pole width of the magnetic sensors 6A and 6B that detect the magnetic track of the magnetic encoder 1. If the pole width of the magnetic sensors 6A and 6B is limited, the magnetic pole pitch of the magnetic track formed on the magnetic encoder 1 will be the same width as the pole width of the magnetic sensors 6A and 6B. For example, if the pole width of magnetic sensor 6A is limited to 1.28 mm (or 1.5 mm), the main track 2 of the magnetic encoder 1 will be magnetized to 1.28 mm (or 1.5 mm), as shown in Figure 1.
磁化は、いわゆる着磁であり、着磁手段は、例えば、特許文献3に開示されているような、被着磁物をその磁石粉末のキュリー点以上に加熱し、キュリー点未満まで冷却する間、界磁源である永久磁石によって被着磁物に着磁磁界を継続的に印加する手段で行うことで、狭い磁極ピッチで多極着磁しても好適に着磁できる。以上によって、希土類ボンド磁石による磁気エンコーダが作製される。 Magnetization is what is commonly known as magnetization, and the magnetization method is, for example, as disclosed in Patent Document 3, a method in which the object to be magnetized is heated above the Curie point of its magnetic powder, and while it is cooling to below the Curie point, a magnetizing magnetic field is continuously applied to the object using a permanent magnet, which is the field source. This allows for suitable magnetization even with a narrow pole pitch and multi-pole magnetization. Thus, a magnetic encoder using rare-earth bonded magnets is fabricated.
以下、実施例に基づいて上記実施の形態をより詳細に説明する。なお、上記実施の形態は、以下の実施例および比較例によって何ら制限されない。 The above embodiments will be described in more detail below based on the examples. However, the above embodiments are not limited in any way by the following examples and comparative examples.
[実施例1~実施例2及び比較例1~比較例3]
希土類磁石粉末として、実施例1~実施例2及び比較例1~比較例3に対応する試料1~試料5を準備した。試料1~試料5は、いずれも希土類磁石粉末として、超急冷法で作製された磁気的に等方性の希土類鉄系磁石粉末であるNd-Fe-B系磁石粉末(マグネクエンチ社製、型番MQP-10-11)を用いた。
[Examples 1-2 and Comparative Examples 1-3]
Samples 1 to 5 were prepared as rare earth magnet powders, corresponding to Examples 1 to 2 and Comparative Examples 1 to 3. For all five samples, Nd-Fe-B type magnet powder (manufactured by Magnequench, model number MQP-10-11), which is a magnetically isotropic rare earth iron-based magnet powder produced by an ultra-rapid quenching method, was used as the rare earth magnet powder.
希土類鉄系磁粉は、R-Fe-B系磁石(但しRはYを含むCe、Pr、Nd、Gd、Tb、Dy、Ho等の希土類元素)又は前記磁石においてFeの一部をCoで置換したR-Fe(Co)-B系磁石(但しRは前述の意味を表す)と、更にはSi、Al、Nb、Zr、Hf、Mo、Ga、P、Cの1種または2種以上の組み合わせを用いたR-Fe-B-M系磁石又はR-Fe(Co)-B-M系磁石(但しRは前述の意味を表し、MはSi、Al、Nb、Zr、Hf、Mo、Ga、P、Cの1種または2種以上の組み合わせを表す)、不可避不純物からなる合金組成を有するR2Fe14B、R2Fe(Co)14Bナノ結晶組織(nanocrystalline)、またはαFeとR2Fe14B、R2Fe(Co)14Bとのナノ複合組織(nanocomposite)、前記Rは前述の意を表す)を含む、磁気的に等方性の希土類鉄系急冷磁粉が好ましい。 Rare earth iron-based magnetic powders include R-Fe-B magnets (where R is a rare earth element such as Ce, Pr, Nd, Gd, Tb, Dy, Ho, including Y) or R-Fe(Co)-B magnets (where R represents the meaning described above) in which a portion of Fe in the above magnet is replaced with Co, and further, R-Fe-B-M magnets or R-Fe(Co)-B-M magnets (where R represents the meaning described above, and M represents a combination of one or more of Si, Al, Nb, Zr, Hf, Mo, Ga, P, C) having an alloy composition consisting of unavoidable impurities , R2Fe14B, R2Fe ( Co ) 14B nanocrystalline structure, or αFe and R2Fe14 A magnetically isotropic rare-earth iron-based quenched magnetic powder containing a nanocomposite structure of B, R 2 Fe(Co) 14 B (where R represents the aforementioned meaning) is preferred.
或いは、実施の形態にかかる希土類-鉄系磁粉は、Sm-Fe-N系磁石と、Hf、Zr、Si、Nb、Ti、Ga、Al、TaおよびCの1種または2種以上の組合せを用いたSm-Fe-M’-N系磁石(但しM’はHf、Zr、Si、Nb、Ti、Ga、Al、TaおよびCの1種または2種以上を表す)、並びに、不可避不純物からなる合金組成を有するSm2Fe17Nx(x≒3)ナノ結晶組織(nanocrystalline)、またはαFeとSm2Fe17Nx(x≒3)とのナノ複合組織(nanocomposite)を含む、磁気的に等方性の希土類鉄系急冷磁粉を使用しても差し支えない。また、前述のR-Fe-B系磁粉とSm-Fe-N系磁粉を混ぜてもよく、どちらかが、あるいは両方とも磁気的に異方性磁粉でも差し支えない。 Alternatively, the rare earth-iron-based magnetic powder according to the embodiment may include a magnetically isotropic rare earth-iron-based quenched magnetic powder having an alloy composition consisting of an Sm-Fe-N magnet, an Sm-Fe-M'-N magnet (where M' represents one or more of Hf, Zr, Si, Nb, Ti, Ga, Al, Ta, and C in combination of one or more of Hf, Zr, Si, Nb, Ti, Ga, Al, Ta, and C), and an alloy composition consisting of unavoidable impurities, such as an Sm 2 Fe 17 N x (x ≈ 3) nanocrystalline structure or a nanocomposite of αFe and Sm 2 Fe 17 N x (x ≈ 3). Furthermore, the aforementioned R-Fe-B magnetic powder and Sm-Fe-N magnetic powder may be mixed, and it is acceptable for one or both of them to be magnetically anisotropic magnetic powders.
次に、各々の試料の希土類磁石粉末とバインダーである熱硬化性樹脂(エポキシ樹脂:ペルノック社製、型番XW2310)を所定の配合比率(希土類磁石粉末:97.5重量%、熱硬化性樹脂:2.5重量%)で混合してコンパウンドを作製した。希土類磁石粉末とバインダーの配合比率は、試料1~5すべて同じ条件で作製した。また、このコンパウンドに滑剤(例えば、ステアリン酸カルシウム)を添加してもよい。そして、コンパウンドを金型に充填し、所定の圧力を加えて圧縮し、グリーン体(試料1~5)を作製した。グリーン体の形状は、図1に示すように、外径B:Φ56mm、内径A:Φ41mm、厚さT:1.0mmのリング状である。 Next, a compound was prepared by mixing the rare earth magnet powder of each sample with a thermosetting resin (epoxy resin: Pernock, model number XW2310) as a binder at a predetermined mixing ratio (rare earth magnet powder: 97.5% by weight, thermosetting resin: 2.5% by weight). The mixing ratio of rare earth magnet powder to binder was the same for all samples 1 to 5. A lubricant (e.g., calcium stearate) may also be added to this compound. The compound was then filled into a mold and compressed under a predetermined pressure to produce green bodies (samples 1 to 5). As shown in Figure 1, the shape of the green bodies is ring-shaped with an outer diameter B: Φ56 mm, an inner diameter A: Φ41 mm, and a thickness T: 1.0 mm.
試料を飽和磁化させるためには、試料の厚さTは、磁極ピッチの1/2以上であることが好ましい。厚さTが磁極ピッチの1/2以上である場合、磁力線の半円が試料内に収まるため、磁力の低下を抑制することができる。例えば、図2に示すような、磁気エンコーダの磁気トラックを検出する磁気センサ6Aの磁極幅が1.28mmに制限されている場合、磁気エンコーダに形成する磁気トラック(主トラック2)の磁極ピッチは、1.28mmに形成される。 To achieve saturation magnetization of a sample, it is preferable that the sample thickness T be at least half the magnetic pole pitch. When the thickness T is at least half the magnetic pole pitch, the semicircles of the magnetic field lines are contained within the sample, thus suppressing a decrease in magnetic force. For example, if the magnetic pole width of the magnetic sensor 6A that detects the magnetic track of a magnetic encoder is limited to 1.28 mm, as shown in Figure 2, the magnetic pole pitch of the magnetic track (main track 2) formed on the magnetic encoder will be formed to 1.28 mm.
このため、試料の厚さTは、磁気トラックの磁極ピッチ1.28mmの1/2である、0.64mm以上あれば特に限定されないが、試料の厚さTを必要以上に大きくした場合、磁気トラック形成時の磁化の深さが及ばず磁力に寄与しないため、無駄な厚さとなり、コストの増加となってしまう。一方、試料の厚さTを、0.7mm程度とした場合、磁極ピッチの1/2以上であるが、例えば、ハンドリング性が悪く、金型で圧縮成形したグリーン体を排出する際、グリーン体が破損する可能性が高くなる。また、手作業によるハンドリング時に破損し易くなるため、破損を防止する観点から、試料の厚さTは、1.0mmに設定した。 Therefore, the sample thickness T is not particularly limited as long as it is 0.64 mm or more, which is half the magnetic pole pitch of the magnetic track (1.28 mm). However, if the sample thickness T is made unnecessarily large, the magnetization depth during magnetic track formation will not be sufficient, and it will not contribute to the magnetic force, resulting in wasted thickness and increased costs. On the other hand, if the sample thickness T is set to about 0.7 mm, it is more than half the magnetic pole pitch, but for example, handling is poor, and there is a high possibility of damage to the green body when ejecting the green body compressed in the mold. Also, it becomes more prone to damage during manual handling, so from the viewpoint of preventing damage, the sample thickness T was set to 1.0 mm.
ここで、各試料のグリーン体のハンドリング性(○:欠け無く良、△:欠け少し有り並、×:欠け多く不可)を評価した。ハンドリング性とは、希土類磁石粉末とバインダーとを混合して作製したコンパウンドを金型に充填して圧縮成形したリング状のグリーン体を金型から取り出す際の取り扱い性を評価した内容であり、金型に備えたエジェクタピンにて金型からグリーン体を取り出す際、グリーン体に生じる割れや欠けの状態を目視で観察し、ハンドリング性として評価した。ハンドリング性の評価結果を含む他の評価結果等と共に、表1に纏めて示す。 Here, the handling characteristics of each sample of the green material were evaluated (○: good, no chipping; △: fair, some chipping; ×: poor, many chips). Handling characteristics refer to the ease of handling the ring-shaped green material, which was created by mixing rare-earth magnet powder and a binder, filling a mold with the compound, and compression molding it. The condition of cracks and chips occurring in the green material when removing it from the mold using an ejector pin was visually observed and evaluated as handling characteristics. The results of the handling characteristics evaluation, along with other evaluation results, are summarized in Table 1.
次に、金型から取り出したグリーン体をオーブンにセットし、150℃程度の温度で所定時間、キュア(熱硬化)させて、熱硬化体であるキュア体を作製した。オーブンから取り出したキュア体をマイクロメーターにて、対角線の位置で8箇所の厚みを測定して厚さのバラツキ(最大値-最小値)及び厚み精度を評価し、評価結果を表1に示した。表1において、厚さのバラツキの値が0.08mmより大きい試料は不可として厚み精度を×で表示し、バラツキの値が0.08~0.06mmの間の値を有する試料は並として厚み精度を△で表示し、バラツキの値が0.06未満の試料は良として厚み精度を〇で表示した。 Next, the green material removed from the mold was placed in an oven and cured (thermal-cured) at a temperature of approximately 150°C for a predetermined time to produce a cured body. The thickness of the cured body removed from the oven was measured at eight diagonal points using a micrometer to evaluate the thickness variation (maximum value - minimum value) and thickness accuracy. The evaluation results are shown in Table 1. In Table 1, samples with a thickness variation greater than 0.08 mm were marked as unacceptable and their thickness accuracy was indicated by ×. Samples with a variation between 0.08 and 0.06 mm were marked as average and their thickness accuracy was indicated by △. Samples with a variation less than 0.06 mm were marked as good and their thickness accuracy was indicated by ○.
表1より、ハンドリング性の評価に関し、試料1~3は、金型からエジェクタピンで試料(グリーン体)を排出する際、外周縁に割れや欠けが生じた。特に試料1,2では、大きな欠けが生じ、不可であった。このような欠けの発生は、後工程で、試料を磁化してトラックを形成する際、トラック形成領域まで欠けが及ぶ場合、トラックが形成できないという問題が生じる。また、希土類磁石粉末として、Nd-Fe-B系磁石粉末を用いているため錆び易い。このため、酸化防止のため、試料表面に防錆膜を被覆する必要があるが、欠けが生じた箇所は、均一な防錆膜とならず、この箇所から錆が生じる虞がある。これに対して、試料4,5に関しては、金型から試料(グリーン体)を排出する際、欠けが生じず、ハンドリング性が良好であった。 Table 1 shows that, regarding the evaluation of handling properties, samples 1-3 exhibited cracks and chips on their outer edges when ejecting the samples (green material) from the mold using ejector pins. Samples 1 and 2, in particular, showed significant chipping, making them unsuitable. Such chipping poses a problem in subsequent processes, where, if the chipping extends to the track formation area, track formation becomes impossible. Furthermore, because Nd-Fe-B type magnet powder is used as the rare-earth magnet powder, it is prone to rusting. Therefore, a rust-preventive film needs to be applied to the sample surface to prevent oxidation. However, the areas where chipping occurred will not form a uniform rust-preventive film, potentially leading to rust formation in these areas. In contrast, samples 4 and 5 showed no chipping when ejecting the samples (green material) from the mold, demonstrating good handling properties.
また、グリーン体をキュアして作製したキュア体の厚さのバラツキ(最大値-最小値)を評価した厚み精度を見ると、試料1、2は、バラツキが0.06mmより大きく、不可であり、試料3~5は、バラツキが0.06mm以下で良好であった。特に、試料4、5は、バラツキが0.03mmであり、厚み精度が良好な結果を示した。厚さのバラツキが大きくなると、試料を磁気エンコーダとして用いた場合、磁気トラックを検出する磁気センサが検出するトラックからの磁束の大きさにバラツキが生じ、磁気エンコーダの角度精度の低下の要因になる。 Furthermore, when evaluating the thickness accuracy of the cured bodies produced by curing the green material (maximum - minimum value), samples 1 and 2 showed variations greater than 0.06 mm, which was unacceptable. Samples 3-5 showed variations of 0.06 mm or less, which was good. In particular, samples 4 and 5 showed good thickness accuracy with a variation of 0.03 mm. Large variations in thickness, when used as a magnetic encoder, can lead to variations in the magnitude of the magnetic flux detected by the magnetic sensor that detects the magnetic track, resulting in a decrease in the angular accuracy of the magnetic encoder.
表1のハンドリング性と厚み精度の評価結果から、試料4、5がいずれも良好な結果を示す。ここで、希土類磁石粉末の粒度分布における最大粒径を参照すると、試料4、5における最大粒径は、試料1~3の最大粒径に比べて小さいことがわかる。 Table 1 shows the evaluation results for handling and thickness accuracy, indicating that samples 4 and 5 both show good results. Referring to the maximum particle size in the particle size distribution of the rare earth magnet powder, it can be seen that the maximum particle size in samples 4 and 5 is smaller than that of samples 1-3.
ここで、グリーン体(試料1~5)の厚さT(mm)と、各試料1~5における希土類磁石粉末の最大粒径G(μm)との比率RをT/Gとした場合、表1に示すように、試料1は約2.82、試料2は約3.92、試料3は約4.44、試料4~5は約6.67である。このことから、表1のハンドリング性及び厚み精度の評価結果を勘案すると、試料の厚さTは、希土類磁石粉末の最大粒径の約4.5倍以上が好ましく、希土類磁石粉末の最大粒径の約6.7倍以上がさらに好ましい。 Here, when the ratio R of the thickness T (mm) of the green material (samples 1-5) to the maximum particle size G (μm) of the rare earth magnet powder in each sample 1-5 is defined as T/G, as shown in Table 1, the ratios are approximately 2.82 for sample 1, 3.92 for sample 2, 4.44 for sample 3, and 6.67 for samples 4-5. Therefore, considering the evaluation results of handling and thickness accuracy in Table 1, the sample thickness T is preferably approximately 4.5 times or more the maximum particle size of the rare earth magnet powder, and more preferably approximately 6.7 times or more the maximum particle size of the rare earth magnet powder.
また、表1のハンドリング性及び厚み精度の評価結果より、希土類磁石粉末の最適な粒径は、45μm ~ 225μmであり、好ましくは、45μm ~150μmである。なお、希土類磁石粉末の粒径が45μm未満では、金型間のクリアランス(隙間)に噛み込みが生じ易く、成形が困難になる虞がある。また、希土類磁石粉末の粒径が150μmを超えると、グリーン体に割れや欠けを生じるので、好ましくない。 Furthermore, based on the evaluation results for handling and thickness accuracy shown in Table 1, the optimal particle size for the rare earth magnet powder is 45 μm to 225 μm, preferably 45 μm to 150 μm. Note that if the particle size of the rare earth magnet powder is less than 45 μm, jamming is likely to occur in the clearance (gap) between the molds, potentially making molding difficult. Also, if the particle size of the rare earth magnet powder exceeds 150 μm, cracks and chips may occur in the green body, which is undesirable.
なお、上述した実施の形態では、リング状の希土類ボンド磁石に同心状に2つの磁気トラックを形成したバーニヤ方式を有するアキシャル形の磁気エンコーダについて説明したが、磁気トラックが1つの磁気エンコーダであっても同様に適用できる。また、筒状の希土類ボンド磁石の外周面に磁気トラックを形成するラジアルタイプの磁気エンコーダであっても同様に適用できる。 In the above-described embodiment, an axial magnetic encoder with a vernier type in which two magnetic tracks are formed concentrically on a ring-shaped rare-earth bonded magnet was explained. However, the same method can be applied to magnetic encoders with only one magnetic track. Furthermore, the same method can be applied to radial-type magnetic encoders in which magnetic tracks are formed on the outer surface of a cylindrical rare-earth bonded magnet.
1 磁気エンコーダ、2 主トラック、3 副トラック、4 無着磁領域、5 センサモジュール、6A、6B 磁気センサ、A 内径、B 外径 1. Magnetic encoder, 2. Main track, 3. Sub-track, 4. Unmagnetized area, 5. Sensor module, 6A, 6B. Magnetic sensors, A: Inner diameter, B: Outer diameter
Claims (5)
前記未加熱体に含まれる樹脂を熱硬化して熱硬化体を作製する工程と、
周方向に互いに異なる磁極が所定の磁極ピッチで着磁された磁気トラックを有するリング状の磁気エンコーダを作製する工程と、を含み、
前記未加熱体を作製する工程において、前記未加熱体の厚さをT(mm)、前記希土類磁石粉末の最大粒径をG(μm)とした時の比率RをT/Gとした場合、前記比率Rが6.67以上であり、かつ前記希土類磁石粉末の粒径が、45μm~150μmである、磁気エンコーダの製造方法。 A process of mixing rare earth magnet powder and resin, compressing it to produce an unheated body,
A step of producing a thermoset body by heat-curing the resin contained in the unheated body,
The process includes manufacturing a ring-shaped magnetic encoder having a magnetic track in which different magnetic poles in the circumferential direction are magnetized at a predetermined magnetic pole pitch,
A method for manufacturing a magnetic encoder, wherein, in the step of producing the unheated body, when the thickness of the unheated body is T (mm) and the maximum particle size of the rare earth magnet powder is G (μm), the ratio R is T/G, the ratio R is 6.67 or more, and the particle size of the rare earth magnet powder is 45 μm to 150 μm.
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| JP2022144727A JP7835652B2 (en) | 2022-09-12 | 2022-09-12 | Method for manufacturing a magnetic encoder |
| CN202380061943.2A CN119790284A (en) | 2022-09-12 | 2023-09-07 | Magnetic encoder |
| PCT/JP2023/032644 WO2024058040A1 (en) | 2022-09-12 | 2023-09-07 | Magnetic encoder |
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| JP2022144727A JP7835652B2 (en) | 2022-09-12 | 2022-09-12 | Method for manufacturing a magnetic encoder |
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| JP7835652B2 true JP7835652B2 (en) | 2026-03-25 |
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| CN (1) | CN119790284A (en) |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223337A (en) | 1999-01-28 | 2000-08-11 | Citizen Watch Co Ltd | Rare-earth bonded magnet and its manufacture |
| JP2006269657A (en) | 2005-03-23 | 2006-10-05 | Tdk Corp | Method for manufacturing resin bonding type permanent magnet |
| JP2006278461A (en) | 2005-03-28 | 2006-10-12 | Tdk Corp | Method of manufacturing resin-bonded permanent magnet |
| JP2011252826A (en) | 2010-06-03 | 2011-12-15 | Ntn Corp | Magnetic encoder |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006013055A (en) * | 2004-06-24 | 2006-01-12 | Minebea Co Ltd | Method for manufacturing anisotropic bond magnet |
| JP2008051770A (en) * | 2006-08-28 | 2008-03-06 | Ntn Corp | Magnetic encoder, wheel bearing arrangement including same, and manufacturing method of arrangement |
| JP6227972B2 (en) * | 2013-10-16 | 2017-11-08 | Ntn株式会社 | Magnetic encoder device and rotation detection device |
-
2022
- 2022-09-12 JP JP2022144727A patent/JP7835652B2/en active Active
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2023
- 2023-09-07 WO PCT/JP2023/032644 patent/WO2024058040A1/en not_active Ceased
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000223337A (en) | 1999-01-28 | 2000-08-11 | Citizen Watch Co Ltd | Rare-earth bonded magnet and its manufacture |
| JP2006269657A (en) | 2005-03-23 | 2006-10-05 | Tdk Corp | Method for manufacturing resin bonding type permanent magnet |
| JP2006278461A (en) | 2005-03-28 | 2006-10-12 | Tdk Corp | Method of manufacturing resin-bonded permanent magnet |
| JP2011252826A (en) | 2010-06-03 | 2011-12-15 | Ntn Corp | Magnetic encoder |
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| WO2024058040A1 (en) | 2024-03-21 |
| JP2024039956A (en) | 2024-03-25 |
| CN119790284A (en) | 2025-04-08 |
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