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JP7837052B2 - Wire-shaped circuit board, device, and method for manufacturing the same - Google Patents
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JP7837052B2 - Wire-shaped circuit board, device, and method for manufacturing the same - Google Patents

Wire-shaped circuit board, device, and method for manufacturing the same

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JP7837052B2
JP7837052B2 JP2022133692A JP2022133692A JP7837052B2 JP 7837052 B2 JP7837052 B2 JP 7837052B2 JP 2022133692 A JP2022133692 A JP 2022133692A JP 2022133692 A JP2022133692 A JP 2022133692A JP 7837052 B2 JP7837052 B2 JP 7837052B2
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circuit board
wire
thin film
circuit layer
manufacturing
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淳 武居
一徳 栗原
靖之 日下
大樹 延島
俊弘 竹下
健一 野村
学 吉田
グェン・タン・ヴィン
香理 木村
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National Institute of Advanced Industrial Science and Technology AIST
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Description

本発明は、伸縮性を有するワイヤ状の回路基板、デバイス及びその製造方法に関する。 This invention relates to a stretchable wire-shaped circuit board, a device, and a method for manufacturing the same.

健康モニタリングや感覚の共有システムなどにおいて、身体に違和感なく着装できる電子デバイスが求められ、この中枢の回路部分では高機能化とともに小型且つ軽量化が求められる。 In applications such as health monitoring and sensory sharing systems, there is a demand for electronic devices that can be worn comfortably on the body. The central circuitry in these devices requires not only high functionality but also miniaturization and lightweight design.

例えば、特許文献1では、シート材料上に回路層を形成した上で渦巻状に巻かれてなる渦巻状回路デバイスが開示されている。渦巻状に巻かれた回路は、従来の回路に比べ、体積特性及び重量特性において極めて有利であり、航空宇宙技術等における小型且つ軽量の、より一層多機能な回路デバイスに適用され得るとしている。 For example, Patent Document 1 discloses a spiral-shaped circuit device in which a circuit layer is formed on a sheet material and then wound into a spiral shape. The spiral-wound circuit is said to be extremely advantageous in terms of volumetric and weight characteristics compared to conventional circuits, and can be applied to smaller, lighter, and more multifunctional circuit devices in aerospace technology and other fields.

特表2006-527484号公報Special Publication No. 2006-527484

上記したような渦巻状回路デバイスをウェアラブルデバイスに使用するには、変形に対する自由度が必要であり、特に、巻き軸方向(長さ方向)への伸縮性が必要とされる。また、変形性を有する渦巻状回路デバイスとしてより細くワイヤ状に加工するには、その体積や重量を増加させる原因となる、渦巻き層間を接着する粘着剤の如き使用を極力制限することも求められる。 To use the spiral circuit devices described above in wearable devices, a degree of freedom in deformation is necessary, particularly elasticity in the winding axis direction (length direction). Furthermore, to process the spiral circuit device into a thinner, wire-like form, it is necessary to minimize the use of adhesives, such as those used to bond the spiral layers, which increase volume and weight.

本発明は、上記したような状況に鑑みてなされたものであって、その目的とするところは、ストレッチャブルデバイスへの適用に好適な、伸縮性を有するワイヤ状の回路基板、デバイス及びその製造方法を提供することにある。 This invention has been made in view of the circumstances described above, and its objective is to provide a stretchable wire-shaped circuit board, a device, and a method for manufacturing the same, which are suitable for application to stretchable devices.

本発明による回路基板は、伸縮性を有するワイヤ状の回路基板であって、弾性体膜の上を覆って導電性回路部分を有する薄膜からなる回路層を付与された薄膜基板が巻回されてなり、長手方向に沿って前記回路層の表面にうねりが形成され、前記長手方向に伸張させたときに前記うねりが平坦化することを特徴とする。かかる特徴によれば、小型且つ軽量であることを損なわず、巻き軸方向(長さ方向)への伸縮性を有し得て、ストレッチャブルデバイスへの適用に好適なのである。 The circuit board according to the present invention is a stretchable wire-shaped circuit board, characterized by the winding of a thin-film substrate on which a circuit layer made of a thin film having conductive circuit portions is applied, covering an elastic film, and the formation of undulations on the surface of the circuit layer along the longitudinal direction, which flatten when stretched in the longitudinal direction. This characteristic allows for stretchability in the winding axis direction (length direction) without compromising compactness and light weight, making it suitable for application in stretchable devices.

また本発明によるデバイスは、伸縮性を有するワイヤ状の回路基板を用いたデバイスであって、弾性体膜の上を覆って導電性回路部分を有する薄膜からなる回路層の上に機能性素子を付与された薄膜基板が巻回されてなり、長手方向に沿って前記回路層の表面にうねりが形成され、前記長手方向に伸張させたときに前記うねりが平坦化することを特徴とする。かかる特徴によれば、小型且つ軽量であることを損なわず、巻き軸方向(長さ方向)への伸縮性を有し得て、ストレッチャブルデバイスへの適用に好適なのである。 Furthermore, the device according to the present invention is a device using a stretchable wire-shaped circuit board, wherein a thin-film substrate, on which functional elements are attached, is wound around a circuit layer made of a thin film covering an elastic film and having a conductive circuit portion. A waviness is formed on the surface of the circuit layer along the longitudinal direction, and this waviness flattens when stretched in the longitudinal direction. This feature allows for miniaturization and lightweight construction without compromising stretchability in the winding axis direction (length direction), making it suitable for application to stretchable devices.

上記した発明において、長方形の前記弾性体膜の対向する2辺から互いに逆回りに巻回された並行する2本の巻回部を含むことを特徴としてもよい。かかる特徴によれば、回路密度を高めることができて、ストレッチャブルデバイスへの適用に好適なのである。 The invention described above may be characterized by including two parallel windings wound in opposite directions from two opposing sides of the rectangular elastic film. This feature allows for increased circuit density and is suitable for application to stretchable devices.

更に本発明による回路基板の製造方法は、伸縮性を有するワイヤ状の回路基板の製造方法であって、長方形の弾性体膜の対向する2つの短辺をそれぞれ幅方向に拘束しつつ互いに離間させるように荷重を与えて一軸方向に弾性変形させるステップと、前記弾性体膜の上を覆って導電性薄膜からなる回路層を付与するステップと、前記荷重を解除して前記一軸方向に沿って前記回路層の表面にうねりを形成させるとともに、前記弾性体膜の2つの長辺から互いに逆回り巻回させるステップと、含むことを特徴とする。かかる特徴によれば、小型且つ軽量であることを損なわず、巻き軸方向(長さ方向)への伸縮性を有し得て、ストレッチャブルデバイスへの適用に好適な回路基板を簡便に得られるのである。 Furthermore, the method for manufacturing a circuit board according to the present invention is a method for manufacturing a stretchable wire-shaped circuit board, characterized by the steps of: applying a load to a rectangular elastic film so as to restrain two opposing short sides in the width direction and separate them from each other, thereby elastically deforming it in a uniaxial direction; applying a circuit layer made of a conductive thin film to cover the elastic film; and releasing the load to form undulations on the surface of the circuit layer along the uniaxial direction, while simultaneously winding the elastic film in opposite directions from its two long sides. According to these features, a circuit board suitable for application to stretchable devices can be easily obtained without compromising compactness and light weight, while possessing stretchability in the winding axis direction (length direction).

本発明による実施例としてのワイヤ状の回路基板の斜視図である。This is a perspective view of a wire-shaped circuit board as an embodiment of the present invention. 同回路基板の長手方向に沿った断面を表す斜視図である。This is a perspective view showing a cross-section of the circuit board along its longitudinal direction. 同断面の拡大図である。This is a magnified view of the same cross-section. 回路基板の第1の製造方法の工程を示す斜視図である。This is a perspective view showing the steps of the first manufacturing method for a circuit board. 回路基板の第2の製造方法の工程を示す斜視図である。This is a perspective view showing the steps of the second manufacturing method for a circuit board. 回路基板の第3の製造方法の工程を示す写真である。This is a photograph showing the third manufacturing process for a circuit board. 製造試験における回路基板の寸法記号を示す斜視図である。This is a perspective view showing the dimensional symbols of a circuit board during manufacturing testing. 第1製造試験における初期長さと幅によるスクロール形状の形成の有無を示すグラフである。This graph shows whether or not a scroll shape was formed based on the initial length and width in the first manufacturing test. 第2製造試験における製造条件と得られた回路基板のスクロール幅の一覧表である。This is a table listing the manufacturing conditions in the second manufacturing test and the resulting scroll width of the circuit board.

以下に、本発明による1つの実施例であるワイヤ状の回路基板、これを用いたデバイス、及び、これらの製造方法について、図1乃至図6を用いて説明する。 Below, an embodiment of the present invention, consisting of a wire-shaped circuit board, a device using the same, and a method for manufacturing these, will be described with reference to Figures 1 to 6.

図1に示すように、回路基板1は、薄膜基板2を長手方向に沿った巻き軸の周りに巻回させたことにより、全体としてワイヤ状(線状)を呈する。本実施例においては、巻き軸A1及びA2の2つが存在し、これによって、並行する2本の巻回部R1及びR2を形成している。 As shown in Figure 1, the circuit board 1 is formed by winding a thin film substrate 2 around a winding axis oriented in the longitudinal direction, resulting in an overall wire-like (linear) structure. In this embodiment, there are two winding axes, A1 and A2, which form two parallel winding sections, R1 and R2.

図2及び図3(a)を併せて参照すると、巻回部R1及びR2は、薄膜基板2による複層状体となり、各層の内周側の表面には巻き軸A1及びA2に沿ってうねり3が形成されている。つまり、うねり3はその尾根3a及び谷3bを巻き軸A1及びA2に垂直な平面上で巻き軸A1及びA2周りに周回させるように形成される。薄膜基板2は、弾性体膜5とその上を覆う回路層4の二層構造となっている。回路層4は、導電性回路部分を有する薄膜によって形成されている。 Referring to Figures 2 and 3(a) together, the winding sections R1 and R2 are multilayered structures made of the thin film substrate 2, and undulations 3 are formed on the inner surface of each layer along the winding axes A1 and A2. That is, the undulations 3 are formed so that their ridges 3a and valleys 3b circulate around the winding axes A1 and A2 on a plane perpendicular to the winding axes A1 and A2. The thin film substrate 2 has a two-layer structure consisting of an elastic film 5 and a circuit layer 4 covering it. The circuit layer 4 is formed of a thin film having a conductive circuit portion.

ここで、図3(b)に示すように、回路基板1を長手方向(紙面左右方向)に伸張させると、うねり3が平坦化してその尾根3a及び谷3bの高低差を小さくする。また、伸張させるための力を解除すると、回路基板1は、弾性体膜5の弾性によって同図(a)のようなうねり3の高低差の大きな形状に戻る。 Here, as shown in Figure 3(b), when the circuit board 1 is stretched in the longitudinal direction (left-right direction on the paper), the undulation 3 flattens, reducing the height difference between its ridges 3a and valleys 3b. Furthermore, when the stretching force is released, the circuit board 1 returns to its original shape with a large height difference between the undulations 3, as shown in Figure 3(a), due to the elasticity of the elastic membrane 5.

つまり、回路層4は、弾性体膜5のような優れた弾性を有していなくても、長手方向に沿ったうねり3を形成していることで、長手方向の伸張に対してうねり3を平坦化させることで追従できる。そのため、回路基板1は長手方向に荷重を付与して伸張させることができ、さらに、かかる荷重を解除して元の形状に戻すことができる。例えば、ワイヤ状の回路基板1をストレッチャブル配線とし得る。 In other words, even if the circuit layer 4 does not possess the excellent elasticity of an elastic membrane 5, it can follow longitudinal stretching by flattening the undulations 3 formed along its longitudinal direction. Therefore, the circuit board 1 can be stretched by applying a load in the longitudinal direction, and furthermore, it can return to its original shape by releasing the load. For example, a wire-shaped circuit board 1 can be made into stretchable wiring.

また、回路基板1は、回路層4を所定の構成として必要な機能性素子を組み込むことにより、例えば、曲げ検出デバイス、光発電デバイス、発光デバイスなどのストレッチャブルデバイスとし得る。 Furthermore, by integrating necessary functional elements into the circuit layer 4 with a predetermined configuration, the circuit board 1 can be transformed into a stretchable device such as a bending detection device, a photovoltaic power generation device, or a light-emitting device.

例えば、回路層4の導電性回路部分に用いられる材料としては、薄膜基板2の変形に追従できるものが求められる。例えば、回路基板1を用いたデバイスとして圧力センサを構成する場合、ポリチオフェン系導電性ポリマーであるPEDOT:PSSなどの導電性高分子材料が好適に用いられる。その他、発光素子とする場合には、導電性高分子材料、発光弾性体材料、有機発光材料などを用い得る。また、ストレッチャブル配線とする場合には、液体金属材料などを用い得る。さらに、光発電素子とする場合には、導電性高分子材料、金、P3HT/PCBMなどの有機薄膜太陽電池用の有機半導体材料、液体金属材料などの適用が考慮される。 For example, the material used in the conductive circuit portion of the circuit layer 4 must be able to follow the deformation of the thin-film substrate 2. For instance, when a pressure sensor is constructed as a device using the circuit substrate 1, conductive polymer materials such as PEDOT:PSS, a polythiophene-based conductive polymer, are preferably used. Other materials that can be used for light-emitting devices include conductive polymer materials, luminescent elastic materials, and organic luminescent materials. Furthermore, liquid metal materials can be used for stretchable wiring. In addition, for photovoltaic elements, conductive polymer materials, gold, organic semiconductor materials for organic thin-film solar cells such as P3HT/PCBM, and liquid metal materials are considered.

次に、このような回路基板1の製造方法について説明する。 Next, we will explain how to manufacture such a circuit board 1.

[第1の製造方法]
図4(a)に示すように、まず、長方形の弾性体膜5を用意し、対向する2つの短辺をそれぞれ幅方向に拘束するように、長手方向の両端部をそれぞれ治具11で固定する。弾性体膜5としては、例えば、PDMS(ポリジメチルシロキサン)等のシリコーンエラストマを好適に使用し得る。
[First manufacturing method]
As shown in Figure 4(a), first, a rectangular elastic membrane 5 is prepared, and both ends in the longitudinal direction are fixed with jigs 11 so as to restrain the two opposing short sides in the width direction. For the elastic membrane 5, a silicone elastomer such as PDMS (polydimethylsiloxane) can be suitably used.

同図(b)に示すように、治具11によって弾性体膜5の短辺を幅方向に拘束しながら2つの治具11を互いに離間させるように荷重を与え、弾性体膜5を長手の一軸方向に伸張させるように弾性変形させる(弾性変形ステップ)。そして、その弾性変形を維持したまま、弾性体膜5の上を覆うように回路層4を付与する(回路層付与ステップ)。回路層4としては、可撓性を有することでうねり3を形成し得る膜体であり、例えば、パリレン(登録商標)やフッ素樹脂などの絶縁膜に導電性回路部分を付与した導電性薄膜である。弾性体膜5に回路層4を付与することで薄膜基板2を得る。なお、回路層4を形成する前にはOプラズマを印加するなどして、各層間の接合性を高くすることが好ましい。回路層4を複層とする場合も同様にプラズマ処理を行うことが好ましい。 As shown in Figure (b), a load is applied to the two jigs 11 so as to separate them from each other while constraining the short side of the elastic film 5 in the width direction with the jig 11, causing the elastic film 5 to be elastically deformed so as to stretch in the longitudinal direction (elastic deformation step). Then, while maintaining this elastic deformation, a circuit layer 4 is applied so as to cover the elastic film 5 (circuit layer application step). The circuit layer 4 is a film body that can form undulations 3 by having flexibility, and is, for example, a conductive thin film in which a conductive circuit portion is applied to an insulating film such as parylene (registered trademark) or fluororesin. A thin film substrate 2 is obtained by applying the circuit layer 4 to the elastic film 5. It is preferable to apply O2 plasma before forming the circuit layer 4 to improve the bonding between each layer. It is also preferable to perform plasma treatment in the same way when the circuit layer 4 is a multi-layer.

同図(c)に示すように、治具11に与えた荷重を維持した状態から、同図(d)に示すように、治具11に与えた荷重を解除する(荷重解除ステップ)。すると、治具11に拘束されない薄膜基板2の長手方向の中央部分において巻回部R1及びR2が形成される。巻回部R1及びR2は、長方形の弾性体膜5の対向する2辺(長辺)から薄膜基板2の弾性体膜5を外側にするようにして互いに逆回りに巻回される。このように、2つの長辺から互いに逆回りに巻回させた巻回部を含む形状を、以降、「スクロール形状」と呼ぶことにする。また、回路層4の表面には、弾性体膜5の長辺に沿ってうねり3が形成される。このようにして、回路基板1を得ることができる。なお、巻回部R1及びR2の間を長手方向に切断することで、巻回部を1つとするワイヤ状の回路基板を得ることもできる。 As shown in Figure (c), the load applied to the jig 11 is maintained, and then, as shown in Figure (d), the load applied to the jig 11 is released (load release step). This forms winding sections R1 and R2 in the central longitudinal portion of the thin film substrate 2, which is not constrained by the jig 11. The winding sections R1 and R2 are wound in opposite directions from two opposing sides (long sides) of the rectangular elastic film 5, with the elastic film 5 of the thin film substrate 2 facing outwards. This shape, including the winding sections wound in opposite directions from the two long sides, will hereafter be referred to as a "scroll shape." Furthermore, undulations 3 are formed on the surface of the circuit layer 4 along the long sides of the elastic film 5. In this way, the circuit board 1 can be obtained. Note that by cutting the circuit board between the winding sections R1 and R2 in the longitudinal direction, a wire-shaped circuit board with a single winding section can also be obtained.

このような製造方法においては、延伸させる量は弾性体膜5の弾性限によるため比較的大きくでき、巻回部を形成させるための条件を調整しやすい。 In this manufacturing method, the amount of stretching can be relatively large because it is limited by the elastic limit of the elastic membrane 5, making it easy to adjust the conditions for forming the winding portion.

なお、同図(d)に示すように、治具11に荷重を与えていない状態から、治具11の2つを互いに離間する方向に荷重を与えると、治具11による短辺の拘束があるため、同図(c)に示すように巻回部R1及びR1を広げて薄膜基板2の全体を平坦とする。また、うねり3は小さくなり、十分に荷重を与えると消失する。 Furthermore, as shown in Figure (d), when a load is applied to the two parts of the jig 11 in a direction that separates them from each other, the short side is constrained by the jig 11. Therefore, as shown in Figure (c), the winding sections R1 and R1 spread out, making the entire thin film substrate 2 flat. Also, the waviness 3 decreases and disappears completely when sufficient load is applied.

[第2の製造方法]
図5に示すように、他の製造方法によってもスクロール形状を有する回路基板1を得ることができる。
[Second manufacturing method]
As shown in Figure 5, a circuit board 1 having a scroll shape can also be obtained by other manufacturing methods.

まず、同図(a)に示すように、長方形の弾性体膜5の上を覆うように伸張前回路層4’を付与した伸張前薄膜基板2’を用意する。このとき、弾性体膜5に荷重は付与されていない。そして、第1の製造方法と同様に、長方形の伸張前薄膜基板2’の対向する2つの短辺をそれぞれ幅方向に拘束するように、長手方向の両端部をそれぞれ治具11で固定する。 First, as shown in Figure (a), a pre-stretched thin film substrate 2' is prepared by applying a pre-stretched circuit layer 4' to cover the rectangular elastic film 5. At this time, no load is applied to the elastic film 5. Then, similar to the first manufacturing method, both ends of the rectangular pre-stretched thin film substrate 2' in the longitudinal direction are fixed with jigs 11 so that the two opposing short sides are constrained in the width direction.

次に、同図(b)に示すように、治具11によって伸張前薄膜基板2’の短辺を幅方向に拘束しながら2つの治具11を互いに離間させるように荷重を与え、伸張前薄膜基板2’を長手の一軸方向に伸張させるように変形させて薄膜基板2とする。このとき弾性体膜5は弾性変形をし、伸張前回路層4’は塑性変形により伸張して回路層4となる。なお、伸張前回路層4’は、伸張することで回路層4となるような寸法とされ、塑性変形によっても薄膜形状を維持できる材料を用いて形成される。伸張前回路層4’の材料としては、例えば、パリレンを好適に用い得る。また、伸張前回路層4’の導電性回路部分に用いられる材料としても、伸張前薄膜基板2’の変形に追従できるものが求められる。例えば、上記した、導電性高分子材料、発光弾性体材料、有機発光材料、液体金属材料、金、有機半導体材料などを好適に用い得る。 Next, as shown in Figure (b), a load is applied to the two jigs 11 so as to separate them while constraining the short side of the pre-stretched thin film substrate 2' in the width direction, thereby deforming the pre-stretched thin film substrate 2' by stretching it in the longitudinal direction to form the thin film substrate 2. At this time, the elastic film 5 undergoes elastic deformation, and the pre-stretched circuit layer 4' undergoes plastic deformation to stretch and become the circuit layer 4. The pre-stretched circuit layer 4' is sized to become the circuit layer 4 upon stretching and is formed using a material that can maintain its thin film shape even under plastic deformation. For example, parylene can be suitably used as the material for the pre-stretched circuit layer 4'. Furthermore, the material used for the conductive circuit portion of the pre-stretched circuit layer 4' must also be able to follow the deformation of the pre-stretched thin film substrate 2'. For example, the conductive polymer materials, luminescent elastic materials, organic luminescent materials, liquid metal materials, gold, and organic semiconductor materials mentioned above can be suitably used.

最後に、同図(c)に示すように、治具11に与えた荷重を解除すると、治具11に拘束されない薄膜基板2の長手方向の中央部分において巻回部R1及びR2が形成される。巻回部R1及びR2は、長方形の弾性体膜5の対向する2辺(長辺)から薄膜基板2の弾性体膜5を外側にするようにして互いに逆回りに巻回され、スクロール形状を得る。また、回路層4の表面には、弾性体膜5の長辺に沿ってうねり3が形成される。このようにして、回路基板1を得ることができる。 Finally, as shown in Figure (c), when the load applied to the jig 11 is released, winding portions R1 and R2 are formed in the central longitudinal portion of the thin film substrate 2, which is not constrained by the jig 11. The winding portions R1 and R2 are wound in opposite directions from two opposing sides (long sides) of the rectangular elastic film 5, with the elastic film 5 of the thin film substrate 2 facing outwards, thereby obtaining a scroll shape. Furthermore, undulations 3 are formed on the surface of the circuit layer 4 along the long sides of the elastic film 5. In this way, the circuit board 1 can be obtained.

また、同図(c)に示すように、治具11に荷重を与えていない状態から、治具11の2つを互いに離間する方向に荷重を与えると、同図(b)に示すように、薄膜基板2は伸張される。このとき、治具11による短辺の拘束があるため、巻回部R1及びR1を広げて薄膜基板2の全体を平坦とする。また、うねり3は小さくなり、十分に荷重を与えると消失する。 Furthermore, as shown in Figure (c), when a load is applied to the two parts of the jig 11 in a direction that separates them from each other, starting from a state where no load is applied to the jig 11, the thin film substrate 2 is stretched, as shown in Figure (b). At this time, due to the constraint on the short side by the jig 11, the winding portions R1 and R1 are spread out, making the entire thin film substrate 2 flat. Also, the waviness 3 becomes smaller and disappears when sufficient load is applied.

このような製造方向においては、塑性変形させる量は伸張前回路層4’の塑性変形能によるため、上記した第1の製造方法に比較して小さくなる傾向にある。一方、伸張前回路層4’を付与するときに治具11への荷重を要さず、製造が容易である。 In this manufacturing method, the amount of plastic deformation is determined by the plastic deformability of the pre-stretched circuit layer 4', and therefore tends to be smaller compared to the first manufacturing method described above. On the other hand, since no load is required on the jig 11 when applying the pre-stretched circuit layer 4', manufacturing is easier.

[第3の製造方法]
図6に示すように、例えば、1mを超えるような長さを有する回路基板1を製造することもできる。
[Third manufacturing method]
As shown in Figure 6, for example, it is also possible to manufacture a circuit board 1 having a length exceeding 1 meter.

まず、同図(a)に示すように、円盤状の基台の表面に剥離剤を成膜し、その上に第2の製造方法と同様の伸張前薄膜基板2’を成膜する。さらに、伸張前薄膜基板2’に渦巻き状の切れ込みをいれた。 First, as shown in Figure (a), a release agent is deposited on the surface of a disc-shaped base, and then a pre-stretched thin film substrate 2' is deposited on top of it, similar to the method used in the second manufacturing method. Furthermore, spiral-shaped cuts are made in the pre-stretched thin film substrate 2'.

ここでは、基台として直径8インチのシリコンウエハを用い、剥離剤としてCytop 809Mをスピンコートにより成膜した。また、伸張前薄膜基板2’の弾性体膜5として、Sylgard184の主剤と硬化剤を5:1で混合し、約50μmの厚さで塗布して硬化させた。さらに、伸張前薄膜基板2’の伸張前回路層4’として、パリレンCを4μmの厚さで成膜した。また、渦巻き状の切れ込みの幅は約5mmとした。 Here, an 8-inch diameter silicon wafer was used as the substrate, and Cytop 809M was deposited as a release agent by spin coating. Furthermore, as the elastic film 5 of the pre-stretched thin film substrate 2', a mixture of the main component and curing agent of Sylgard 184 in a 5:1 ratio was applied to a thickness of approximately 50 μm and cured. In addition, parylene C was deposited to a thickness of 4 μm as the pre-stretched circuit layer 4' of the pre-stretched thin film substrate 2'. The width of the spiral-shaped cutouts was approximately 5 mm.

次に、同図(b)に示すように、外周側から伸張前薄膜基板2’の一部を剥離させ、引っ張り荷重を付与して延伸させる。延伸させた部分の荷重を解除すると、剥離・延伸させた部分において薄膜基板2に巻回部R1及びR2を形成しスクロール形状を有する回路基板1となる。ここでは、伸張前薄膜基板2’の長さ3cm程度を剥離させ、5cm程度の長さまで延伸させて薄膜基板2とし、荷重を解除した。 Next, as shown in Figure (b), a portion of the pre-stretched thin film substrate 2' is peeled off from the outer periphery, and a tensile load is applied to stretch it. When the load is released from the stretched portion, winding sections R1 and R2 are formed on the peeled and stretched portion of the thin film substrate 2, resulting in a scroll-shaped circuit board 1. In this example, approximately 3 cm of the pre-stretched thin film substrate 2' was peeled off, stretched to approximately 5 cm to form the thin film substrate 2, and then the load was released.

さらに、同図(c)に示すように、剥離・延伸を渦巻きの外側から、順次、繰り返して行い、長く連続したスクロール形状を有する回路基板1を得た。 Furthermore, as shown in Figure (c), peeling and stretching were repeatedly performed sequentially from the outside of the spiral to obtain a circuit board 1 having a long, continuous scroll shape.

以上のように、薄膜基板2を巻回させる構造により、小型且つ軽量であることを損なわず、巻き軸方向(長さ方向)への伸縮性を有し得る回路基板1を得ることができる。また、このような回路基板1は、ワイヤ状で長さ方向への伸縮性を有するため、ストレッチャブルデバイスへの適用に好適であり、比較的簡便に得られる。 As described above, by winding the thin film substrate 2, a circuit board 1 can be obtained that is compact and lightweight, and has stretchability in the winding axis direction (length direction). Furthermore, because such a circuit board 1 is wire-like and stretchable in the length direction, it is suitable for application to stretchable devices and can be obtained relatively easily.

次に、上記した第2の製造方法による回路基板の製造を実際に行った結果について、図7乃至図9を用いて説明する。 Next, the results of actually manufacturing a circuit board using the second manufacturing method described above will be explained with reference to Figures 7 to 9.

[第1製造試験]
上記した第2の製造方法と同様の製造方法によって薄膜基板2を製造したときに、スクロール形状を有するワイヤ状の回路基板1を得られるか、複数の製造条件で確認した。
[First Manufacturing Test]
We investigated whether a wire-shaped circuit board 1 having a scroll shape could be obtained by manufacturing the thin film substrate 2 using the same manufacturing method as the second manufacturing method described above, under multiple manufacturing conditions.

まず、図7に示すように、治具11間の初期長さL、幅Wの長方形の伸張前薄膜基板2’を用意した。つまり、弾性体膜5とその上を覆う伸張前回路層4’を付与した伸張前薄膜基板2’の両短辺を治具11で拘束した。なお、弾性体膜5は、Sylgard(登録商標) 184 Erastomer kit(ザ・ダウ・ケミカル・カンパニー社製)を用い、主剤:硬化剤を5:1の割合で混合して厚さ55μmに成膜して得た。また、伸張前回路層4’としては、弾性体膜5の上にParylene C(PARYLENEは登録商標)を4μmの厚さに成膜して得た。 First, as shown in Figure 7, a rectangular pre-stretched thin film substrate 2' with an initial length L and width W between the jigs 11 was prepared. That is, both short sides of the pre-stretched thin film substrate 2', which had an elastic film 5 and a pre-stretched circuit layer 4' covering it, were restrained by the jigs 11. The elastic film 5 was obtained by using Sylgard® 184 Elastomer kit (manufactured by The Dow Chemical Company), mixing the main agent and curing agent in a 5:1 ratio and depositing a film to a thickness of 55 μm. The pre-stretched circuit layer 4' was obtained by depositing Parylene C (PARYLENE is a registered trademark) to a thickness of 4 μm on the elastic film 5.

次に、治具11の2つを互いに離間させるように荷重を付与し、治具11間の距離が初期長さLの1.8倍となるまで伸張前薄膜基板2’を伸張させ、伸張前回路層4’を塑性変形させ、薄膜基板2(図5(b)参照)を得た。さらに、治具11間を離間させた荷重を解除し、薄膜基板2がスクロール形状を呈するかを観察した。 Next, a load was applied to separate the two jigs 11 from each other, and the pre-stretched thin film substrate 2' was stretched until the distance between the jigs 11 became 1.8 times the initial length L. This caused plastic deformation of the pre-stretched circuit layer 4', obtaining the thin film substrate 2 (see Figure 5(b)). Furthermore, the load separating the jigs 11 was released, and it was observed whether the thin film substrate 2 exhibited a scroll shape.

図8には、観察した結果を示した。ここでは、「〇」がスクロール形状を呈したものであり、「×」はスクロール形状を得られなかったものである。スクロール形状を呈する幅と初期長さとの組み合わせに条件のあることが判る。 Figure 8 shows the observed results. Here, "○" indicates a scroll shape, and "×" indicates a lack of a scroll shape. It can be seen that there are conditions regarding the combination of width and initial length required to exhibit a scroll shape.

[第2製造試験]
上記した第2の製造方法と同様の製造方法によってスクロール形状を有する回路基板1を製造したときのスクロール形状部分の幅(スクロール幅)を測定した。
[Second Manufacturing Test]
The width of the scroll-shaped portion (scroll width) was measured when a circuit board 1 having a scroll shape was manufactured by the same manufacturing method as the second manufacturing method described above.

図9には、弾性体膜5の厚さ、伸張前回路層4’の厚さ、伸張前薄膜基板2’の長さ及び幅、伸張前薄膜基板2’を伸張させる割合(最大歪)を変化させたときのスクロール幅を示した。なお、最大歪 εは、初期長さ Lに対し、全長がL×(1+ε/100%)となるまで伸張させたことを示す。例えば、最大歪 εが100%の場合は、初期長さ Lに対し、伸張させたときの寸法を2×Lとするのである。 Figure 9 shows the scroll width when the thickness of the elastic film 5, the thickness of the circuit layer 4' before stretching, the length and width of the thin film substrate 2' before stretching, and the degree of stretching (maximum strain) of the thin film substrate 2' before stretching are varied. The maximum strain ε indicates that the substrate has been stretched to L × (1 + ε/100%) relative to its initial length L. For example, when the maximum strain ε is 100%, the stretched dimension is 2 × L relative to the initial length L.

No.1~27については、以下の条件とした。弾性体膜5は、上記と同じくSylgard 184 Erastomer kitを主剤:硬化剤を5:1の割合で混合し、ヤング率を1.37MPaとした。また、伸張前回路層4’は、上記と同じくParylene Cを厚さ4μmとして用いた。なお、伸張前回路層4’のヤング率は1.8GPaである。 For samples No. 1 to 27, the following conditions were met. The elastic film 5 was prepared by mixing Sylgard 184 Elastomer kit in a 5:1 ratio of main component to hardener, resulting in a Young's modulus of 1.37 MPa. The pre-stretch circuit layer 4' was prepared using Parylene C with a thickness of 4 μm, as described above. The Young's modulus of the pre-stretch circuit layer 4' was 1.8 GPa.

No.28、29は、弾性体膜5を混合材料とし、伸張前薄膜基板2’を複層にした場合の例である。弾性体膜5は、Sylgard 184 Erastomer kitの主剤(a)、硬化剤(b)と、Ecoflex 00-30(Smoothon社製)のA剤(c)、B剤(d)を混合した。混合比率は(a):(b):(c):(d)=40:1:82:82とした。なお、ヤング率は86kPaであった。また、伸張前薄膜基板2’は、Parylene C→diX-SR(diXは登録商標:KISCO株式会社製)→Parylene C→Cytop 809M(Cytopは登録商標:AGC化学品カンパニー製)の四層構造とした。Paryleneは、2層ともに厚さ0.2μmとし、ヤング率は1.8GPaであった。diX-SRは、No.28において厚さ1μm、No.29において厚さ0.8μmとし、ヤング率は4.0GPaであった。Cytop 809Mは、厚さ0.3μmとし、ヤング率は1.3GPaであった。 Nos. 28 and 29 are examples where the elastic film 5 is used as a mixed material and the pre-stretched thin film substrate 2' is multilayered. The elastic film 5 was prepared by mixing the main component (a) and curing agent (b) of Sylgard 184 Elastomer kit with component A (c) and component B (d) of Ecoflex 00-30 (manufactured by Smoothon). The mixing ratio was (a):(b):(c):(d) = 40:1:82:82. The Young's modulus was 86 kPa. The pre-stretched thin film substrate 2' had a four-layer structure of Parylene C → diX-SR (diX is a registered trademark: manufactured by KISCO Corporation) → Parylene C → Cytop 809M (Cytop is a registered trademark: manufactured by AGC Chemicals Company). Parylene had a thickness of 0.2 μm in both layers, and its Young's modulus was 1.8 GPa. diX-SR had a thickness of 1 μm in No. 28 and a thickness of 0.8 μm in No. 29, with a Young's modulus of 4.0 GPa. Cytop 809M had a thickness of 0.3 μm, and its Young's modulus was 1.3 GPa.

これらに示すように、種々の条件においてスクロール形状を有する回路基板1を製造することができた。伸張前薄膜基板の厚さが薄く、伸張前薄膜基板の幅Wが小さく、最大歪εが大きいものほどスクロール幅が小さくなる傾向にあった。 As shown above, we were able to manufacture a circuit board 1 with a scroll shape under various conditions. The scroll width tended to be smaller when the thickness of the thin film substrate before stretching was thin, the width W of the thin film substrate before stretching was small, and the maximum strain ε was large.

以上、本発明による実施例及びこれに基づく変形例を説明したが、本発明は必ずしもこれに限定されるものではなく、当業者であれば、本発明の主旨又は添付した特許請求の範囲を逸脱することなく、様々な代替実施例及び改変例を見出すことができるであろう。 Although embodiments and modifications based thereon have been described above, the present invention is not necessarily limited thereto. Those skilled in the art will be able to find various alternative embodiments and modifications without departing from the spirit of the invention or the scope of the attached claims.

1 回路基板
2 薄膜基板
2’伸張前薄膜基板
3 うねり
4 回路層
4’伸張前回路層
5 弾性体膜
11 治具
R1、R2 巻回部
1 Circuit board 2 Thin film substrate 2' Thin film substrate before stretching 3 Wavy 4 Circuit layer 4' Circuit layer before stretching 5 Elastic film 11 Jig R1, R2 Winding section

Claims (5)

伸縮性を有するワイヤ状の回路基板であって、
弾性体膜の上を覆って導電性回路部分を有する薄膜からなる回路層を付与された薄膜基板が巻回されてなり、長手方向に沿って前記回路層の表面にうねりが形成され、前記長手方向に伸張させたときに前記うねりが平坦化することを特徴とするワイヤ状の回路基板。
A wire-shaped circuit board that is stretchable,
A wire-shaped circuit board is formed by winding a thin-film substrate onto which a circuit layer made of a thin film having a conductive circuit portion is provided, covering an elastic film, wherein undulations are formed on the surface of the circuit layer along the longitudinal direction, and the undulations flatten out when the wire is stretched in the longitudinal direction.
長方形の前記弾性体膜の対向する2辺から互いに逆回りに巻回された並行する2本の巻回部を含むことを特徴とする請求項1記載のワイヤ状の回路基板。 The wire-shaped circuit board according to claim 1, characterized in that it includes two parallel windings wound in opposite directions from two opposing sides of the rectangular elastic film. 伸縮性を有するワイヤ状の回路基板を用いたデバイスであって、
弾性体膜の上を覆って導電性回路部分を有する薄膜からなる回路層の上に機能性素子を付与された薄膜基板が巻回されてなり、長手方向に沿って前記回路層の表面にうねりが形成され、前記長手方向に伸張させたときに前記うねりが平坦化することを特徴とするワイヤ状の回路基板を用いたデバイス。
A device using a wire-shaped circuit board that is stretchable,
A device using a wire-shaped circuit board, characterized in that a thin film substrate, on which a functional element is attached, is wound around a circuit layer made of a thin film covering an elastic film and having a conductive circuit portion, and undulations are formed on the surface of the circuit layer along the longitudinal direction, and the undulations become flat when stretched in the longitudinal direction.
長方形の前記薄膜基板の対向する2辺から互いに逆回りに巻回された並行する2本の巻回部を含むことを特徴とする請求項3記載のデバイス。 The device according to claim 3, characterized by including two parallel windings wound in opposite directions from two opposing sides of the rectangular thin-film substrate. 伸縮性を有するワイヤ状の回路基板の製造方法であって、
長方形の弾性体膜の対向する2つの短辺をそれぞれ幅方向に拘束しつつ互いに離間させるように荷重を与えて一軸方向に弾性変形させるステップと、
前記弾性体膜の上を覆って導電性薄膜からなる回路層を付与するステップと、
前記荷重を解除して前記一軸方向に沿って前記回路層の表面にうねりを形成させるとともに、前記弾性体膜の2つの長辺から互いに逆回り巻回させるステップと、含むことを特徴とするワイヤ状の回路基板の製造方法。

A method for manufacturing a stretchable wire-shaped circuit board,
A step of elastically deforming a rectangular elastic membrane in one axis direction by applying a load to restrict two opposing short sides in the width direction and move them apart from each other,
The steps include: providing a circuit layer made of a conductive thin film by covering the elastic film;
A method for manufacturing a wire-shaped circuit board, comprising the steps of releasing the load to form undulations on the surface of the circuit layer along the uniaxial direction, and winding the elastic film in opposite directions from its two long sides.

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150017818A1 (en) 2013-07-12 2015-01-15 Advanced Flexible Circuits Co., Ltd. Method and structure of penetration and combination for flexible circuit board with hinge assembly
WO2019093069A1 (en) 2017-11-07 2019-05-16 大日本印刷株式会社 Stretchable circuit substrate and article
JP2020194952A (en) 2019-05-24 2020-12-03 Nissha株式会社 Cylindrical printed circuit board and printed circuit board integrally molded product
JP2021109371A (en) 2020-01-09 2021-08-02 国立研究開発法人産業技術総合研究所 Stretchable device and method for manufacturing the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102416112B1 (en) * 2014-10-02 2022-07-04 삼성전자주식회사 Stretchable/foldable optoelectronic device, method of manufacturing the same and apparatus including the optoelectronic device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150017818A1 (en) 2013-07-12 2015-01-15 Advanced Flexible Circuits Co., Ltd. Method and structure of penetration and combination for flexible circuit board with hinge assembly
WO2019093069A1 (en) 2017-11-07 2019-05-16 大日本印刷株式会社 Stretchable circuit substrate and article
JP2020194952A (en) 2019-05-24 2020-12-03 Nissha株式会社 Cylindrical printed circuit board and printed circuit board integrally molded product
JP2021109371A (en) 2020-01-09 2021-08-02 国立研究開発法人産業技術総合研究所 Stretchable device and method for manufacturing the same

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