JP7846111B2 - X-ray transmission inspection apparatus and X-ray transmission inspection method - Google Patents
X-ray transmission inspection apparatus and X-ray transmission inspection methodInfo
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- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
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Description
本発明は、透過Ｘ線検査装置、及び透過Ｘ線検査方法に関するものである。The present invention relates to a transmission X-ray inspection apparatus and a transmission X-ray inspection method.
従来、試料中の異物を検査するシステムとして、特許文献１に示すように、透過Ｘ線検査装置を用いたものがある。この透過Ｘ線検査装置は、Ｘ線発生器からのＸ線を試料に照射し、当該試料を透過した透過Ｘ線を検出して、異物を検査するものである。Conventionally, as shown in Patent Document 1, there are systems that use a transmission X-ray inspection device for inspecting foreign substances in a sample. This transmission X-ray inspection device irradiates the sample with X-rays from an X-ray generator and detects the transmitted X-rays that pass through the sample to inspect for foreign substances.
しかしながら、Ｘ線発生器からのＸ線は広がりながら試料に照射されるため、試料に照射されるＸ線強度が弱く、結果として、試料を透過する透過Ｘ線の強度も弱くなってしまう。そのため、透過Ｘ線検出器の検出感度が低下してしまう。なお、透過Ｘ線検出器の検出感度を向上させるべく、積算線量を大きくするために計数時間を長くすることも考えられるが、試料１つ１つに対して異物検査の時間が長くなってしまう。However, because the X-rays from the X-ray generator spread out as they irradiate the sample, the intensity of the X-rays irradiating the sample is weak, and as a result, the intensity of the transmitted X-rays that pass through the sample is also weak. Therefore, the detection sensitivity of the transmitted X-ray detector decreases. While it is possible to increase the counting time to increase the cumulative dose in order to improve the detection sensitivity of the transmitted X-ray detector, this would increase the time required for foreign object inspection for each individual sample.
そこで、本発明は上述したような問題に鑑みてなされたものであり、透過Ｘ線検査装置において試料中の異物の検出感度を向上することをその主たる課題とするものである。Therefore, the present invention has been made in view of the above-mentioned problems, and its main objective is to improve the detection sensitivity of foreign substances in a sample in a transmission X-ray inspection device.
すなわち、本発明に係る透過Ｘ線検査装置は、互いに異なる複数のエネルギ域を含むＸ線を発するＸ線源と、前記Ｘ線から１つのエネルギ域のＸ線に分光するとともに試料に向けて集光する光学素子と、前記試料を透過した透過Ｘ線を検出する透過Ｘ線検出部とを備えることを特徴とする。In other words, the transmission X-ray inspection apparatus according to the present invention is characterized by comprising an X-ray source that emits X-rays including a plurality of energy ranges that are different from each other, an optical element that spectrally separates the X-rays into X-rays of one energy range and focuses them toward a sample, and a transmission X-ray detection unit that detects the transmission X-rays that have passed through the sample.
このような構成であれば、互いに異なる複数のエネルギ域を含むＸ線から１つのエネルギ域のＸ線に分光しつつ試料に向けて集光するので、試料に照射される１つのエネルギ域のＸ線の強度を向上させることができ、透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、透過Ｘ線検査装置において試料中の異物の検出感度を向上することができる。また、試料に照射される１つのエネルギ域のＸ線の強度を向上させることにより、試料１つ１つに対する異物検査の時間が短くすることができる。なお、本発明において、試料中の異物には、試料表面に付着した異物及び試料内部に含まれる異物を含む。With this configuration, X-rays containing multiple different energy ranges are spectrally separated into X-rays of a single energy range and focused toward the sample. This improves the intensity of the X-rays of that single energy range irradiated onto the sample, thereby increasing the contrast of the transmitted X-rays. As a result, the detection sensitivity of foreign matter in the sample can be improved in the transmitted X-ray inspection device. Furthermore, by improving the intensity of the X-rays of a single energy range irradiated onto the sample, the time required for foreign matter inspection of each sample can be shortened. In this invention, foreign matter in the sample includes foreign matter adhering to the sample surface and foreign matter contained within the sample.
搬送機構により搬送される試料を効率よく検査するためには、前記光学素子は、前記１つのエネルギ域のＸ線をライン状に集光する湾曲分光素子であることが望ましい。In order to efficiently inspect the sample being transported by the transport mechanism, it is desirable that the optical element be a curved spectrometer that focuses X-rays in one energy range in a linear shape.
また、前記透過Ｘ線検出部は、前記ライン状に集光されたＸ線に対応して設けられたラインセンサであることが望ましい。ここで、試料に照射されるＸ線を漏れなく検出して検出精度を向上するためには、前記ラインセンサのピクセル幅は、前記ライン状に集光されたＸ線の幅と略同一であることが望ましい。Furthermore, it is desirable that the transmitted X-ray detection unit be a line sensor provided in accordance with the line-shaped focused X-rays. Here, in order to detect all X-rays irradiated onto the sample without omission and improve detection accuracy, it is desirable that the pixel width of the line sensor be approximately the same as the width of the line-shaped focused X-rays.
また、本発明の透過Ｘ線検査装置は、前記試料を搬送する搬送機構とともに用いられるものであり、前記光学素子及び前記透過Ｘ線検出部は、前記搬送機構により搬送される前記試料を挟んで配置されていることが望ましい。ここで、ライン状に集光されたＸ線の長手方向、及び、ラインセンサの長手方向は、搬送機構の搬送方向に直交した方向とすることが望ましい。
この構成であれば、試料が搬送機構により搬送されるシステムにおいて、搬送される試料に照射される１つのエネルギ域のＸ線の強度を向上させることができる。その結果、透過Ｘ線検出部の積算線量を、計数時間を長くすることなく大きくすることができ、従来よりも高速に搬送しても透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、試料の異物検査の高速化を図ることができる。
Furthermore, the X-ray transmission inspection apparatus of the present invention is used in conjunction with a transport mechanism for transporting the sample, and it is desirable that the optical element and the X-ray transmission detection unit are positioned on either side of the sample being transported by the transport mechanism. Here, it is desirable that the longitudinal direction of the line-shaped focused X-rays and the longitudinal direction of the line sensor be perpendicular to the transport direction of the transport mechanism.
With this configuration, in a system where samples are transported by a transport mechanism, the intensity of X-rays in one energy range irradiated onto the transported sample can be improved. As a result, the cumulative dose in the transmitted X-ray detection unit can be increased without increasing the counting time, and the contrast of transmitted X-rays can be increased even when transported at a higher speed than before. Consequently, the inspection of foreign objects in samples can be accelerated.
検出対象となる異物の検出感度を向上させるためには、前記光学素子は、前記試料中の検出対象となる異物のＸ線吸収端よりも高いエネルギ域のＸ線に分光するものであることが望ましい。ここで、異物のＸ線吸収端は、例えばＫ吸収端又はＬ１吸収端、Ｌ２吸収端又はＬ３吸収端を含む概念であり、異物に応じてＸ線吸収端が選択され、それに応じて光学素子が選択される。例えば異物が銅の場合には、Ｋ吸収端を選択することができる。To improve the detection sensitivity of the foreign substance to be detected, it is desirable that the optical element spectrally analyzes X-rays in an energy range higher than the X-ray absorption edge of the foreign substance to be detected in the sample. Here, the X-ray absorption edge of the foreign substance is a concept that includes, for example, the K absorption edge, L1 absorption edge, L2 absorption edge, or L3 absorption edge, and the X-ray absorption edge is selected according to the foreign substance, and the optical element is selected accordingly. For example, if the foreign substance is copper, the K absorption edge can be selected.
試料に照射するＸ線の強度を向上させるためには、前記Ｘ線から同じエネルギ域のＸ線に分光するとともに試料に向けて集光する２つの光学素子を備えていることが望ましい。
この構成であれば、透過Ｘ線検出部の積算線量を、計数時間を長くすることなく大きくすることができ、従来よりも高速に搬送しても透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、試料の異物検査の高精度化、高速化を図ることができる。
To improve the intensity of the X-rays irradiated onto the sample, it is desirable to have two optical elements that spectrally separate the X-rays into X-rays of the same energy range and focus them toward the sample.
With this configuration, the cumulative dose of the transmitted X-ray detection unit can be increased without lengthening the counting time, and the contrast of the transmitted X-rays can be increased even when transported at a higher speed than before. As a result, the accuracy and speed of foreign object inspection of samples can be improved.
１種類の異物の検出感度を向上させるため、又は、複数種類の異物を検出できるようにするためには、本発明の透過Ｘ線検査装置は、前記光学素子を複数種類有し、前記複数種類の光学素子は、互いに異なるエネルギ域のＸ線に分光するものであることが望ましい。To improve the detection sensitivity of one type of foreign object, or to enable the detection of multiple types of foreign objects, it is desirable that the transmission X-ray inspection apparatus of the present invention has multiple types of optical elements, and that these multiple types of optical elements spectrally separate into X-rays in different energy ranges.
１種類の異物の検出感度を向上させるための具体的な実施の態様としては、前記光学素子を２種類有し、２種類のうちの一方の前記光学素子は、前記試料中の検出対象となる異物のＸ線吸収端よりも高いエネルギ域のＸ線に分光するものであり、２種類のうちの他方の前記光学素子は、前記Ｘ線吸収端よりも低いエネルギ域のＸ線に分光するものであることが望ましい。As a specific embodiment for improving the detection sensitivity of a single type of foreign substance, it is desirable to have two types of optical elements, where one of the two optical elements spectrally analyzes X-rays in an energy range higher than the X-ray absorption edge of the foreign substance to be detected in the sample, and the other of the two optical elements spectrally analyzes X-rays in an energy range lower than the X-ray absorption edge.
ここで、前記複数種類の光学素子は、１つの前記Ｘ線源からのＸ線を、互いに異なるエネルギ域のＸ線に分光するものであることが望ましい。この構成であれば、複数種類の光学素子それぞれに対応して複数のＸ線源を設ける必要がなく、装置を小型化することができる。Here, it is desirable that the multiple types of optical elements spectrally separate the X-rays from a single X-ray source into X-rays in different energy ranges. With this configuration, there is no need to provide multiple X-ray sources corresponding to each of the multiple types of optical elements, and the device can be miniaturized.
複数種類の光学素子を用いて互いに異なるエネルギ域のＸ線に分光する構成において、透過Ｘ線検出部の具体的な実施の態様としては、前記透過Ｘ線検出部は、前記互いに異なるエネルギ域のＸ線それぞれに対応する複数の透過Ｘ線画像を生成するための複数の透過Ｘ線検出器を有することが望ましい。In a configuration that spectrally separates X-rays into different energy ranges using multiple types of optical elements, it is desirable that the transmission X-ray detection unit has multiple transmission X-ray detectors for generating multiple transmission X-ray images corresponding to each of the X-rays in the different energy ranges.
異物の検出精度を向上するためには、本発明の透過Ｘ線検査装置は、前記複数の透過Ｘ線検出器それぞれを用いて生成された透過Ｘ線画像を処理する画像処理部をさらに備え、前記画像処理部は、前記互いに異なるエネルギ域のＸ線それぞれに対応する複数の透過Ｘ線画像を用いて差分処理を行い、前記試料中の異物を検出することが望ましい。To improve the accuracy of foreign object detection, the transmission X-ray inspection apparatus of the present invention further comprises an image processing unit that processes transmission X-ray images generated using each of the plurality of transmission X-ray detectors, and it is desirable that the image processing unit performs differential processing using the plurality of transmission X-ray images corresponding to each of the X-rays in different energy ranges to detect foreign objects in the sample.
検出した異物をユーザに視認しやすくするためには、本発明の透過Ｘ線検査装置は、前記透過Ｘ線画像をディスプレイに表示させる表示制御部をさらに備え、前記表示制御部は、前記画像処理部により検出された前記異物に色を付けて表示させることが望ましい。To make the detected foreign objects easily visible to the user, the transmission X-ray inspection apparatus of the present invention further comprises a display control unit that displays the transmission X-ray image on a display, and it is desirable that the display control unit displays the foreign objects detected by the image processing unit in color.
互いに異なる第１異物及び第２異物を検査するための具体的な実施の態様としては、前記光学素子は、前記第１異物のＸ線吸収端よりも低いエネルギ域の第１Ｘ線に分光する第１光学素子と、前記第１異物のＸ線吸収端よりも高いエネルギ域であり、且つ、前記第２異物のＸ線吸収端よりも低いエネルギ域の第２Ｘ線に分光する第２光学素子と、前記第２異物のＸ線吸収端よりも高いエネルギ域の第３Ｘ線に分光する第３光学素子とを有し、前記画像処理部は、前記第１Ｘ線を照射して得られた第１透過Ｘ線画像と、前記第２Ｘ線を照射して得られた第２透過Ｘ線画像と、前記第３Ｘ線を照射して得られた第３透過Ｘ線画像とを用いて差分処理を行い、前記第１異物及び第２異物を検出することが望ましい。As a specific embodiment for inspecting the first and second foreign objects, which are distinct from each other, it is desirable that the optical element comprises a first optical element that spectrally analyzes first X-rays in an energy range lower than the X-ray absorption edge of the first foreign object, a second optical element that spectrally analyzes second X-rays in an energy range higher than the X-ray absorption edge of the first foreign object and lower than the X-ray absorption edge of the second foreign object, and a third optical element that spectrally analyzes third X-rays in an energy range higher than the X-ray absorption edge of the second foreign object, and that the image processing unit performs difference processing using a first transmitted X-ray image obtained by irradiating with the first X-rays, a second transmitted X-ray image obtained by irradiating with the second X-rays, and a third transmitted X-ray image obtained by irradiating with the third X-rays to detect the first and second foreign objects.
複数種類の光学素子を配置した場合には、Ｘ線源及び透過Ｘ線検出部との位置関係が光学素子毎に異なるため、試料に照射されるＸ線強度が異なってしまう。このため、本発明の透過Ｘ線検査装置は、前記複数種類の光学素子それぞれから前記試料に照射されるＸ線強度の違いを補正する補正部をさらに備えることが望ましい。When multiple types of optical elements are arranged, the positional relationship between each optical element and the X-ray source and the transmitted X-ray detection unit differs, resulting in different X-ray intensities being irradiated onto the sample. Therefore, it is desirable that the transmitted X-ray inspection apparatus of the present invention further includes a correction unit that compensates for the differences in X-ray intensities irradiated onto the sample from each of the multiple types of optical elements.
また、本発明に係る透過Ｘ線検査方法は、Ｘ線源から発せられる互いに異なる複数のエネルギ域を含むＸ線を、光学素子によって１つのエネルギ域のＸ線に分光するとともに試料に向けて集光し、前記試料を透過した透過Ｘ線を透過Ｘ線検出部によって検出することを特徴とする。 Furthermore, the transmission X-ray inspection method according to the present invention is characterized by spectrally separating X-rays, which include multiple energy ranges and are emitted from an X-ray source, into X-rays of a single energy range using an optical element, focusing them toward a sample, and detecting the transmitted X-rays that have passed through the sample with a transmission X-ray detection unit.
以上に述べた本発明によれば、透過Ｘ線検査装置において試料中の異物の検出感度を向上することができる。According to the present invention described above, the detection sensitivity of foreign substances in a sample can be improved in a transmission X-ray inspection apparatus.
以下に、本発明に係る透過Ｘ線検査装置の一実施形態について、図面を参照して説明する。なお、以下に示すいずれの図についても、わかりやすくするために、適宜省略し又は誇張して模式的に描かれている。同一の構成要素については、同一の符号を付して説明を適宜省略する。An embodiment of the transmission X-ray inspection apparatus according to the present invention will be described below with reference to the drawings. Note that, for clarity, all the following figures are schematic representations, with some details omitted or exaggerated as appropriate. The same components are denoted by the same reference numerals, and their descriptions are omitted as appropriate.
本実施形態の透過Ｘ線検査装置１００は、図１及び図２に示すように、一次Ｘ線を発するＸ線源２と、一次Ｘ線を分光しつつ試料Ｗに向けて集光する光学素子３と、試料Ｗを透過した透過Ｘ線を検出する透過Ｘ線検出部４と、透過Ｘ線検出部４からの検出信号を処理する信号処理装置５とを備えている。As shown in Figures 1 and 2, the transmission X-ray inspection apparatus 100 of this embodiment comprises an X-ray source 2 that emits primary X-rays, an optical element 3 that spectrally analyzes the primary X-rays and focuses them toward the sample W, a transmission X-ray detection unit 4 that detects the transmission X-rays that have passed through the sample W, and a signal processing device 5 that processes the detection signal from the transmission X-ray detection unit 4.
また、本実施形態の透過Ｘ線検査装置１００は、検査対象である試料Ｗを所定方向（図２において紙面左右方向であり、ここではＸ方向）に搬送させる搬送機構６を有している。そして、光学素子３及び透過Ｘ線検出部４は、搬送機構６により搬送される試料Ｗを上下から挟んで配置されている。この構成により、本実施形態の透過Ｘ線検査装置１００は、搬送機構６で試料Ｗを搬送しながら試料Ｗの異物検査を行うことができる。また、透過Ｘ線検査装置１００は、例えば基材に膜材を塗布する膜材塗布装置７に組み込んだインラインシステムとすることができる。なお、本実施形態の試料Ｗは、例えばリチウムイオン電池の正極材であり、検出対象である異物Ｓは、銅（Ｋ吸収端のエネルギーは８．９８ｋｅＶ）である。Furthermore, the X-ray transmission inspection apparatus 100 of this embodiment has a transport mechanism 6 that transports the sample W to be inspected in a predetermined direction (the left-right direction in Figure 2, which is the X direction in this case). The optical element 3 and the X-ray transmission detection unit 4 are positioned to sandwich the sample W being transported by the transport mechanism 6 from above and below. With this configuration, the X-ray transmission inspection apparatus 100 of this embodiment can perform foreign matter inspection of the sample W while the sample W is being transported by the transport mechanism 6. Also, the X-ray transmission inspection apparatus 100 can be incorporated into an in-line system, for example, by a film coating apparatus 7 that coats a film material onto a substrate. In this embodiment, the sample W is, for example, the positive electrode material of a lithium-ion battery, and the foreign matter S to be detected is copper (the energy of the K absorption edge is 8.98 keV).
Ｘ線源２は、互いに異なる複数のエネルギ域（波長域）を含む一次Ｘ線（多色Ｘ線）を発するものである。具体的にＸ線源２は、フィラメントを加熱することで発生した電子をタングステンやモリブデンなどのターゲット金属に衝突させることで連続Ｘ線と特性Ｘ線を発生するＸ線管である。なお、本実施形態のターゲット金属は、タングステンである。X-ray source 2 emits primary X-rays (multicolor X-rays) that include multiple energy ranges (wavelength ranges) that are different from each other. Specifically, X-ray source 2 is an X-ray tube that generates continuous X-rays and characteristic X-rays by colliding electrons generated by heating a filament with a target metal such as tungsten or molybdenum. In this embodiment, the target metal is tungsten.
光学素子３は、一次Ｘ線から１つのエネルギ域（１つの波長域）のＸ線に分光しつつ試料Ｗに向けて集光するものである。ここで、１つのエネルギ域（１つの波長域）は、検出対象である異物Ｓの透過率、特にＸ線吸収端（ここでは銅のＫ吸収端）に基づいて設定されるものである。The optical element 3 focuses the primary X-rays towards the sample W while spectrally separating them into X-rays within a single energy range (single wavelength range). Here, the single energy range (single wavelength range) is set based on the transmittance of the foreign substance S to be detected, particularly the X-ray absorption edge (in this case, the K absorption edge of copper).
具体的に光学素子３は、１つのエネルギ域のＸ線に分光する（単色化する）と同時にライン状に集光する湾曲分光素子である。ここで、光学素子３ａによりライン状に集光されたＸ線の長手方向は、搬送機構６の搬送方向に直交した方向（Ｙ方向）である。この湾曲分光素子を用いることにより、広がりを持って入射してきた一次Ｘ線を湾曲した結晶表面でブラッグ反射させて所定の位置（ここでは試料Ｗの上面）に集光させ、所定のエネルギ域のＸ線のみを取り出すことができる。湾曲分光素子の材料としては、シリコン、グラファイト、フッ化リチウム等の分光結晶として用いられるものを挙げることができる。湾曲分光素子として、２種類の分光結晶を組み合わせて構成する場合には、分光する波長は分光結晶の湾曲具合（ローランド円のサイズ）を変えて集光するＸ線波長を変える。また、分光する波長は分光結晶の湾曲具合（ローランド円のサイズ）及び／又は分光結晶の材質を変えて集光するＸ線波長を変えることもできる。本実施形態の光学素子３は、タングステンの蛍光Ｘ線のＬβ（高エネルギ；９．６７～９．９６ｋｅＶ）とＬα（低エネルギ；８．４０ｋｅＶ）とを分光して集光する。 Specifically, optical element 3 is a curved spectrometer that spectrally separates (monochromatizes) X-rays in a single energy range while simultaneously focusing them in a linear shape. Here, the longitudinal direction of the X-rays focused in a linear shape by optical element 3a is perpendicular to the transport direction of the transport mechanism 6 (Y direction). By using this curved spectrometer, the primary X-rays incident with a broad spread can be Bragg-reflected by the curved crystal surface and focused at a predetermined position (in this case, the upper surface of the sample W), thereby extracting only X-rays in a predetermined energy range. Examples of materials for the curved spectrometer include silicon, graphite, lithium fluoride, and other materials used as spectroscopic crystals. When a curved spectrometer is constructed by combining two types of spectroscopic crystals, the wavelength of spectral separation can be changed by changing the curvature of the spectroscopic crystal (size of the Rowland circle) to change the wavelength of X-rays that are focused. Alternatively, the wavelength of spectral separation can also be changed by changing the curvature of the spectroscopic crystal (size of the Rowland circle) and/or the material of the spectroscopic crystal to change the wavelength of X-rays that are focused. The optical element 3 of this embodiment spectrally separates and focuses the Lβ (high energy; 9.67 to 9.96 keV) and Lα (low energy; 8.40 keV) fluorescent X-rays of tungsten.
本実施形態では、図１及び図２に示すように、互いに異なるエネルギ域のＸ線に分光する複数種類（ここでは２種類）の光学素子３ａ、３ｂを有している。２種類のうちの一方の光学素子３ａは、高エネルギ域のＸ線に分光しつつ試料Ｗに集光する。また、２種類のうちの他方の光学素子３ｂは、低エネルギ域のＸ線に分光しつつ試料Ｗに集光するものである。In this embodiment, as shown in Figures 1 and 2, there are multiple types (two types in this case) of optical elements 3a and 3b that spectrally separate into X-rays in different energy ranges. One of the two types of optical elements 3a spectrally separates into high-energy X-rays and focuses them onto the sample W. The other of the two types of optical elements 3b spectrally separates into low-energy X-rays and focuses them onto the sample W.
ここで、図４に示すように、一方の光学素子３ａにより分光されたＸ線は、試料Ｗ中の検出対象となる異物ＳのＸ線吸収端よりも高いエネルギ域のＸ線である。また、他方の光学素子３ｂにより分光されたＸ線は、試料Ｗ中の検出対象となる異物ＳのＸ線吸収端よりも低いエネルギ域のＸ線である。 Here, as shown in Figure 4 , the X-rays spectrally separated by one optical element 3a are in an energy range higher than the X-ray absorption edge of the foreign substance S to be detected in the sample W. On the other hand, the X-rays spectrally separated by the other optical element 3b are in an energy range lower than the X-ray absorption edge of the foreign substance S to be detected in the sample W.
透過Ｘ線検出部４は、試料Ｗを透過した透過Ｘ線を検出するものであり、図１及び図２に示すように、試料Ｗの下面側に設けられたラインセンサからなる透過Ｘ線検出器４ａ、４ｂを用いて構成されている。この透過Ｘ線検出器４ａ、４ｂは、ライン状に集光されたＸ線に対応して設けられている。つまり、透過Ｘ線検出器４ａ、４ｂの長手方向は、搬送機構６の搬送方向に直交した方向（Ｙ方向）である。さらに、透過Ｘ線検出器４ａ、４ｂのピクセル幅は、ライン状に集光されたＸ線の幅と略同一である。The transmitted X-ray detection unit 4 detects transmitted X-rays that have passed through the sample W. As shown in Figures 1 and 2, it is configured using transmitted X-ray detectors 4a and 4b, which are line sensors provided on the lower surface side of the sample W. These transmitted X-ray detectors 4a and 4b are provided in accordance with the X-rays focused in a line shape. In other words, the longitudinal direction of the transmitted X-ray detectors 4a and 4b is perpendicular to the transport direction of the transport mechanism 6 (the Y direction). Furthermore, the pixel width of the transmitted X-ray detectors 4a and 4b is approximately the same as the width of the X-rays focused in a line shape.
本実施形態の透過Ｘ線検出部４は、互いに異なるエネルギ域のＸ線それぞれに対応する複数の透過Ｘ線画像を生成するための複数（ここでは２つ）の透過Ｘ線検出器４ａ、４ｂを有している。一方の透過Ｘ線検出器４ａは、一方の光学素子３ａに対応して設けられたラインセンサであり、高エネルギ域のＸ線が照射された試料Ｗからの透過Ｘ線を検出する。また、他方の透過Ｘ線検出器４ｂは、他方の光学素子３ｂに対応して設けられたラインセンサであり、低エネルギ域のＸ線が照射された試料Ｗからの透過Ｘ線を検出する。なお、各ラインセンサは、ライン状に設けられたシンチレータと、当該シンチレータのＸ線入射側の前方に設けられたＸ線フィルタとを有している。なお、Ｘ線フィルタは、検出すべき透過Ｘ線を透過しつつ、外乱となるその他のＸ線を遮断するものである。また、ラインセンサは、半導体放射線検出器（ＳＤＤ）又は光電子増倍管などを用いた構成としても良い。The transmitted X-ray detection unit 4 of this embodiment has a plurality (in this case, two) of transmitted X-ray detectors 4a and 4b for generating a plurality of transmitted X-ray images corresponding to X-rays in different energy ranges. One transmitted X-ray detector 4a is a line sensor provided in correspondence with one optical element 3a and detects transmitted X-rays from a sample W irradiated with high-energy X-rays. The other transmitted X-ray detector 4b is a line sensor provided in correspondence with the other optical element 3b and detects transmitted X-rays from a sample W irradiated with low-energy X-rays. Each line sensor has a scintillator provided in a line shape and an X-ray filter provided in front of the X-ray incident side of the scintillator. The X-ray filter transmits the transmitted X-rays to be detected while blocking other X-rays that would be disturbing. The line sensors may also be configured using semiconductor radiation detectors (SDDs) or photomultiplier tubes.
信号処理装置５は、透過Ｘ線検出部４からの検出信号を処理して、透過Ｘ線画像を生成するとともに、透過Ｘ線画像から異物を検出するものである。具体的に信号処理装置は、ＣＰＵ、メモリ、入出力インターフェイス、ディスプレイ５０、入力手段等を有するコンピュータであり、図３に示すように、画像生成部５ａ、画像処理部５ｂ、異物検出部５ｃ及び表示制御部５ｄ等の機能を有している。 The signal processing device 5 processes the detection signal from the transmission X-ray detection unit 4 to generate a transmission X-ray image and to detect foreign objects from the transmission X-ray image. Specifically, the signal processing device is a computer having a CPU, memory, input/output interface, display 50, input means, etc., and as shown in Figure 3 , it has functions such as an image generation unit 5a, an image processing unit 5b, a foreign object detection unit 5c, and a display control unit 5d.
画像生成部５ａは、複数の透過Ｘ線検出器４ａ、４ｂからの検出信号を取得して、複数の透過Ｘ線画像を生成するものである。本実施形態では、一方の透過Ｘ線検出器４ａからの検出信号を用いて、高エネルギ域の透過Ｘ線画像を生成し、他方の透過Ｘ線検出器４ｂからの検出信号を用いて、低エネルギ域の透過Ｘ線画像を生成する。画像生成部５ａにより生成された透過Ｘ線画像は、画像処理部５ｂに送信されるとともに、表示制御部５ｄに送信される。The image generation unit 5a acquires detection signals from multiple transmission X-ray detectors 4a and 4b and generates multiple transmission X-ray images. In this embodiment, a high-energy transmission X-ray image is generated using the detection signal from one transmission X-ray detector 4a, and a low-energy transmission X-ray image is generated using the detection signal from the other transmission X-ray detector 4b. The transmission X-ray images generated by the image generation unit 5a are transmitted to the image processing unit 5b and to the display control unit 5d.
画像処理部５ｂは、画像生成部５ａにより生成された高エネルギ域の透過Ｘ線画像及び低エネルギ域の透過Ｘ線画像を用いて、差分処理を行い、試料Ｗ中の異物を検出する。この画像処理部５ｂは、高エネルギ域の透過Ｘ線画像と低エネルギ域の透過Ｘ線画像との差分画像を生成して、透過Ｘ線画像の濃淡（コントラスト）を大きくして、異物Ｓを抽出しやすくする。画像処理部５ｂにより生成された差分画像は、異物検出部５ｃに送信されるとともに、表示制御部５ｄに送信される。The image processing unit 5b performs difference processing using the high-energy and low-energy transmitted X-ray images generated by the image generation unit 5a to detect foreign matter in the sample W. This image processing unit 5b generates a difference image between the high-energy and low-energy transmitted X-ray images, increasing the contrast of the transmitted X-ray image to facilitate the extraction of foreign matter S. The difference image generated by the image processing unit 5b is transmitted to the foreign matter detection unit 5c and also to the display control unit 5d.
異物検出部５ｃは、画像処理部５ｂの差分処理により生成された差分画像から、異物Ｓを検出するものである。この異物検出部５ｃは、例えば、差分画像から異物サイズを求めて、当該異物サイズが例えば面積相当径で２０μｍ以上の場合に異物をして検出する。この異物検出部５ｃにより検出された異物を示す異物情報は、表示制御部５ｄに送信される。なお、異物情報は、異物が検出された画像データであり、当該画像データは、信号処理装置５のメモリにも保存される。また、異物検出部５ｃは、管制室のサーバ（上位制御装置）等に異物を検出したことを示すエラー情報とともに画像データを送信することもできる。The foreign object detection unit 5c detects foreign objects S from the difference image generated by the difference processing of the image processing unit 5b. For example, the foreign object detection unit 5c determines the size of the foreign object from the difference image and detects it as a foreign object if its size is, for example, 20 μm or more in terms of area-equivalent diameter. The foreign object information indicating the foreign object detected by the foreign object detection unit 5c is transmitted to the display control unit 5d. This foreign object information is image data in which the foreign object was detected, and this image data is also stored in the memory of the signal processing device 5. Furthermore, the foreign object detection unit 5c can also transmit image data along with error information indicating the detection of a foreign object to a server (higher-level control device) in the control room, etc.
表示制御部５ｄは、異物検出部５ｃにより検出された異物Ｓをディスプレイ５０に表示させるものである。具体的に表示制御部５ｄは、画像処理部５ｂにより生成された差分画像と検出された異物とを重ねてディスプレイ５０に表示させる。ここで、表示制御部５ｄは、検出された異物に色を付けて表示する等のようにユーザが視認しやすい態様で検出された異物を表示させることができる。The display control unit 5d displays the foreign object S detected by the foreign object detection unit 5c on the display 50. Specifically, the display control unit 5d overlays the difference image generated by the image processing unit 5b with the detected foreign object and displays them on the display 50. Here, the display control unit 5d can display the detected foreign object in a manner that is easy for the user to see, such as by coloring the detected foreign object.
その他、表示制御部５ｄは、画像生成部５ａにより生成された各エネルギ域のＸ線透過画像、又は、画像処理部５ｂにより生成された差分画像をディスプレイ５０に表示することもできる。さらに、表示制御部５ｄは、画像生成部５ａにより生成された各エネルギ域のＸ線透過画像と検出された異物とを重ねてディスプレイ５０に表示させることもできる。In addition, the display control unit 5d can also display the X-ray transmission images for each energy range generated by the image generation unit 5a, or the difference images generated by the image processing unit 5b, on the display 50. Furthermore, the display control unit 5d can also overlay the X-ray transmission images for each energy range generated by the image generation unit 5a with the detected foreign object and display them on the display 50.
＜本実施形態の効果＞
このように構成した本実施形態の透過Ｘ線検査装置１００によれば、互いに異なる複数のエネルギ域を含むＸ線から１つのエネルギ域のＸ線に分光しつつ試料Ｗに向けて集光するので、試料Ｗに照射される１つのエネルギ域のＸ線の強度を向上させることができ、透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、透過Ｘ線検査装置１００において試料Ｗ中の異物Ｓの検出感度を向上することができる。また、試料Ｗに照射される１つのエネルギ域のＸ線の強度を向上させることにより、試料Ｗ１つ１つに対する異物検査の時間が短くすることができる。
<Effects of this embodiment>
According to the X-ray transmission inspection apparatus 100 configured in this way, X-rays containing multiple different energy ranges are spectrally separated into X-rays of a single energy range and focused toward the sample W. This improves the intensity of the X-rays of a single energy range irradiated onto the sample W, thereby increasing the contrast of the transmitted X-rays. As a result, the detection sensitivity of foreign matter S in the sample W can be improved in the X-ray transmission inspection apparatus 100. Furthermore, by improving the intensity of the X-rays of a single energy range irradiated onto the sample W, the time required for foreign matter inspection of each sample W can be shortened.
また、試料Ｗが搬送機構６により搬送されるシステムにおいて、搬送される試料Ｗに照射される１つのエネルギ域のＸ線の強度を向上させることができる。その結果、透過Ｘ線検出部４の積算線量を、計数時間を長くすることなく大きくすることができ、従来よりも高速に搬送しても透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、試料Ｗの異物検査の高速化を図ることができる。 Furthermore, in a system where the sample W is transported by the transport mechanism 6 , the intensity of X-rays in one energy range irradiated onto the transported sample W can be improved. As a result, the cumulative dose of the transmitted X-ray detection unit 4 can be increased without increasing the counting time, and the contrast of transmitted X-rays can be increased even when transported at a higher speed than before. As a result, the inspection of foreign objects in the sample W can be accelerated.
＜その他の実施形態＞
例えば、前記実施形態では１種類の異物を検出対象としていたが、２種類以上の異物を検出対象としても良い。具体的に、互いに異なる種類の第１異物及び第２異物を検査する場合には、光学素子３は、第１異物のＸ線吸収端よりも低いエネルギ域の第１Ｘ線（図５参照）に分光する第１光学素子と、第１異物のＸ線吸収端よりも高いエネルギ域であり、且つ、第２異物のＸ線吸収端よりも低いエネルギ域の第２Ｘ線（図５参照）に分光する第２光学素子と、第２異物のＸ線吸収端よりも高いエネルギ域の第３Ｘ線（図５参照）に分光する第３光学素子とを含む。なお、第１～第３光学素子は、前記実施形態と同様に、湾曲分光素子である。また、これら３つの光学素子に対応して、透過Ｘ線検出部４は、３つの透過Ｘ線検出器を有している。
<Other Embodiments>
For example, in the above embodiment, one type of foreign object was the target of detection, but two or more types of foreign objects may be the target of detection. Specifically, when inspecting a first foreign object and a second foreign object of different types, the optical element 3 includes a first optical element that spectrally analyzes first X-rays (see Figure 5) in an energy range lower than the X-ray absorption edge of the first foreign object, a second optical element that spectrally analyzes second X-rays (see Figure 5) in an energy range higher than the X-ray absorption edge of the first foreign object and lower than the X-ray absorption edge of the second foreign object, and a third optical element that spectrally analyzes third X-rays (see Figure 5) in an energy range higher than the X-ray absorption edge of the second foreign object. The first to third optical elements are curved X-ray spectrometers, as in the above embodiment. In addition, corresponding to these three optical elements, the transmitted X-ray detection unit 4 has three transmitted X-ray detectors.
そして、画像処理部５ｂは、第１Ｘ線を照射して得られた第１透過Ｘ線画像と、第２Ｘ線を照射して得られた第２透過Ｘ線画像と、第３Ｘ線を照射して得られた第３透過Ｘ線画像とを用いて差分処理を行い、第１異物及び第２異物を検出する。具体的には、第２透過Ｘ線画像と第１透過Ｘ線画像との差分処理により第１異物を検出し、第３透過Ｘ線画像と第２透過Ｘ線画像との差分処理により第２異物を検出する。表示制御部５ｄは、それぞれの検出した第１異物及び第２異物を別々に表示させても良いし、第１異物及び第２異物を１つの画像の中でそれぞれの異物を異なる色で色分けしてもよい。なお、第１異物については、第３透過Ｘ線画像と第１透過Ｘ線画像との差分処理により検出してもよい。
The image processing unit 5b then performs a difference processing using the first transmitted X-ray image obtained by irradiating with the first X-ray, the second transmitted X-ray image obtained by irradiating with the second X-ray, and the third transmitted X-ray image obtained by irradiating with the third X-ray to detect the first and second foreign objects. Specifically, the first foreign object is detected by difference processing between the second transmitted X-ray image and the first transmitted X-ray image, and the second foreign object is detected by difference processing between the third transmitted X-ray image and the second transmitted X -ray image. The display control unit 5d may display the detected first and second foreign objects separately, or it may color-code the first and second foreign objects in a single image using different colors. The first foreign object may also be detected by difference processing between the third transmitted X-ray image and the first transmitted X-ray image.
また、信号処理装置５は、複数の光学素子３それぞれから試料Ｗに照射されるＸ線強度の違いを補正する補正部をさらに備えていても良い。この補正部は、Ｘ線源２及び透過Ｘ線検出部４と複数の光学素子３との光学配置に基づいて、画像生成部５ａにおける透過Ｘ画像を生成する際に用いるパラメータを補正するものであっても良い。また、補正部は、Ｘ線源２及び透過Ｘ線検出部４と複数の光学素子３との光学配置に基づいて、複数の透過Ｘ線画像を補正するものであっても良い。Furthermore, the signal processing device 5 may also include a correction unit that corrects for differences in X-ray intensity irradiated onto the sample W from each of the multiple optical elements 3. This correction unit may correct the parameters used when generating the transmitted X-ray image in the image generation unit 5a based on the optical arrangement of the X-ray source 2, the transmitted X-ray detection unit 4, and the multiple optical elements 3. Alternatively, the correction unit may correct multiple transmitted X-ray images based on the optical arrangement of the X-ray source 2, the transmitted X-ray detection unit 4, and the multiple optical elements 3.
さらに、信号処理装置５は、複数の透過Ｘ線検出器４ａ、４ｂそれぞれの検出感度を合わせるように補正する感度補正部をさらに備えていても良い。Furthermore, the signal processing device 5 may also include a sensitivity correction unit that corrects the detection sensitivity of each of the multiple transmission X-ray detectors 4a and 4b to match.
その上、前記実施形態では１つのＸ線源２からのＸ線を複数の光学素子３により互いに異なるエネルギ域のＸ線に分光する構成であったが、複数のＸ線源２を備えていても良い。例えば、複数の光学素子３それぞれに対応してＸ線源２を設けても良い。Furthermore, although the above embodiment involved spectrally separating X-rays from one X-ray source 2 into X-rays of different energy ranges using multiple optical elements 3, it is also possible to have multiple X-ray sources 2. For example, an X-ray source 2 may be provided corresponding to each of the multiple optical elements 3.
また、前記実施形態では、複数の光学素子及び複数の透過Ｘ線検出器を有する構成であったが、１つの光学素子及び１つの透過Ｘ線検出器を有する構成であっても良い。この場合、光学素子は、異物のＫ吸収端よりも高いエネルギのＸ線を分光して集光することが考えられる。Furthermore, although the above embodiment had a configuration with multiple optical elements and multiple transmission X-ray detectors, a configuration with one optical element and one transmission X-ray detector is also possible. In this case, the optical element can be used to spectrally analyze and focus X-rays with energy higher than the K absorption edge of the foreign substance.
さらに、Ｘ線源２からのＸ線を１つのエネルギ域のＸ線に分光して試料Ｗに照射する構成としては、図６に示す構成であっても良い。図６に示す構成は、２つの同じ光学素子３を互いに対向するように配置する。ここで、２つの光学素子３は、同一のエネルギ域のＸ線に分光する（単色化する）と同時にライン状に集光する湾曲分光素子である。そして、２つの光学素子３は、各光学素子３によりライン状に集光されたＸ線が互いに試料Ｗ上で一致するように配置されている。また、Ｘ線源と光学素子３との間には、光学素子３に入射しないＸ線を除去するための第１コリメータ８１が設けられており、光学素子３と試料Ｗとの間には、所望のエネルギ域のＸ線以外のＸ線を除去するための第２コリメータ８２が設けられている。また、第２コリメータと試料Ｗとの間には、必要に応じて不要なＸ線を除去するための第３コリメータ８３を設けても良い。図６に示すような光学系の構成により、試料Ｗに照射するＸ線の強度を向上させることができる。その結果、透過Ｘ線検出部の積算線量を、計数時間を長くすることなく大きくすることができ、従来よりも高速に搬送しても透過Ｘ線の濃淡（コントラスト）を大きくすることができる。その結果、試料の異物検査の高精度化、高速化を図ることができる。Furthermore, the configuration for spectrally separating the X-rays from the X-ray source 2 into X-rays of a single energy range and irradiating the sample W may be the configuration shown in Figure 6. In the configuration shown in Figure 6, two identical optical elements 3 are arranged facing each other. Here, the two optical elements 3 are curved spectrometers that spectrally separate (monochromatize) X-rays of the same energy range and simultaneously focus them into a line. The two optical elements 3 are arranged so that the X-rays focused into a line by each optical element 3 coincide on the sample W. In addition, a first collimator 81 is provided between the X-ray source and the optical elements 3 to remove X-rays that do not enter the optical elements 3, and a second collimator 82 is provided between the optical elements 3 and the sample W to remove X-rays other than those in the desired energy range. Furthermore, a third collimator 83 may be provided between the second collimator and the sample W to remove unwanted X-rays as needed. With the optical system configuration shown in Figure 6, the intensity of the X-rays irradiated onto the sample W can be improved. As a result, the cumulative dose in the transmitted X-ray detection unit can be increased without increasing the counting time, and the contrast of transmitted X-rays can be increased even when transported at a higher speed than before. Consequently, the accuracy and speed of foreign object inspection of samples can be improved.
その上、前記実施形態の構成に加えて、異物検出部が異物を検出した場合に、エラーを出すなどのようにユーザに報知する報知部を有する構成としても良い。Furthermore, in addition to the configuration of the above embodiment, the system may also be configured to include a notification unit that notifies the user, such as by issuing an error, when the foreign object detection unit detects a foreign object.
加えて、前記実施形態では、搬送機構６により搬送される試料Ｗの異物検査を行うものであったが、固定された検査テーブルに試料を設置して異物検査を行うスタンドアローンタイプのものであっても良い。In addition, although the above embodiment involved inspecting the sample W being transported by the transport mechanism 6 for foreign matter, a standalone type may also be used, in which the sample is placed on a fixed inspection table for foreign matter inspection.
その他、本発明の趣旨に反しない限りにおいて様々な実施形態の変形や組み合わせを行っても構わない。Furthermore, various modifications and combinations of the embodiments are permitted, as long as they do not contradict the spirit of the present invention.
本発明によれば、透過Ｘ線検査装置において試料中の異物の検出感度を向上することができる。According to the present invention, the detection sensitivity of foreign substances in a sample can be improved in a transmission X-ray inspection apparatus.
１００・・・透過Ｘ線検査装置
Ｗ・・・試料
２・・・Ｘ線源
３（３ａ、３ｂ）・・・光学素子
４・・・透過Ｘ線検出部
４ａ、４ｂ・・・透過Ｘ線検出器
５・・・信号処理装置
５１・・・画像処理部
５２・・・表示制御部
100...Transmission X-ray inspection apparatus W...Sample 2...X-ray source 3 (3a, 3b)...Optical element 4...Transmission X-ray detection unit 4a, 4b...Transmission X-ray detector 5...Signal processing device 51...Image processing unit 52...Display control unit
Claims (12)
前記Ｘ線から１つのエネルギ域のＸ線に分光するとともに試料に向けて集光する光学素子と、
前記試料を透過した透過Ｘ線を検出する透過Ｘ線検出部とを備え、
前記試料を搬送する搬送機構とともに用いられるものであり、
前記光学素子及び前記透過Ｘ線検出部は、前記搬送機構により搬送される前記試料を挟んで配置されており、
前記光学素子は、前記１つのエネルギ域のＸ線をライン状に集光する湾曲分光素子であり、
前記透過Ｘ線検出部は、前記ライン状に集光されたＸ線に対応して設けられたラインセンサである、透過Ｘ線検査装置。 An X-ray source that emits X-rays containing multiple energy ranges that are different from each other,
An optical element that spectrally separates the aforementioned X-rays into X-rays in one energy range and focuses them toward a sample,
The system includes a transmitted X-ray detection unit that detects transmitted X-rays that have passed through the sample ,
It is used in conjunction with a transport mechanism for transporting the aforementioned sample,
The optical element and the transmitted X-ray detection unit are arranged to sandwich the sample being transported by the transport mechanism.
The optical element is a curved spectrometer that focuses X-rays in one energy range in a line shape,
The transmitted X-ray detection unit is a line sensor provided in correspondence with the line-shaped focused X-rays , in a transmitted X-ray inspection apparatus.
前記複数種類の光学素子は、互いに異なるエネルギ域のＸ線に分光するものである、請求項１に記載の透過Ｘ線検査装置。 The optical element has multiple types,
The transmission X-ray inspection apparatus according to claim 1 , wherein the plurality of optical elements spectrally separate into X-rays in different energy ranges.
２種類のうちの一方の前記光学素子は、前記試料中の検出対象となる異物のＸ線吸収端よりも高いエネルギ域のＸ線に分光するものであり、
２種類のうちの他方の前記光学素子は、前記Ｘ線吸収端よりも低いエネルギ域のＸ線に分光するものである、請求項４に記載の透過Ｘ線検査装置。 The optical element has two types,
One of the two types of optical elements spectrally separates the sample into X-rays in an energy range higher than the X-ray absorption edge of the foreign substance to be detected.
The transmission X-ray inspection apparatus according to claim 4 , wherein the other of the two types of optical elements spectrally separates X-rays into an energy range lower than the X-ray absorption edge.
前記画像処理部は、前記互いに異なるエネルギ域のＸ線それぞれに対応する複数の透過Ｘ線画像を用いて差分処理を行い、前記試料中の異物を検出する、請求項７に記載の透過Ｘ線検査装置。 The system further includes an image processing unit that processes the transmitted X-ray images generated using each of the plurality of transmitted X-ray detectors.
The transmission X-ray inspection apparatus according to claim 7 , wherein the image processing unit performs difference processing using a plurality of transmission X-ray images corresponding to each of the X-rays in different energy ranges to detect foreign matter in the sample.
前記表示制御部は、前記画像処理部により検出された前記異物に色を付けて表示させる、請求項８に記載の透過Ｘ線検査装置。 The system further includes a display control unit that displays the aforementioned transmitted X-ray image on a display,
The transmission X-ray inspection apparatus according to claim 8 , wherein the display control unit displays the foreign object detected by the image processing unit with color.
前記光学素子は、前記第１異物のＸ線吸収端よりも低いエネルギ域の第１Ｘ線に分光する第１光学素子と、前記第１異物のＸ線吸収端よりも高いエネルギ域であり、且つ、前記第２異物のＸ線吸収端よりも低いエネルギ域の第２Ｘ線に分光する第２光学素子と、前記第２異物のＸ線吸収端よりも高いエネルギ域の第３Ｘ線に分光する第３光学素子とを含み、
前記画像処理部は、前記第１Ｘ線を照射して得られた第１透過Ｘ線画像と、前記第２Ｘ線を照射して得られた第２透過Ｘ線画像と、前記第３Ｘ線を照射して得られた第３透過Ｘ線画像とを用いて差分処理を行い、前記第１異物及び第２異物を検出する、請求項８に記載の透過Ｘ線検査装置。 This involves inspecting two different types of foreign objects, the first and second.
The optical element includes a first optical element that spectrally separates the X-rays into first X-rays in an energy range lower than the X-ray absorption edge of the first foreign substance, a second optical element that spectrally separates the X-rays into second X-rays in an energy range higher than the X-ray absorption edge of the first foreign substance and lower than the X-ray absorption edge of the second foreign substance, and a third optical element that spectrally separates the X-rays into third X-rays in an energy range higher than the X-ray absorption edge of the second foreign substance.
The X-ray transmission inspection apparatus according to claim 8, wherein the image processing unit performs difference processing using a first transmitted X-ray image obtained by irradiating with the first X-ray, a second transmitted X-ray image obtained by irradiating with the second X-ray, and a third transmitted X-ray image obtained by irradiating with the third X-ray to detect the first foreign object and the second foreign object.
前記試料を透過した透過Ｘ線を透過Ｘ線検出部によって検出するものであり、
前記光学素子及び前記透過Ｘ線検出部を、前記搬送機構により搬送される前記試料を挟んで配置し、
前記光学素子は、前記１つのエネルギ域のＸ線をライン状に集光する湾曲分光素子であり、
前記透過Ｘ線検出部は、前記ライン状に集光されたＸ線に対応して設けられたラインセンサである、透過Ｘ線検査方法。 X-rays emitted from an X-ray source, containing multiple different energy ranges, are spectrally separated into X-rays of a single energy range by an optical element , and then focused toward a sample being transported by a transport mechanism .
The transmitted X-rays that have passed through the aforementioned sample are detected by a transmitted X-ray detection unit .
The optical element and the transmitted X-ray detection unit are arranged to sandwich the sample being transported by the transport mechanism.
The optical element is a curved spectrometer that focuses X-rays in one energy range in a line shape,
A transmission X-ray inspection method, wherein the transmission X-ray detection unit is a line sensor provided in correspondence with the line-shaped focused X-rays.
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