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JPS5210685A - Semiconductor device - Google Patents
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JPS5210685A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5210685A
JPS5210685A JP8614975A JP8614975A JPS5210685A JP S5210685 A JPS5210685 A JP S5210685A JP 8614975 A JP8614975 A JP 8614975A JP 8614975 A JP8614975 A JP 8614975A JP S5210685 A JPS5210685 A JP S5210685A
Authority
JP
Japan
Prior art keywords
semiconductor device
semiconductor
checking
yield
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8614975A
Other languages
Japanese (ja)
Inventor
Shigeharu Horiuchi
Yukio Tanuma
Hiroshi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8614975A priority Critical patent/JPS5210685A/en
Publication of JPS5210685A publication Critical patent/JPS5210685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To improve reliability and yield of a semiconductor having the multilayer wiring construction by checking an alloying reaction of Si with Al with arrangement of a contact hole.
COPYRIGHT: (C)1977,JPO&Japio
JP8614975A 1975-07-16 1975-07-16 Semiconductor device Pending JPS5210685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8614975A JPS5210685A (en) 1975-07-16 1975-07-16 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8614975A JPS5210685A (en) 1975-07-16 1975-07-16 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5210685A true JPS5210685A (en) 1977-01-27

Family

ID=13878672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8614975A Pending JPS5210685A (en) 1975-07-16 1975-07-16 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5210685A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216189A (en) * 1975-07-29 1977-02-07 Toshiba Corp Semiconductor device
JPS5669420A (en) * 1979-11-08 1981-06-10 Mazda Motor Corp Intake device for rotary piston engine
US6307273B1 (en) * 1996-06-07 2001-10-23 Vanguard International Semiconductor Corporation High contrast, low noise alignment mark for laser trimming of redundant memory arrays

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911277A (en) * 1972-05-29 1974-01-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911277A (en) * 1972-05-29 1974-01-31

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216189A (en) * 1975-07-29 1977-02-07 Toshiba Corp Semiconductor device
JPS5669420A (en) * 1979-11-08 1981-06-10 Mazda Motor Corp Intake device for rotary piston engine
US6307273B1 (en) * 1996-06-07 2001-10-23 Vanguard International Semiconductor Corporation High contrast, low noise alignment mark for laser trimming of redundant memory arrays

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