JPS5217890B2 - - Google Patents
Info
- Publication number
- JPS5217890B2 JPS5217890B2 JP5618073A JP5618073A JPS5217890B2 JP S5217890 B2 JPS5217890 B2 JP S5217890B2 JP 5618073 A JP5618073 A JP 5618073A JP 5618073 A JP5618073 A JP 5618073A JP S5217890 B2 JPS5217890 B2 JP S5217890B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Non-Mechanical Conveyors (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5618073A JPS5217890B2 (ja) | 1973-05-19 | 1973-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5618073A JPS5217890B2 (ja) | 1973-05-19 | 1973-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS505949A JPS505949A (ja) | 1975-01-22 |
| JPS5217890B2 true JPS5217890B2 (ja) | 1977-05-18 |
Family
ID=13019895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5618073A Expired JPS5217890B2 (ja) | 1973-05-19 | 1973-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5217890B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52140943A (en) * | 1976-05-20 | 1977-11-24 | Matsushita Electric Ind Co Ltd | High-frequency heating unit |
| JPS5796255A (en) * | 1980-12-05 | 1982-06-15 | Oki Electric Ind Co Ltd | Sludge detector |
| JP6511309B2 (ja) * | 2015-03-19 | 2019-05-15 | 東京エレクトロン株式会社 | 基板加熱装置及び基板加熱方法 |
-
1973
- 1973-05-19 JP JP5618073A patent/JPS5217890B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS505949A (ja) | 1975-01-22 |