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JPS5222335B2 - - Google Patents
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JPS5222335B2 - - Google Patents

Info

Publication number
JPS5222335B2
JPS5222335B2 JP7927872A JP7927872A JPS5222335B2 JP S5222335 B2 JPS5222335 B2 JP S5222335B2 JP 7927872 A JP7927872 A JP 7927872A JP 7927872 A JP7927872 A JP 7927872A JP S5222335 B2 JPS5222335 B2 JP S5222335B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7927872A
Other languages
Japanese (ja)
Other versions
JPS4936544A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7927872A priority Critical patent/JPS5222335B2/ja
Publication of JPS4936544A publication Critical patent/JPS4936544A/ja
Publication of JPS5222335B2 publication Critical patent/JPS5222335B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7927872A 1972-08-08 1972-08-08 Expired JPS5222335B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7927872A JPS5222335B2 (en) 1972-08-08 1972-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7927872A JPS5222335B2 (en) 1972-08-08 1972-08-08

Publications (2)

Publication Number Publication Date
JPS4936544A JPS4936544A (en) 1974-04-04
JPS5222335B2 true JPS5222335B2 (en) 1977-06-16

Family

ID=13685388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7927872A Expired JPS5222335B2 (en) 1972-08-08 1972-08-08

Country Status (1)

Country Link
JP (1) JPS5222335B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61244740A (en) * 1985-04-22 1986-10-31 花王株式会社 Carton with hanger

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140480A (en) * 1976-05-20 1977-11-24 Nippon Telegr & Teleph Corp <Ntt> Sputtering evaporation apparatus by ion beam
JP4901624B2 (en) * 2007-07-23 2012-03-21 株式会社東芝 Film forming apparatus and film forming method
JP4776599B2 (en) * 2007-08-30 2011-09-21 株式会社東芝 Film forming apparatus and film forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61244740A (en) * 1985-04-22 1986-10-31 花王株式会社 Carton with hanger

Also Published As

Publication number Publication date
JPS4936544A (en) 1974-04-04

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