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JPS5236759B2 - - Google Patents
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JPS5236759B2 - - Google Patents

Info

Publication number
JPS5236759B2
JPS5236759B2 JP6815373A JP6815373A JPS5236759B2 JP S5236759 B2 JPS5236759 B2 JP S5236759B2 JP 6815373 A JP6815373 A JP 6815373A JP 6815373 A JP6815373 A JP 6815373A JP S5236759 B2 JPS5236759 B2 JP S5236759B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6815373A
Other languages
Japanese (ja)
Other versions
JPS5016680A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6815373A priority Critical patent/JPS5236759B2/ja
Publication of JPS5016680A publication Critical patent/JPS5016680A/ja
Publication of JPS5236759B2 publication Critical patent/JPS5236759B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6815373A 1973-06-15 1973-06-15 Expired JPS5236759B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6815373A JPS5236759B2 (en) 1973-06-15 1973-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6815373A JPS5236759B2 (en) 1973-06-15 1973-06-15

Publications (2)

Publication Number Publication Date
JPS5016680A JPS5016680A (en) 1975-02-21
JPS5236759B2 true JPS5236759B2 (en) 1977-09-17

Family

ID=13365498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6815373A Expired JPS5236759B2 (en) 1973-06-15 1973-06-15

Country Status (1)

Country Link
JP (1) JPS5236759B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56130469A (en) * 1980-03-17 1981-10-13 Sanyo Shinku Kogyo Kk Manufacture of fine grain for decoration
JP4560971B2 (en) * 2000-03-23 2010-10-13 日立金属株式会社 Vapor deposition film forming equipment

Also Published As

Publication number Publication date
JPS5016680A (en) 1975-02-21

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