JPS5240996B2 - - Google Patents
Info
- Publication number
- JPS5240996B2 JPS5240996B2 JP7932673A JP7932673A JPS5240996B2 JP S5240996 B2 JPS5240996 B2 JP S5240996B2 JP 7932673 A JP7932673 A JP 7932673A JP 7932673 A JP7932673 A JP 7932673A JP S5240996 B2 JPS5240996 B2 JP S5240996B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7932673A JPS5240996B2 (en) | 1973-07-16 | 1973-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7932673A JPS5240996B2 (en) | 1973-07-16 | 1973-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5028892A JPS5028892A (en) | 1975-03-24 |
| JPS5240996B2 true JPS5240996B2 (en) | 1977-10-15 |
Family
ID=13686748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7932673A Expired JPS5240996B2 (en) | 1973-07-16 | 1973-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240996B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5118611B2 (en) * | 2008-11-27 | 2013-01-16 | ケイミュー株式会社 | Non-contact measurement method for substrate and coating defect inspection method |
-
1973
- 1973-07-16 JP JP7932673A patent/JPS5240996B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5028892A (en) | 1975-03-24 |