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JPS5244232B2 - - Google Patents
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JPS5244232B2 - - Google Patents

Info

Publication number
JPS5244232B2
JPS5244232B2 JP3799874A JP3799874A JPS5244232B2 JP S5244232 B2 JPS5244232 B2 JP S5244232B2 JP 3799874 A JP3799874 A JP 3799874A JP 3799874 A JP3799874 A JP 3799874A JP S5244232 B2 JPS5244232 B2 JP S5244232B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3799874A
Other versions
JPS50132980A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3799874A priority Critical patent/JPS5244232B2/ja
Publication of JPS50132980A publication Critical patent/JPS50132980A/ja
Publication of JPS5244232B2 publication Critical patent/JPS5244232B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3799874A 1974-04-05 1974-04-05 Expired JPS5244232B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (ja) 1974-04-05 1974-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (ja) 1974-04-05 1974-04-05

Publications (2)

Publication Number Publication Date
JPS50132980A JPS50132980A (ja) 1975-10-21
JPS5244232B2 true JPS5244232B2 (ja) 1977-11-05

Family

ID=12513232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3799874A Expired JPS5244232B2 (ja) 1974-04-05 1974-04-05

Country Status (1)

Country Link
JP (1) JPS5244232B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0671038B2 (ja) * 1987-03-31 1994-09-07 株式会社東芝 結晶欠陥認識処理方法

Also Published As

Publication number Publication date
JPS50132980A (ja) 1975-10-21

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