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JPS528229B2 - - Google Patents
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JPS528229B2 - - Google Patents

Info

Publication number
JPS528229B2
JPS528229B2 JP48054847A JP5484773A JPS528229B2 JP S528229 B2 JPS528229 B2 JP S528229B2 JP 48054847 A JP48054847 A JP 48054847A JP 5484773 A JP5484773 A JP 5484773A JP S528229 B2 JPS528229 B2 JP S528229B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48054847A
Other languages
Japanese (ja)
Other versions
JPS4945688A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4945688A publication Critical patent/JPS4945688A/ja
Publication of JPS528229B2 publication Critical patent/JPS528229B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/112Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/011Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/13Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/20Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]

Landscapes

  • Semiconductor Memories (AREA)
JP48054847A 1972-06-30 1973-05-18 Expired JPS528229B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26777172A 1972-06-30 1972-06-30

Publications (2)

Publication Number Publication Date
JPS4945688A JPS4945688A (en) 1974-05-01
JPS528229B2 true JPS528229B2 (en) 1977-03-08

Family

ID=23020055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48054847A Expired JPS528229B2 (en) 1972-06-30 1973-05-18

Country Status (6)

Country Link
JP (1) JPS528229B2 (en)
CA (1) CA1005925A (en)
DE (1) DE2318912A1 (en)
FR (1) FR2191270B1 (en)
GB (1) GB1422586A (en)
IT (1) IT987426B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2554450A1 (en) * 1975-12-03 1977-06-16 Siemens Ag Integrated circuit prodn. with FET in silicon substrate - with polycrystalline silicon gate electrode and planar insulating oxide film
DE2720533A1 (en) * 1977-05-06 1978-11-09 Siemens Ag MONOLITHIC INTEGRATED CIRCUIT ARRANGEMENT WITH SINGLE TRANSISTOR STORAGE ELEMENTS
CA1186808A (en) * 1981-11-06 1985-05-07 Sidney I. Soclof Method of fabrication of dielectrically isolated cmos device with an isolated slot
JPS58100441A (en) * 1981-12-10 1983-06-15 Toshiba Corp Manufacture of semiconductor device
JPS58212165A (en) * 1983-05-23 1983-12-09 Nec Corp Semiconductor device
JPH0616549B2 (en) * 1984-04-17 1994-03-02 三菱電機株式会社 Semiconductor integrated circuit device
JP2003124514A (en) * 2001-10-17 2003-04-25 Sony Corp Semiconductor light emitting device and method of manufacturing the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL153374B (en) * 1966-10-05 1977-05-16 Philips Nv PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE PROVIDED WITH AN OXIDE LAYER AND SEMI-CONDUCTOR DEVICE MANUFACTURED ACCORDING TO THE PROCEDURE.
FR2080849A6 (en) * 1970-02-06 1971-11-26 Radiotechnique Compelec
US3698966A (en) * 1970-02-26 1972-10-17 North American Rockwell Processes using a masking layer for producing field effect devices having oxide isolation
US3859717A (en) * 1970-12-21 1975-01-14 Rockwell International Corp Method of manufacturing control electrodes for charge coupled circuits and the like
US3751722A (en) * 1971-04-30 1973-08-07 Standard Microsyst Smc Mos integrated circuit with substrate containing selectively formed resistivity regions

Also Published As

Publication number Publication date
IT987426B (en) 1975-02-20
CA1005925A (en) 1977-02-22
FR2191270B1 (en) 1977-07-29
DE2318912A1 (en) 1974-01-17
JPS4945688A (en) 1974-05-01
GB1422586A (en) 1976-01-28
FR2191270A1 (en) 1974-02-01

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