JPS5313296B2 - - Google Patents
Info
- Publication number
- JPS5313296B2 JPS5313296B2 JP11300873A JP11300873A JPS5313296B2 JP S5313296 B2 JPS5313296 B2 JP S5313296B2 JP 11300873 A JP11300873 A JP 11300873A JP 11300873 A JP11300873 A JP 11300873A JP S5313296 B2 JPS5313296 B2 JP S5313296B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300873A JPS5313296B2 (en) | 1973-10-06 | 1973-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300873A JPS5313296B2 (en) | 1973-10-06 | 1973-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5063965A JPS5063965A (en) | 1975-05-30 |
| JPS5313296B2 true JPS5313296B2 (en) | 1978-05-09 |
Family
ID=14601113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11300873A Expired JPS5313296B2 (en) | 1973-10-06 | 1973-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313296B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523372U (en) * | 1978-08-01 | 1980-02-15 | ||
| JPS6090630U (en) * | 1983-11-28 | 1985-06-21 | オーバル機器工業株式会社 | Gas flowmeter test equipment |
| JPS6112045U (en) * | 1984-06-26 | 1986-01-24 | 株式会社 堀場製作所 | dust sampling device |
| JPH0212576Y2 (en) * | 1987-07-06 | 1990-04-09 | ||
| US7743670B2 (en) * | 2006-08-14 | 2010-06-29 | Applied Materials, Inc. | Method and apparatus for gas flow measurement |
-
1973
- 1973-10-06 JP JP11300873A patent/JPS5313296B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5063965A (en) | 1975-05-30 |