JPS5319390B2 - - Google Patents
Info
- Publication number
- JPS5319390B2 JPS5319390B2 JP1028473A JP1028473A JPS5319390B2 JP S5319390 B2 JPS5319390 B2 JP S5319390B2 JP 1028473 A JP1028473 A JP 1028473A JP 1028473 A JP1028473 A JP 1028473A JP S5319390 B2 JPS5319390 B2 JP S5319390B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1028473A JPS5319390B2 (en) | 1973-01-26 | 1973-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1028473A JPS5319390B2 (en) | 1973-01-26 | 1973-01-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4999077A JPS4999077A (en) | 1974-09-19 |
| JPS5319390B2 true JPS5319390B2 (en) | 1978-06-20 |
Family
ID=11745999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1028473A Expired JPS5319390B2 (en) | 1973-01-26 | 1973-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5319390B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0770299B2 (en) * | 1984-04-05 | 1995-07-31 | 株式会社日立製作所 | Ion beam processing apparatus and surface processing method |
-
1973
- 1973-01-26 JP JP1028473A patent/JPS5319390B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4999077A (en) | 1974-09-19 |