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JPS5328384A - Production method of semiconductor device - Google Patents
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JPS5328384A - Production method of semiconductor device - Google Patents

Production method of semiconductor device

Info

Publication number
JPS5328384A
JPS5328384A JP10281476A JP10281476A JPS5328384A JP S5328384 A JPS5328384 A JP S5328384A JP 10281476 A JP10281476 A JP 10281476A JP 10281476 A JP10281476 A JP 10281476A JP S5328384 A JPS5328384 A JP S5328384A
Authority
JP
Japan
Prior art keywords
semiconductor device
production method
multilayers
layer
thyristors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10281476A
Other languages
Japanese (ja)
Other versions
JPS5549772B2 (en
Inventor
Koichi Nishiuchi
Masaru Ihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10281476A priority Critical patent/JPS5328384A/en
Publication of JPS5328384A publication Critical patent/JPS5328384A/en
Publication of JPS5549772B2 publication Critical patent/JPS5549772B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To constitute semiconductor devices three-dimensionally in multilayers and increase the scale of integration by forming active regions such as transistors, thyristors, etc. layer by layer in multilayers.
COPYRIGHT: (C)1978,JPO&Japio
JP10281476A 1976-08-27 1976-08-27 Production method of semiconductor device Granted JPS5328384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10281476A JPS5328384A (en) 1976-08-27 1976-08-27 Production method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10281476A JPS5328384A (en) 1976-08-27 1976-08-27 Production method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5328384A true JPS5328384A (en) 1978-03-16
JPS5549772B2 JPS5549772B2 (en) 1980-12-13

Family

ID=14337492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10281476A Granted JPS5328384A (en) 1976-08-27 1976-08-27 Production method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5328384A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133553A (en) * 1979-04-03 1980-10-17 Hitachi Ltd Semiconductor integrated device
JPS56126961A (en) * 1980-03-03 1981-10-05 Ibm Semiconductor device
JPS5720468A (en) * 1980-07-10 1982-02-02 Nec Corp Semiconductor device
JPS59110112A (en) * 1982-12-16 1984-06-26 Nec Corp Manufacture of semiconductor base material
JPS60120547A (en) * 1983-12-05 1985-06-28 Oki Electric Ind Co Ltd Semiconductor integrated circuit device
JPS6235550A (en) * 1985-08-09 1987-02-16 Agency Of Ind Science & Technol Manufacture of semiconductor stereoscopic circuit element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133553A (en) * 1979-04-03 1980-10-17 Hitachi Ltd Semiconductor integrated device
JPS56126961A (en) * 1980-03-03 1981-10-05 Ibm Semiconductor device
JPS5720468A (en) * 1980-07-10 1982-02-02 Nec Corp Semiconductor device
JPS59110112A (en) * 1982-12-16 1984-06-26 Nec Corp Manufacture of semiconductor base material
JPS60120547A (en) * 1983-12-05 1985-06-28 Oki Electric Ind Co Ltd Semiconductor integrated circuit device
JPS6235550A (en) * 1985-08-09 1987-02-16 Agency Of Ind Science & Technol Manufacture of semiconductor stereoscopic circuit element

Also Published As

Publication number Publication date
JPS5549772B2 (en) 1980-12-13

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