JPS5332518B2 - - Google Patents
Info
- Publication number
- JPS5332518B2 JPS5332518B2 JP1109872A JP1109872A JPS5332518B2 JP S5332518 B2 JPS5332518 B2 JP S5332518B2 JP 1109872 A JP1109872 A JP 1109872A JP 1109872 A JP1109872 A JP 1109872A JP S5332518 B2 JPS5332518 B2 JP S5332518B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Inorganic Insulating Materials (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1109872A JPS5332518B2 (en) | 1972-01-31 | 1972-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1109872A JPS5332518B2 (en) | 1972-01-31 | 1972-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4881094A JPS4881094A (en) | 1973-10-30 |
| JPS5332518B2 true JPS5332518B2 (en) | 1978-09-08 |
Family
ID=11768514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1109872A Expired JPS5332518B2 (en) | 1972-01-31 | 1972-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5332518B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5411900A (en) * | 1977-06-30 | 1979-01-29 | Toshiba Corp | Method of fabricating piezo-electric substrate for use in elstic surface wave element |
| JP2845871B2 (en) * | 1987-02-25 | 1999-01-13 | 株式会社日立製作所 | Ion beam irradiation method |
| KR100766093B1 (en) | 2005-07-13 | 2007-10-11 | 삼성전자주식회사 | Neutral beam etching device for separating and accelerating plasma |
-
1972
- 1972-01-31 JP JP1109872A patent/JPS5332518B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4881094A (en) | 1973-10-30 |