JPS5333437B2 - - Google Patents

Info

Publication number: JPS5333437B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP4224474A

Other languages

Japanese (ja)

Other versions

JPS50137079A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-04-17

Filing date

1974-04-17

Publication date

1978-09-13

1974-04-17 Application filed filed Critical

1974-04-17 Priority to JP4224474A priority Critical patent/JPS5333437B2/ja

1975-10-30 Publication of JPS50137079A publication Critical patent/JPS50137079A/ja

1978-09-13 Publication of JPS5333437B2 publication Critical patent/JPS5333437B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Coating Apparatus (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

JP4224474A 1974-04-17 1974-04-17 Expired JPS5333437B2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP4224474A JPS5333437B2 (en)	1974-04-17	1974-04-17

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP4224474A JPS5333437B2 (en)	1974-04-17	1974-04-17

Publications (2)

Publication Number	Publication Date
JPS50137079A JPS50137079A (en)	1975-10-30
JPS5333437B2 true JPS5333437B2 (en)	1978-09-13

Family

ID=12630603

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP4224474A Expired JPS5333437B2 (en)	1974-04-17	1974-04-17

Country Status (1)

Country	Link
JP (1)	JPS5333437B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5891735U (en) *	1981-12-12	1983-06-21	橋本　茂夫	strobe adapter

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS52122123A (en) *	1976-05-12	1977-10-14	Akai Electric	Method and device for coating resist film
JPS584587B2 (en) *	1977-06-14	1983-01-27	松下電器産業株式会社	Rotary viscous agent application method and device
JPS5498574A (en) *	1978-01-20	1979-08-03	Matsushita Electric Ind Co Ltd	Rotary coating unit of viscous material
JPS54139483A (en) *	1978-04-21	1979-10-29	Hitachi Ltd	Photo resist coating device
JP6818001B2 (en) *	2018-12-12	2021-01-20	株式会社Ｓｃｒｅｅｎホールディングス	Processing chamber and substrate processing equipment

1974
- 1974-04-17 JP JP4224474A patent/JPS5333437B2/ja not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5891735U (en) *	1981-12-12	1983-06-21	橋本　茂夫	strobe adapter

Also Published As

Publication number	Publication date
JPS50137079A (en)	1975-10-30

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