JPS5334099A - Ion generator device - Google Patents
Ion generator deviceInfo
- Publication number
- JPS5334099A JPS5334099A JP10726976A JP10726976A JPS5334099A JP S5334099 A JPS5334099 A JP S5334099A JP 10726976 A JP10726976 A JP 10726976A JP 10726976 A JP10726976 A JP 10726976A JP S5334099 A JPS5334099 A JP S5334099A
- Authority
- JP
- Japan
- Prior art keywords
- ion generator
- generator device
- procure
- cylindrically
- well
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To procure a uniform plasma density as well as excellent gas efficiency by arranging positive and negative electrodes in the direction of ion draw-out and forming this negative electrode cylindrically.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10726976A JPS5334099A (en) | 1976-09-09 | 1976-09-09 | Ion generator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10726976A JPS5334099A (en) | 1976-09-09 | 1976-09-09 | Ion generator device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5334099A true JPS5334099A (en) | 1978-03-30 |
Family
ID=14454766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10726976A Pending JPS5334099A (en) | 1976-09-09 | 1976-09-09 | Ion generator device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5334099A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01176633A (en) * | 1987-12-30 | 1989-07-13 | Tokyo Electron Ltd | Electron beam-exciting ion source |
| JP2010044993A (en) * | 2008-08-18 | 2010-02-25 | Nissin Ion Equipment Co Ltd | Hot cathode and ion source provided therewith |
-
1976
- 1976-09-09 JP JP10726976A patent/JPS5334099A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01176633A (en) * | 1987-12-30 | 1989-07-13 | Tokyo Electron Ltd | Electron beam-exciting ion source |
| JP2010044993A (en) * | 2008-08-18 | 2010-02-25 | Nissin Ion Equipment Co Ltd | Hot cathode and ion source provided therewith |
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