JPS5346668B2 - - Google Patents
Info
- Publication number
- JPS5346668B2 JPS5346668B2 JP12410175A JP12410175A JPS5346668B2 JP S5346668 B2 JPS5346668 B2 JP S5346668B2 JP 12410175 A JP12410175 A JP 12410175A JP 12410175 A JP12410175 A JP 12410175A JP S5346668 B2 JPS5346668 B2 JP S5346668B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50124101A JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50124101A JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5247676A JPS5247676A (en) | 1977-04-15 |
| JPS5346668B2 true JPS5346668B2 (ja) | 1978-12-15 |
Family
ID=14876939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50124101A Granted JPS5247676A (en) | 1975-10-14 | 1975-10-14 | Process for production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5247676A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55114487U (ja) * | 1979-02-08 | 1980-08-12 | ||
| JPS5916991U (ja) * | 1982-07-23 | 1984-02-01 | 株式会社ワコ− | 熱風式乾燥箱 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2830035C2 (de) * | 1977-07-15 | 1984-05-17 | Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka | Verfahren, bei arsenhaltigen Oxidfilmen auf einer Halbleitervorrichtung die Verarmung an Arsen zu verhindern |
| JPS6047428A (ja) * | 1983-08-26 | 1985-03-14 | Fujitsu Ltd | 半導体装置の製造方法 |
| JPS62250635A (ja) * | 1986-04-23 | 1987-10-31 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| JPH02256229A (ja) * | 1989-03-29 | 1990-10-17 | Rohm Co Ltd | 化合物半導体装置の製造方法 |
-
1975
- 1975-10-14 JP JP50124101A patent/JPS5247676A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55114487U (ja) * | 1979-02-08 | 1980-08-12 | ||
| JPS5916991U (ja) * | 1982-07-23 | 1984-02-01 | 株式会社ワコ− | 熱風式乾燥箱 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5247676A (en) | 1977-04-15 |