JPS53671B2 - - Google Patents
Info
- Publication number
- JPS53671B2 JPS53671B2 JP7563271A JP7563271A JPS53671B2 JP S53671 B2 JPS53671 B2 JP S53671B2 JP 7563271 A JP7563271 A JP 7563271A JP 7563271 A JP7563271 A JP 7563271A JP S53671 B2 JPS53671 B2 JP S53671B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7563271A JPS53671B2 (ja) | 1971-09-28 | 1971-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7563271A JPS53671B2 (ja) | 1971-09-28 | 1971-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4841670A JPS4841670A (ja) | 1973-06-18 |
| JPS53671B2 true JPS53671B2 (ja) | 1978-01-11 |
Family
ID=13581803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7563271A Expired JPS53671B2 (ja) | 1971-09-28 | 1971-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53671B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518994Y2 (ja) * | 1975-04-22 | 1980-05-06 | ||
| JPS6165419A (ja) * | 1984-09-07 | 1986-04-04 | Tdk Corp | 気相成長装置 |
| JPH0626194B2 (ja) * | 1988-05-31 | 1994-04-06 | 信越石英株式会社 | ウエハ熱処理装置 |
-
1971
- 1971-09-28 JP JP7563271A patent/JPS53671B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4841670A (ja) | 1973-06-18 |