JPS5394182A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5394182A JPS5394182A JP770177A JP770177A JPS5394182A JP S5394182 A JPS5394182 A JP S5394182A JP 770177 A JP770177 A JP 770177A JP 770177 A JP770177 A JP 770177A JP S5394182 A JPS5394182 A JP S5394182A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- moat
- eaves
- eliminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To obtain a device of high reliability by eliminating eaves-form SiO2 films and perfectly covering moat grooves with glass.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP770177A JPS5394182A (en) | 1977-01-28 | 1977-01-28 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP770177A JPS5394182A (en) | 1977-01-28 | 1977-01-28 | Production of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5394182A true JPS5394182A (en) | 1978-08-17 |
Family
ID=11673053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP770177A Pending JPS5394182A (en) | 1977-01-28 | 1977-01-28 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5394182A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5994413A (en) * | 1982-11-19 | 1984-05-31 | Nec Kyushu Ltd | Semiconductor device |
-
1977
- 1977-01-28 JP JP770177A patent/JPS5394182A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5994413A (en) * | 1982-11-19 | 1984-05-31 | Nec Kyushu Ltd | Semiconductor device |
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