Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPS541496A - Charged particle beam machining device - Google Patents
[go: Go Back, main page]

JPS541496A - Charged particle beam machining device - Google Patents

Charged particle beam machining device

Info

Publication number
JPS541496A
JPS541496A JP6573777A JP6573777A JPS541496A JP S541496 A JPS541496 A JP S541496A JP 6573777 A JP6573777 A JP 6573777A JP 6573777 A JP6573777 A JP 6573777A JP S541496 A JPS541496 A JP S541496A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
machining device
beam machining
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6573777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134911B2 (sr
Inventor
Akiyuki Okada
Youichi Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP6573777A priority Critical patent/JPS541496A/ja
Publication of JPS541496A publication Critical patent/JPS541496A/ja
Publication of JPS6134911B2 publication Critical patent/JPS6134911B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP6573777A 1977-06-06 1977-06-06 Charged particle beam machining device Granted JPS541496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6573777A JPS541496A (en) 1977-06-06 1977-06-06 Charged particle beam machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6573777A JPS541496A (en) 1977-06-06 1977-06-06 Charged particle beam machining device

Publications (2)

Publication Number Publication Date
JPS541496A true JPS541496A (en) 1979-01-08
JPS6134911B2 JPS6134911B2 (sr) 1986-08-09

Family

ID=13295619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6573777A Granted JPS541496A (en) 1977-06-06 1977-06-06 Charged particle beam machining device

Country Status (1)

Country Link
JP (1) JPS541496A (sr)

Also Published As

Publication number Publication date
JPS6134911B2 (sr) 1986-08-09

Similar Documents

Publication Publication Date Title
AU522601B2 (en) Generating charged particles
JPS5441988A (en) Adheren polymer fine particle
AU3621778A (en) Neutralizing electrically charged airborne particles
JPS51132758A (en) Particle beam optical device
JPS5238879A (en) Particle beam device
GB1549451A (en) Charged particle beam apparatus
JPS545779A (en) Optical particle detector
JPS5498578A (en) Device for projecting particle beam
JPS5494198A (en) Charged particle beam terminating device
JPS52139357A (en) Device for monitoring charged particle beam position
JPS53140682A (en) Machining device
JPS5440369A (en) Particle charging device
JPS5454663A (en) Particle detector
JPS5522401A (en) Welding method by using charged particle beam and its device
JPS5429970A (en) Device for forming particle flux
JPS5482778A (en) Particle charger
JPS52139356A (en) Device for deflecting charged particle beam
JPS56116000A (en) Charged particle beam machining equipmint
JPS5425596A (en) Method of projecting charged particle beam
JPS52122075A (en) Charged particle beam scanning unit
JPS541496A (en) Charged particle beam machining device
JPS57168461A (en) Charged particle beam focusing device
JPS53148980A (en) Method of projecting charged particle beam
JPS5425673A (en) Method of projecting charged particle beam
JPS5451098A (en) Charged particle beam apparatus