JPS5433559B2 - - Google Patents

Info

Publication number: JPS5433559B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP12786773A

Other languages

Japanese (ja)

Other versions

JPS5080194A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-11-13

Filing date

1973-11-13

Publication date

1979-10-22

1973-11-13 Application filed filed Critical

1973-11-13 Priority to JP12786773A priority Critical patent/JPS5433559B2/ja

1975-06-30 Publication of JPS5080194A publication Critical patent/JPS5080194A/ja

1979-10-22 Publication of JPS5433559B2 publication Critical patent/JPS5433559B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

JP12786773A 1973-11-13 1973-11-13 Expired JPS5433559B2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12786773A JPS5433559B2 (en)	1973-11-13	1973-11-13

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12786773A JPS5433559B2 (en)	1973-11-13	1973-11-13

Publications (2)

Publication Number	Publication Date
JPS5080194A JPS5080194A (en)	1975-06-30
JPS5433559B2 true JPS5433559B2 (en)	1979-10-22

Family

ID=14970602

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12786773A Expired JPS5433559B2 (en)	1973-11-13	1973-11-13

Country Status (1)

Country	Link
JP (1)	JPS5433559B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7567339B2 (en) *	2006-09-08	2009-07-28	Asml Netherlands B.V.	Lithographic apparatus with gas bearing supply mechanism and device manufacturing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4829498A (en) *	1971-08-19	1973-04-19

1973
- 1973-11-13 JP JP12786773A patent/JPS5433559B2/ja not_active Expired

Also Published As

Publication number	Publication date
JPS5080194A (en)	1975-06-30

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