JPS5473585A - Gate turn-off thyristor - Google Patents
Gate turn-off thyristorInfo
- Publication number
- JPS5473585A JPS5473585A JP14061977A JP14061977A JPS5473585A JP S5473585 A JPS5473585 A JP S5473585A JP 14061977 A JP14061977 A JP 14061977A JP 14061977 A JP14061977 A JP 14061977A JP S5473585 A JPS5473585 A JP S5473585A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- impurity
- type
- selectively
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Landscapes
- Thyristors (AREA)
Abstract
PURPOSE: To make possible turn-off of large current without decreasing the dielectric strength of cathode junctions by incorporating reverse parallel diodes within substrate and selectively providing impurity high concentration regions through an ordinary impurity doping process.
CONSTITUTION: After P type base regions are formed on the surface of an n type silicon substrate by diffusing an impurity with B, Ga, Al, etc., the impurity surface layer on one side of the substrate is removed by etching or polishing to selectively form P type high concentration regions 20. Next, a P type base region 21 is formed by an epitaxial method, following to which an n+ type impurity is selectively diffused to provide emitter regions 24, auxiliary thyristor regions 23 and gate regions 22. Diode regions 35 are formed by the n+ type impurity layer shortcircuited and connected to the gate regions 32 and the regions 36 of a high impurity concentration of the same conductivity type as that of the base regions 31 are selectively formed under the diode regions 35 and emitter regions 34.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14061977A JPS5473585A (en) | 1977-11-25 | 1977-11-25 | Gate turn-off thyristor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14061977A JPS5473585A (en) | 1977-11-25 | 1977-11-25 | Gate turn-off thyristor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5473585A true JPS5473585A (en) | 1979-06-12 |
Family
ID=15272910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14061977A Pending JPS5473585A (en) | 1977-11-25 | 1977-11-25 | Gate turn-off thyristor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5473585A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57201077A (en) * | 1981-06-05 | 1982-12-09 | Hitachi Ltd | Semiconductor switching device |
| JPS59217366A (en) * | 1983-05-26 | 1984-12-07 | Toshiba Corp | Semiconductor device |
| JPS60106170A (en) * | 1983-11-15 | 1985-06-11 | Toshiba Corp | Thyristor with overvoltage protective function |
| US4541001A (en) * | 1982-09-23 | 1985-09-10 | Eaton Corporation | Bidirectional power FET with substrate-referenced shield |
| US4553151A (en) * | 1982-09-23 | 1985-11-12 | Eaton Corporation | Bidirectional power FET with field shaping |
| US4574296A (en) * | 1982-08-05 | 1986-03-04 | Kabushiki Kaisha Meidensha | Gate turn-off thyristor with a cathode base layer having four distinct impurity concentrations |
| US4577208A (en) * | 1982-09-23 | 1986-03-18 | Eaton Corporation | Bidirectional power FET with integral avalanche protection |
| US5001537A (en) * | 1987-06-09 | 1991-03-19 | Texas Instruments Incorporated | Semiconductor device for electrical overstress protection |
-
1977
- 1977-11-25 JP JP14061977A patent/JPS5473585A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57201077A (en) * | 1981-06-05 | 1982-12-09 | Hitachi Ltd | Semiconductor switching device |
| US4574296A (en) * | 1982-08-05 | 1986-03-04 | Kabushiki Kaisha Meidensha | Gate turn-off thyristor with a cathode base layer having four distinct impurity concentrations |
| US4541001A (en) * | 1982-09-23 | 1985-09-10 | Eaton Corporation | Bidirectional power FET with substrate-referenced shield |
| US4553151A (en) * | 1982-09-23 | 1985-11-12 | Eaton Corporation | Bidirectional power FET with field shaping |
| US4577208A (en) * | 1982-09-23 | 1986-03-18 | Eaton Corporation | Bidirectional power FET with integral avalanche protection |
| JPS59217366A (en) * | 1983-05-26 | 1984-12-07 | Toshiba Corp | Semiconductor device |
| JPS60106170A (en) * | 1983-11-15 | 1985-06-11 | Toshiba Corp | Thyristor with overvoltage protective function |
| US5001537A (en) * | 1987-06-09 | 1991-03-19 | Texas Instruments Incorporated | Semiconductor device for electrical overstress protection |
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