JPS547558B2 - - Google Patents
Info
- Publication number
- JPS547558B2 JPS547558B2 JP2052174A JP2052174A JPS547558B2 JP S547558 B2 JPS547558 B2 JP S547558B2 JP 2052174 A JP2052174 A JP 2052174A JP 2052174 A JP2052174 A JP 2052174A JP S547558 B2 JPS547558 B2 JP S547558B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2052174A JPS547558B2 (en) | 1974-02-22 | 1974-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2052174A JPS547558B2 (en) | 1974-02-22 | 1974-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50115774A JPS50115774A (en) | 1975-09-10 |
| JPS547558B2 true JPS547558B2 (en) | 1979-04-07 |
Family
ID=12029451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2052174A Expired JPS547558B2 (en) | 1974-02-22 | 1974-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS547558B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56114326A (en) * | 1980-02-15 | 1981-09-08 | Semiconductor Res Found | Mask aligning exposure means |
| JPS6281024A (en) * | 1985-10-03 | 1987-04-14 | Iwatsu Electric Co Ltd | Resist exposure method and equipment |
| JPS62111425A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
| JPS62111424A (en) * | 1985-10-28 | 1987-05-22 | Ushio Inc | Method for resist treatment |
| JP4675385B2 (en) * | 2008-01-04 | 2011-04-20 | 学校法人立命館 | Material processing apparatus and processing method using ultraviolet light or light having a shorter wavelength than ultraviolet light |
-
1974
- 1974-02-22 JP JP2052174A patent/JPS547558B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50115774A (en) | 1975-09-10 |