JPS5494343A - Thermal head - Google Patents
Thermal headInfo
- Publication number
- JPS5494343A JPS5494343A JP103478A JP103478A JPS5494343A JP S5494343 A JPS5494343 A JP S5494343A JP 103478 A JP103478 A JP 103478A JP 103478 A JP103478 A JP 103478A JP S5494343 A JPS5494343 A JP S5494343A
- Authority
- JP
- Japan
- Prior art keywords
- semimetals
- metals
- substrate
- heating resistor
- adhesiveness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 abstract 6
- 239000002184 metal Substances 0.000 abstract 6
- 238000010438 heat treatment Methods 0.000 abstract 4
- 150000002739 metals Chemical class 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 3
- OFEAOSSMQHGXMM-UHFFFAOYSA-N 12007-10-2 Chemical compound [W].[W]=[B] OFEAOSSMQHGXMM-UHFFFAOYSA-N 0.000 abstract 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract 1
- LRTTZMZPZHBOPO-UHFFFAOYSA-N [B].[B].[Hf] Chemical compound [B].[B].[Hf] LRTTZMZPZHBOPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000012300 argon atmosphere Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000003989 dielectric material Substances 0.000 abstract 1
- 229910052746 lanthanum Inorganic materials 0.000 abstract 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 230000035939 shock Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Adjustable Resistors (AREA)
- Electronic Switches (AREA)
Abstract
PURPOSE:To improve shock resistance and adhesiveness between layers by letting metals or semimetals and metal borides be contained in heating resistor. CONSTITUTION:The thin film heating resistor 2 on a substrate 1 composed of an electric insulator such as ceramics or other is formed of metal borides such as zirconium boride, hafnium boride, tungsten boride, etc., and semimetals such as Si, Ge, etc. or metals of element periodic table group IVb, Vb, VIb, b, lanthanum base elements, etc. with the quantity of the metals or semimetals as 0.5 to 50 mol%. If the thin film heating resistor 2 is formed by sputtering while the substrate 1 is being heated in an argon atmosphere, its adhesiveness to the substrate 1 improves and in addition, specifying of the metals or semimetals improves the adhesiveness of the thin film heating resistor 2 to the substrate 1, electric conductor 3 and protecting layer 4.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP103478A JPS5494343A (en) | 1978-01-09 | 1978-01-09 | Thermal head |
| US05/906,359 US4296309A (en) | 1977-05-19 | 1978-05-15 | Thermal head |
| US06/552,013 US4545881A (en) | 1977-05-19 | 1983-11-16 | Method for producing electro-thermal transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP103478A JPS5494343A (en) | 1978-01-09 | 1978-01-09 | Thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5494343A true JPS5494343A (en) | 1979-07-26 |
| JPS6145543B2 JPS6145543B2 (en) | 1986-10-08 |
Family
ID=11490273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP103478A Granted JPS5494343A (en) | 1977-05-19 | 1978-01-09 | Thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5494343A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0551521A4 (en) * | 1991-08-02 | 1995-07-19 | Canon Kk | |
| JP2004264157A (en) * | 2003-02-28 | 2004-09-24 | Kenji Sumiyama | Transition metal cluster assembly having low-magnetic resistance and manufacturing method therefor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
-
1978
- 1978-01-09 JP JP103478A patent/JPS5494343A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0551521A4 (en) * | 1991-08-02 | 1995-07-19 | Canon Kk | |
| EP0855271A3 (en) * | 1991-08-02 | 1998-12-09 | Canon Kabushiki Kaisha | Substrate for ink jet head, ink jet head provided with said substrate and ink jet apparatus having such ink jet head |
| JP2004264157A (en) * | 2003-02-28 | 2004-09-24 | Kenji Sumiyama | Transition metal cluster assembly having low-magnetic resistance and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6145543B2 (en) | 1986-10-08 |
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