JPS5521474B2 - - Google Patents
Info
- Publication number
- JPS5521474B2 JPS5521474B2 JP2873374A JP2873374A JPS5521474B2 JP S5521474 B2 JPS5521474 B2 JP S5521474B2 JP 2873374 A JP2873374 A JP 2873374A JP 2873374 A JP2873374 A JP 2873374A JP S5521474 B2 JPS5521474 B2 JP S5521474B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2873374A JPS5521474B2 (en) | 1974-03-12 | 1974-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2873374A JPS5521474B2 (en) | 1974-03-12 | 1974-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50119998A JPS50119998A (en) | 1975-09-19 |
| JPS5521474B2 true JPS5521474B2 (en) | 1980-06-10 |
Family
ID=12256622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2873374A Expired JPS5521474B2 (en) | 1974-03-12 | 1974-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5521474B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
| JPS5830749B2 (en) * | 1977-07-28 | 1983-07-01 | 株式会社村田製作所 | Zinc oxide piezoelectric crystal film |
| JPS5516555A (en) * | 1978-07-21 | 1980-02-05 | Toko Inc | Manufacture of thin film of zinc oxide |
| JP2934692B2 (en) * | 1992-01-22 | 1999-08-16 | 株式会社村田製作所 | Manufacturing method of piezoelectric ceramics |
| US6291085B1 (en) * | 1998-08-03 | 2001-09-18 | The Curators Of The University Of Missouri | Zinc oxide films containing P-type dopant and process for preparing same |
-
1974
- 1974-03-12 JP JP2873374A patent/JPS5521474B2/ja not_active Expired
Non-Patent Citations (3)
| Title |
|---|
| JOURNAL OF APPLIED PHYSICS=1968 * |
| SOLID STATE PHYSICS=1959 * |
| THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1970 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50119998A (en) | 1975-09-19 |