JPS5524258B2 - - Google Patents
Info
- Publication number
- JPS5524258B2 JPS5524258B2 JP13603173A JP13603173A JPS5524258B2 JP S5524258 B2 JPS5524258 B2 JP S5524258B2 JP 13603173 A JP13603173 A JP 13603173A JP 13603173 A JP13603173 A JP 13603173A JP S5524258 B2 JPS5524258 B2 JP S5524258B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13603173A JPS5524258B2 (en) | 1973-12-07 | 1973-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13603173A JPS5524258B2 (en) | 1973-12-07 | 1973-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5087577A JPS5087577A (en) | 1975-07-14 |
| JPS5524258B2 true JPS5524258B2 (en) | 1980-06-27 |
Family
ID=15165552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13603173A Expired JPS5524258B2 (en) | 1973-12-07 | 1973-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5524258B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6379076B2 (en) * | 2015-08-19 | 2018-08-22 | 濱田重工株式会社 | Wet etching method and wet etching apparatus for single crystal SiC wafer |
-
1973
- 1973-12-07 JP JP13603173A patent/JPS5524258B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5087577A (en) | 1975-07-14 |