JPS5533545B2 - - Google Patents
Info
- Publication number
- JPS5533545B2 JPS5533545B2 JP11072473A JP11072473A JPS5533545B2 JP S5533545 B2 JPS5533545 B2 JP S5533545B2 JP 11072473 A JP11072473 A JP 11072473A JP 11072473 A JP11072473 A JP 11072473A JP S5533545 B2 JPS5533545 B2 JP S5533545B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11072473A JPS5533545B2 (en) | 1973-10-01 | 1973-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11072473A JPS5533545B2 (en) | 1973-10-01 | 1973-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5062093A JPS5062093A (en) | 1975-05-27 |
| JPS5533545B2 true JPS5533545B2 (en) | 1980-09-01 |
Family
ID=14542869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11072473A Expired JPS5533545B2 (en) | 1973-10-01 | 1973-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533545B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6613219B2 (en) * | 2016-09-02 | 2019-11-27 | 株式会社日立製作所 | Scanning microscope |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5229790Y2 (en) * | 1971-04-02 | 1977-07-07 | ||
| JPS515618Y2 (en) * | 1971-05-21 | 1976-02-17 | ||
| JPS512233Y2 (en) * | 1971-06-04 | 1976-01-22 |
-
1973
- 1973-10-01 JP JP11072473A patent/JPS5533545B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5062093A (en) | 1975-05-27 |