JPS5534359B2 - - Google Patents
Info
- Publication number
- JPS5534359B2 JPS5534359B2 JP12502072A JP12502072A JPS5534359B2 JP S5534359 B2 JPS5534359 B2 JP S5534359B2 JP 12502072 A JP12502072 A JP 12502072A JP 12502072 A JP12502072 A JP 12502072A JP S5534359 B2 JPS5534359 B2 JP S5534359B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502072A JPS5534359B2 (en) | 1972-12-12 | 1972-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502072A JPS5534359B2 (en) | 1972-12-12 | 1972-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4981949A JPS4981949A (en) | 1974-08-07 |
| JPS5534359B2 true JPS5534359B2 (en) | 1980-09-05 |
Family
ID=14899858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12502072A Expired JPS5534359B2 (en) | 1972-12-12 | 1972-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5534359B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019048298A (en) * | 2018-11-30 | 2019-03-28 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus and method of cleaning piping of substrate processing apparatus |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5836280B2 (en) * | 1976-11-08 | 1983-08-08 | 日本鋼管株式会社 | Water treatment method for heat exchanger for sintering exhaust gas treatment |
| JPS5842799Y2 (en) * | 1977-12-19 | 1983-09-28 | 高砂熱学工業株式会社 | Coil antifreeze treatment equipment |
| JPS5873391U (en) * | 1981-11-13 | 1983-05-18 | 横河電機株式会社 | Impulse pipe cleaning device |
| JPS58194396U (en) * | 1982-06-18 | 1983-12-24 | 岩井機械工業株式会社 | Damage inspection device for heat transfer plates in plate heat exchangers |
| JPS63281992A (en) * | 1987-05-14 | 1988-11-18 | 株式会社 インダック | Method and device for washing beer sediment |
| JPH05215491A (en) * | 1992-02-05 | 1993-08-24 | Kubota Corp | Heat exchanger for water heat source |
| JP5583245B2 (en) * | 2013-06-24 | 2014-09-03 | 株式会社東芝 | Equipment for decontamination of nuclear power plant facilities |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919083B2 (en) * | 1975-07-29 | 1984-05-02 | 石原産業株式会社 | herbicide |
-
1972
- 1972-12-12 JP JP12502072A patent/JPS5534359B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019048298A (en) * | 2018-11-30 | 2019-03-28 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus and method of cleaning piping of substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4981949A (en) | 1974-08-07 |