JPS5537855B2 - - Google Patents

Info

Publication number: JPS5537855B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP10949673A

Other languages

Japanese (ja)

Other versions

JPS5061982A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-09-29

Filing date

1973-09-29

Publication date

1980-09-30

1973-09-29 Application filed filed Critical

1973-09-29 Priority to JP10949673A priority Critical patent/JPS5537855B2/ja

1975-05-27 Publication of JPS5061982A publication Critical patent/JPS5061982A/ja

1980-09-30 Publication of JPS5537855B2 publication Critical patent/JPS5537855B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Electrodes Of Semiconductors (AREA)
Drying Of Semiconductors (AREA)

JP10949673A 1973-09-29 1973-09-29 Expired JPS5537855B2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP10949673A JPS5537855B2 (en)	1973-09-29	1973-09-29

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10949673A JPS5537855B2 (en)	1973-09-29	1973-09-29

Publications (2)

Publication Number	Publication Date
JPS5061982A JPS5061982A (en)	1975-05-27
JPS5537855B2 true JPS5537855B2 (en)	1980-09-30

Family

ID=14511716

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10949673A Expired JPS5537855B2 (en)	1973-09-29	1973-09-29

Country Status (1)

Country	Link
JP (1)	JPS5537855B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1499857A (en) *	1975-09-18	1978-02-01	Standard Telephones Cables Ltd	Glow discharge etching
JPS5835364B2 (en) *	1977-04-07	1983-08-02	富士通株式会社	plasma etching method
JPS5469074A (en) *	1977-11-11	1979-06-02	Mitsubishi Electric Corp	Plasma etching method

1973
- 1973-09-29 JP JP10949673A patent/JPS5537855B2/ja not_active Expired

Also Published As

Publication number	Publication date
JPS5061982A (en)	1975-05-27

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