JPS56167370A - Amorphous solar cell - Google Patents

Abstract

PURPOSE:To prevent the separation of an amorphous layer and an electrode by depositing the amorphous layer wherein addition is not made and whose inner stress is smaller than that of another amorphous layer wherein addition is not made. CONSTITUTION:On a stainless plate 1, is formed the amorphous layer 3, wherein addition is not made, and which is grown under the condition the inner stress becomes small, and also is formed the amorphous layer 4, wherein the addition is not made, and which forms a junction with the layer 3 and a main active region. The layer 4 is formed by selecting the growing condition in a glow discharge method so that the inner stress is larger than that of the layer 3, the local level density is lower, and the mobility is higher. Then, P type amorphous layer Si 5, and a transparent electrode 6 which also serves as a reflection preventing film. In this constitution, the filn, wherein the inner stress is large, the space charge density is small, and the hole mobility is large, is used in the main generating region 4 of light current, and the film 3, wherein the film thickness is poor but the inner stress is large, is used for the interface of the substrate. Thus the inner stress as a whole is reduced and the separation of the electrode can be prevented.