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JPS562785B2 - - Google Patents
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JPS562785B2 - - Google Patents

Info

Publication number
JPS562785B2
JPS562785B2 JP9686476A JP9686476A JPS562785B2 JP S562785 B2 JPS562785 B2 JP S562785B2 JP 9686476 A JP9686476 A JP 9686476A JP 9686476 A JP9686476 A JP 9686476A JP S562785 B2 JPS562785 B2 JP S562785B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9686476A
Other languages
Japanese (ja)
Other versions
JPS5322375A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9686476A priority Critical patent/JPS5322375A/en
Publication of JPS5322375A publication Critical patent/JPS5322375A/en
Publication of JPS562785B2 publication Critical patent/JPS562785B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP9686476A 1976-08-13 1976-08-13 Beam blanking device Granted JPS5322375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9686476A JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9686476A JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Publications (2)

Publication Number Publication Date
JPS5322375A JPS5322375A (en) 1978-03-01
JPS562785B2 true JPS562785B2 (en) 1981-01-21

Family

ID=14176305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9686476A Granted JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Country Status (1)

Country Link
JP (1) JPS5322375A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562730A (en) * 1978-11-02 1980-05-12 Toshiba Corp Electron beam exposure device
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube
JPS58137947A (en) * 1982-02-10 1983-08-16 Toshiba Corp Electronic optical mirror tube
JPS6182428A (en) * 1984-09-29 1986-04-26 Toshiba Corp Lens adjusting method of charged beam optical barrel
JPS6251218A (en) * 1985-08-30 1987-03-05 Hitachi Ltd Electron beam lithography equipment

Also Published As

Publication number Publication date
JPS5322375A (en) 1978-03-01

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