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JPS5628257B2 - - Google Patents
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JPS5628257B2 - - Google Patents

Info

Publication number
JPS5628257B2
JPS5628257B2 JP10875373A JP10875373A JPS5628257B2 JP S5628257 B2 JPS5628257 B2 JP S5628257B2 JP 10875373 A JP10875373 A JP 10875373A JP 10875373 A JP10875373 A JP 10875373A JP S5628257 B2 JPS5628257 B2 JP S5628257B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10875373A
Other languages
Japanese (ja)
Other versions
JPS5060221A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10875373A priority Critical patent/JPS5628257B2/ja
Priority to DE19742445395 priority patent/DE2445395A1/en
Priority to GB4136274A priority patent/GB1484061A/en
Publication of JPS5060221A publication Critical patent/JPS5060221A/ja
Priority to US05/731,606 priority patent/US4106943A/en
Publication of JPS5628257B2 publication Critical patent/JPS5628257B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0384Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the main chain of the photopolymer
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
    • C08G61/08Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/0008Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0025Crosslinking or vulcanising agents; including accelerators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/008Azides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
JP10875373A 1973-09-27 1973-09-27 Expired JPS5628257B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10875373A JPS5628257B2 (en) 1973-09-27 1973-09-27
DE19742445395 DE2445395A1 (en) 1973-09-27 1974-09-23 LIGHT SENSITIVE COMPOSITION
GB4136274A GB1484061A (en) 1973-09-27 1974-09-23 Radiation sensitive composition
US05/731,606 US4106943A (en) 1973-09-27 1976-10-13 Photosensitive cross-linkable azide containing polymeric composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10875373A JPS5628257B2 (en) 1973-09-27 1973-09-27

Publications (2)

Publication Number Publication Date
JPS5060221A JPS5060221A (en) 1975-05-24
JPS5628257B2 true JPS5628257B2 (en) 1981-06-30

Family

ID=14492620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10875373A Expired JPS5628257B2 (en) 1973-09-27 1973-09-27

Country Status (3)

Country Link
JP (1) JPS5628257B2 (en)
DE (1) DE2445395A1 (en)
GB (1) GB1484061A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1489470A (en) * 1974-07-04 1977-10-19 Showa Denko Kk Norbornene polymers
US4440850A (en) * 1981-07-23 1984-04-03 Ciba-Geigy Corporation Photopolymerisation process with two exposures of a single layer
US4571375A (en) * 1983-10-24 1986-02-18 Benedikt George M Ring-opened polynorbornene negative photoresist with bisazide
KR100321080B1 (en) 1997-12-29 2002-11-22 주식회사 하이닉스반도체 Copolymer resin, method for preparing the same, and photoresist using the same
KR100520148B1 (en) 1997-12-31 2006-05-12 주식회사 하이닉스반도체 Novel bicycloalkene derivatives and photoresist polymers using the same and photoresist compositions containing the polymers
KR100403325B1 (en) 1998-07-27 2004-03-24 주식회사 하이닉스반도체 Photoresist Polymers and Photoresist Compositions Using the Same
KR20000015014A (en) 1998-08-26 2000-03-15 김영환 New photoresist monomer, polymer, and photoresist compound
JP3587743B2 (en) 1998-08-26 2004-11-10 株式会社ハイニックスセミコンダクター A photoresist monomer and a method for producing the same, a photoresist copolymer and a method for producing the same, a photoresist composition, a method for forming a photoresist pattern, and a semiconductor device.
US6569971B2 (en) 1998-08-27 2003-05-27 Hyundai Electronics Industries Co., Ltd. Polymers for photoresist and photoresist compositions using the same
JP3680920B2 (en) 1999-02-25 2005-08-10 信越化学工業株式会社 Novel ester compound, polymer compound, resist material, and pattern forming method

Also Published As

Publication number Publication date
JPS5060221A (en) 1975-05-24
DE2445395A1 (en) 1975-04-10
GB1484061A (en) 1977-08-24

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