JPS5628257B2 - - Google Patents
Info
- Publication number
- JPS5628257B2 JPS5628257B2 JP10875373A JP10875373A JPS5628257B2 JP S5628257 B2 JPS5628257 B2 JP S5628257B2 JP 10875373 A JP10875373 A JP 10875373A JP 10875373 A JP10875373 A JP 10875373A JP S5628257 B2 JPS5628257 B2 JP S5628257B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0384—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the main chain of the photopolymer
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
- C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
- C08G61/08—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0025—Crosslinking or vulcanising agents; including accelerators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/008—Azides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875373A JPS5628257B2 (en) | 1973-09-27 | 1973-09-27 | |
| DE19742445395 DE2445395A1 (en) | 1973-09-27 | 1974-09-23 | LIGHT SENSITIVE COMPOSITION |
| GB4136274A GB1484061A (en) | 1973-09-27 | 1974-09-23 | Radiation sensitive composition |
| US05/731,606 US4106943A (en) | 1973-09-27 | 1976-10-13 | Photosensitive cross-linkable azide containing polymeric composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875373A JPS5628257B2 (en) | 1973-09-27 | 1973-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5060221A JPS5060221A (en) | 1975-05-24 |
| JPS5628257B2 true JPS5628257B2 (en) | 1981-06-30 |
Family
ID=14492620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10875373A Expired JPS5628257B2 (en) | 1973-09-27 | 1973-09-27 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5628257B2 (en) |
| DE (1) | DE2445395A1 (en) |
| GB (1) | GB1484061A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1489470A (en) * | 1974-07-04 | 1977-10-19 | Showa Denko Kk | Norbornene polymers |
| US4440850A (en) * | 1981-07-23 | 1984-04-03 | Ciba-Geigy Corporation | Photopolymerisation process with two exposures of a single layer |
| US4571375A (en) * | 1983-10-24 | 1986-02-18 | Benedikt George M | Ring-opened polynorbornene negative photoresist with bisazide |
| KR100321080B1 (en) | 1997-12-29 | 2002-11-22 | 주식회사 하이닉스반도체 | Copolymer resin, method for preparing the same, and photoresist using the same |
| KR100520148B1 (en) | 1997-12-31 | 2006-05-12 | 주식회사 하이닉스반도체 | Novel bicycloalkene derivatives and photoresist polymers using the same and photoresist compositions containing the polymers |
| KR100403325B1 (en) | 1998-07-27 | 2004-03-24 | 주식회사 하이닉스반도체 | Photoresist Polymers and Photoresist Compositions Using the Same |
| KR20000015014A (en) | 1998-08-26 | 2000-03-15 | 김영환 | New photoresist monomer, polymer, and photoresist compound |
| JP3587743B2 (en) | 1998-08-26 | 2004-11-10 | 株式会社ハイニックスセミコンダクター | A photoresist monomer and a method for producing the same, a photoresist copolymer and a method for producing the same, a photoresist composition, a method for forming a photoresist pattern, and a semiconductor device. |
| US6569971B2 (en) | 1998-08-27 | 2003-05-27 | Hyundai Electronics Industries Co., Ltd. | Polymers for photoresist and photoresist compositions using the same |
| JP3680920B2 (en) | 1999-02-25 | 2005-08-10 | 信越化学工業株式会社 | Novel ester compound, polymer compound, resist material, and pattern forming method |
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1973
- 1973-09-27 JP JP10875373A patent/JPS5628257B2/ja not_active Expired
-
1974
- 1974-09-23 DE DE19742445395 patent/DE2445395A1/en not_active Withdrawn
- 1974-09-23 GB GB4136274A patent/GB1484061A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5060221A (en) | 1975-05-24 |
| DE2445395A1 (en) | 1975-04-10 |
| GB1484061A (en) | 1977-08-24 |