JPS5637542B2 - - Google Patents
Info
- Publication number
- JPS5637542B2 JPS5637542B2 JP12841573A JP12841573A JPS5637542B2 JP S5637542 B2 JPS5637542 B2 JP S5637542B2 JP 12841573 A JP12841573 A JP 12841573A JP 12841573 A JP12841573 A JP 12841573A JP S5637542 B2 JPS5637542 B2 JP S5637542B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12841573A JPS5637542B2 (en) | 1973-11-16 | 1973-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12841573A JPS5637542B2 (en) | 1973-11-16 | 1973-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5080834A JPS5080834A (en) | 1975-07-01 |
| JPS5637542B2 true JPS5637542B2 (en) | 1981-09-01 |
Family
ID=14984188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12841573A Expired JPS5637542B2 (en) | 1973-11-16 | 1973-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5637542B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5819152B2 (en) * | 1975-10-01 | 1983-04-16 | 株式会社日立製作所 | Insatsu High Senkiban no Seizouhouhou |
| JPS53116090A (en) * | 1977-03-22 | 1978-10-11 | Oki Electric Ind Co Ltd | Through-hole forming method for semiconductor integrated circuit |
| JPS564236A (en) * | 1979-06-25 | 1981-01-17 | Nec Corp | Manufacture of photoresist film pattern |
| JPS56129323A (en) * | 1980-03-17 | 1981-10-09 | Toshiba Corp | Manufacture of semiconductor device |
| JPS5732635A (en) * | 1980-08-07 | 1982-02-22 | Nec Corp | Production of semiconductor device |
-
1973
- 1973-11-16 JP JP12841573A patent/JPS5637542B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5080834A (en) | 1975-07-01 |