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JPS5721830B2 - - Google Patents
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JPS5721830B2 - - Google Patents

Info

Publication number
JPS5721830B2
JPS5721830B2 JP6187973A JP6187973A JPS5721830B2 JP S5721830 B2 JPS5721830 B2 JP S5721830B2 JP 6187973 A JP6187973 A JP 6187973A JP 6187973 A JP6187973 A JP 6187973A JP S5721830 B2 JPS5721830 B2 JP S5721830B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6187973A
Other languages
Japanese (ja)
Other versions
JPS5011761A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6187973A priority Critical patent/JPS5721830B2/ja
Publication of JPS5011761A publication Critical patent/JPS5011761A/ja
Publication of JPS5721830B2 publication Critical patent/JPS5721830B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP6187973A 1973-06-04 1973-06-04 Expired JPS5721830B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6187973A JPS5721830B2 (en) 1973-06-04 1973-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6187973A JPS5721830B2 (en) 1973-06-04 1973-06-04

Publications (2)

Publication Number Publication Date
JPS5011761A JPS5011761A (en) 1975-02-06
JPS5721830B2 true JPS5721830B2 (en) 1982-05-10

Family

ID=13183850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6187973A Expired JPS5721830B2 (en) 1973-06-04 1973-06-04

Country Status (1)

Country Link
JP (1) JPS5721830B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165968U (en) * 1982-04-30 1983-11-05 株式会社島津製作所 Electron beam scanning analyzer
JPS60236444A (en) * 1985-05-10 1985-11-25 Hitachi Ltd Scanning backscattered electron diffraction microscope device
JPS63284405A (en) * 1987-05-18 1988-11-21 Hitachi Ltd Scanning electron microscope
JPH0748366B2 (en) * 1988-07-29 1995-05-24 日本電子株式会社 Focused ion beam implanter
JP2590374B2 (en) * 1988-11-30 1997-03-12 株式会社島津製作所 Material testing machine with scanning electron microscope
JP4684623B2 (en) * 2004-11-11 2011-05-18 鋼板剪断機械株式会社 Lifting electromagnet device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1441824A (en) * 1973-04-19 1976-07-07 Cambridge Scientific Instr Ltd Scanning electronbeam instrument

Also Published As

Publication number Publication date
JPS5011761A (en) 1975-02-06

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